{"id":"https://openalex.org/W2317922930","doi":"https://doi.org/10.1109/rws.2016.7444351","title":"Single crystal aluminum nitride film bulk acoustic resonators","display_name":"Single crystal aluminum nitride film bulk acoustic resonators","publication_year":2016,"publication_date":"2016-01-01","ids":{"openalex":"https://openalex.org/W2317922930","doi":"https://doi.org/10.1109/rws.2016.7444351","mag":"2317922930"},"language":"en","primary_location":{"id":"doi:10.1109/rws.2016.7444351","is_oa":false,"landing_page_url":"https://doi.org/10.1109/rws.2016.7444351","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2016 IEEE Radio and Wireless Symposium (RWS)","raw_type":"proceedings-article"},"type":"article","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5068687877","display_name":"James B. Shealy","orcid":null},"institutions":[{"id":"https://openalex.org/I205783295","display_name":"Cornell University","ror":"https://ror.org/05bnh6r87","country_code":"US","type":"education","lineage":["https://openalex.org/I205783295"]}],"countries":["US"],"is_corresponding":true,"raw_author_name":"James B. Shealy","raw_affiliation_strings":["Akoustis Technologies, Cornell University, Ithaca, N.Y","Akoustis Technologies, USA"],"affiliations":[{"raw_affiliation_string":"Akoustis Technologies, Cornell University, Ithaca, N.Y","institution_ids":["https://openalex.org/I205783295"]},{"raw_affiliation_string":"Akoustis Technologies, USA","institution_ids":[]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5080107396","display_name":"J.B. Shealy","orcid":null},"institutions":[{"id":"https://openalex.org/I205783295","display_name":"Cornell University","ror":"https://ror.org/05bnh6r87","country_code":"US","type":"education","lineage":["https://openalex.org/I205783295"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"Jeffrey B. Shealy","raw_affiliation_strings":["Akoustis Technologies, Cornell University, Ithaca, N.Y","Akoustis Technologies, USA"],"affiliations":[{"raw_affiliation_string":"Akoustis Technologies, Cornell University, Ithaca, N.Y","institution_ids":["https://openalex.org/I205783295"]},{"raw_affiliation_string":"Akoustis Technologies, USA","institution_ids":[]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5032477365","display_name":"Pinal Patel","orcid":null},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"Pinal Patel","raw_affiliation_strings":["Akoustis Technologies, USA"],"affiliations":[{"raw_affiliation_string":"Akoustis Technologies, USA","institution_ids":[]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5043661526","display_name":"Michael D. Hodge","orcid":null},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"Michael D. Hodge","raw_affiliation_strings":["Akoustis Technologies, USA"],"affiliations":[{"raw_affiliation_string":"Akoustis Technologies, USA","institution_ids":[]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5111695359","display_name":"R. Vetury","orcid":null},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"Rama Vetury","raw_affiliation_strings":["Akoustis Technologies, USA"],"affiliations":[{"raw_affiliation_string":"Akoustis Technologies, USA","institution_ids":[]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5105775400","display_name":"James R. Shealy","orcid":null},"institutions":[{"id":"https://openalex.org/I205783295","display_name":"Cornell University","ror":"https://ror.org/05bnh6r87","country_code":"US","type":"education","lineage":["https://openalex.org/I205783295"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"James R. Shealy","raw_affiliation_strings":["Akoustis Technologies, Cornell University, Ithaca, N.Y","Akoustis Technologies, USA"],"affiliations":[{"raw_affiliation_string":"Akoustis Technologies, Cornell University, Ithaca, N.Y","institution_ids":["https://openalex.org/I205783295"]},{"raw_affiliation_string":"Akoustis Technologies, USA","institution_ids":[]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":6,"corresponding_author_ids":["https://openalex.org/A5068687877"],"corresponding_institution_ids":["https://openalex.org/I205783295"],"apc_list":null,"apc_paid":null,"fwci":1.1965,"has_fulltext":false,"cited_by_count":16,"citation_normalized_percentile":{"value":0.78064174,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":89,"max":99},"biblio":{"volume":null,"issue":null,"first_page":"16","last_page":"19"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T11160","display_name":"Acoustic Wave Resonator Technologies","score":1.0,"subfield":{"id":"https://openalex.org/subfields/2204","display_name":"Biomedical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T11160","display_name":"Acoustic Wave Resonator Technologies","score":1.0,"subfield":{"id":"https://openalex.org/subfields/2204","display_name":"Biomedical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10099","display_name":"GaN-based semiconductor devices and materials","score":0.9998999834060669,"subfield":{"id":"https://openalex.org/subfields/3104","display_name":"Condensed Matter Physics"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10377","display_name":"Metal and Thin Film Mechanics","score":0.9980000257492065,"subfield":{"id":"https://openalex.org/subfields/2211","display_name":"Mechanics of Materials"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/multiphysics","display_name":"Multiphysics","score":0.8212006092071533},{"id":"https://openalex.org/keywords/resonator","display_name":"Resonator","score":0.7826932668685913},{"id":"https://openalex.org/keywords/materials-science","display_name":"Materials science","score":0.7575787901878357},{"id":"https://openalex.org/keywords/handset","display_name":"Handset","score":0.4843672215938568},{"id":"https://openalex.org/keywords/optoelectronics","display_name":"Optoelectronics","score":0.46800437569618225},{"id":"https://openalex.org/keywords/acoustics","display_name":"Acoustics","score":0.4650723934173584},{"id":"https://openalex.org/keywords/finite-element-method","display_name":"Finite element method","score":0.46298539638519287},{"id":"https://openalex.org/keywords/aluminium-nitride","display_name":"Aluminium nitride","score":0.4264053404331207},{"id":"https://openalex.org/keywords/electronic-engineering","display_name":"Electronic engineering","score":0.3504205346107483},{"id":"https://openalex.org/keywords/aluminium","display_name":"Aluminium","score":0.3180617690086365},{"id":"https://openalex.org/keywords/computer-science","display_name":"Computer science","score":0.2545301914215088},{"id":"https://openalex.org/keywords/composite-material","display_name":"Composite material","score":0.16881301999092102},{"id":"https://openalex.org/keywords/engineering","display_name":"Engineering","score":0.09796243906021118},{"id":"https://openalex.org/keywords/telecommunications","display_name":"Telecommunications","score":0.09287908673286438},{"id":"https://openalex.org/keywords/structural-engineering","display_name":"Structural engineering","score":0.08012807369232178}],"concepts":[{"id":"https://openalex.org/C46435376","wikidata":"https://www.wikidata.org/wiki/Q1829750","display_name":"Multiphysics","level":3,"score":0.8212006092071533},{"id":"https://openalex.org/C97126364","wikidata":"https://www.wikidata.org/wiki/Q349669","display_name":"Resonator","level":2,"score":0.7826932668685913},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.7575787901878357},{"id":"https://openalex.org/C2779971919","wikidata":"https://www.wikidata.org/wiki/Q1378949","display_name":"Handset","level":2,"score":0.4843672215938568},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.46800437569618225},{"id":"https://openalex.org/C24890656","wikidata":"https://www.wikidata.org/wiki/Q82811","display_name":"Acoustics","level":1,"score":0.4650723934173584},{"id":"https://openalex.org/C135628077","wikidata":"https://www.wikidata.org/wiki/Q220184","display_name":"Finite element method","level":2,"score":0.46298539638519287},{"id":"https://openalex.org/C2780162792","wikidata":"https://www.wikidata.org/wiki/Q414445","display_name":"Aluminium nitride","level":3,"score":0.4264053404331207},{"id":"https://openalex.org/C24326235","wikidata":"https://www.wikidata.org/wiki/Q126095","display_name":"Electronic engineering","level":1,"score":0.3504205346107483},{"id":"https://openalex.org/C513153333","wikidata":"https://www.wikidata.org/wiki/Q663","display_name":"Aluminium","level":2,"score":0.3180617690086365},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.2545301914215088},{"id":"https://openalex.org/C159985019","wikidata":"https://www.wikidata.org/wiki/Q181790","display_name":"Composite material","level":1,"score":0.16881301999092102},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.09796243906021118},{"id":"https://openalex.org/C76155785","wikidata":"https://www.wikidata.org/wiki/Q418","display_name":"Telecommunications","level":1,"score":0.09287908673286438},{"id":"https://openalex.org/C66938386","wikidata":"https://www.wikidata.org/wiki/Q633538","display_name":"Structural engineering","level":1,"score":0.08012807369232178},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1109/rws.2016.7444351","is_oa":false,"landing_page_url":"https://doi.org/10.1109/rws.2016.7444351","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2016 IEEE Radio and Wireless Symposium (RWS)","raw_type":"proceedings-article"}],"best_oa_location":null,"sustainable_development_goals":[{"display_name":"Affordable and clean energy","score":0.5899999737739563,"id":"https://metadata.un.org/sdg/7"}],"awards":[],"funders":[],"has_content":{"pdf":false,"grobid_xml":false},"content_urls":null,"referenced_works_count":4,"referenced_works":["https://openalex.org/W1993405320","https://openalex.org/W2143538365","https://openalex.org/W2334616289","https://openalex.org/W2505751109"],"related_works":["https://openalex.org/W2610945718","https://openalex.org/W2808925712","https://openalex.org/W274022721","https://openalex.org/W1998621903","https://openalex.org/W2469918743","https://openalex.org/W2101130583","https://openalex.org/W3159386921","https://openalex.org/W3089886176","https://openalex.org/W2139580322","https://openalex.org/W4383670013"],"abstract_inverted_index":{"In":[0,44],"recent":[1],"years,":[2],"film":[3],"bulk":[4],"acoustic":[5,23],"resonators":[6],"(FBARs)":[7],"have":[8],"become":[9],"important":[10],"in":[11,36],"the":[12],"mobile":[13],"handset":[14],"market":[15],"for":[16],"their":[17,26,34,68],"small":[18],"size":[19],"compared":[20],"to":[21],"surface":[22],"wave":[24],"resonators,":[25],"compatibility":[27],"with":[28,67],"existing":[29],"integrated":[30],"circuit":[31],"processes,":[32],"and":[33,42,56,73],"usage":[35],"synthesizing":[37],"components":[38],"such":[39],"as":[40],"filters":[41],"duplexers.":[43],"this":[45],"work,":[46],"we":[47],"demonstrate":[48],"through":[49],"finite":[50],"element":[51],"simulation":[52],"using":[53],"COMSOL":[54],"MultiPhysics":[55],"experimental":[57,83],"data,":[58],"that":[59],"single":[60],"crystal":[61],"FBARs":[62],"outperform":[63],"current":[64],"polycrystalline":[65],"devices":[66],"higher":[69],"mechanical":[70],"coupling":[71],"efficiency":[72],"quality":[74],"factor.":[75],"We":[76],"also":[77],"present":[78],"elasticity":[79],"coefficients":[80],"extracted":[81],"from":[82],"data":[84],"on":[85],"fabricated":[86],"devices.":[87]},"counts_by_year":[{"year":2026,"cited_by_count":1},{"year":2025,"cited_by_count":2},{"year":2024,"cited_by_count":3},{"year":2022,"cited_by_count":1},{"year":2021,"cited_by_count":1},{"year":2020,"cited_by_count":1},{"year":2019,"cited_by_count":1},{"year":2018,"cited_by_count":3},{"year":2017,"cited_by_count":2},{"year":2016,"cited_by_count":1}],"updated_date":"2026-02-24T19:35:01.260952","created_date":"2025-10-10T00:00:00"}