{"id":"https://openalex.org/W3112415107","doi":"https://doi.org/10.1109/sensors47125.2020.9278761","title":"A High-sensitivity Optical MEMS Accelerometer based on SOI Double-side Micromachining","display_name":"A High-sensitivity Optical MEMS Accelerometer based on SOI Double-side Micromachining","publication_year":2020,"publication_date":"2020-10-25","ids":{"openalex":"https://openalex.org/W3112415107","doi":"https://doi.org/10.1109/sensors47125.2020.9278761","mag":"3112415107"},"language":"en","primary_location":{"id":"doi:10.1109/sensors47125.2020.9278761","is_oa":false,"landing_page_url":"https://doi.org/10.1109/sensors47125.2020.9278761","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2020 IEEE SENSORS","raw_type":"proceedings-article"},"type":"article","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5030087835","display_name":"Ziqiang Qu","orcid":"https://orcid.org/0000-0002-8417-3229"},"institutions":[{"id":"https://openalex.org/I47720641","display_name":"Huazhong University of Science and Technology","ror":"https://ror.org/00p991c53","country_code":"CN","type":"education","lineage":["https://openalex.org/I47720641"]}],"countries":["CN"],"is_corresponding":true,"raw_author_name":"Ziqiang Qu","raw_affiliation_strings":["MOE Key Laboratory of Fundamental Physical Quantities Measurement & Hubei Key Laboratory of Gravitation and Quantum Physics, PGMF and School of Physics, Huazhong University of Science and Technology, Wuhan, China"],"affiliations":[{"raw_affiliation_string":"MOE Key Laboratory of Fundamental Physical Quantities Measurement & Hubei Key Laboratory of Gravitation and Quantum Physics, PGMF and School of Physics, Huazhong University of Science and Technology, Wuhan, China","institution_ids":["https://openalex.org/I47720641"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5100725636","display_name":"Huafeng Liu","orcid":"https://orcid.org/0000-0003-0757-2362"},"institutions":[{"id":"https://openalex.org/I47720641","display_name":"Huazhong University of Science and Technology","ror":"https://ror.org/00p991c53","country_code":"CN","type":"education","lineage":["https://openalex.org/I47720641"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Huafeng Liu","raw_affiliation_strings":["MOE Key Laboratory of Fundamental Physical Quantities Measurement & Hubei Key Laboratory of Gravitation and Quantum Physics, PGMF and School of Physics, Huazhong University of Science and Technology, Wuhan, China"],"affiliations":[{"raw_affiliation_string":"MOE Key Laboratory of Fundamental Physical Quantities Measurement & Hubei Key Laboratory of Gravitation and Quantum Physics, PGMF and School of Physics, Huazhong University of Science and Technology, Wuhan, China","institution_ids":["https://openalex.org/I47720641"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5038374014","display_name":"H. Daniel Ou\u2010Yang","orcid":"https://orcid.org/0000-0003-1662-1832"},"institutions":[{"id":"https://openalex.org/I47720641","display_name":"Huazhong University of Science and Technology","ror":"https://ror.org/00p991c53","country_code":"CN","type":"education","lineage":["https://openalex.org/I47720641"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Hao Ouyang","raw_affiliation_strings":["MOE Key Laboratory of Fundamental Physical Quantities Measurement & Hubei Key Laboratory of Gravitation and Quantum Physics, PGMF and School of Physics, Huazhong University of Science and Technology, Wuhan, China"],"affiliations":[{"raw_affiliation_string":"MOE Key Laboratory of Fundamental Physical Quantities Measurement & Hubei Key Laboratory of Gravitation and Quantum Physics, PGMF and School of Physics, Huazhong University of Science and Technology, Wuhan, China","institution_ids":["https://openalex.org/I47720641"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5069482201","display_name":"Chenyuan Hu","orcid":"https://orcid.org/0000-0003-4619-9978"},"institutions":[{"id":"https://openalex.org/I47720641","display_name":"Huazhong University of Science and Technology","ror":"https://ror.org/00p991c53","country_code":"CN","type":"education","lineage":["https://openalex.org/I47720641"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Chenyuan Hu","raw_affiliation_strings":["MOE Key Laboratory of Fundamental Physical Quantities Measurement & Hubei Key Laboratory of Gravitation and Quantum Physics, PGMF and School of Physics, Huazhong University of Science and Technology, Wuhan, China"],"affiliations":[{"raw_affiliation_string":"MOE Key Laboratory of Fundamental Physical Quantities Measurement & Hubei Key Laboratory of Gravitation and Quantum Physics, PGMF and School of Physics, Huazhong University of Science and Technology, Wuhan, China","institution_ids":["https://openalex.org/I47720641"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5064697095","display_name":"Liangcheng Tu","orcid":"https://orcid.org/0000-0003-1014-9784"},"institutions":[{"id":"https://openalex.org/I157773358","display_name":"Sun Yat-sen University","ror":"https://ror.org/0064kty71","country_code":"CN","type":"education","lineage":["https://openalex.org/I157773358"]},{"id":"https://openalex.org/I47720641","display_name":"Huazhong University of Science and Technology","ror":"https://ror.org/00p991c53","country_code":"CN","type":"education","lineage":["https://openalex.org/I47720641"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"LiangCheng Tu","raw_affiliation_strings":["MOE Key Laboratory of Fundamental Physical Quantities Measurement & Hubei Key Laboratory of Gravitation and Quantum Physics, PGMF and School of Physics, Huazhong University of Science and Technology, Wuhan, China","TianQin Research Center for Gravitational Physics, School of Physics and Astronomy, Sun Yat-sen University (Zhuhai Campus), Zhuhai, China"],"affiliations":[{"raw_affiliation_string":"MOE Key Laboratory of Fundamental Physical Quantities Measurement & Hubei Key Laboratory of Gravitation and Quantum Physics, PGMF and School of Physics, Huazhong University of Science and Technology, Wuhan, China","institution_ids":["https://openalex.org/I47720641"]},{"raw_affiliation_string":"TianQin Research Center for Gravitational Physics, School of Physics and Astronomy, Sun Yat-sen University (Zhuhai Campus), Zhuhai, China","institution_ids":["https://openalex.org/I157773358"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":5,"corresponding_author_ids":["https://openalex.org/A5030087835"],"corresponding_institution_ids":["https://openalex.org/I47720641"],"apc_list":null,"apc_paid":null,"fwci":1.1302,"has_fulltext":false,"cited_by_count":13,"citation_normalized_percentile":{"value":0.78466293,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":95,"max":97},"biblio":{"volume":null,"issue":null,"first_page":"1","last_page":"4"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":1.0,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":1.0,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10299","display_name":"Photonic and Optical Devices","score":0.9998999834060669,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11449","display_name":"Mechanical and Optical Resonators","score":0.9998000264167786,"subfield":{"id":"https://openalex.org/subfields/3107","display_name":"Atomic and Molecular Physics, and Optics"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/accelerometer","display_name":"Accelerometer","score":0.9018466472625732},{"id":"https://openalex.org/keywords/proof-mass","display_name":"Proof mass","score":0.7868911027908325},{"id":"https://openalex.org/keywords/microelectromechanical-systems","display_name":"Microelectromechanical systems","score":0.7773665189743042},{"id":"https://openalex.org/keywords/silicon-on-insulator","display_name":"Silicon on insulator","score":0.7224417328834534},{"id":"https://openalex.org/keywords/surface-micromachining","display_name":"Surface micromachining","score":0.7054928541183472},{"id":"https://openalex.org/keywords/materials-science","display_name":"Materials science","score":0.6185702681541443},{"id":"https://openalex.org/keywords/bulk-micromachining","display_name":"Bulk micromachining","score":0.591079831123352},{"id":"https://openalex.org/keywords/sensitivity","display_name":"Sensitivity (control systems)","score":0.5076268911361694},{"id":"https://openalex.org/keywords/capacitive-sensing","display_name":"Capacitive sensing","score":0.503415048122406},{"id":"https://openalex.org/keywords/interferometry","display_name":"Interferometry","score":0.448886513710022},{"id":"https://openalex.org/keywords/acceleration","display_name":"Acceleration","score":0.43177932500839233},{"id":"https://openalex.org/keywords/optoelectronics","display_name":"Optoelectronics","score":0.4297170341014862},{"id":"https://openalex.org/keywords/optics","display_name":"Optics","score":0.36342358589172363},{"id":"https://openalex.org/keywords/electronic-engineering","display_name":"Electronic engineering","score":0.34917140007019043},{"id":"https://openalex.org/keywords/fabrication","display_name":"Fabrication","score":0.2907393276691437},{"id":"https://openalex.org/keywords/silicon","display_name":"Silicon","score":0.25350314378738403},{"id":"https://openalex.org/keywords/computer-science","display_name":"Computer science","score":0.2261718213558197},{"id":"https://openalex.org/keywords/electrical-engineering","display_name":"Electrical engineering","score":0.1798742711544037},{"id":"https://openalex.org/keywords/engineering","display_name":"Engineering","score":0.17602017521858215},{"id":"https://openalex.org/keywords/physics","display_name":"Physics","score":0.16585156321525574}],"concepts":[{"id":"https://openalex.org/C89805583","wikidata":"https://www.wikidata.org/wiki/Q192940","display_name":"Accelerometer","level":2,"score":0.9018466472625732},{"id":"https://openalex.org/C2780330379","wikidata":"https://www.wikidata.org/wiki/Q16990023","display_name":"Proof mass","level":3,"score":0.7868911027908325},{"id":"https://openalex.org/C37977207","wikidata":"https://www.wikidata.org/wiki/Q175561","display_name":"Microelectromechanical systems","level":2,"score":0.7773665189743042},{"id":"https://openalex.org/C53143962","wikidata":"https://www.wikidata.org/wiki/Q1478788","display_name":"Silicon on insulator","level":3,"score":0.7224417328834534},{"id":"https://openalex.org/C145667562","wikidata":"https://www.wikidata.org/wiki/Q7646003","display_name":"Surface micromachining","level":4,"score":0.7054928541183472},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.6185702681541443},{"id":"https://openalex.org/C41075158","wikidata":"https://www.wikidata.org/wiki/Q4996485","display_name":"Bulk micromachining","level":5,"score":0.591079831123352},{"id":"https://openalex.org/C21200559","wikidata":"https://www.wikidata.org/wiki/Q7451068","display_name":"Sensitivity (control systems)","level":2,"score":0.5076268911361694},{"id":"https://openalex.org/C206755178","wikidata":"https://www.wikidata.org/wiki/Q1131271","display_name":"Capacitive sensing","level":2,"score":0.503415048122406},{"id":"https://openalex.org/C166689943","wikidata":"https://www.wikidata.org/wiki/Q850283","display_name":"Interferometry","level":2,"score":0.448886513710022},{"id":"https://openalex.org/C117896860","wikidata":"https://www.wikidata.org/wiki/Q11376","display_name":"Acceleration","level":2,"score":0.43177932500839233},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.4297170341014862},{"id":"https://openalex.org/C120665830","wikidata":"https://www.wikidata.org/wiki/Q14620","display_name":"Optics","level":1,"score":0.36342358589172363},{"id":"https://openalex.org/C24326235","wikidata":"https://www.wikidata.org/wiki/Q126095","display_name":"Electronic engineering","level":1,"score":0.34917140007019043},{"id":"https://openalex.org/C136525101","wikidata":"https://www.wikidata.org/wiki/Q5428139","display_name":"Fabrication","level":3,"score":0.2907393276691437},{"id":"https://openalex.org/C544956773","wikidata":"https://www.wikidata.org/wiki/Q670","display_name":"Silicon","level":2,"score":0.25350314378738403},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.2261718213558197},{"id":"https://openalex.org/C119599485","wikidata":"https://www.wikidata.org/wiki/Q43035","display_name":"Electrical engineering","level":1,"score":0.1798742711544037},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.17602017521858215},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.16585156321525574},{"id":"https://openalex.org/C111919701","wikidata":"https://www.wikidata.org/wiki/Q9135","display_name":"Operating system","level":1,"score":0.0},{"id":"https://openalex.org/C204787440","wikidata":"https://www.wikidata.org/wiki/Q188504","display_name":"Alternative medicine","level":2,"score":0.0},{"id":"https://openalex.org/C74650414","wikidata":"https://www.wikidata.org/wiki/Q11397","display_name":"Classical mechanics","level":1,"score":0.0},{"id":"https://openalex.org/C71924100","wikidata":"https://www.wikidata.org/wiki/Q11190","display_name":"Medicine","level":0,"score":0.0},{"id":"https://openalex.org/C142724271","wikidata":"https://www.wikidata.org/wiki/Q7208","display_name":"Pathology","level":1,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1109/sensors47125.2020.9278761","is_oa":false,"landing_page_url":"https://doi.org/10.1109/sensors47125.2020.9278761","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2020 IEEE SENSORS","raw_type":"proceedings-article"}],"best_oa_location":null,"sustainable_development_goals":[{"id":"https://metadata.un.org/sdg/7","display_name":"Affordable and clean energy","score":0.7400000095367432}],"awards":[],"funders":[{"id":"https://openalex.org/F4320322186","display_name":"Natural Science Foundation of Hubei Province","ror":null}],"has_content":{"grobid_xml":false,"pdf":false},"content_urls":null,"referenced_works_count":14,"referenced_works":["https://openalex.org/W1463985332","https://openalex.org/W2041960291","https://openalex.org/W2084772656","https://openalex.org/W2117985175","https://openalex.org/W2149128480","https://openalex.org/W2884780119","https://openalex.org/W2914429376","https://openalex.org/W2938234592","https://openalex.org/W2948851209","https://openalex.org/W2983912852","https://openalex.org/W3000671171","https://openalex.org/W3004456029","https://openalex.org/W3104061742","https://openalex.org/W6773490021"],"related_works":["https://openalex.org/W2922271745","https://openalex.org/W2310543875","https://openalex.org/W2127116786","https://openalex.org/W2024175055","https://openalex.org/W2022641457","https://openalex.org/W2036772353","https://openalex.org/W2296264082","https://openalex.org/W1501419981","https://openalex.org/W3215636742","https://openalex.org/W2149069570"],"abstract_inverted_index":{"High-sensitivity":[0],"micro-electromechanical":[1],"systems":[2],"(MEMS)":[3],"accelerometers":[4,16,36],"have":[5,17],"been":[6],"widely":[7],"used":[8],"in":[9],"many":[10],"applications.":[11],"Although":[12],"the":[13,18,59,84,88,92,98,102,113,119,123,130,146],"optical":[14,46,63,110,132,148],"MEMS":[15,35,47,149],"advantage":[19],"of":[20,29,61,83,101,129,145],"insensitive":[21],"to":[22],"electromagnetic":[23],"interferences,":[24],"there":[25],"are":[26,37],"still":[27],"difficulties":[28,60],"integration":[30,65],"and":[31,66,91,122],"fabrication.":[32],"Therefore,":[33],"capacitive":[34],"more":[38],"commonly":[39],"used.":[40],"This":[41],"paper":[42],"introduces":[43],"a":[44,75],"high-sensitivity":[45],"accelerometer":[48,78,133],"based":[49],"on":[50],"silicon-on-insulator":[51],"(SOI)":[52],"double-side":[53],"micromachining":[54],"technology":[55],"which":[56,140],"can":[57,105],"overcome":[58],"both":[62],"component":[64],"low-frequency":[67],"suspension":[68],"system":[69],"micromachining.":[70],"The":[71,127],"proposed":[72],"sensor":[73,93],"is":[74,134,141],"silicon":[76],"flexure":[77],"whose":[79],"spring-mass":[80],"structure":[81],"consists":[82],"compliant":[85],"spring":[86],"beams,":[87],"proof":[89,103,124],"mass":[90,104,125],"frame.":[94],"When":[95],"acceleration":[96],"applies,":[97],"in-plane":[99],"motion":[100],"be":[106],"transduced":[107],"by":[108],"an":[109],"interferometer":[111],"with":[112],"Fabry-Perot":[114],"(F-P)":[115],"cavity":[116],"formed":[117],"between":[118],"fiber":[120],"end-face":[121],"sidewall.":[126],"sensitivity":[128],"micro-machined":[131],"measured":[135],"as":[136],"100":[137],"ng/\u221aHz@1":[138],"Hz":[139],"better":[142],"than":[143],"most":[144],"reported":[147],"accelerometers.":[150]},"counts_by_year":[{"year":2025,"cited_by_count":2},{"year":2023,"cited_by_count":3},{"year":2022,"cited_by_count":4},{"year":2021,"cited_by_count":4}],"updated_date":"2025-11-06T03:46:38.306776","created_date":"2025-10-10T00:00:00"}