{"id":"https://openalex.org/W2999159553","doi":"https://doi.org/10.1109/sensors43011.2019.8956842","title":"Thermal Conductivity Sensor with Isolating Membrane Holes","display_name":"Thermal Conductivity Sensor with Isolating Membrane Holes","publication_year":2019,"publication_date":"2019-10-01","ids":{"openalex":"https://openalex.org/W2999159553","doi":"https://doi.org/10.1109/sensors43011.2019.8956842","mag":"2999159553"},"language":"en","primary_location":{"id":"doi:10.1109/sensors43011.2019.8956842","is_oa":false,"landing_page_url":"https://doi.org/10.1109/sensors43011.2019.8956842","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2019 IEEE SENSORS","raw_type":"proceedings-article"},"type":"article","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5046975351","display_name":"Ethan L. W. Gardner","orcid":"https://orcid.org/0000-0002-0990-0481"},"institutions":[{"id":"https://openalex.org/I241749","display_name":"University of Cambridge","ror":"https://ror.org/013meh722","country_code":"GB","type":"education","lineage":["https://openalex.org/I241749"]}],"countries":["GB"],"is_corresponding":false,"raw_author_name":"Ethan L. W. Gardner","raw_affiliation_strings":["University of Cambridge,Cambridge,United Kingdom","University of Cambridge, Cambridge, United Kingdom"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"University of Cambridge,Cambridge,United Kingdom","institution_ids":["https://openalex.org/I241749"]},{"raw_affiliation_string":"University of Cambridge, Cambridge, United Kingdom","institution_ids":["https://openalex.org/I241749"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5028536242","display_name":"Andrea De Luca","orcid":"https://orcid.org/0000-0002-9481-4747"},"institutions":[{"id":"https://openalex.org/I241749","display_name":"University of Cambridge","ror":"https://ror.org/013meh722","country_code":"GB","type":"education","lineage":["https://openalex.org/I241749"]}],"countries":["GB"],"is_corresponding":false,"raw_author_name":"Andrea De Luca","raw_affiliation_strings":["University of Cambridge,Cambridge,United Kingdom","University of Cambridge, Cambridge, United Kingdom"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"University of Cambridge,Cambridge,United Kingdom","institution_ids":["https://openalex.org/I241749"]},{"raw_affiliation_string":"University of Cambridge, Cambridge, United Kingdom","institution_ids":["https://openalex.org/I241749"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5075608911","display_name":"Timothy A. Vincent","orcid":"https://orcid.org/0000-0002-3520-6610"},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"Timothy Vincent","raw_affiliation_strings":["Flusso Ltd,Cambridge,United Kingdom","Flusso Ltd, Cambridge, United Kingdom"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Flusso Ltd,Cambridge,United Kingdom","institution_ids":[]},{"raw_affiliation_string":"Flusso Ltd, Cambridge, United Kingdom","institution_ids":[]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5023998582","display_name":"Rhys G. Jones","orcid":null},"institutions":[{"id":"https://openalex.org/I39555362","display_name":"University of Warwick","ror":"https://ror.org/01a77tt86","country_code":"GB","type":"education","lineage":["https://openalex.org/I39555362"]}],"countries":["GB"],"is_corresponding":false,"raw_author_name":"Rhys G. Jones","raw_affiliation_strings":["University of Warwick,Coventry,United Kingdom","University of Warwick, Coventry, United Kingdom"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"University of Warwick,Coventry,United Kingdom","institution_ids":["https://openalex.org/I39555362"]},{"raw_affiliation_string":"University of Warwick, Coventry, United Kingdom","institution_ids":["https://openalex.org/I39555362"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5085053574","display_name":"Julian W. Gardner","orcid":"https://orcid.org/0000-0002-4706-0049"},"institutions":[{"id":"https://openalex.org/I39555362","display_name":"University of Warwick","ror":"https://ror.org/01a77tt86","country_code":"GB","type":"education","lineage":["https://openalex.org/I39555362"]}],"countries":["GB"],"is_corresponding":false,"raw_author_name":"Julian W. Gardner","raw_affiliation_strings":["University of Warwick,Coventry,United Kingdom","University of Warwick, Coventry, United Kingdom"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"University of Warwick,Coventry,United Kingdom","institution_ids":["https://openalex.org/I39555362"]},{"raw_affiliation_string":"University of Warwick, Coventry, United Kingdom","institution_ids":["https://openalex.org/I39555362"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5066534887","display_name":"Florin Udrea","orcid":"https://orcid.org/0000-0002-7288-3370"},"institutions":[{"id":"https://openalex.org/I241749","display_name":"University of Cambridge","ror":"https://ror.org/013meh722","country_code":"GB","type":"education","lineage":["https://openalex.org/I241749"]}],"countries":["GB"],"is_corresponding":false,"raw_author_name":"Florin Udrea","raw_affiliation_strings":["University of Cambridge,Cambridge,United Kingdom","University of Cambridge, Cambridge, United Kingdom"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"University of Cambridge,Cambridge,United Kingdom","institution_ids":["https://openalex.org/I241749"]},{"raw_affiliation_string":"University of Cambridge, Cambridge, United Kingdom","institution_ids":["https://openalex.org/I241749"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":2,"corresponding_author_ids":[],"corresponding_institution_ids":[],"apc_list":null,"apc_paid":null,"fwci":0.1167,"has_fulltext":false,"cited_by_count":4,"citation_normalized_percentile":{"value":0.48410307,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":89,"max":97},"biblio":{"volume":null,"issue":null,"first_page":"1","last_page":"4"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10461","display_name":"Gas Sensing Nanomaterials and Sensors","score":0.9943000078201294,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10461","display_name":"Gas Sensing Nanomaterials and Sensors","score":0.9943000078201294,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":0.9927999973297119,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T12564","display_name":"Sensor Technology and Measurement Systems","score":0.9926999807357788,"subfield":{"id":"https://openalex.org/subfields/1705","display_name":"Computer Networks and Communications"},"field":{"id":"https://openalex.org/fields/17","display_name":"Computer Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/thermal-conductivity","display_name":"Thermal conductivity","score":0.6834646463394165},{"id":"https://openalex.org/keywords/conductivity","display_name":"Conductivity","score":0.5740272998809814},{"id":"https://openalex.org/keywords/membrane","display_name":"Membrane","score":0.5668120384216309},{"id":"https://openalex.org/keywords/materials-science","display_name":"Materials science","score":0.5292161107063293},{"id":"https://openalex.org/keywords/optoelectronics","display_name":"Optoelectronics","score":0.36826857924461365},{"id":"https://openalex.org/keywords/physics","display_name":"Physics","score":0.20498892664909363},{"id":"https://openalex.org/keywords/composite-material","display_name":"Composite material","score":0.20343896746635437},{"id":"https://openalex.org/keywords/chemistry","display_name":"Chemistry","score":0.14126670360565186}],"concepts":[{"id":"https://openalex.org/C97346530","wikidata":"https://www.wikidata.org/wiki/Q487005","display_name":"Thermal conductivity","level":2,"score":0.6834646463394165},{"id":"https://openalex.org/C131540310","wikidata":"https://www.wikidata.org/wiki/Q907564","display_name":"Conductivity","level":2,"score":0.5740272998809814},{"id":"https://openalex.org/C41625074","wikidata":"https://www.wikidata.org/wiki/Q176088","display_name":"Membrane","level":2,"score":0.5668120384216309},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.5292161107063293},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.36826857924461365},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.20498892664909363},{"id":"https://openalex.org/C159985019","wikidata":"https://www.wikidata.org/wiki/Q181790","display_name":"Composite material","level":1,"score":0.20343896746635437},{"id":"https://openalex.org/C185592680","wikidata":"https://www.wikidata.org/wiki/Q2329","display_name":"Chemistry","level":0,"score":0.14126670360565186},{"id":"https://openalex.org/C55493867","wikidata":"https://www.wikidata.org/wiki/Q7094","display_name":"Biochemistry","level":1,"score":0.0},{"id":"https://openalex.org/C62520636","wikidata":"https://www.wikidata.org/wiki/Q944","display_name":"Quantum mechanics","level":1,"score":0.0}],"mesh":[],"locations_count":2,"locations":[{"id":"doi:10.1109/sensors43011.2019.8956842","is_oa":false,"landing_page_url":"https://doi.org/10.1109/sensors43011.2019.8956842","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2019 IEEE SENSORS","raw_type":"proceedings-article"},{"id":"pmh:oai:generic.eprints.org:1173607","is_oa":false,"landing_page_url":"http://publications.eng.cam.ac.uk/1173607/","pdf_url":null,"source":{"id":"https://openalex.org/S4406922847","display_name":"Cambridge University Engineering Department Publications Database","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"host_organization":null,"host_organization_name":null,"host_organization_lineage":[],"host_organization_lineage_names":[],"type":"repository"},"license":null,"license_id":null,"version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"","raw_type":"Conference or Workshop Item"}],"best_oa_location":null,"sustainable_development_goals":[{"display_name":"Affordable and clean energy","id":"https://metadata.un.org/sdg/7","score":0.8700000047683716}],"awards":[],"funders":[],"has_content":{"pdf":false,"grobid_xml":false},"content_urls":null,"referenced_works_count":13,"referenced_works":["https://openalex.org/W1521947150","https://openalex.org/W1964418885","https://openalex.org/W1990690388","https://openalex.org/W2004518031","https://openalex.org/W2008654583","https://openalex.org/W2112616753","https://openalex.org/W2159225979","https://openalex.org/W2486760153","https://openalex.org/W2742996467","https://openalex.org/W2744647938","https://openalex.org/W2765271911","https://openalex.org/W2771051499","https://openalex.org/W2910840067"],"related_works":["https://openalex.org/W4246450666","https://openalex.org/W4388998267","https://openalex.org/W2898370298","https://openalex.org/W2137437058","https://openalex.org/W4390401159","https://openalex.org/W2744391499","https://openalex.org/W3120461830","https://openalex.org/W4230250635","https://openalex.org/W3041790586","https://openalex.org/W2018879842"],"abstract_inverted_index":{"In":[0],"this":[1],"paper":[2,139],"we":[3],"present":[4],"a":[5,158,169],"thermal":[6,32,151],"conductivity":[7,33,152],"gas":[8,173],"sensor":[9],"with":[10],"improved":[11],"sensitivity":[12,74,90],"by":[13,68,75,86,99],"adding":[14],"holes":[15,47,60,111,122,145],"in":[16],"the":[17,28,42,49,56,89,107,110,132],"thin-film":[18],"membrane.":[19],"A":[20],"numerical":[21,36],"model":[22,37],"is":[23,38,82,102],"created":[24],"and":[25,63,154,165],"validated":[26],"against":[27],"reference":[29,159],"CMOS":[30],"MEMS":[31],"sensor.":[34,174],"The":[35,79],"used":[39,148],"to":[40,84,91,149,168],"investigate":[41],"advantages":[43],"of":[44,55,109],"having":[45],"isolating":[46],"through":[48],"membrane,":[50],"located":[51],"on":[52,117],"either":[53],"side":[54],"heating":[57],"resistor.":[58],"These":[59],"increase":[61,85],"robustness":[62],"minimise":[64],"catastrophic":[65],"failure":[66],"caused":[67],"pressure":[69],"difference":[70],"whilst":[71,88],"simultaneously":[72],"increasing":[73,106],"enhancing":[76],"convective":[77],"interaction.":[78],"electro-thermal":[80],"efficiency":[81],"shown":[83,104],"16%":[87],"measuring":[92,136],"percentage":[93],"CO":[94],"<sub":[95],"xmlns:mml=\"http://www.w3.org/1998/Math/MathML\"":[96],"xmlns:xlink=\"http://www.w3.org/1999/xlink\">2</sub>":[97],"increases":[98],"39.2%.":[100],"It":[101],"also":[103],"that":[105,143],"width":[108],"does":[112],"not":[113],"have":[114],"significant":[115],"effect":[116],"these":[118,161],"sensitivities;":[119],"thus,":[120],"small":[121],"can":[123,146],"be":[124,147],"incorporated,":[125],"leaving":[126],"room":[127],"for":[128,134],"multiple":[129],"resistors":[130],"across":[131],"membrane":[133,144],"different":[135],"techniques.":[137],"This":[138],"serves":[140],"as":[141,157],"proof":[142],"optimise":[150],"sensors":[153],"will":[155],"serve":[156],"when":[160],"designs":[162],"are":[163],"fabricated":[164],"tested,":[166],"leading":[167],"new":[170],"low-power,":[171],"high-sensitivity":[172]},"counts_by_year":[{"year":2023,"cited_by_count":3},{"year":2021,"cited_by_count":1}],"updated_date":"2026-07-02T09:51:11.867554","created_date":"2025-10-10T00:00:00"}