{"id":"https://openalex.org/W3000222671","doi":"https://doi.org/10.1109/sensors43011.2019.8956517","title":"Dynamic response of VO<sub>2</sub> mesa based GaN microcantilevers for sensing applications","display_name":"Dynamic response of VO<sub>2</sub> mesa based GaN microcantilevers for sensing applications","publication_year":2019,"publication_date":"2019-10-01","ids":{"openalex":"https://openalex.org/W3000222671","doi":"https://doi.org/10.1109/sensors43011.2019.8956517","mag":"3000222671"},"language":"en","primary_location":{"id":"doi:10.1109/sensors43011.2019.8956517","is_oa":false,"landing_page_url":"https://doi.org/10.1109/sensors43011.2019.8956517","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2019 IEEE SENSORS","raw_type":"proceedings-article"},"type":"article","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5020835471","display_name":"Durga Gajula","orcid":"https://orcid.org/0000-0001-9270-7334"},"institutions":[{"id":"https://openalex.org/I8078737","display_name":"Clemson University","ror":"https://ror.org/037s24f05","country_code":"US","type":"education","lineage":["https://openalex.org/I8078737"]}],"countries":["US"],"is_corresponding":true,"raw_author_name":"Durga Gajula","raw_affiliation_strings":["Clemson University,Holcombe Department of Electrical and Computer Engineering,Clemson,SC,USA,29634","Holcombe Department of Electrical and Computer Engineering, Clemson University, Clemson, SC, USA"],"affiliations":[{"raw_affiliation_string":"Clemson University,Holcombe Department of Electrical and Computer Engineering,Clemson,SC,USA,29634","institution_ids":["https://openalex.org/I8078737"]},{"raw_affiliation_string":"Holcombe Department of Electrical and Computer Engineering, Clemson University, Clemson, SC, USA","institution_ids":["https://openalex.org/I8078737"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5054464569","display_name":"Ferhat Bayram","orcid":"https://orcid.org/0000-0003-0659-3524"},"institutions":[{"id":"https://openalex.org/I8078737","display_name":"Clemson University","ror":"https://ror.org/037s24f05","country_code":"US","type":"education","lineage":["https://openalex.org/I8078737"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"Ferhat Bayram","raw_affiliation_strings":["Clemson University,Holcombe Department of Electrical and Computer Engineering,Clemson,SC,USA,29634","Holcombe Department of Electrical and Computer Engineering, Clemson University, Clemson, SC, USA"],"affiliations":[{"raw_affiliation_string":"Clemson University,Holcombe Department of Electrical and Computer Engineering,Clemson,SC,USA,29634","institution_ids":["https://openalex.org/I8078737"]},{"raw_affiliation_string":"Holcombe Department of Electrical and Computer Engineering, Clemson University, Clemson, SC, USA","institution_ids":["https://openalex.org/I8078737"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5016733334","display_name":"Ifat Jahangir","orcid":"https://orcid.org/0000-0002-2489-207X"},"institutions":[{"id":"https://openalex.org/I155781252","display_name":"University of South Carolina","ror":"https://ror.org/02b6qw903","country_code":"US","type":"education","lineage":["https://openalex.org/I155781252"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"Ifat Jahangir","raw_affiliation_strings":["University of South Carolina,Department of Electrical Engineering,Columbia,SC,USA,29208","Department of Electrical Engineering, University of South Carolina, Columbia, SC, USA"],"affiliations":[{"raw_affiliation_string":"University of South Carolina,Department of Electrical Engineering,Columbia,SC,USA,29208","institution_ids":["https://openalex.org/I155781252"]},{"raw_affiliation_string":"Department of Electrical Engineering, University of South Carolina, Columbia, SC, USA","institution_ids":["https://openalex.org/I155781252"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5049540630","display_name":"Digangana Khan","orcid":"https://orcid.org/0000-0002-3239-5129"},"institutions":[{"id":"https://openalex.org/I8078737","display_name":"Clemson University","ror":"https://ror.org/037s24f05","country_code":"US","type":"education","lineage":["https://openalex.org/I8078737"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"Digangana Khan","raw_affiliation_strings":["Clemson University,Holcombe Department of Electrical and Computer Engineering,Clemson,SC,USA,29634","Holcombe Department of Electrical and Computer Engineering, Clemson University, Clemson, SC, USA"],"affiliations":[{"raw_affiliation_string":"Clemson University,Holcombe Department of Electrical and Computer Engineering,Clemson,SC,USA,29634","institution_ids":["https://openalex.org/I8078737"]},{"raw_affiliation_string":"Holcombe Department of Electrical and Computer Engineering, Clemson University, Clemson, SC, USA","institution_ids":["https://openalex.org/I8078737"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5035874660","display_name":"Goutam Koley","orcid":null},"institutions":[{"id":"https://openalex.org/I8078737","display_name":"Clemson University","ror":"https://ror.org/037s24f05","country_code":"US","type":"education","lineage":["https://openalex.org/I8078737"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"Goutam Koley","raw_affiliation_strings":["Clemson University,Holcombe Department of Electrical and Computer Engineering,Clemson,SC,USA,29634","Holcombe Department of Electrical and Computer Engineering, Clemson University, Clemson, SC, USA"],"affiliations":[{"raw_affiliation_string":"Clemson University,Holcombe Department of Electrical and Computer Engineering,Clemson,SC,USA,29634","institution_ids":["https://openalex.org/I8078737"]},{"raw_affiliation_string":"Holcombe Department of Electrical and Computer Engineering, Clemson University, Clemson, SC, USA","institution_ids":["https://openalex.org/I8078737"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":5,"corresponding_author_ids":["https://openalex.org/A5020835471"],"corresponding_institution_ids":["https://openalex.org/I8078737"],"apc_list":null,"apc_paid":null,"fwci":0.6817,"has_fulltext":false,"cited_by_count":6,"citation_normalized_percentile":{"value":0.65900681,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":89,"max":97},"biblio":{"volume":null,"issue":null,"first_page":"1","last_page":"4"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T11128","display_name":"Transition Metal Oxide Nanomaterials","score":0.9998000264167786,"subfield":{"id":"https://openalex.org/subfields/2507","display_name":"Polymers and Plastics"},"field":{"id":"https://openalex.org/fields/25","display_name":"Materials Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T11128","display_name":"Transition Metal Oxide Nanomaterials","score":0.9998000264167786,"subfield":{"id":"https://openalex.org/subfields/2507","display_name":"Polymers and Plastics"},"field":{"id":"https://openalex.org/fields/25","display_name":"Materials Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10461","display_name":"Gas Sensing Nanomaterials and Sensors","score":0.9975000023841858,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10205","display_name":"Advanced Fiber Optic Sensors","score":0.989300012588501,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/piezoresistive-effect","display_name":"Piezoresistive effect","score":0.8439068794250488},{"id":"https://openalex.org/keywords/materials-science","display_name":"Materials science","score":0.7695465087890625},{"id":"https://openalex.org/keywords/cantilever","display_name":"Cantilever","score":0.705919086933136},{"id":"https://openalex.org/keywords/deflection","display_name":"Deflection (physics)","score":0.7046664953231812},{"id":"https://openalex.org/keywords/optoelectronics","display_name":"Optoelectronics","score":0.5537548661231995},{"id":"https://openalex.org/keywords/transducer","display_name":"Transducer","score":0.5051267743110657},{"id":"https://openalex.org/keywords/insulator","display_name":"Insulator (electricity)","score":0.45297637581825256},{"id":"https://openalex.org/keywords/excitation","display_name":"Excitation","score":0.4527074694633484},{"id":"https://openalex.org/keywords/torr","display_name":"Torr","score":0.43386292457580566},{"id":"https://openalex.org/keywords/resonator","display_name":"Resonator","score":0.42497751116752625},{"id":"https://openalex.org/keywords/acoustics","display_name":"Acoustics","score":0.30978238582611084},{"id":"https://openalex.org/keywords/optics","display_name":"Optics","score":0.2694757580757141},{"id":"https://openalex.org/keywords/electrical-engineering","display_name":"Electrical engineering","score":0.17579162120819092},{"id":"https://openalex.org/keywords/composite-material","display_name":"Composite material","score":0.15078213810920715},{"id":"https://openalex.org/keywords/physics","display_name":"Physics","score":0.08140882849693298}],"concepts":[{"id":"https://openalex.org/C198490522","wikidata":"https://www.wikidata.org/wiki/Q1932915","display_name":"Piezoresistive effect","level":2,"score":0.8439068794250488},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.7695465087890625},{"id":"https://openalex.org/C141354745","wikidata":"https://www.wikidata.org/wiki/Q17227","display_name":"Cantilever","level":2,"score":0.705919086933136},{"id":"https://openalex.org/C2781355719","wikidata":"https://www.wikidata.org/wiki/Q2080698","display_name":"Deflection (physics)","level":2,"score":0.7046664953231812},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.5537548661231995},{"id":"https://openalex.org/C56318395","wikidata":"https://www.wikidata.org/wiki/Q215928","display_name":"Transducer","level":2,"score":0.5051267743110657},{"id":"https://openalex.org/C212702","wikidata":"https://www.wikidata.org/wiki/Q178150","display_name":"Insulator (electricity)","level":2,"score":0.45297637581825256},{"id":"https://openalex.org/C83581075","wikidata":"https://www.wikidata.org/wiki/Q1361503","display_name":"Excitation","level":2,"score":0.4527074694633484},{"id":"https://openalex.org/C30646810","wikidata":"https://www.wikidata.org/wiki/Q185648","display_name":"Torr","level":2,"score":0.43386292457580566},{"id":"https://openalex.org/C97126364","wikidata":"https://www.wikidata.org/wiki/Q349669","display_name":"Resonator","level":2,"score":0.42497751116752625},{"id":"https://openalex.org/C24890656","wikidata":"https://www.wikidata.org/wiki/Q82811","display_name":"Acoustics","level":1,"score":0.30978238582611084},{"id":"https://openalex.org/C120665830","wikidata":"https://www.wikidata.org/wiki/Q14620","display_name":"Optics","level":1,"score":0.2694757580757141},{"id":"https://openalex.org/C119599485","wikidata":"https://www.wikidata.org/wiki/Q43035","display_name":"Electrical engineering","level":1,"score":0.17579162120819092},{"id":"https://openalex.org/C159985019","wikidata":"https://www.wikidata.org/wiki/Q181790","display_name":"Composite material","level":1,"score":0.15078213810920715},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.08140882849693298},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.0},{"id":"https://openalex.org/C97355855","wikidata":"https://www.wikidata.org/wiki/Q11473","display_name":"Thermodynamics","level":1,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1109/sensors43011.2019.8956517","is_oa":false,"landing_page_url":"https://doi.org/10.1109/sensors43011.2019.8956517","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2019 IEEE SENSORS","raw_type":"proceedings-article"}],"best_oa_location":null,"sustainable_development_goals":[],"awards":[],"funders":[],"has_content":{"grobid_xml":false,"pdf":false},"content_urls":null,"referenced_works_count":17,"referenced_works":["https://openalex.org/W1969052259","https://openalex.org/W1969488369","https://openalex.org/W1970287347","https://openalex.org/W1981313925","https://openalex.org/W1991413152","https://openalex.org/W2001485074","https://openalex.org/W2010045670","https://openalex.org/W2026404350","https://openalex.org/W2032729136","https://openalex.org/W2059618414","https://openalex.org/W2065745205","https://openalex.org/W2074260684","https://openalex.org/W2087508572","https://openalex.org/W2091723149","https://openalex.org/W2120702583","https://openalex.org/W2578219048","https://openalex.org/W2800331296"],"related_works":["https://openalex.org/W2899084033","https://openalex.org/W2748952813","https://openalex.org/W366439803","https://openalex.org/W3086649970","https://openalex.org/W2028177534","https://openalex.org/W3124291356","https://openalex.org/W3013412803","https://openalex.org/W2991497349","https://openalex.org/W2153514476","https://openalex.org/W2141644593"],"abstract_inverted_index":{"For":[0],"the":[1,40,43,47,69,108],"first":[2],"time,":[3],"dynamic":[4],"response":[5],"of":[6,42,49,83,99],"GaN":[7],"microcantilevers":[8],"with":[9,75,93],"integrated":[10],"piezoresistive":[11],"VO":[12,56,109],"<sub":[13,57,110],"xmlns:mml=\"http://www.w3.org/1998/Math/MathML\"":[14,58,111],"xmlns:xlink=\"http://www.w3.org/1999/xlink\">2</sub>":[15,59,112],"mesa,":[16],"as":[17,52],"high":[18,77,80],"sensitive":[19],"deflection":[20,53,102],"transducers":[21],"have":[22],"been":[23],"investigated.":[24],"The":[25,55,101],"studies":[26],"are":[27],"carried":[28],"out":[29],"by":[30,90],"a":[31,36],"direct":[32],"excitation":[33],"method":[34],"using":[35],"piezo-chip":[37],"attached":[38],"to":[39,63,114],"bottom":[41],"microcantilever":[44],"structure,":[45],"highlighting":[46],"utility":[48],"these":[50,91],"cantilevers":[51],"transducers.":[54],"phase":[60],"was":[61],"able":[62],"detect":[64],"acoustic":[65],"waves":[66],"generated":[67],"in":[68],"Si":[70],"substrate":[71],"at":[72,87,107],"resonant":[73],"frequency":[74],"very":[76],"sensitivity.":[78],"A":[79],"quality":[81,96],"factor":[82,97],"9400":[84],"is":[85,104],"recorded":[86],"88":[88],"\u03bctorr":[89],"microcantilevers,":[92],"an":[94],"atmospheric":[95],"value":[98],"90.":[100],"sensitivity":[103],"found":[105],"maximum":[106],"insulator":[113],"metal":[115],"transition":[116],"temperature":[117],"(MIT)":[118],"temperature.":[119]},"counts_by_year":[{"year":2022,"cited_by_count":1},{"year":2021,"cited_by_count":2},{"year":2020,"cited_by_count":3}],"updated_date":"2025-11-06T03:46:38.306776","created_date":"2025-10-10T00:00:00"}