{"id":"https://openalex.org/W3112254538","doi":"https://doi.org/10.1109/sensors47125.2020.9278897","title":"A MEMS Type Damping Viscous Vacuum Gauge For High Vacuum Measurement","display_name":"A MEMS Type Damping Viscous Vacuum Gauge For High Vacuum Measurement","publication_year":2020,"publication_date":"2020-10-25","ids":{"openalex":"https://openalex.org/W3112254538","doi":"https://doi.org/10.1109/sensors47125.2020.9278897","mag":"3112254538"},"language":"en","primary_location":{"id":"doi:10.1109/sensors47125.2020.9278897","is_oa":false,"landing_page_url":"https://doi.org/10.1109/sensors47125.2020.9278897","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2020 IEEE SENSORS","raw_type":"proceedings-article"},"type":"article","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5032887270","display_name":"Chengxiang Wang","orcid":"https://orcid.org/0000-0001-5223-6240"},"institutions":[{"id":"https://openalex.org/I170215575","display_name":"National University of Defense Technology","ror":"https://ror.org/05d2yfz11","country_code":"CN","type":"education","lineage":["https://openalex.org/I170215575"]}],"countries":["CN"],"is_corresponding":true,"raw_author_name":"Chengxiang wang","raw_affiliation_strings":["National University of Defense Technology, Changsha, China"],"affiliations":[{"raw_affiliation_string":"National University of Defense Technology, Changsha, China","institution_ids":["https://openalex.org/I170215575"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5102303046","display_name":"Yulie Wu","orcid":"https://orcid.org/0000-0003-4884-2218"},"institutions":[{"id":"https://openalex.org/I170215575","display_name":"National University of Defense Technology","ror":"https://ror.org/05d2yfz11","country_code":"CN","type":"education","lineage":["https://openalex.org/I170215575"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Yulie Wu","raw_affiliation_strings":["National University of Defense Technology, Changsha, China"],"affiliations":[{"raw_affiliation_string":"National University of Defense Technology, Changsha, China","institution_ids":["https://openalex.org/I170215575"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5085245429","display_name":"Zhanqiang Hou","orcid":"https://orcid.org/0000-0001-9903-7951"},"institutions":[{"id":"https://openalex.org/I170215575","display_name":"National University of Defense Technology","ror":"https://ror.org/05d2yfz11","country_code":"CN","type":"education","lineage":["https://openalex.org/I170215575"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Zhanqiang Hou","raw_affiliation_strings":["National University of Defense Technology, Changsha, China"],"affiliations":[{"raw_affiliation_string":"National University of Defense Technology, Changsha, China","institution_ids":["https://openalex.org/I170215575"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5064608175","display_name":"Yunbin Kuang","orcid":"https://orcid.org/0000-0002-5169-1863"},"institutions":[{"id":"https://openalex.org/I170215575","display_name":"National University of Defense Technology","ror":"https://ror.org/05d2yfz11","country_code":"CN","type":"education","lineage":["https://openalex.org/I170215575"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Yunbin Kuang","raw_affiliation_strings":["National University of Defense Technology, Changsha, China"],"affiliations":[{"raw_affiliation_string":"National University of Defense Technology, Changsha, China","institution_ids":["https://openalex.org/I170215575"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5018426574","display_name":"Yongmeng Zhang","orcid":"https://orcid.org/0000-0002-3314-5818"},"institutions":[{"id":"https://openalex.org/I170215575","display_name":"National University of Defense Technology","ror":"https://ror.org/05d2yfz11","country_code":"CN","type":"education","lineage":["https://openalex.org/I170215575"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Yongmeng Zhang","raw_affiliation_strings":["National University of Defense Technology, Changsha, China"],"affiliations":[{"raw_affiliation_string":"National University of Defense Technology, Changsha, China","institution_ids":["https://openalex.org/I170215575"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5100861826","display_name":"Xuezhong Wu","orcid":null},"institutions":[{"id":"https://openalex.org/I170215575","display_name":"National University of Defense Technology","ror":"https://ror.org/05d2yfz11","country_code":"CN","type":"education","lineage":["https://openalex.org/I170215575"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Xuezhong Wu","raw_affiliation_strings":["National University of Defense Technology, Changsha, China"],"affiliations":[{"raw_affiliation_string":"National University of Defense Technology, Changsha, China","institution_ids":["https://openalex.org/I170215575"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5088900085","display_name":"Dingbang Xiao","orcid":"https://orcid.org/0000-0002-1591-7220"},"institutions":[{"id":"https://openalex.org/I170215575","display_name":"National University of Defense Technology","ror":"https://ror.org/05d2yfz11","country_code":"CN","type":"education","lineage":["https://openalex.org/I170215575"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Dingbang Xiao","raw_affiliation_strings":["National University of Defense Technology, Changsha, China"],"affiliations":[{"raw_affiliation_string":"National University of Defense Technology, Changsha, China","institution_ids":["https://openalex.org/I170215575"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":7,"corresponding_author_ids":["https://openalex.org/A5032887270"],"corresponding_institution_ids":["https://openalex.org/I170215575"],"apc_list":null,"apc_paid":null,"fwci":0.0,"has_fulltext":false,"cited_by_count":0,"citation_normalized_percentile":{"value":0.12906084,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":null,"biblio":{"volume":null,"issue":null,"first_page":"1","last_page":"4"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":0.9998999834060669,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":0.9998999834060669,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T13928","display_name":"Advanced Sensor Technologies Research","score":0.9998000264167786,"subfield":{"id":"https://openalex.org/subfields/2204","display_name":"Biomedical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11449","display_name":"Mechanical and Optical Resonators","score":0.9984999895095825,"subfield":{"id":"https://openalex.org/subfields/3107","display_name":"Atomic and Molecular Physics, and Optics"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/physics","display_name":"Physics","score":0.5063050985336304},{"id":"https://openalex.org/keywords/linearity","display_name":"Linearity","score":0.43277212977409363},{"id":"https://openalex.org/keywords/analytical-chemistry","display_name":"Analytical Chemistry (journal)","score":0.373701274394989},{"id":"https://openalex.org/keywords/quantum-mechanics","display_name":"Quantum mechanics","score":0.17912617325782776},{"id":"https://openalex.org/keywords/chemistry","display_name":"Chemistry","score":0.1049756407737732},{"id":"https://openalex.org/keywords/chromatography","display_name":"Chromatography","score":0.08975744247436523}],"concepts":[{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.5063050985336304},{"id":"https://openalex.org/C77170095","wikidata":"https://www.wikidata.org/wiki/Q1753188","display_name":"Linearity","level":2,"score":0.43277212977409363},{"id":"https://openalex.org/C113196181","wikidata":"https://www.wikidata.org/wiki/Q485223","display_name":"Analytical Chemistry (journal)","level":2,"score":0.373701274394989},{"id":"https://openalex.org/C62520636","wikidata":"https://www.wikidata.org/wiki/Q944","display_name":"Quantum mechanics","level":1,"score":0.17912617325782776},{"id":"https://openalex.org/C185592680","wikidata":"https://www.wikidata.org/wiki/Q2329","display_name":"Chemistry","level":0,"score":0.1049756407737732},{"id":"https://openalex.org/C43617362","wikidata":"https://www.wikidata.org/wiki/Q170050","display_name":"Chromatography","level":1,"score":0.08975744247436523}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1109/sensors47125.2020.9278897","is_oa":false,"landing_page_url":"https://doi.org/10.1109/sensors47125.2020.9278897","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2020 IEEE SENSORS","raw_type":"proceedings-article"}],"best_oa_location":null,"sustainable_development_goals":[],"awards":[],"funders":[{"id":"https://openalex.org/F4320321001","display_name":"National Natural Science Foundation of China","ror":"https://ror.org/01h0zpd94"}],"has_content":{"pdf":false,"grobid_xml":false},"content_urls":null,"referenced_works_count":12,"referenced_works":["https://openalex.org/W1422347651","https://openalex.org/W2022484471","https://openalex.org/W2038544002","https://openalex.org/W2074064189","https://openalex.org/W2136030158","https://openalex.org/W2136426006","https://openalex.org/W2168698773","https://openalex.org/W2511899697","https://openalex.org/W2603194933","https://openalex.org/W2807143605","https://openalex.org/W2911534664","https://openalex.org/W6680274261"],"related_works":["https://openalex.org/W4391375266","https://openalex.org/W2935759653","https://openalex.org/W3105167352","https://openalex.org/W54078636","https://openalex.org/W2954470139","https://openalex.org/W1501425562","https://openalex.org/W2902782467","https://openalex.org/W3084825885","https://openalex.org/W2298861036","https://openalex.org/W2271181815"],"abstract_inverted_index":{"This":[0,14,54],"article":[1],"reports":[2],"a":[3],"MEMS":[4,34],"type":[5],"Damping":[6],"Viscous":[7],"Vacuum":[8],"Gauge(DVVG)":[9],"for":[10,38,79],"high":[11,29,117],"vacuum":[12,86,95],"measurement.":[13],"gauge,":[15,55],"based":[16],"on":[17,25],"squeeze":[18],"film":[19],"damping":[20],"effect":[21],"that":[22,70,100],"gases":[23],"exerts":[24],"moving":[26],"block":[27],"with":[28,57,115],"velocity":[30],"and":[31,47,67,126,140],"constructed":[32],"by":[33],"technology,":[35],"was":[36,91],"reported":[37],"the":[39,58,62,73],"first":[40],"time.":[41],"The":[42,88],"working":[43],"principle,":[44],"manufacturing":[45],"process":[46],"measurement":[48,77,101],"steps":[49],"were":[50],"introduced":[51],"in":[52],"detail.":[53],"comparing":[56],"existing":[59],"DVVG":[60],"has":[61],"advantages":[63],"of":[64,75,84],"smart":[65],"size":[66],"lower":[68],"price":[69],"could":[71],"meet":[72],"requirement":[74],"embedded":[76],"requirement,":[78],"example,":[80],"leakage":[81],"rate":[82],"detection":[83],"tiny":[85],"chamber.":[87],"third-order":[89],"mode":[90],"applied":[92],"to":[93,109],"measure":[94],"degree,":[96],"test":[97],"result":[98],"shows":[99],"range":[102],"covers":[103],"7.5\u00d710-":[104],"<sup":[105,111,122,129,136,142],"xmlns:mml=\"http://www.w3.org/1998/Math/MathML\"":[106,112,123,130,137,143],"xmlns:xlink=\"http://www.w3.org/1999/xlink\">5</sup>":[107,124],"Pa":[108,114,139],"5\u00d710":[110],"xmlns:xlink=\"http://www.w3.org/1999/xlink\">-3</sup>":[113,144],"especially":[116],"sensitivity":[118],"(superior":[119],"than":[120],"10-":[121],"Pa)":[125],"output":[127],"linearity(R":[128],"xmlns:xlink=\"http://www.w3.org/1999/xlink\">2</sup>":[131],"=0.9978":[132],")":[133],"between":[134],"1\u00d710":[135,141],"xmlns:xlink=\"http://www.w3.org/1999/xlink\">-4</sup>":[138],"Pa.":[145]},"counts_by_year":[],"updated_date":"2025-11-06T03:46:38.306776","created_date":"2025-10-10T00:00:00"}