{"id":"https://openalex.org/W3000356907","doi":"https://doi.org/10.1109/sensors43011.2019.8956573","title":"Detection of Low Concentration NO<sub>2</sub> gas Using Si FET-type Gas Sensor with Localized Micro-heater for Low Power Consumption","display_name":"Detection of Low Concentration NO<sub>2</sub> gas Using Si FET-type Gas Sensor with Localized Micro-heater for Low Power Consumption","publication_year":2019,"publication_date":"2019-10-01","ids":{"openalex":"https://openalex.org/W3000356907","doi":"https://doi.org/10.1109/sensors43011.2019.8956573","mag":"3000356907"},"language":"en","primary_location":{"id":"doi:10.1109/sensors43011.2019.8956573","is_oa":false,"landing_page_url":"https://doi.org/10.1109/sensors43011.2019.8956573","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2019 IEEE SENSORS","raw_type":"proceedings-article"},"type":"article","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5057392027","display_name":"Gyuweon Jung","orcid":"https://orcid.org/0000-0003-0357-0933"},"institutions":[{"id":"https://openalex.org/I139264467","display_name":"Seoul National University","ror":"https://ror.org/04h9pn542","country_code":"KR","type":"education","lineage":["https://openalex.org/I139264467"]}],"countries":["KR"],"is_corresponding":false,"raw_author_name":"Gyuweon Jung","raw_affiliation_strings":["Seoul National University,Department of Electrical and Computer Engineering, and Inter-University Semiconductor Research Center,Seoul,Korea,08826","Department of Electrical and Computer Engineering, and Inter-University Semiconductor Research Center, Seoul National University, Seoul, Korea"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Seoul National University,Department of Electrical and Computer Engineering, and Inter-University Semiconductor Research Center,Seoul,Korea,08826","institution_ids":["https://openalex.org/I139264467"]},{"raw_affiliation_string":"Department of Electrical and Computer Engineering, and Inter-University Semiconductor Research Center, Seoul National University, Seoul, Korea","institution_ids":["https://openalex.org/I139264467"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5101623357","display_name":"Yoonki Hong","orcid":"https://orcid.org/0000-0002-4249-143X"},"institutions":[{"id":"https://openalex.org/I139264467","display_name":"Seoul National University","ror":"https://ror.org/04h9pn542","country_code":"KR","type":"education","lineage":["https://openalex.org/I139264467"]}],"countries":["KR"],"is_corresponding":false,"raw_author_name":"Yoonki Hong","raw_affiliation_strings":["Seoul National University,Department of Electrical and Computer Engineering, and Inter-University Semiconductor Research Center,Seoul,Korea,08826","Department of Electrical and Computer Engineering, and Inter-University Semiconductor Research Center, Seoul National University, Seoul, Korea"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Seoul National University,Department of Electrical and Computer Engineering, and Inter-University Semiconductor Research Center,Seoul,Korea,08826","institution_ids":["https://openalex.org/I139264467"]},{"raw_affiliation_string":"Department of Electrical and Computer Engineering, and Inter-University Semiconductor Research Center, Seoul National University, Seoul, Korea","institution_ids":["https://openalex.org/I139264467"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5046403430","display_name":"Seongbin Hong","orcid":"https://orcid.org/0000-0002-6719-7608"},"institutions":[{"id":"https://openalex.org/I139264467","display_name":"Seoul National University","ror":"https://ror.org/04h9pn542","country_code":"KR","type":"education","lineage":["https://openalex.org/I139264467"]}],"countries":["KR"],"is_corresponding":false,"raw_author_name":"Seongbin Hong","raw_affiliation_strings":["Seoul National University,Department of Electrical and Computer Engineering, and Inter-University Semiconductor Research Center,Seoul,Korea,08826","Department of Electrical and Computer Engineering, and Inter-University Semiconductor Research Center, Seoul National University, Seoul, Korea"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Seoul National University,Department of Electrical and Computer Engineering, and Inter-University Semiconductor Research Center,Seoul,Korea,08826","institution_ids":["https://openalex.org/I139264467"]},{"raw_affiliation_string":"Department of Electrical and Computer Engineering, and Inter-University Semiconductor Research Center, Seoul National University, Seoul, Korea","institution_ids":["https://openalex.org/I139264467"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5003092782","display_name":"Yujeong Jeong","orcid":"https://orcid.org/0009-0001-4462-0266"},"institutions":[{"id":"https://openalex.org/I139264467","display_name":"Seoul National University","ror":"https://ror.org/04h9pn542","country_code":"KR","type":"education","lineage":["https://openalex.org/I139264467"]}],"countries":["KR"],"is_corresponding":false,"raw_author_name":"Yujeong Jeong","raw_affiliation_strings":["Seoul National University,Department of Electrical and Computer Engineering, and Inter-University Semiconductor Research Center,Seoul,Korea,08826","Department of Electrical and Computer Engineering, and Inter-University Semiconductor Research Center, Seoul National University, Seoul, Korea"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Seoul National University,Department of Electrical and Computer Engineering, and Inter-University Semiconductor Research Center,Seoul,Korea,08826","institution_ids":["https://openalex.org/I139264467"]},{"raw_affiliation_string":"Department of Electrical and Computer Engineering, and Inter-University Semiconductor Research Center, Seoul National University, Seoul, Korea","institution_ids":["https://openalex.org/I139264467"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5003829010","display_name":"Wonjun Shin","orcid":"https://orcid.org/0000-0001-9122-2458"},"institutions":[{"id":"https://openalex.org/I139264467","display_name":"Seoul National University","ror":"https://ror.org/04h9pn542","country_code":"KR","type":"education","lineage":["https://openalex.org/I139264467"]}],"countries":["KR"],"is_corresponding":false,"raw_author_name":"Wonjun Shin","raw_affiliation_strings":["Seoul National University,Department of Electrical and Computer Engineering, and Inter-University Semiconductor Research Center,Seoul,Korea,08826","Department of Electrical and Computer Engineering, and Inter-University Semiconductor Research Center, Seoul National University, Seoul, Korea"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Seoul National University,Department of Electrical and Computer Engineering, and Inter-University Semiconductor Research Center,Seoul,Korea,08826","institution_ids":["https://openalex.org/I139264467"]},{"raw_affiliation_string":"Department of Electrical and Computer Engineering, and Inter-University Semiconductor Research Center, Seoul National University, Seoul, Korea","institution_ids":["https://openalex.org/I139264467"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5100330080","display_name":"Jinwoo Park","orcid":"https://orcid.org/0000-0001-9074-2152"},"institutions":[{"id":"https://openalex.org/I139264467","display_name":"Seoul National University","ror":"https://ror.org/04h9pn542","country_code":"KR","type":"education","lineage":["https://openalex.org/I139264467"]}],"countries":["KR"],"is_corresponding":false,"raw_author_name":"Jinwoo Park","raw_affiliation_strings":["Seoul National University,Department of Electrical and Computer Engineering, and Inter-University Semiconductor Research Center,Seoul,Korea,08826","Department of Electrical and Computer Engineering, and Inter-University Semiconductor Research Center, Seoul National University, Seoul, Korea"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Seoul National University,Department of Electrical and Computer Engineering, and Inter-University Semiconductor Research Center,Seoul,Korea,08826","institution_ids":["https://openalex.org/I139264467"]},{"raw_affiliation_string":"Department of Electrical and Computer Engineering, and Inter-University Semiconductor Research Center, Seoul National University, Seoul, Korea","institution_ids":["https://openalex.org/I139264467"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5066143701","display_name":"Jung\u2010Kyu Lee","orcid":"https://orcid.org/0000-0001-5060-7255"},"institutions":[{"id":"https://openalex.org/I139264467","display_name":"Seoul National University","ror":"https://ror.org/04h9pn542","country_code":"KR","type":"education","lineage":["https://openalex.org/I139264467"]}],"countries":["KR"],"is_corresponding":false,"raw_author_name":"Jungkyu Lee","raw_affiliation_strings":["Seoul National University,Department of Electrical and Computer Engineering, and Inter-University Semiconductor Research Center,Seoul,Korea,08826","Department of Electrical and Computer Engineering, and Inter-University Semiconductor Research Center, Seoul National University, Seoul, Korea"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Seoul National University,Department of Electrical and Computer Engineering, and Inter-University Semiconductor Research Center,Seoul,Korea,08826","institution_ids":["https://openalex.org/I139264467"]},{"raw_affiliation_string":"Department of Electrical and Computer Engineering, and Inter-University Semiconductor Research Center, Seoul National University, Seoul, Korea","institution_ids":["https://openalex.org/I139264467"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5113880569","display_name":"Dongkyu Jang","orcid":"https://orcid.org/0009-0007-8770-2652"},"institutions":[{"id":"https://openalex.org/I139264467","display_name":"Seoul National University","ror":"https://ror.org/04h9pn542","country_code":"KR","type":"education","lineage":["https://openalex.org/I139264467"]}],"countries":["KR"],"is_corresponding":false,"raw_author_name":"Dongkyu Jang","raw_affiliation_strings":["Seoul National University,Department of Electrical and Computer Engineering, and Inter-University Semiconductor Research Center,Seoul,Korea,08826","Department of Electrical and Computer Engineering, and Inter-University Semiconductor Research Center, Seoul National University, Seoul, Korea"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Seoul National University,Department of Electrical and Computer Engineering, and Inter-University Semiconductor Research Center,Seoul,Korea,08826","institution_ids":["https://openalex.org/I139264467"]},{"raw_affiliation_string":"Department of Electrical and Computer Engineering, and Inter-University Semiconductor Research Center, Seoul National University, Seoul, Korea","institution_ids":["https://openalex.org/I139264467"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5109951429","display_name":"Jong-Ho Lee","orcid":"https://orcid.org/0000-0003-0357-0933"},"institutions":[{"id":"https://openalex.org/I139264467","display_name":"Seoul National University","ror":"https://ror.org/04h9pn542","country_code":"KR","type":"education","lineage":["https://openalex.org/I139264467"]}],"countries":["KR"],"is_corresponding":false,"raw_author_name":"Jong-Ho Lee","raw_affiliation_strings":["Seoul National University,Department of Electrical and Computer Engineering, and Inter-University Semiconductor Research Center,Seoul,Korea,08826","Department of Electrical and Computer Engineering, and Inter-University Semiconductor Research Center, Seoul National University, Seoul, Korea"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Seoul National University,Department of Electrical and Computer Engineering, and Inter-University Semiconductor Research Center,Seoul,Korea,08826","institution_ids":["https://openalex.org/I139264467"]},{"raw_affiliation_string":"Department of Electrical and Computer Engineering, and Inter-University Semiconductor Research Center, Seoul National University, Seoul, Korea","institution_ids":["https://openalex.org/I139264467"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":9,"corresponding_author_ids":[],"corresponding_institution_ids":[],"apc_list":null,"apc_paid":null,"fwci":0.2422,"has_fulltext":false,"cited_by_count":3,"citation_normalized_percentile":{"value":0.57961007,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":89,"max":94},"biblio":{"volume":null,"issue":null,"first_page":"1","last_page":"4"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10461","display_name":"Gas Sensing Nanomaterials and Sensors","score":1.0,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10461","display_name":"Gas Sensing Nanomaterials and Sensors","score":1.0,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11667","display_name":"Advanced Chemical Sensor Technologies","score":0.9998000264167786,"subfield":{"id":"https://openalex.org/subfields/2204","display_name":"Biomedical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11472","display_name":"Analytical Chemistry and Sensors","score":0.9988999962806702,"subfield":{"id":"https://openalex.org/subfields/1502","display_name":"Bioengineering"},"field":{"id":"https://openalex.org/fields/15","display_name":"Chemical Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/analytical-chemistry","display_name":"Analytical Chemistry (journal)","score":0.4415808320045471},{"id":"https://openalex.org/keywords/power-consumption","display_name":"Power consumption","score":0.4236203134059906},{"id":"https://openalex.org/keywords/materials-science","display_name":"Materials science","score":0.3820182979106903},{"id":"https://openalex.org/keywords/physics","display_name":"Physics","score":0.32940056920051575},{"id":"https://openalex.org/keywords/chemistry","display_name":"Chemistry","score":0.24780943989753723},{"id":"https://openalex.org/keywords/power","display_name":"Power (physics)","score":0.22018930315971375},{"id":"https://openalex.org/keywords/organic-chemistry","display_name":"Organic chemistry","score":0.14939150214195251},{"id":"https://openalex.org/keywords/thermodynamics","display_name":"Thermodynamics","score":0.1273098587989807}],"concepts":[{"id":"https://openalex.org/C113196181","wikidata":"https://www.wikidata.org/wiki/Q485223","display_name":"Analytical Chemistry (journal)","level":2,"score":0.4415808320045471},{"id":"https://openalex.org/C2984118289","wikidata":"https://www.wikidata.org/wiki/Q29954","display_name":"Power consumption","level":3,"score":0.4236203134059906},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.3820182979106903},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.32940056920051575},{"id":"https://openalex.org/C185592680","wikidata":"https://www.wikidata.org/wiki/Q2329","display_name":"Chemistry","level":0,"score":0.24780943989753723},{"id":"https://openalex.org/C163258240","wikidata":"https://www.wikidata.org/wiki/Q25342","display_name":"Power (physics)","level":2,"score":0.22018930315971375},{"id":"https://openalex.org/C178790620","wikidata":"https://www.wikidata.org/wiki/Q11351","display_name":"Organic chemistry","level":1,"score":0.14939150214195251},{"id":"https://openalex.org/C97355855","wikidata":"https://www.wikidata.org/wiki/Q11473","display_name":"Thermodynamics","level":1,"score":0.1273098587989807}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1109/sensors43011.2019.8956573","is_oa":false,"landing_page_url":"https://doi.org/10.1109/sensors43011.2019.8956573","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2019 IEEE SENSORS","raw_type":"proceedings-article"}],"best_oa_location":null,"sustainable_development_goals":[{"score":0.8999999761581421,"display_name":"Affordable and clean energy","id":"https://metadata.un.org/sdg/7"}],"awards":[],"funders":[],"has_content":{"pdf":false,"grobid_xml":false},"content_urls":null,"referenced_works_count":22,"referenced_works":["https://openalex.org/W316218788","https://openalex.org/W1493662694","https://openalex.org/W1649617132","https://openalex.org/W1984030187","https://openalex.org/W1992378413","https://openalex.org/W2018803765","https://openalex.org/W2039779415","https://openalex.org/W2046081994","https://openalex.org/W2092411913","https://openalex.org/W2165899560","https://openalex.org/W2256605848","https://openalex.org/W2289289769","https://openalex.org/W2319050221","https://openalex.org/W2579772167","https://openalex.org/W2585992332","https://openalex.org/W2755535570","https://openalex.org/W2781764043","https://openalex.org/W2796664303","https://openalex.org/W2891567531","https://openalex.org/W2912493307","https://openalex.org/W6629714899","https://openalex.org/W6636820726"],"related_works":["https://openalex.org/W4391375266","https://openalex.org/W2935759653","https://openalex.org/W3105167352","https://openalex.org/W54078636","https://openalex.org/W2954470139","https://openalex.org/W1501425562","https://openalex.org/W2902782467","https://openalex.org/W3084825885","https://openalex.org/W2298861036","https://openalex.org/W2271181815"],"abstract_inverted_index":{"The":[0,49,85],"sensing":[1,24,55,110],"characteristics":[2,56,111],"of":[3,64,75,95,127],"nitrogen":[4],"dioxide":[5],"(NO":[6],"<sub":[7,31,35,51,68,78,97],"xmlns:mml=\"http://www.w3.org/1998/Math/MathML\"":[8,32,36,52,69,79,98],"xmlns:xlink=\"http://www.w3.org/1999/xlink\">2</sub>":[9,33,53,80,99],")":[10,38,71],"gas":[11,15,54,81,100],"in":[12,91],"Si":[13],"FET-type":[14],"sensor":[16,87],"using":[17,112],"localized":[18],"micro-heater":[19,66,123],"are":[20,57],"investigated.":[21],"As":[22],"the":[23,61,65,73,76,109,113,122],"material,":[25],"a":[26,41],"12-nm-thick":[27],"indium":[28],"oxide":[29],"(In":[30],"O":[34],"xmlns:xlink=\"http://www.w3.org/1999/xlink\">3</sub>":[37],"deposited":[39],"by":[40],"radio":[42],"frequency":[43],"magnetron":[44],"sputtering":[45],"method":[46],"is":[47,119],"used.":[48],"NO":[50,77,96],"examined":[58],"while":[59,116],"varying":[60],"applied":[62,120],"voltage":[63],"(V":[67],"xmlns:xlink=\"http://www.w3.org/1999/xlink\">H</sub>":[70],"and":[72,103],"concentration":[74,94],"at":[82],"room":[83],"temperature.":[84],"fabricated":[86],"shows":[88,104],"excellent":[89],"performance":[90],"detecting":[92],"low":[93],"(25":[101],"ppb)":[102],"that":[105],"it":[106],"can":[107],"improve":[108],"pre-bias":[114],"scheme":[115],"2":[117],"V":[118],"to":[121],"with":[124],"50":[125],"%":[126],"duty":[128],"cycle":[129],"which":[130],"only":[131],"consumes":[132],"~0.84":[133],"mW.":[134]},"counts_by_year":[{"year":2024,"cited_by_count":1},{"year":2021,"cited_by_count":1},{"year":2020,"cited_by_count":1}],"updated_date":"2026-06-11T09:08:48.828518","created_date":"2025-10-10T00:00:00"}