{"id":"https://openalex.org/W4388281444","doi":"https://doi.org/10.1109/safeprocess58597.2023.10295611","title":"Research on Temperature and Humidity Prediction Technology in Polysilicon Production Tank Farm","display_name":"Research on Temperature and Humidity Prediction Technology in Polysilicon Production Tank Farm","publication_year":2023,"publication_date":"2023-09-22","ids":{"openalex":"https://openalex.org/W4388281444","doi":"https://doi.org/10.1109/safeprocess58597.2023.10295611"},"language":"en","primary_location":{"id":"doi:10.1109/safeprocess58597.2023.10295611","is_oa":false,"landing_page_url":"http://dx.doi.org/10.1109/safeprocess58597.2023.10295611","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2023 CAA Symposium on Fault Detection, Supervision and Safety for Technical Processes (SAFEPROCESS)","raw_type":"proceedings-article"},"type":"conference-paper","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5103169665","display_name":"Weiwei Cao","orcid":"https://orcid.org/0000-0003-1462-0342"},"institutions":[{"id":"https://openalex.org/I134687103","display_name":"Nanjing Tech University","ror":"https://ror.org/03sd35x91","country_code":"CN","type":"education","lineage":["https://openalex.org/I134687103"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Weiwei Cao","raw_affiliation_strings":["Nanjing Tech University,College of Electrical Engineering and Control Science,Nanjing,China","College of Electrical Engineering and Control Science, Nanjing Tech University, Nanjing, China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Nanjing Tech University,College of Electrical Engineering and Control Science,Nanjing,China","institution_ids":["https://openalex.org/I134687103"]},{"raw_affiliation_string":"College of Electrical Engineering and Control Science, Nanjing Tech University, Nanjing, China","institution_ids":["https://openalex.org/I134687103"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5101263127","display_name":"Weida Cai","orcid":null},"institutions":[{"id":"https://openalex.org/I134687103","display_name":"Nanjing Tech University","ror":"https://ror.org/03sd35x91","country_code":"CN","type":"education","lineage":["https://openalex.org/I134687103"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Weida Cai","raw_affiliation_strings":["Nanjing Tech University,College of Electrical Engineering and Control Science,Nanjing,China","College of Electrical Engineering and Control Science, Nanjing Tech University, Nanjing, China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Nanjing Tech University,College of Electrical Engineering and Control Science,Nanjing,China","institution_ids":["https://openalex.org/I134687103"]},{"raw_affiliation_string":"College of Electrical Engineering and Control Science, Nanjing Tech University, Nanjing, China","institution_ids":["https://openalex.org/I134687103"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5083867418","display_name":"Cuimei Bo","orcid":"https://orcid.org/0000-0002-9357-0509"},"institutions":[{"id":"https://openalex.org/I134687103","display_name":"Nanjing Tech University","ror":"https://ror.org/03sd35x91","country_code":"CN","type":"education","lineage":["https://openalex.org/I134687103"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Cuimei Bo","raw_affiliation_strings":["Nanjing Tech University,College of Electrical Engineering and Control Science,Nanjing,China","College of Electrical Engineering and Control Science, Nanjing Tech University, Nanjing, China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Nanjing Tech University,College of Electrical Engineering and Control Science,Nanjing,China","institution_ids":["https://openalex.org/I134687103"]},{"raw_affiliation_string":"College of Electrical Engineering and Control Science, Nanjing Tech University, Nanjing, China","institution_ids":["https://openalex.org/I134687103"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5100361782","display_name":"Jun Li","orcid":"https://orcid.org/0000-0002-1449-8810"},"institutions":[{"id":"https://openalex.org/I134687103","display_name":"Nanjing Tech University","ror":"https://ror.org/03sd35x91","country_code":"CN","type":"education","lineage":["https://openalex.org/I134687103"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Jun Li","raw_affiliation_strings":["Nanjing Tech University,College of Electrical Engineering and Control Science,Nanjing,China","College of Electrical Engineering and Control Science, Nanjing Tech University, Nanjing, China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Nanjing Tech University,College of Electrical Engineering and Control Science,Nanjing,China","institution_ids":["https://openalex.org/I134687103"]},{"raw_affiliation_string":"College of Electrical Engineering and Control Science, Nanjing Tech University, Nanjing, China","institution_ids":["https://openalex.org/I134687103"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5056549178","display_name":"Weijie Gao","orcid":"https://orcid.org/0000-0002-6082-6993"},"institutions":[{"id":"https://openalex.org/I134687103","display_name":"Nanjing Tech University","ror":"https://ror.org/03sd35x91","country_code":"CN","type":"education","lineage":["https://openalex.org/I134687103"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Weijie Gao","raw_affiliation_strings":["Nanjing Tech University,College of Electrical Engineering and Control Science,Nanjing,China","College of Electrical Engineering and Control Science, Nanjing Tech University, Nanjing, China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Nanjing Tech University,College of Electrical Engineering and Control Science,Nanjing,China","institution_ids":["https://openalex.org/I134687103"]},{"raw_affiliation_string":"College of Electrical Engineering and Control Science, Nanjing Tech University, Nanjing, China","institution_ids":["https://openalex.org/I134687103"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5105507271","display_name":"Mingshui Cai","orcid":null},"institutions":[{"id":"https://openalex.org/I134687103","display_name":"Nanjing Tech University","ror":"https://ror.org/03sd35x91","country_code":"CN","type":"education","lineage":["https://openalex.org/I134687103"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Mingshui Cai","raw_affiliation_strings":["Nanjing Tech University,College of Electrical Engineering and Control Science,Nanjing,China","College of Electrical Engineering and Control Science, Nanjing Tech University, Nanjing, China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Nanjing Tech University,College of Electrical Engineering and Control Science,Nanjing,China","institution_ids":["https://openalex.org/I134687103"]},{"raw_affiliation_string":"College of Electrical Engineering and Control Science, Nanjing Tech University, Nanjing, China","institution_ids":["https://openalex.org/I134687103"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":1,"corresponding_author_ids":[],"corresponding_institution_ids":["https://openalex.org/I134687103"],"apc_list":null,"apc_paid":null,"fwci":null,"has_fulltext":false,"cited_by_count":0,"citation_normalized_percentile":null,"cited_by_percentile_year":null,"biblio":{"volume":"22","issue":null,"first_page":"1","last_page":"5"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T12120","display_name":"Air Quality Monitoring and Forecasting","score":0.6543999910354614,"subfield":{"id":"https://openalex.org/subfields/2305","display_name":"Environmental Engineering"},"field":{"id":"https://openalex.org/fields/23","display_name":"Environmental Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T12120","display_name":"Air Quality Monitoring and Forecasting","score":0.6543999910354614,"subfield":{"id":"https://openalex.org/subfields/2305","display_name":"Environmental Engineering"},"field":{"id":"https://openalex.org/fields/23","display_name":"Environmental Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/polycrystalline-silicon","display_name":"Polycrystalline silicon","score":0.7928845882415771},{"id":"https://openalex.org/keywords/production","display_name":"Production (economics)","score":0.7067775726318359},{"id":"https://openalex.org/keywords/silicon","display_name":"Silicon","score":0.5417388677597046},{"id":"https://openalex.org/keywords/feature","display_name":"Feature (linguistics)","score":0.4820912182331085},{"id":"https://openalex.org/keywords/humidity","display_name":"Humidity","score":0.46489185094833374},{"id":"https://openalex.org/keywords/environmental-science","display_name":"Environmental science","score":0.42745622992515564},{"id":"https://openalex.org/keywords/computer-science","display_name":"Computer science","score":0.4090333580970764},{"id":"https://openalex.org/keywords/process-engineering","display_name":"Process engineering","score":0.33268165588378906},{"id":"https://openalex.org/keywords/engineering","display_name":"Engineering","score":0.2387939989566803},{"id":"https://openalex.org/keywords/materials-science","display_name":"Materials science","score":0.1799740195274353},{"id":"https://openalex.org/keywords/meteorology","display_name":"Meteorology","score":0.11547812819480896}],"concepts":[{"id":"https://openalex.org/C2780565262","wikidata":"https://www.wikidata.org/wiki/Q737038","display_name":"Polycrystalline silicon","level":4,"score":0.7928845882415771},{"id":"https://openalex.org/C2778348673","wikidata":"https://www.wikidata.org/wiki/Q739302","display_name":"Production (economics)","level":2,"score":0.7067775726318359},{"id":"https://openalex.org/C544956773","wikidata":"https://www.wikidata.org/wiki/Q670","display_name":"Silicon","level":2,"score":0.5417388677597046},{"id":"https://openalex.org/C2776401178","wikidata":"https://www.wikidata.org/wiki/Q12050496","display_name":"Feature (linguistics)","level":2,"score":0.4820912182331085},{"id":"https://openalex.org/C151420433","wikidata":"https://www.wikidata.org/wiki/Q180600","display_name":"Humidity","level":2,"score":0.46489185094833374},{"id":"https://openalex.org/C39432304","wikidata":"https://www.wikidata.org/wiki/Q188847","display_name":"Environmental science","level":0,"score":0.42745622992515564},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.4090333580970764},{"id":"https://openalex.org/C21880701","wikidata":"https://www.wikidata.org/wiki/Q2144042","display_name":"Process engineering","level":1,"score":0.33268165588378906},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.2387939989566803},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.1799740195274353},{"id":"https://openalex.org/C153294291","wikidata":"https://www.wikidata.org/wiki/Q25261","display_name":"Meteorology","level":1,"score":0.11547812819480896},{"id":"https://openalex.org/C138885662","wikidata":"https://www.wikidata.org/wiki/Q5891","display_name":"Philosophy","level":0,"score":0.0},{"id":"https://openalex.org/C191897082","wikidata":"https://www.wikidata.org/wiki/Q11467","display_name":"Metallurgy","level":1,"score":0.0},{"id":"https://openalex.org/C2779227376","wikidata":"https://www.wikidata.org/wiki/Q6505497","display_name":"Layer (electronics)","level":2,"score":0.0},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.0},{"id":"https://openalex.org/C139719470","wikidata":"https://www.wikidata.org/wiki/Q39680","display_name":"Macroeconomics","level":1,"score":0.0},{"id":"https://openalex.org/C159985019","wikidata":"https://www.wikidata.org/wiki/Q181790","display_name":"Composite material","level":1,"score":0.0},{"id":"https://openalex.org/C87359718","wikidata":"https://www.wikidata.org/wiki/Q1271916","display_name":"Thin-film transistor","level":3,"score":0.0},{"id":"https://openalex.org/C162324750","wikidata":"https://www.wikidata.org/wiki/Q8134","display_name":"Economics","level":0,"score":0.0},{"id":"https://openalex.org/C41895202","wikidata":"https://www.wikidata.org/wiki/Q8162","display_name":"Linguistics","level":1,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1109/safeprocess58597.2023.10295611","is_oa":false,"landing_page_url":"http://dx.doi.org/10.1109/safeprocess58597.2023.10295611","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2023 CAA Symposium on Fault Detection, Supervision and Safety for Technical Processes (SAFEPROCESS)","raw_type":"proceedings-article"}],"best_oa_location":null,"sustainable_development_goals":[],"awards":[],"funders":[],"has_content":{"pdf":false,"grobid_xml":false},"content_urls":null,"referenced_works_count":0,"referenced_works":[],"related_works":["https://openalex.org/W3025464592","https://openalex.org/W2357457856","https://openalex.org/W849902440","https://openalex.org/W2354578673","https://openalex.org/W2910942079","https://openalex.org/W2529788040","https://openalex.org/W2361343437","https://openalex.org/W2024411877","https://openalex.org/W2359991085","https://openalex.org/W3154159472"],"abstract_inverted_index":{"The":[0,85,119],"production":[1,65,78],"and":[2,14,20,25,30,52,71,94,156],"processing":[3,95],"of":[4,62,100,115,149,161],"polycrystalline":[5,63,76,104],"silicon,":[6],"as":[7,18],"a":[8,34,111],"typical":[9],"chemical":[10,42],"production,":[11,23],"involves":[12],"dangerous":[13],"harmful":[15],"factors":[16,102,151,164],"such":[17],"explosions":[19],"leaks":[21],"during":[22],"storage,":[24],"transportation.":[26],"If":[27],"not":[28,143],"detected":[29],"dealt":[31],"with":[32],"in":[33,103,152,165],"timely":[35],"manner,":[36],"it":[37],"may":[38],"lead":[39],"to":[40,57,96,130],"serious":[41,47],"hazards,":[43],"which":[44,134],"will":[45],"have":[46],"consequences":[48],"for":[49,75,91,146],"personnel":[50],"safety":[51,61,163],"economic":[53],"development.":[54],"In":[55],"order":[56],"improve":[58],"the":[59,125,131,136,139,147,153,158,166],"environmental":[60,101,150,162],"silicon":[64,77,105],"tank":[66,79,154,167],"areas,":[67],"research":[68],"on":[69,109],"temperature":[70],"humidity":[72],"prediction":[73,113,148],"technology":[74],"areas":[80],"has":[81],"been":[82],"carried":[83],"out.":[84],"XGBoost":[86],"algorithm":[87],"network":[88,127],"is":[89,117,128,142],"used":[90],"data":[92],"analysis":[93],"extract":[97],"feature":[98,120],"information":[99],"storage":[106],"areas.":[107],"Based":[108],"this,":[110],"hybrid":[112],"model":[114,141],"CNN-LSTM":[116],"proposed.":[118],"Information":[121],"mapping":[122],"extracted":[123],"from":[124],"CNN":[126],"mapped":[129],"LSTM":[132],"network,":[133],"solves":[135],"problem":[137],"that":[138],"traditional":[140],"accurate":[144,159],"enough":[145],"farm,":[155],"realizes":[157],"monitoring":[160],"farm.":[168]},"counts_by_year":[],"updated_date":"2026-07-14T23:27:15.235271","created_date":"2025-10-10T00:00:00"}