{"id":"https://openalex.org/W2999879216","doi":"https://doi.org/10.1109/sensors43011.2019.8956601","title":"A Dual-Axis Resonant Accelerometer Based on Electrostatic Stiffness Modulation in Epi-Seal Process","display_name":"A Dual-Axis Resonant Accelerometer Based on Electrostatic Stiffness Modulation in Epi-Seal Process","publication_year":2019,"publication_date":"2019-10-01","ids":{"openalex":"https://openalex.org/W2999879216","doi":"https://doi.org/10.1109/sensors43011.2019.8956601","mag":"2999879216"},"language":"en","primary_location":{"id":"doi:10.1109/sensors43011.2019.8956601","is_oa":false,"landing_page_url":"https://doi.org/10.1109/sensors43011.2019.8956601","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2019 IEEE SENSORS","raw_type":"proceedings-article"},"type":"article","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5038965164","display_name":"Seungyong Shin","orcid":"https://orcid.org/0000-0002-5996-3157"},"institutions":[{"id":"https://openalex.org/I130701444","display_name":"Georgia Institute of Technology","ror":"https://ror.org/01zkghx44","country_code":"US","type":"education","lineage":["https://openalex.org/I130701444"]}],"countries":["US"],"is_corresponding":true,"raw_author_name":"Seungyong Shin","raw_affiliation_strings":["Georgia Institute of Technology,Atlanta,GA,USA","Georgia Institute of Technology, Atlanta, GA, USA"],"affiliations":[{"raw_affiliation_string":"Georgia Institute of Technology,Atlanta,GA,USA","institution_ids":["https://openalex.org/I130701444"]},{"raw_affiliation_string":"Georgia Institute of Technology, Atlanta, GA, USA","institution_ids":["https://openalex.org/I130701444"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5019388756","display_name":"Haoran Wen","orcid":"https://orcid.org/0000-0003-4691-701X"},"institutions":[{"id":"https://openalex.org/I130701444","display_name":"Georgia Institute of Technology","ror":"https://ror.org/01zkghx44","country_code":"US","type":"education","lineage":["https://openalex.org/I130701444"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"Haoran Wen","raw_affiliation_strings":["Georgia Institute of Technology,Atlanta,GA,USA","Georgia Institute of Technology, Atlanta, GA, USA"],"affiliations":[{"raw_affiliation_string":"Georgia Institute of Technology,Atlanta,GA,USA","institution_ids":["https://openalex.org/I130701444"]},{"raw_affiliation_string":"Georgia Institute of Technology, Atlanta, GA, USA","institution_ids":["https://openalex.org/I130701444"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5085582223","display_name":"Hyun-Keun Kwon","orcid":"https://orcid.org/0000-0003-2570-287X"},"institutions":[{"id":"https://openalex.org/I97018004","display_name":"Stanford University","ror":"https://ror.org/00f54p054","country_code":"US","type":"education","lineage":["https://openalex.org/I97018004"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"Hyun-Keun Kwon","raw_affiliation_strings":["Stanford University,Stanford,CA,USA","Stanford University, Stanford, CA, USA"],"affiliations":[{"raw_affiliation_string":"Stanford University,Stanford,CA,USA","institution_ids":["https://openalex.org/I97018004"]},{"raw_affiliation_string":"Stanford University, Stanford, CA, USA","institution_ids":["https://openalex.org/I97018004"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5003502228","display_name":"Gabrielle D. Vukasin","orcid":"https://orcid.org/0000-0002-4301-1880"},"institutions":[{"id":"https://openalex.org/I97018004","display_name":"Stanford University","ror":"https://ror.org/00f54p054","country_code":"US","type":"education","lineage":["https://openalex.org/I97018004"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"Gabrielle D. Vukasin","raw_affiliation_strings":["Stanford University,Stanford,CA,USA","Stanford University, Stanford, CA, USA"],"affiliations":[{"raw_affiliation_string":"Stanford University,Stanford,CA,USA","institution_ids":["https://openalex.org/I97018004"]},{"raw_affiliation_string":"Stanford University, Stanford, CA, USA","institution_ids":["https://openalex.org/I97018004"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5103803864","display_name":"Thomas W. Kenny","orcid":null},"institutions":[{"id":"https://openalex.org/I97018004","display_name":"Stanford University","ror":"https://ror.org/00f54p054","country_code":"US","type":"education","lineage":["https://openalex.org/I97018004"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"Thomas W. Kenny","raw_affiliation_strings":["Stanford University,Stanford,CA,USA","Stanford University, Stanford, CA, USA"],"affiliations":[{"raw_affiliation_string":"Stanford University,Stanford,CA,USA","institution_ids":["https://openalex.org/I97018004"]},{"raw_affiliation_string":"Stanford University, Stanford, CA, USA","institution_ids":["https://openalex.org/I97018004"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5081523432","display_name":"Farrokh Ayazi","orcid":"https://orcid.org/0000-0002-4539-7393"},"institutions":[{"id":"https://openalex.org/I130701444","display_name":"Georgia Institute of Technology","ror":"https://ror.org/01zkghx44","country_code":"US","type":"education","lineage":["https://openalex.org/I130701444"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"Farrokh Ayazi","raw_affiliation_strings":["Georgia Institute of Technology,Atlanta,GA,USA","Georgia Institute of Technology, Atlanta, GA, USA"],"affiliations":[{"raw_affiliation_string":"Georgia Institute of Technology,Atlanta,GA,USA","institution_ids":["https://openalex.org/I130701444"]},{"raw_affiliation_string":"Georgia Institute of Technology, Atlanta, GA, USA","institution_ids":["https://openalex.org/I130701444"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":6,"corresponding_author_ids":["https://openalex.org/A5038965164"],"corresponding_institution_ids":["https://openalex.org/I130701444"],"apc_list":null,"apc_paid":null,"fwci":0.726,"has_fulltext":false,"cited_by_count":12,"citation_normalized_percentile":{"value":0.73019878,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":89,"max":97},"biblio":{"volume":"2019","issue":null,"first_page":"1","last_page":"4"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":1.0,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":1.0,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11449","display_name":"Mechanical and Optical Resonators","score":0.9998999834060669,"subfield":{"id":"https://openalex.org/subfields/3107","display_name":"Atomic and Molecular Physics, and Optics"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T13885","display_name":"Geophysics and Sensor Technology","score":0.9997000098228455,"subfield":{"id":"https://openalex.org/subfields/2212","display_name":"Ocean Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/accelerometer","display_name":"Accelerometer","score":0.8297574520111084},{"id":"https://openalex.org/keywords/proof-mass","display_name":"Proof mass","score":0.6614890694618225},{"id":"https://openalex.org/keywords/resonator","display_name":"Resonator","score":0.6489588022232056},{"id":"https://openalex.org/keywords/sensitivity","display_name":"Sensitivity (control systems)","score":0.5881732106208801},{"id":"https://openalex.org/keywords/bandwidth","display_name":"Bandwidth (computing)","score":0.514698326587677},{"id":"https://openalex.org/keywords/chip","display_name":"Chip","score":0.4862062335014343},{"id":"https://openalex.org/keywords/materials-science","display_name":"Materials science","score":0.42234036326408386},{"id":"https://openalex.org/keywords/modulation","display_name":"Modulation (music)","score":0.4189998507499695},{"id":"https://openalex.org/keywords/stiffness","display_name":"Stiffness","score":0.4147375226020813},{"id":"https://openalex.org/keywords/physics","display_name":"Physics","score":0.3878766894340515},{"id":"https://openalex.org/keywords/optoelectronics","display_name":"Optoelectronics","score":0.3744301199913025},{"id":"https://openalex.org/keywords/electronic-engineering","display_name":"Electronic engineering","score":0.3679487109184265},{"id":"https://openalex.org/keywords/acoustics","display_name":"Acoustics","score":0.3592453598976135},{"id":"https://openalex.org/keywords/computer-science","display_name":"Computer science","score":0.2721666097640991},{"id":"https://openalex.org/keywords/electrical-engineering","display_name":"Electrical engineering","score":0.2699521481990814},{"id":"https://openalex.org/keywords/engineering","display_name":"Engineering","score":0.22541159391403198},{"id":"https://openalex.org/keywords/telecommunications","display_name":"Telecommunications","score":0.08929920196533203}],"concepts":[{"id":"https://openalex.org/C89805583","wikidata":"https://www.wikidata.org/wiki/Q192940","display_name":"Accelerometer","level":2,"score":0.8297574520111084},{"id":"https://openalex.org/C2780330379","wikidata":"https://www.wikidata.org/wiki/Q16990023","display_name":"Proof mass","level":3,"score":0.6614890694618225},{"id":"https://openalex.org/C97126364","wikidata":"https://www.wikidata.org/wiki/Q349669","display_name":"Resonator","level":2,"score":0.6489588022232056},{"id":"https://openalex.org/C21200559","wikidata":"https://www.wikidata.org/wiki/Q7451068","display_name":"Sensitivity (control systems)","level":2,"score":0.5881732106208801},{"id":"https://openalex.org/C2776257435","wikidata":"https://www.wikidata.org/wiki/Q1576430","display_name":"Bandwidth (computing)","level":2,"score":0.514698326587677},{"id":"https://openalex.org/C165005293","wikidata":"https://www.wikidata.org/wiki/Q1074500","display_name":"Chip","level":2,"score":0.4862062335014343},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.42234036326408386},{"id":"https://openalex.org/C123079801","wikidata":"https://www.wikidata.org/wiki/Q750240","display_name":"Modulation (music)","level":2,"score":0.4189998507499695},{"id":"https://openalex.org/C2779372316","wikidata":"https://www.wikidata.org/wiki/Q569057","display_name":"Stiffness","level":2,"score":0.4147375226020813},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.3878766894340515},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.3744301199913025},{"id":"https://openalex.org/C24326235","wikidata":"https://www.wikidata.org/wiki/Q126095","display_name":"Electronic engineering","level":1,"score":0.3679487109184265},{"id":"https://openalex.org/C24890656","wikidata":"https://www.wikidata.org/wiki/Q82811","display_name":"Acoustics","level":1,"score":0.3592453598976135},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.2721666097640991},{"id":"https://openalex.org/C119599485","wikidata":"https://www.wikidata.org/wiki/Q43035","display_name":"Electrical engineering","level":1,"score":0.2699521481990814},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.22541159391403198},{"id":"https://openalex.org/C76155785","wikidata":"https://www.wikidata.org/wiki/Q418","display_name":"Telecommunications","level":1,"score":0.08929920196533203},{"id":"https://openalex.org/C62520636","wikidata":"https://www.wikidata.org/wiki/Q944","display_name":"Quantum mechanics","level":1,"score":0.0},{"id":"https://openalex.org/C159985019","wikidata":"https://www.wikidata.org/wiki/Q181790","display_name":"Composite material","level":1,"score":0.0}],"mesh":[],"locations_count":2,"locations":[{"id":"doi:10.1109/sensors43011.2019.8956601","is_oa":false,"landing_page_url":"https://doi.org/10.1109/sensors43011.2019.8956601","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2019 IEEE SENSORS","raw_type":"proceedings-article"},{"id":"mag:3043571586","is_oa":false,"landing_page_url":"https://jglobal.jst.go.jp/en/detail?JGLOBAL_ID=202002291600203728","pdf_url":null,"source":{"id":"https://openalex.org/S4306512817","display_name":"IEEE Conference Proceedings","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"host_organization":null,"host_organization_name":null,"host_organization_lineage":[],"host_organization_lineage_names":[],"type":"conference"},"license":null,"license_id":null,"version":null,"is_accepted":false,"is_published":null,"raw_source_name":"IEEE Conference Proceedings","raw_type":null}],"best_oa_location":null,"sustainable_development_goals":[{"score":0.7200000286102295,"id":"https://metadata.un.org/sdg/7","display_name":"Affordable and clean energy"}],"awards":[],"funders":[],"has_content":{"grobid_xml":false,"pdf":false},"content_urls":null,"referenced_works_count":14,"referenced_works":["https://openalex.org/W1487811479","https://openalex.org/W2015255031","https://openalex.org/W2060197691","https://openalex.org/W2188675559","https://openalex.org/W2484462930","https://openalex.org/W2592121206","https://openalex.org/W2793246642","https://openalex.org/W2805219221","https://openalex.org/W2888339933","https://openalex.org/W2899035624","https://openalex.org/W2914644111","https://openalex.org/W2969912479","https://openalex.org/W6752243400","https://openalex.org/W6766977445"],"related_works":["https://openalex.org/W4245472411","https://openalex.org/W2045042928","https://openalex.org/W4379746342","https://openalex.org/W2145387305","https://openalex.org/W2006014592","https://openalex.org/W2299769077","https://openalex.org/W1980657915","https://openalex.org/W2546640304","https://openalex.org/W3088783532","https://openalex.org/W2591925013"],"abstract_inverted_index":{"We":[0],"report":[1],"on":[2,56],"the":[3,29,37,53,95,106,109],"implementation":[4,99],"of":[5,28,59,72,94,100,108],"a":[6,69],"novel":[7],"vacuum-encapsulated":[8],"dual-axis":[9,25],"resonant":[10],"accelerometer":[11,80],"utilizing":[12],"electrostatic":[13],"stiffness":[14],"modulation.":[15],"Novel":[16],"flexure":[17],"designs":[18],"are":[19],"used":[20],"to":[21,31,113],"enable":[22],"fully-decoupled":[23],"in-plane":[24],"translational":[26,38],"motions":[27],"proof-mass":[30],"achieve":[32],"low":[33,76],"cross-axis":[34,77],"sensitivity":[35],"with":[36,75,84,111],"mode":[39],"frequencies":[40],"above":[41],"20":[42],"kHz":[43],"for":[44,117],"high":[45,82],"bandwidth":[46],"applications.":[47],"Differential":[48],"frequency":[49,57],"readout":[50],"scheme":[51],"mitigates":[52],"temperature":[54],"effects":[55],"stability":[58],"resonators":[60],"and":[61,87,98],"reduces":[62],"off-axis":[63],"sensitivity.":[64,78],"The":[65,79],"fabricated":[66],"device":[67],"measures":[68],"scale":[70],"factor":[71],"22Hz/g":[73],"(119ppm/g)":[74],"demonstrates":[81],"performance":[83,107,116],"18\u03bcg/\u221aHz":[85],"VRW":[86],"27\u03bcg":[88],"BI":[89],"in":[90],"ambient":[91],"environment.":[92],"Optimization":[93],"oscillator":[96],"circuits":[97],"chip-level":[101],"ovenization":[102],"can":[103],"further":[104],"improve":[105],"design,":[110],"potentials":[112],"reach":[114],"sub-\u03bcg":[115],"emerging":[118],"high-bandwidth":[119],"application.":[120]},"counts_by_year":[{"year":2025,"cited_by_count":3},{"year":2024,"cited_by_count":2},{"year":2023,"cited_by_count":1},{"year":2022,"cited_by_count":1},{"year":2021,"cited_by_count":1},{"year":2020,"cited_by_count":4}],"updated_date":"2026-04-04T16:13:02.066488","created_date":"2025-10-10T00:00:00"}