{"id":"https://openalex.org/W4200209347","doi":"https://doi.org/10.1109/sensors47087.2021.9639237","title":"Piezoelectric Mems for Microparticles Detection","display_name":"Piezoelectric Mems for Microparticles Detection","publication_year":2021,"publication_date":"2021-10-31","ids":{"openalex":"https://openalex.org/W4200209347","doi":"https://doi.org/10.1109/sensors47087.2021.9639237"},"language":"en","primary_location":{"id":"doi:10.1109/sensors47087.2021.9639237","is_oa":false,"landing_page_url":"https://doi.org/10.1109/sensors47087.2021.9639237","pdf_url":null,"source":{"id":"https://openalex.org/S4363605007","display_name":"2021 IEEE Sensors","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"host_organization":null,"host_organization_name":null,"host_organization_lineage":[],"host_organization_lineage_names":[],"type":"conference"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2021 IEEE Sensors","raw_type":"proceedings-article"},"type":"article","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5084632084","display_name":"F. Foncellino","orcid":null},"institutions":[{"id":"https://openalex.org/I4210154781","display_name":"STMicroelectronics (Italy)","ror":"https://ror.org/053bqv655","country_code":"IT","type":"company","lineage":["https://openalex.org/I131827901","https://openalex.org/I4210154781"]}],"countries":["IT"],"is_corresponding":true,"raw_author_name":"Francesco Foncellino","raw_affiliation_strings":["STMicroelectronics, Arzano, NA, Italy"],"affiliations":[{"raw_affiliation_string":"STMicroelectronics, Arzano, NA, Italy","institution_ids":["https://openalex.org/I4210154781"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5090856337","display_name":"Luigi Barretta","orcid":"https://orcid.org/0000-0001-7628-524X"},"institutions":[{"id":"https://openalex.org/I4210154781","display_name":"STMicroelectronics (Italy)","ror":"https://ror.org/053bqv655","country_code":"IT","type":"company","lineage":["https://openalex.org/I131827901","https://openalex.org/I4210154781"]},{"id":"https://openalex.org/I71267560","display_name":"University of Naples Federico II","ror":"https://ror.org/05290cv24","country_code":"IT","type":"education","lineage":["https://openalex.org/I71267560"]}],"countries":["IT"],"is_corresponding":false,"raw_author_name":"Luigi Barretta","raw_affiliation_strings":["Dept. of Physics, Universit\u00e0 Degli Studi di Napoli Federico II, Napoli, Italy","STMicroelectronics, Arzano, NA, Italy"],"affiliations":[{"raw_affiliation_string":"Dept. of Physics, Universit\u00e0 Degli Studi di Napoli Federico II, Napoli, Italy","institution_ids":["https://openalex.org/I71267560"]},{"raw_affiliation_string":"STMicroelectronics, Arzano, NA, Italy","institution_ids":["https://openalex.org/I4210154781"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5069802950","display_name":"Ettore Massera","orcid":"https://orcid.org/0000-0002-0613-9455"},"institutions":[{"id":"https://openalex.org/I110120368","display_name":"National Agency for New Technologies, Energy and Sustainable Economic Development","ror":"https://ror.org/02an8es95","country_code":"IT","type":"government","lineage":["https://openalex.org/I110120368"]}],"countries":["IT"],"is_corresponding":false,"raw_author_name":"Ettore Massera","raw_affiliation_strings":["ENEA, CR-Portici, Napoli, Italy"],"affiliations":[{"raw_affiliation_string":"ENEA, CR-Portici, Napoli, Italy","institution_ids":["https://openalex.org/I110120368"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5078762562","display_name":"Alberto Corigliano","orcid":"https://orcid.org/0000-0002-1285-2724"},"institutions":[{"id":"https://openalex.org/I93860229","display_name":"Politecnico di Milano","ror":"https://ror.org/01nffqt88","country_code":"IT","type":"education","lineage":["https://openalex.org/I93860229"]}],"countries":["IT"],"is_corresponding":false,"raw_author_name":"Alberto Corigliano","raw_affiliation_strings":["Dept. of Civil and Environmental Engineering, Politecnico di Milano, Milano, Italy"],"affiliations":[{"raw_affiliation_string":"Dept. of Civil and Environmental Engineering, Politecnico di Milano, Milano, Italy","institution_ids":["https://openalex.org/I93860229"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":4,"corresponding_author_ids":["https://openalex.org/A5084632084"],"corresponding_institution_ids":["https://openalex.org/I4210154781"],"apc_list":null,"apc_paid":null,"fwci":2.1676,"has_fulltext":false,"cited_by_count":5,"citation_normalized_percentile":{"value":0.87952756,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":89,"max":97},"biblio":{"volume":null,"issue":null,"first_page":"1","last_page":"4"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":0.9980999827384949,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":0.9980999827384949,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10461","display_name":"Gas Sensing Nanomaterials and Sensors","score":0.9979000091552734,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11160","display_name":"Acoustic Wave Resonator Technologies","score":0.9958999752998352,"subfield":{"id":"https://openalex.org/subfields/2204","display_name":"Biomedical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/materials-science","display_name":"Materials science","score":0.692086398601532},{"id":"https://openalex.org/keywords/diaphragm","display_name":"Diaphragm (acoustics)","score":0.6808066964149475},{"id":"https://openalex.org/keywords/microelectromechanical-systems","display_name":"Microelectromechanical systems","score":0.6796541213989258},{"id":"https://openalex.org/keywords/piezoelectricity","display_name":"Piezoelectricity","score":0.6593233346939087},{"id":"https://openalex.org/keywords/laser-doppler-vibrometer","display_name":"Laser Doppler vibrometer","score":0.5051386952400208},{"id":"https://openalex.org/keywords/acoustics","display_name":"Acoustics","score":0.4510546922683716},{"id":"https://openalex.org/keywords/particle","display_name":"Particle (ecology)","score":0.4413219392299652},{"id":"https://openalex.org/keywords/vibration","display_name":"Vibration","score":0.42626655101776123},{"id":"https://openalex.org/keywords/optoelectronics","display_name":"Optoelectronics","score":0.4245030879974365},{"id":"https://openalex.org/keywords/natural-frequency","display_name":"Natural frequency","score":0.4220525920391083},{"id":"https://openalex.org/keywords/sensitivity","display_name":"Sensitivity (control systems)","score":0.41418713331222534},{"id":"https://openalex.org/keywords/nanotechnology","display_name":"Nanotechnology","score":0.32103848457336426},{"id":"https://openalex.org/keywords/composite-material","display_name":"Composite material","score":0.28032344579696655},{"id":"https://openalex.org/keywords/electronic-engineering","display_name":"Electronic engineering","score":0.1970767080783844},{"id":"https://openalex.org/keywords/engineering","display_name":"Engineering","score":0.09441891312599182},{"id":"https://openalex.org/keywords/physics","display_name":"Physics","score":0.08093363046646118}],"concepts":[{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.692086398601532},{"id":"https://openalex.org/C164292776","wikidata":"https://www.wikidata.org/wiki/Q5271779","display_name":"Diaphragm (acoustics)","level":3,"score":0.6808066964149475},{"id":"https://openalex.org/C37977207","wikidata":"https://www.wikidata.org/wiki/Q175561","display_name":"Microelectromechanical systems","level":2,"score":0.6796541213989258},{"id":"https://openalex.org/C100082104","wikidata":"https://www.wikidata.org/wiki/Q183759","display_name":"Piezoelectricity","level":2,"score":0.6593233346939087},{"id":"https://openalex.org/C96199931","wikidata":"https://www.wikidata.org/wiki/Q1724132","display_name":"Laser Doppler vibrometer","level":4,"score":0.5051386952400208},{"id":"https://openalex.org/C24890656","wikidata":"https://www.wikidata.org/wiki/Q82811","display_name":"Acoustics","level":1,"score":0.4510546922683716},{"id":"https://openalex.org/C2778517922","wikidata":"https://www.wikidata.org/wiki/Q7140482","display_name":"Particle (ecology)","level":2,"score":0.4413219392299652},{"id":"https://openalex.org/C198394728","wikidata":"https://www.wikidata.org/wiki/Q3695508","display_name":"Vibration","level":2,"score":0.42626655101776123},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.4245030879974365},{"id":"https://openalex.org/C78736273","wikidata":"https://www.wikidata.org/wiki/Q946764","display_name":"Natural frequency","level":3,"score":0.4220525920391083},{"id":"https://openalex.org/C21200559","wikidata":"https://www.wikidata.org/wiki/Q7451068","display_name":"Sensitivity (control systems)","level":2,"score":0.41418713331222534},{"id":"https://openalex.org/C171250308","wikidata":"https://www.wikidata.org/wiki/Q11468","display_name":"Nanotechnology","level":1,"score":0.32103848457336426},{"id":"https://openalex.org/C159985019","wikidata":"https://www.wikidata.org/wiki/Q181790","display_name":"Composite material","level":1,"score":0.28032344579696655},{"id":"https://openalex.org/C24326235","wikidata":"https://www.wikidata.org/wiki/Q126095","display_name":"Electronic engineering","level":1,"score":0.1970767080783844},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.09441891312599182},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.08093363046646118},{"id":"https://openalex.org/C127313418","wikidata":"https://www.wikidata.org/wiki/Q1069","display_name":"Geology","level":0,"score":0.0},{"id":"https://openalex.org/C927094","wikidata":"https://www.wikidata.org/wiki/Q285877","display_name":"Distributed feedback laser","level":3,"score":0.0},{"id":"https://openalex.org/C111368507","wikidata":"https://www.wikidata.org/wiki/Q43518","display_name":"Oceanography","level":1,"score":0.0},{"id":"https://openalex.org/C6260449","wikidata":"https://www.wikidata.org/wiki/Q41364","display_name":"Wavelength","level":2,"score":0.0}],"mesh":[],"locations_count":2,"locations":[{"id":"doi:10.1109/sensors47087.2021.9639237","is_oa":false,"landing_page_url":"https://doi.org/10.1109/sensors47087.2021.9639237","pdf_url":null,"source":{"id":"https://openalex.org/S4363605007","display_name":"2021 IEEE Sensors","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"host_organization":null,"host_organization_name":null,"host_organization_lineage":[],"host_organization_lineage_names":[],"type":"conference"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2021 IEEE Sensors","raw_type":"proceedings-article"},{"id":"pmh:oai:re.public.polimi.it:11311/1207164","is_oa":false,"landing_page_url":"http://hdl.handle.net/11311/1207164","pdf_url":null,"source":{"id":"https://openalex.org/S4306400312","display_name":"Virtual Community of Pathological Anatomy (University of Castilla La Mancha)","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"host_organization":"https://openalex.org/I79189158","host_organization_name":"University of Castilla-La Mancha","host_organization_lineage":["https://openalex.org/I79189158"],"host_organization_lineage_names":[],"type":"repository"},"license":null,"license_id":null,"version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":null,"raw_type":"info:eu-repo/semantics/conferenceObject"}],"best_oa_location":null,"sustainable_development_goals":[{"score":0.5099999904632568,"id":"https://metadata.un.org/sdg/7","display_name":"Affordable and clean energy"}],"awards":[],"funders":[],"has_content":{"pdf":false,"grobid_xml":false},"content_urls":null,"referenced_works_count":17,"referenced_works":["https://openalex.org/W1443879350","https://openalex.org/W2065898944","https://openalex.org/W2100751274","https://openalex.org/W2159442239","https://openalex.org/W2165000018","https://openalex.org/W2166435454","https://openalex.org/W2418660021","https://openalex.org/W2559510580","https://openalex.org/W2599199563","https://openalex.org/W2615710859","https://openalex.org/W2792309381","https://openalex.org/W2804791149","https://openalex.org/W2974446738","https://openalex.org/W3000165467","https://openalex.org/W3014616410","https://openalex.org/W3149229616","https://openalex.org/W4233584056"],"related_works":["https://openalex.org/W2272290532","https://openalex.org/W3199221649","https://openalex.org/W120386264","https://openalex.org/W1975932505","https://openalex.org/W2120483398","https://openalex.org/W1530711136","https://openalex.org/W4244336329","https://openalex.org/W2006010605","https://openalex.org/W1997296189","https://openalex.org/W2078116069"],"abstract_inverted_index":{"We":[0],"present":[1],"a":[2,78],"thin":[3],"film":[4],"circular":[5],"diaphragm":[6],"for":[7,18],"the":[8,51,63,67,81,89,102],"implementation":[9],"of":[10,31,77,95,124],"micro":[11],"electro-mechanical":[12],"systems":[13],"(MEMS)":[14],"resonant":[15],"mass":[16,53,82,94],"sensors":[17],"detecting":[19],"particles":[20,98],"(e.g.,":[21],"PM10)":[22],"in":[23,41,66,122],"air.":[24],"A":[25],"piezoelectric":[26],"resonating":[27],"membrane":[28,103],"with":[29],"frequency":[30,46,90],"about":[32],"100kHz":[33],"is":[34,48,73,84,120],"used":[35],"as":[36],"high":[37],"precision":[38],"microbalance":[39],"operated":[40],"flexural":[42],"mode.":[43],"The":[44,70,105,118],"natural":[45],"shift":[47,91],"proportional":[49],"to":[50,62,114],"extra":[52,93],"added":[54],"on":[55,101],"its":[56],"surface":[57],"and":[58,80,130],"can":[59],"be":[60],"related":[61],"particle":[64],"concentration":[65],"sampled":[68],"air-volume.":[69],"vibrational":[71],"spectrum":[72],"recorded":[74],"by":[75,87],"means":[76],"vibrometer":[79],"sensitivity":[83],"then":[85],"evaluated":[86],"measuring":[88],"adding":[92],"calibrated":[96],"PM5":[97],"(Silica":[99],"beads)":[100],"surface.":[104],"feasibility":[106],"study":[107],"has":[108],"experimentally":[109],"showed":[110],"real-time":[111],"detection":[112],"performance":[113],"standard":[115],"silica":[116],"micro-spheres.":[117],"sensor":[119],"promising":[121],"applications":[123],"personal":[125],"portable":[126],"air":[127],"pollution":[128],"monitoring":[129],"analysis.":[131]},"counts_by_year":[{"year":2024,"cited_by_count":1},{"year":2023,"cited_by_count":3},{"year":2022,"cited_by_count":1}],"updated_date":"2026-03-27T05:58:40.876381","created_date":"2021-12-31T00:00:00"}