{"id":"https://openalex.org/W4311413043","doi":"https://doi.org/10.1109/sensors52175.2022.9967062","title":"A feasibility study on relative humidity sensing using Silicon-on-Nothing pMUTs","display_name":"A feasibility study on relative humidity sensing using Silicon-on-Nothing pMUTs","publication_year":2022,"publication_date":"2022-10-30","ids":{"openalex":"https://openalex.org/W4311413043","doi":"https://doi.org/10.1109/sensors52175.2022.9967062"},"language":"en","primary_location":{"id":"doi:10.1109/sensors52175.2022.9967062","is_oa":false,"landing_page_url":"https://doi.org/10.1109/sensors52175.2022.9967062","pdf_url":null,"source":{"id":"https://openalex.org/S4363604906","display_name":"2022 IEEE Sensors","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"host_organization":null,"host_organization_name":null,"host_organization_lineage":[],"host_organization_lineage_names":[],"type":"conference"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2022 IEEE Sensors","raw_type":"proceedings-article"},"type":"article","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5081235915","display_name":"Mantalena Sarafianou","orcid":"https://orcid.org/0000-0003-2463-4991"},"institutions":[{"id":"https://openalex.org/I115228651","display_name":"Agency for Science, Technology and Research","ror":"https://ror.org/036wvzt09","country_code":"SG","type":"government","lineage":["https://openalex.org/I115228651"]},{"id":"https://openalex.org/I4210090209","display_name":"Institute of Microelectronics","ror":"https://ror.org/009rw8n36","country_code":"SG","type":"facility","lineage":["https://openalex.org/I115228651","https://openalex.org/I4210090209","https://openalex.org/I91275662"]}],"countries":["SG"],"is_corresponding":false,"raw_author_name":"Mantalena Sarafianou","raw_affiliation_strings":["Institute of Microelectronics, A*STAR,Singapore","Institute of Microelectronics, A*STAR, Singapore"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Institute of Microelectronics, A*STAR,Singapore","institution_ids":["https://openalex.org/I4210090209","https://openalex.org/I115228651"]},{"raw_affiliation_string":"Institute of Microelectronics, A*STAR, Singapore","institution_ids":["https://openalex.org/I4210090209","https://openalex.org/I115228651"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5067792183","display_name":"David Sze Wai Choong","orcid":null},"institutions":[{"id":"https://openalex.org/I115228651","display_name":"Agency for Science, Technology and Research","ror":"https://ror.org/036wvzt09","country_code":"SG","type":"government","lineage":["https://openalex.org/I115228651"]},{"id":"https://openalex.org/I4210090209","display_name":"Institute of Microelectronics","ror":"https://ror.org/009rw8n36","country_code":"SG","type":"facility","lineage":["https://openalex.org/I115228651","https://openalex.org/I4210090209","https://openalex.org/I91275662"]}],"countries":["SG"],"is_corresponding":false,"raw_author_name":"David Sze Wai Choong","raw_affiliation_strings":["Institute of Microelectronics, A*STAR,Singapore","Institute of Microelectronics, A*STAR, Singapore"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Institute of Microelectronics, A*STAR,Singapore","institution_ids":["https://openalex.org/I4210090209","https://openalex.org/I115228651"]},{"raw_affiliation_string":"Institute of Microelectronics, A*STAR, Singapore","institution_ids":["https://openalex.org/I4210090209","https://openalex.org/I115228651"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5101190408","display_name":"Yul Koh","orcid":null},"institutions":[{"id":"https://openalex.org/I115228651","display_name":"Agency for Science, Technology and Research","ror":"https://ror.org/036wvzt09","country_code":"SG","type":"government","lineage":["https://openalex.org/I115228651"]},{"id":"https://openalex.org/I4210090209","display_name":"Institute of Microelectronics","ror":"https://ror.org/009rw8n36","country_code":"SG","type":"facility","lineage":["https://openalex.org/I115228651","https://openalex.org/I4210090209","https://openalex.org/I91275662"]}],"countries":["SG"],"is_corresponding":false,"raw_author_name":"Koh Yul","raw_affiliation_strings":["Institute of Microelectronics, A*STAR,Singapore","Institute of Microelectronics, A*STAR, Singapore"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Institute of Microelectronics, A*STAR,Singapore","institution_ids":["https://openalex.org/I4210090209","https://openalex.org/I115228651"]},{"raw_affiliation_string":"Institute of Microelectronics, A*STAR, Singapore","institution_ids":["https://openalex.org/I4210090209","https://openalex.org/I115228651"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":3,"corresponding_author_ids":[],"corresponding_institution_ids":[],"apc_list":null,"apc_paid":null,"fwci":0.6379,"has_fulltext":false,"cited_by_count":2,"citation_normalized_percentile":{"value":0.6058499,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":90,"max":94},"biblio":{"volume":"15","issue":null,"first_page":"1","last_page":"4"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10205","display_name":"Advanced Fiber Optic Sensors","score":0.9991999864578247,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10205","display_name":"Advanced Fiber Optic Sensors","score":0.9991999864578247,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11160","display_name":"Acoustic Wave Resonator Technologies","score":0.9987000226974487,"subfield":{"id":"https://openalex.org/subfields/2204","display_name":"Biomedical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":0.9983000159263611,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/relative-humidity","display_name":"Relative humidity","score":0.8793131113052368},{"id":"https://openalex.org/keywords/humidity","display_name":"Humidity","score":0.7232069969177246},{"id":"https://openalex.org/keywords/materials-science","display_name":"Materials science","score":0.6997327208518982},{"id":"https://openalex.org/keywords/silicon","display_name":"Silicon","score":0.4464249610900879},{"id":"https://openalex.org/keywords/signal","display_name":"SIGNAL (programming language)","score":0.4213913679122925},{"id":"https://openalex.org/keywords/environmental-science","display_name":"Environmental science","score":0.3241468071937561},{"id":"https://openalex.org/keywords/optoelectronics","display_name":"Optoelectronics","score":0.27865803241729736},{"id":"https://openalex.org/keywords/computer-science","display_name":"Computer science","score":0.2709760069847107},{"id":"https://openalex.org/keywords/meteorology","display_name":"Meteorology","score":0.1452638804912567}],"concepts":[{"id":"https://openalex.org/C158960510","wikidata":"https://www.wikidata.org/wiki/Q180600","display_name":"Relative humidity","level":2,"score":0.8793131113052368},{"id":"https://openalex.org/C151420433","wikidata":"https://www.wikidata.org/wiki/Q180600","display_name":"Humidity","level":2,"score":0.7232069969177246},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.6997327208518982},{"id":"https://openalex.org/C544956773","wikidata":"https://www.wikidata.org/wiki/Q670","display_name":"Silicon","level":2,"score":0.4464249610900879},{"id":"https://openalex.org/C2779843651","wikidata":"https://www.wikidata.org/wiki/Q7390335","display_name":"SIGNAL (programming language)","level":2,"score":0.4213913679122925},{"id":"https://openalex.org/C39432304","wikidata":"https://www.wikidata.org/wiki/Q188847","display_name":"Environmental science","level":0,"score":0.3241468071937561},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.27865803241729736},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.2709760069847107},{"id":"https://openalex.org/C153294291","wikidata":"https://www.wikidata.org/wiki/Q25261","display_name":"Meteorology","level":1,"score":0.1452638804912567},{"id":"https://openalex.org/C199360897","wikidata":"https://www.wikidata.org/wiki/Q9143","display_name":"Programming language","level":1,"score":0.0},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1109/sensors52175.2022.9967062","is_oa":false,"landing_page_url":"https://doi.org/10.1109/sensors52175.2022.9967062","pdf_url":null,"source":{"id":"https://openalex.org/S4363604906","display_name":"2022 IEEE Sensors","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"host_organization":null,"host_organization_name":null,"host_organization_lineage":[],"host_organization_lineage_names":[],"type":"conference"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2022 IEEE Sensors","raw_type":"proceedings-article"}],"best_oa_location":null,"sustainable_development_goals":[],"awards":[{"id":"https://openalex.org/G8891572067","display_name":null,"funder_award_id":"A18A4b0055","funder_id":"https://openalex.org/F4320320696","funder_display_name":"Agency for Science, Technology and Research"}],"funders":[{"id":"https://openalex.org/F4320320696","display_name":"Agency for Science, Technology and Research","ror":"https://ror.org/036wvzt09"}],"has_content":{"pdf":false,"grobid_xml":false},"content_urls":null,"referenced_works_count":26,"referenced_works":["https://openalex.org/W1572206591","https://openalex.org/W1966878942","https://openalex.org/W1970047880","https://openalex.org/W1977888315","https://openalex.org/W2012779095","https://openalex.org/W2015737056","https://openalex.org/W2022517458","https://openalex.org/W2038121210","https://openalex.org/W2061838979","https://openalex.org/W2088582433","https://openalex.org/W2107681954","https://openalex.org/W2166196665","https://openalex.org/W2285708547","https://openalex.org/W2293629629","https://openalex.org/W2474323988","https://openalex.org/W2743764621","https://openalex.org/W2903747256","https://openalex.org/W3015510350","https://openalex.org/W3212001520","https://openalex.org/W3212142301","https://openalex.org/W3213793884","https://openalex.org/W4241373347","https://openalex.org/W4251491818","https://openalex.org/W4256501888","https://openalex.org/W4310584539","https://openalex.org/W6634265762"],"related_works":["https://openalex.org/W2899084033","https://openalex.org/W2086997807","https://openalex.org/W2369482644","https://openalex.org/W2387657553","https://openalex.org/W2013511864","https://openalex.org/W1586733611","https://openalex.org/W2366365583","https://openalex.org/W2181379992","https://openalex.org/W1642018725","https://openalex.org/W2380249611"],"abstract_inverted_index":{"In":[0],"this":[1,37,62],"paper,":[2],"the":[3,16,24,46,59],"use":[4,60,70],"of":[5,26,48,61,71],"Silicon-on-Nothing":[6],"(SON)":[7],"pMUTs":[8,28,73],"for":[9,15,45,74,79],"relative":[10,30,52,76],"humidity":[11,31,53,77],"sensing":[12,78],"is":[13,43],"investigated":[14],"first":[17],"time.":[18],"The":[19,55],"work":[20],"presented":[21],"here":[22],"demonstrates":[23],"sensitivity":[25],"these":[27],"to":[29,51],"variations":[32],"at":[33],"constant":[34],"temperature.":[35],"For":[36],"application,":[38],"a":[39],"signal":[40],"processing":[41],"methodology":[42],"proposed":[44],"mapping":[47],"pulse-echo":[49],"measurements":[50],"indications.":[54],"results":[56],"obtained":[57],"from":[58],"method":[63],"are":[64],"promising":[65],"and":[66],"could":[67],"enable":[68],"wide":[69],"standard":[72],"environmental":[75],"different":[80],"applications.":[81]},"counts_by_year":[{"year":2024,"cited_by_count":1},{"year":2023,"cited_by_count":1}],"updated_date":"2026-06-11T09:08:48.828518","created_date":"2025-10-10T00:00:00"}