{"id":"https://openalex.org/W2999262021","doi":"https://doi.org/10.1109/sensors43011.2019.8956767","title":"High Frequency Gas Detection With an Uncoated CMUT Array by Impedance Resonant Frequency Measurement","display_name":"High Frequency Gas Detection With an Uncoated CMUT Array by Impedance Resonant Frequency Measurement","publication_year":2019,"publication_date":"2019-10-01","ids":{"openalex":"https://openalex.org/W2999262021","doi":"https://doi.org/10.1109/sensors43011.2019.8956767","mag":"2999262021"},"language":"en","primary_location":{"id":"doi:10.1109/sensors43011.2019.8956767","is_oa":false,"landing_page_url":"https://doi.org/10.1109/sensors43011.2019.8956767","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2019 IEEE SENSORS","raw_type":"proceedings-article"},"type":"article","indexed_in":["crossref"],"open_access":{"is_oa":true,"oa_status":"green","oa_url":"https://hal.science/hal-02476746v1/document","any_repository_has_fulltext":true},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5073591288","display_name":"Luis Iglesias Hernandez","orcid":null},"institutions":[{"id":"https://openalex.org/I1294671590","display_name":"Centre National de la Recherche Scientifique","ror":"https://ror.org/02feahw73","country_code":"FR","type":"government","lineage":["https://openalex.org/I1294671590"]},{"id":"https://openalex.org/I15057530","display_name":"Universit\u00e9 de Bordeaux","ror":"https://ror.org/057qpr032","country_code":"FR","type":"education","lineage":["https://openalex.org/I15057530"]},{"id":"https://openalex.org/I4210157089","display_name":"Laboratoire de l'Int\u00e9gration du Mat\u00e9riau au Syst\u00e8me","ror":"https://ror.org/04nabhy78","country_code":"FR","type":"facility","lineage":["https://openalex.org/I1294671590","https://openalex.org/I1294671590","https://openalex.org/I15057530","https://openalex.org/I4210091158","https://openalex.org/I4210095849","https://openalex.org/I4210157089","https://openalex.org/I4210160189"]},{"id":"https://openalex.org/I4210160189","display_name":"Institut Polytechnique de Bordeaux","ror":"https://ror.org/054qv7y42","country_code":"FR","type":"education","lineage":["https://openalex.org/I4210160189"]}],"countries":["FR"],"is_corresponding":true,"raw_author_name":"Luis Iglesias Hernandez","raw_affiliation_strings":["Université de Bordeaux,Laboratoire IMS UMR-CNRS 5218,TALENCE Cedex,France,33405","Laboratoire IMS UMR-CNRS 5218, Universit\u00e9 de Bordeaux, TALENCE Cedex, France"],"affiliations":[{"raw_affiliation_string":"Université de Bordeaux,Laboratoire IMS UMR-CNRS 5218,TALENCE Cedex,France,33405","institution_ids":["https://openalex.org/I15057530","https://openalex.org/I4210160189","https://openalex.org/I1294671590"]},{"raw_affiliation_string":"Laboratoire IMS UMR-CNRS 5218, Universit\u00e9 de Bordeaux, TALENCE Cedex, France","institution_ids":["https://openalex.org/I4210157089","https://openalex.org/I4210160189","https://openalex.org/I1294671590","https://openalex.org/I15057530"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5005391935","display_name":"Isabelle Dufour","orcid":"https://orcid.org/0000-0002-1986-1463"},"institutions":[{"id":"https://openalex.org/I1294671590","display_name":"Centre National de la Recherche Scientifique","ror":"https://ror.org/02feahw73","country_code":"FR","type":"government","lineage":["https://openalex.org/I1294671590"]},{"id":"https://openalex.org/I15057530","display_name":"Universit\u00e9 de Bordeaux","ror":"https://ror.org/057qpr032","country_code":"FR","type":"education","lineage":["https://openalex.org/I15057530"]},{"id":"https://openalex.org/I4210157089","display_name":"Laboratoire de l'Int\u00e9gration du Mat\u00e9riau au Syst\u00e8me","ror":"https://ror.org/04nabhy78","country_code":"FR","type":"facility","lineage":["https://openalex.org/I1294671590","https://openalex.org/I1294671590","https://openalex.org/I15057530","https://openalex.org/I4210091158","https://openalex.org/I4210095849","https://openalex.org/I4210157089","https://openalex.org/I4210160189"]},{"id":"https://openalex.org/I4210160189","display_name":"Institut Polytechnique de Bordeaux","ror":"https://ror.org/054qv7y42","country_code":"FR","type":"education","lineage":["https://openalex.org/I4210160189"]}],"countries":["FR"],"is_corresponding":false,"raw_author_name":"Isabelle Dufour","raw_affiliation_strings":["Université de Bordeaux,Laboratoire IMS UMR-CNRS 5218,TALENCE Cedex,France,33405","Laboratoire IMS UMR-CNRS 5218, Universit\u00e9 de Bordeaux, TALENCE Cedex, France"],"affiliations":[{"raw_affiliation_string":"Université de Bordeaux,Laboratoire IMS UMR-CNRS 5218,TALENCE Cedex,France,33405","institution_ids":["https://openalex.org/I15057530","https://openalex.org/I4210160189","https://openalex.org/I1294671590"]},{"raw_affiliation_string":"Laboratoire IMS UMR-CNRS 5218, Universit\u00e9 de Bordeaux, TALENCE Cedex, France","institution_ids":["https://openalex.org/I4210157089","https://openalex.org/I4210160189","https://openalex.org/I1294671590","https://openalex.org/I15057530"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5082214069","display_name":"Priyadarshini Shanmugam","orcid":"https://orcid.org/0000-0002-4476-143X"},"institutions":[{"id":"https://openalex.org/I110017253","display_name":"Universit\u00e9 de Tours","ror":"https://ror.org/02wwzvj46","country_code":"FR","type":"education","lineage":["https://openalex.org/I110017253"]},{"id":"https://openalex.org/I1294671590","display_name":"Centre National de la Recherche Scientifique","ror":"https://ror.org/02feahw73","country_code":"FR","type":"government","lineage":["https://openalex.org/I1294671590"]}],"countries":["FR"],"is_corresponding":false,"raw_author_name":"Priyadarshini Shanmugam","raw_affiliation_strings":["Université de Tours,GREMAN UMR-CNRS 7347,TOURS Cedex 2,France,37071","GREMAN UMR-CNRS 7347, Universit\u00e9 de Tours, TOURS Cedex 2, France"],"affiliations":[{"raw_affiliation_string":"Université de Tours,GREMAN UMR-CNRS 7347,TOURS Cedex 2,France,37071","institution_ids":["https://openalex.org/I110017253","https://openalex.org/I1294671590"]},{"raw_affiliation_string":"GREMAN UMR-CNRS 7347, Universit\u00e9 de Tours, TOURS Cedex 2, France","institution_ids":["https://openalex.org/I110017253","https://openalex.org/I1294671590"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5034276471","display_name":"Jean-Fran\u00e7ois Michaud","orcid":"https://orcid.org/0000-0002-7441-8982"},"institutions":[{"id":"https://openalex.org/I110017253","display_name":"Universit\u00e9 de Tours","ror":"https://ror.org/02wwzvj46","country_code":"FR","type":"education","lineage":["https://openalex.org/I110017253"]},{"id":"https://openalex.org/I1294671590","display_name":"Centre National de la Recherche Scientifique","ror":"https://ror.org/02feahw73","country_code":"FR","type":"government","lineage":["https://openalex.org/I1294671590"]}],"countries":["FR"],"is_corresponding":false,"raw_author_name":"Jean-Fran\u00e7ois Michaud","raw_affiliation_strings":["Université de Tours,GREMAN UMR-CNRS 7347,TOURS Cedex 2,France,37071","GREMAN UMR-CNRS 7347, Universit\u00e9 de Tours, TOURS Cedex 2, France"],"affiliations":[{"raw_affiliation_string":"Université de Tours,GREMAN UMR-CNRS 7347,TOURS Cedex 2,France,37071","institution_ids":["https://openalex.org/I110017253","https://openalex.org/I1294671590"]},{"raw_affiliation_string":"GREMAN UMR-CNRS 7347, Universit\u00e9 de Tours, TOURS Cedex 2, France","institution_ids":["https://openalex.org/I110017253","https://openalex.org/I1294671590"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5055755772","display_name":"Daniel Alquier","orcid":"https://orcid.org/0000-0003-1345-8195"},"institutions":[{"id":"https://openalex.org/I110017253","display_name":"Universit\u00e9 de Tours","ror":"https://ror.org/02wwzvj46","country_code":"FR","type":"education","lineage":["https://openalex.org/I110017253"]},{"id":"https://openalex.org/I1294671590","display_name":"Centre National de la Recherche Scientifique","ror":"https://ror.org/02feahw73","country_code":"FR","type":"government","lineage":["https://openalex.org/I1294671590"]}],"countries":["FR"],"is_corresponding":false,"raw_author_name":"Daniel Alquier","raw_affiliation_strings":["Université de Tours,GREMAN UMR-CNRS 7347,TOURS Cedex 2,France,37071","GREMAN UMR-CNRS 7347, Universit\u00e9 de Tours, TOURS Cedex 2, France"],"affiliations":[{"raw_affiliation_string":"Université de Tours,GREMAN UMR-CNRS 7347,TOURS Cedex 2,France,37071","institution_ids":["https://openalex.org/I110017253","https://openalex.org/I1294671590"]},{"raw_affiliation_string":"GREMAN UMR-CNRS 7347, Universit\u00e9 de Tours, TOURS Cedex 2, France","institution_ids":["https://openalex.org/I110017253","https://openalex.org/I1294671590"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5074837796","display_name":"Dominique Certon","orcid":"https://orcid.org/0000-0001-5963-7119"},"institutions":[{"id":"https://openalex.org/I110017253","display_name":"Universit\u00e9 de Tours","ror":"https://ror.org/02wwzvj46","country_code":"FR","type":"education","lineage":["https://openalex.org/I110017253"]},{"id":"https://openalex.org/I1294671590","display_name":"Centre National de la Recherche Scientifique","ror":"https://ror.org/02feahw73","country_code":"FR","type":"government","lineage":["https://openalex.org/I1294671590"]}],"countries":["FR"],"is_corresponding":false,"raw_author_name":"Dominique Certon","raw_affiliation_strings":["Université de Tours,GREMAN UMR-CNRS 7347,TOURS Cedex 2,France,37071","GREMAN UMR-CNRS 7347, Universit\u00e9 de Tours, TOURS Cedex 2, France"],"affiliations":[{"raw_affiliation_string":"Université de Tours,GREMAN UMR-CNRS 7347,TOURS Cedex 2,France,37071","institution_ids":["https://openalex.org/I110017253","https://openalex.org/I1294671590"]},{"raw_affiliation_string":"GREMAN UMR-CNRS 7347, Universit\u00e9 de Tours, TOURS Cedex 2, France","institution_ids":["https://openalex.org/I110017253","https://openalex.org/I1294671590"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":6,"corresponding_author_ids":["https://openalex.org/A5073591288"],"corresponding_institution_ids":["https://openalex.org/I1294671590","https://openalex.org/I15057530","https://openalex.org/I4210157089","https://openalex.org/I4210160189"],"apc_list":null,"apc_paid":null,"fwci":0.0,"has_fulltext":true,"cited_by_count":3,"citation_normalized_percentile":{"value":0.16183051,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":90,"max":95},"biblio":{"volume":null,"issue":null,"first_page":"1","last_page":"4"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T11160","display_name":"Acoustic Wave Resonator Technologies","score":0.9997000098228455,"subfield":{"id":"https://openalex.org/subfields/2204","display_name":"Biomedical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T11160","display_name":"Acoustic Wave Resonator Technologies","score":0.9997000098228455,"subfield":{"id":"https://openalex.org/subfields/2204","display_name":"Biomedical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":0.9991999864578247,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10461","display_name":"Gas Sensing Nanomaterials and Sensors","score":0.9987000226974487,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/capacitive-micromachined-ultrasonic-transducers","display_name":"Capacitive micromachined ultrasonic transducers","score":0.9483370780944824},{"id":"https://openalex.org/keywords/capacitive-sensing","display_name":"Capacitive sensing","score":0.6596254706382751},{"id":"https://openalex.org/keywords/materials-science","display_name":"Materials science","score":0.6382796764373779},{"id":"https://openalex.org/keywords/electrical-impedance","display_name":"Electrical impedance","score":0.6218082904815674},{"id":"https://openalex.org/keywords/acoustics","display_name":"Acoustics","score":0.5795477628707886},{"id":"https://openalex.org/keywords/transducer","display_name":"Transducer","score":0.5711694359779358},{"id":"https://openalex.org/keywords/silicon-nitride","display_name":"Silicon nitride","score":0.5347610712051392},{"id":"https://openalex.org/keywords/ultrasonic-sensor","display_name":"Ultrasonic sensor","score":0.513813316822052},{"id":"https://openalex.org/keywords/optoelectronics","display_name":"Optoelectronics","score":0.44671887159347534},{"id":"https://openalex.org/keywords/silicon","display_name":"Silicon","score":0.30870431661605835},{"id":"https://openalex.org/keywords/electrical-engineering","display_name":"Electrical engineering","score":0.2329109013080597},{"id":"https://openalex.org/keywords/engineering","display_name":"Engineering","score":0.14642241597175598},{"id":"https://openalex.org/keywords/physics","display_name":"Physics","score":0.1085713803768158}],"concepts":[{"id":"https://openalex.org/C58772458","wikidata":"https://www.wikidata.org/wiki/Q5034480","display_name":"Capacitive micromachined ultrasonic transducers","level":3,"score":0.9483370780944824},{"id":"https://openalex.org/C206755178","wikidata":"https://www.wikidata.org/wiki/Q1131271","display_name":"Capacitive sensing","level":2,"score":0.6596254706382751},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.6382796764373779},{"id":"https://openalex.org/C17829176","wikidata":"https://www.wikidata.org/wiki/Q179043","display_name":"Electrical impedance","level":2,"score":0.6218082904815674},{"id":"https://openalex.org/C24890656","wikidata":"https://www.wikidata.org/wiki/Q82811","display_name":"Acoustics","level":1,"score":0.5795477628707886},{"id":"https://openalex.org/C56318395","wikidata":"https://www.wikidata.org/wiki/Q215928","display_name":"Transducer","level":2,"score":0.5711694359779358},{"id":"https://openalex.org/C2777431650","wikidata":"https://www.wikidata.org/wiki/Q413828","display_name":"Silicon nitride","level":3,"score":0.5347610712051392},{"id":"https://openalex.org/C81288441","wikidata":"https://www.wikidata.org/wiki/Q20736125","display_name":"Ultrasonic sensor","level":2,"score":0.513813316822052},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.44671887159347534},{"id":"https://openalex.org/C544956773","wikidata":"https://www.wikidata.org/wiki/Q670","display_name":"Silicon","level":2,"score":0.30870431661605835},{"id":"https://openalex.org/C119599485","wikidata":"https://www.wikidata.org/wiki/Q43035","display_name":"Electrical engineering","level":1,"score":0.2329109013080597},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.14642241597175598},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.1085713803768158}],"mesh":[],"locations_count":2,"locations":[{"id":"doi:10.1109/sensors43011.2019.8956767","is_oa":false,"landing_page_url":"https://doi.org/10.1109/sensors43011.2019.8956767","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2019 IEEE SENSORS","raw_type":"proceedings-article"},{"id":"pmh:oai:HAL:hal-02476746v1","is_oa":true,"landing_page_url":"https://hal.science/hal-02476746","pdf_url":"https://hal.science/hal-02476746v1/document","source":{"id":"https://openalex.org/S4406922461","display_name":"SPIRE - Sciences Po Institutional REpository","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"host_organization":null,"host_organization_name":null,"host_organization_lineage":[],"host_organization_lineage_names":[],"type":"repository"},"license":null,"license_id":null,"version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"https://ieee-sensors.org/conferences/ieee-sensors-2019/","raw_type":"Conference papers"}],"best_oa_location":{"id":"pmh:oai:HAL:hal-02476746v1","is_oa":true,"landing_page_url":"https://hal.science/hal-02476746","pdf_url":"https://hal.science/hal-02476746v1/document","source":{"id":"https://openalex.org/S4406922461","display_name":"SPIRE - Sciences Po Institutional REpository","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"host_organization":null,"host_organization_name":null,"host_organization_lineage":[],"host_organization_lineage_names":[],"type":"repository"},"license":null,"license_id":null,"version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"https://ieee-sensors.org/conferences/ieee-sensors-2019/","raw_type":"Conference papers"},"sustainable_development_goals":[],"awards":[],"funders":[{"id":"https://openalex.org/F4320324081","display_name":"Agence Nationale pour la Gestion des D\u00e9chets Radioactifs","ror":"https://ror.org/04qkhgw46"}],"has_content":{"pdf":true,"grobid_xml":true},"content_urls":{"pdf":"https://content.openalex.org/works/W2999262021.pdf","grobid_xml":"https://content.openalex.org/works/W2999262021.grobid-xml"},"referenced_works_count":19,"referenced_works":["https://openalex.org/W1990445631","https://openalex.org/W1995437468","https://openalex.org/W1996060732","https://openalex.org/W2012779095","https://openalex.org/W2021328313","https://openalex.org/W2023401067","https://openalex.org/W2056210852","https://openalex.org/W2061447323","https://openalex.org/W2061762352","https://openalex.org/W2062632599","https://openalex.org/W2086981746","https://openalex.org/W2115979089","https://openalex.org/W2121189261","https://openalex.org/W2122905951","https://openalex.org/W2334973551","https://openalex.org/W2515995822","https://openalex.org/W2795173406","https://openalex.org/W2908347691","https://openalex.org/W2910129398"],"related_works":["https://openalex.org/W4319718051","https://openalex.org/W2137987953","https://openalex.org/W3202163833","https://openalex.org/W2808928575","https://openalex.org/W4281663564","https://openalex.org/W2330836581","https://openalex.org/W3008955959","https://openalex.org/W2890862950","https://openalex.org/W2051847435","https://openalex.org/W3210581393"],"abstract_inverted_index":{"This":[0],"paper":[1],"shows":[2],"for":[3,66,87],"the":[4,7,15,29,41,48,54,58],"first":[5],"time":[6],"ability":[8],"to":[9],"detect":[10],"different":[11],"gases":[12],"by":[13],"tracking":[14],"impedance":[16],"of":[17,34,43,47,57,74],"an":[18],"uncoated":[19],"silicon":[20],"nitride":[21],"capacitive":[22],"micromachined":[23],"ultrasonic":[24],"transducer":[25],"(CMUT)":[26],"array":[27],"at":[28],"anti-resonant":[30],"frequency.":[31],"The":[32],"principle":[33],"this":[35,61],"chemical":[36],"detection":[37],"is":[38],"based":[39],"on":[40,53],"influence":[42],"a":[44],"physical":[45],"property":[46],"gas":[49,80,85,88],"(the":[50],"mass":[51],"density)":[52],"resonant":[55],"properties":[56],"CMUTs.":[59],"In":[60],"paper,":[62],"we":[63],"present":[64],"results":[65],"carbon":[67],"dioxide":[68],"and":[69],"hydrogen":[70],"detection.":[71,90],"Potential":[72],"applications":[73],"such":[75],"sensor":[76],"include":[77],"long":[78],"term":[79],"monitoring":[81],"or":[82],"fast":[83],"response":[84],"sensing":[86],"leakage":[89]},"counts_by_year":[{"year":2025,"cited_by_count":1},{"year":2024,"cited_by_count":1},{"year":2023,"cited_by_count":1}],"updated_date":"2026-04-17T18:11:37.981687","created_date":"2025-10-10T00:00:00"}