{"id":"https://openalex.org/W1988328306","doi":"https://doi.org/10.1109/robot.2010.5509922","title":"Principle, characterization and control of a new hybrid thermo-piezoelectric microactuator","display_name":"Principle, characterization and control of a new hybrid thermo-piezoelectric microactuator","publication_year":2010,"publication_date":"2010-05-01","ids":{"openalex":"https://openalex.org/W1988328306","doi":"https://doi.org/10.1109/robot.2010.5509922","mag":"1988328306"},"language":"en","primary_location":{"id":"doi:10.1109/robot.2010.5509922","is_oa":false,"landing_page_url":"https://doi.org/10.1109/robot.2010.5509922","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2010 IEEE International Conference on Robotics and Automation","raw_type":"proceedings-article"},"type":"preprint","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5019160451","display_name":"Micky Rakotondrabe","orcid":"https://orcid.org/0000-0002-6413-7271"},"institutions":[{"id":"https://openalex.org/I1294671590","display_name":"Centre National de la Recherche Scientifique","ror":"https://ror.org/02feahw73","country_code":"FR","type":"government","lineage":["https://openalex.org/I1294671590"]},{"id":"https://openalex.org/I2802759292","display_name":"Franche-Comt\u00e9 \u00c9lectronique M\u00e9canique Thermique et Optique - Sciences et Technologies","ror":"https://ror.org/004fmxv66","country_code":"FR","type":"facility","lineage":["https://openalex.org/I1294671590","https://openalex.org/I1294671590","https://openalex.org/I2802759292","https://openalex.org/I37553959","https://openalex.org/I4210095849","https://openalex.org/I4405256580","https://openalex.org/I53262699"]},{"id":"https://openalex.org/I37553959","display_name":"Universit\u00e9 de technologie de belfort-montb\u00e9liard","ror":"https://ror.org/05bn3m307","country_code":"FR","type":"education","lineage":["https://openalex.org/I37553959"]},{"id":"https://openalex.org/I53262699","display_name":"\u00c9cole Nationale Sup\u00e9rieure de M\u00e9canique et des Microtechniques","ror":"https://ror.org/05813w841","country_code":"FR","type":"education","lineage":["https://openalex.org/I53262699"]}],"countries":["FR"],"is_corresponding":false,"raw_author_name":"Micky Rakotondrabe","raw_affiliation_strings":["UMR CNRS-6174 / UFC / ENSMM / UTBM, Automatic Control and Micro-Mechatronic Systems Department, (AS2M Department), FEMTO-ST Institute, Besancon, France","FEMTO-st Institute, UMR CNRS-6174 / UFC / ENSMM / UTBM, Automatic Control and Micro-Mechatronic Systems department (AS2M department), 25000 Besan\u00e7on - France"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"UMR CNRS-6174 / UFC / ENSMM / UTBM, Automatic Control and Micro-Mechatronic Systems Department, (AS2M Department), FEMTO-ST Institute, Besancon, France","institution_ids":["https://openalex.org/I53262699","https://openalex.org/I2802759292","https://openalex.org/I1294671590"]},{"raw_affiliation_string":"FEMTO-st Institute, UMR CNRS-6174 / UFC / ENSMM / UTBM, Automatic Control and Micro-Mechatronic Systems department (AS2M department), 25000 Besan\u00e7on - France","institution_ids":["https://openalex.org/I37553959","https://openalex.org/I1294671590","https://openalex.org/I2802759292"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5108108648","display_name":"Ioan Alexandru Ivan","orcid":null},"institutions":[{"id":"https://openalex.org/I1294671590","display_name":"Centre National de la Recherche Scientifique","ror":"https://ror.org/02feahw73","country_code":"FR","type":"government","lineage":["https://openalex.org/I1294671590"]},{"id":"https://openalex.org/I2802759292","display_name":"Franche-Comt\u00e9 \u00c9lectronique M\u00e9canique Thermique et Optique - Sciences et Technologies","ror":"https://ror.org/004fmxv66","country_code":"FR","type":"facility","lineage":["https://openalex.org/I1294671590","https://openalex.org/I1294671590","https://openalex.org/I2802759292","https://openalex.org/I37553959","https://openalex.org/I4210095849","https://openalex.org/I4405256580","https://openalex.org/I53262699"]},{"id":"https://openalex.org/I37553959","display_name":"Universit\u00e9 de technologie de belfort-montb\u00e9liard","ror":"https://ror.org/05bn3m307","country_code":"FR","type":"education","lineage":["https://openalex.org/I37553959"]},{"id":"https://openalex.org/I53262699","display_name":"\u00c9cole Nationale Sup\u00e9rieure de M\u00e9canique et des Microtechniques","ror":"https://ror.org/05813w841","country_code":"FR","type":"education","lineage":["https://openalex.org/I53262699"]}],"countries":["FR"],"is_corresponding":false,"raw_author_name":"Ioan Alexandru Ivan","raw_affiliation_strings":["UMR CNRS-6174 / UFC / ENSMM / UTBM, Automatic Control and Micro-Mechatronic Systems Department, (AS2M Department), FEMTO-ST Institute, Besancon, France","FEMTO-st Institute, UMR CNRS-6174 / UFC / ENSMM / UTBM, Automatic Control and Micro-Mechatronic Systems department (AS2M department), 25000 Besan\u00e7on - France"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"UMR CNRS-6174 / UFC / ENSMM / UTBM, Automatic Control and Micro-Mechatronic Systems Department, (AS2M Department), FEMTO-ST Institute, Besancon, France","institution_ids":["https://openalex.org/I53262699","https://openalex.org/I2802759292","https://openalex.org/I1294671590"]},{"raw_affiliation_string":"FEMTO-st Institute, UMR CNRS-6174 / UFC / ENSMM / UTBM, Automatic Control and Micro-Mechatronic Systems department (AS2M department), 25000 Besan\u00e7on - France","institution_ids":["https://openalex.org/I37553959","https://openalex.org/I1294671590","https://openalex.org/I2802759292"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":4,"corresponding_author_ids":[],"corresponding_institution_ids":[],"apc_list":null,"apc_paid":null,"fwci":0.5795,"has_fulltext":false,"cited_by_count":3,"citation_normalized_percentile":{"value":0.70079207,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":89,"max":94},"biblio":{"volume":null,"issue":null,"first_page":"1580","last_page":"1585"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":0.9997000098228455,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":0.9997000098228455,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11525","display_name":"Piezoelectric Actuators and Control","score":0.9997000098228455,"subfield":{"id":"https://openalex.org/subfields/2207","display_name":"Control and Systems Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11449","display_name":"Mechanical and Optical Resonators","score":0.9987999796867371,"subfield":{"id":"https://openalex.org/subfields/3107","display_name":"Atomic and Molecular Physics, and Optics"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/unimorph","display_name":"Unimorph","score":0.9380232095718384},{"id":"https://openalex.org/keywords/microactuator","display_name":"Microactuator","score":0.8471267223358154},{"id":"https://openalex.org/keywords/actuator","display_name":"Actuator","score":0.8101798892021179},{"id":"https://openalex.org/keywords/bimorph","display_name":"Bimorph","score":0.6888158321380615},{"id":"https://openalex.org/keywords/piezoelectricity","display_name":"Piezoelectricity","score":0.6199693083763123},{"id":"https://openalex.org/keywords/characterization","display_name":"Characterization (materials science)","score":0.5664706230163574},{"id":"https://openalex.org/keywords/bandwidth","display_name":"Bandwidth (computing)","score":0.5519996881484985},{"id":"https://openalex.org/keywords/thermal","display_name":"Thermal","score":0.49262553453445435},{"id":"https://openalex.org/keywords/control-theory","display_name":"Control theory (sociology)","score":0.45417520403862},{"id":"https://openalex.org/keywords/materials-science","display_name":"Materials science","score":0.453738808631897},{"id":"https://openalex.org/keywords/control-engineering","display_name":"Control engineering","score":0.37850531935691833},{"id":"https://openalex.org/keywords/electronic-engineering","display_name":"Electronic engineering","score":0.3573911786079407},{"id":"https://openalex.org/keywords/computer-science","display_name":"Computer science","score":0.35712164640426636},{"id":"https://openalex.org/keywords/engineering","display_name":"Engineering","score":0.27233511209487915},{"id":"https://openalex.org/keywords/control","display_name":"Control (management)","score":0.20991316437721252},{"id":"https://openalex.org/keywords/electrical-engineering","display_name":"Electrical engineering","score":0.13599571585655212},{"id":"https://openalex.org/keywords/physics","display_name":"Physics","score":0.08306929469108582},{"id":"https://openalex.org/keywords/nanotechnology","display_name":"Nanotechnology","score":0.06322869658470154}],"concepts":[{"id":"https://openalex.org/C2779055265","wikidata":"https://www.wikidata.org/wiki/Q7885234","display_name":"Unimorph","level":3,"score":0.9380232095718384},{"id":"https://openalex.org/C58373989","wikidata":"https://www.wikidata.org/wiki/Q6839208","display_name":"Microactuator","level":3,"score":0.8471267223358154},{"id":"https://openalex.org/C172707124","wikidata":"https://www.wikidata.org/wiki/Q423488","display_name":"Actuator","level":2,"score":0.8101798892021179},{"id":"https://openalex.org/C2778393539","wikidata":"https://www.wikidata.org/wiki/Q4913759","display_name":"Bimorph","level":3,"score":0.6888158321380615},{"id":"https://openalex.org/C100082104","wikidata":"https://www.wikidata.org/wiki/Q183759","display_name":"Piezoelectricity","level":2,"score":0.6199693083763123},{"id":"https://openalex.org/C2780841128","wikidata":"https://www.wikidata.org/wiki/Q5073781","display_name":"Characterization (materials science)","level":2,"score":0.5664706230163574},{"id":"https://openalex.org/C2776257435","wikidata":"https://www.wikidata.org/wiki/Q1576430","display_name":"Bandwidth (computing)","level":2,"score":0.5519996881484985},{"id":"https://openalex.org/C204530211","wikidata":"https://www.wikidata.org/wiki/Q752823","display_name":"Thermal","level":2,"score":0.49262553453445435},{"id":"https://openalex.org/C47446073","wikidata":"https://www.wikidata.org/wiki/Q5165890","display_name":"Control theory (sociology)","level":3,"score":0.45417520403862},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.453738808631897},{"id":"https://openalex.org/C133731056","wikidata":"https://www.wikidata.org/wiki/Q4917288","display_name":"Control engineering","level":1,"score":0.37850531935691833},{"id":"https://openalex.org/C24326235","wikidata":"https://www.wikidata.org/wiki/Q126095","display_name":"Electronic engineering","level":1,"score":0.3573911786079407},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.35712164640426636},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.27233511209487915},{"id":"https://openalex.org/C2775924081","wikidata":"https://www.wikidata.org/wiki/Q55608371","display_name":"Control (management)","level":2,"score":0.20991316437721252},{"id":"https://openalex.org/C119599485","wikidata":"https://www.wikidata.org/wiki/Q43035","display_name":"Electrical engineering","level":1,"score":0.13599571585655212},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.08306929469108582},{"id":"https://openalex.org/C171250308","wikidata":"https://www.wikidata.org/wiki/Q11468","display_name":"Nanotechnology","level":1,"score":0.06322869658470154},{"id":"https://openalex.org/C153294291","wikidata":"https://www.wikidata.org/wiki/Q25261","display_name":"Meteorology","level":1,"score":0.0},{"id":"https://openalex.org/C159985019","wikidata":"https://www.wikidata.org/wiki/Q181790","display_name":"Composite material","level":1,"score":0.0},{"id":"https://openalex.org/C31258907","wikidata":"https://www.wikidata.org/wiki/Q1301371","display_name":"Computer network","level":1,"score":0.0},{"id":"https://openalex.org/C154945302","wikidata":"https://www.wikidata.org/wiki/Q11660","display_name":"Artificial intelligence","level":1,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1109/robot.2010.5509922","is_oa":false,"landing_page_url":"https://doi.org/10.1109/robot.2010.5509922","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2010 IEEE International Conference on Robotics and Automation","raw_type":"proceedings-article"}],"best_oa_location":null,"sustainable_development_goals":[],"awards":[],"funders":[],"has_content":{"grobid_xml":false,"pdf":false},"content_urls":null,"referenced_works_count":21,"referenced_works":["https://openalex.org/W1986810687","https://openalex.org/W2027523277","https://openalex.org/W2055818354","https://openalex.org/W2101042391","https://openalex.org/W2104875694","https://openalex.org/W2110189618","https://openalex.org/W2142498250","https://openalex.org/W2142712736","https://openalex.org/W2149074610","https://openalex.org/W2156501557","https://openalex.org/W2156649757","https://openalex.org/W2159744384","https://openalex.org/W2164385251","https://openalex.org/W2243358416","https://openalex.org/W2416416741","https://openalex.org/W3146248903","https://openalex.org/W3150248096","https://openalex.org/W3212117065","https://openalex.org/W6682296735","https://openalex.org/W6683999576","https://openalex.org/W6690708664"],"related_works":["https://openalex.org/W2441799451","https://openalex.org/W1986000232","https://openalex.org/W1993995488","https://openalex.org/W3034624278","https://openalex.org/W2079013838","https://openalex.org/W2920431403","https://openalex.org/W2884519406","https://openalex.org/W2171620025","https://openalex.org/W2292123381","https://openalex.org/W2666796473"],"abstract_inverted_index":{"This":[0],"paper":[1],"presents":[2],"a":[3,8],"new":[4],"actuator":[5,27],"based":[6],"on":[7,12],"unimorph":[9],"piezocantilever":[10],"and":[11,38,42,50],"the":[13,25,29,35,39,45,64],"thermal":[14,36],"bimorph":[15],"principle,":[16],"called":[17],"hybrid":[18],"thermo-piezoelectric":[19],"actuator.":[20],"The":[21],"main":[22],"advantage":[23],"of":[24,32],"proposed":[26],"is":[28],"high":[30,40],"range":[31],"positioning":[33],"from":[34,44],"actuation":[37,67],"resolution":[41],"bandwidth":[43],"piezoelectric":[46],"one.":[47],"A":[48],"characterization":[49],"linear":[51],"modeling":[52],"are":[53],"proposed.":[54],"Finally,":[55],"we":[56],"propose":[57],"an":[58],"adapted":[59],"control":[60],"law":[61],"to":[62],"manage":[63],"two":[65],"possible":[66],"types.":[68]},"counts_by_year":[{"year":2020,"cited_by_count":1}],"updated_date":"2025-11-06T03:46:38.306776","created_date":"2025-10-10T00:00:00"}