{"id":"https://openalex.org/W1997164991","doi":"https://doi.org/10.1109/robot.2010.5509795","title":"Millimeter-scale microrobots for wafer-level factories","display_name":"Millimeter-scale microrobots for wafer-level factories","publication_year":2010,"publication_date":"2010-05-01","ids":{"openalex":"https://openalex.org/W1997164991","doi":"https://doi.org/10.1109/robot.2010.5509795","mag":"1997164991"},"language":"en","primary_location":{"id":"doi:10.1109/robot.2010.5509795","is_oa":false,"landing_page_url":"https://doi.org/10.1109/robot.2010.5509795","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2010 IEEE International Conference on Robotics and Automation","raw_type":"proceedings-article"},"type":"conference-paper","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5032322370","display_name":"Rakesh Murthy","orcid":null},"institutions":[{"id":"https://openalex.org/I189196454","display_name":"The University of Texas at Arlington","ror":"https://ror.org/019kgqr73","country_code":"US","type":"education","lineage":["https://openalex.org/I189196454"]},{"id":"https://openalex.org/I4210116723","display_name":"Robotics Research (United States)","ror":"https://ror.org/020w2fr77","country_code":"US","type":"company","lineage":["https://openalex.org/I4210116723"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"Rakesh Murthy","raw_affiliation_strings":["Automation & Robotics Research Institute, University of Texas, Arlington, USA","Automation and Robotics Research Institute, The University of Texas at Arlington, USA"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Automation & Robotics Research Institute, University of Texas, Arlington, USA","institution_ids":["https://openalex.org/I4210116723"]},{"raw_affiliation_string":"Automation and Robotics Research Institute, The University of Texas at Arlington, USA","institution_ids":["https://openalex.org/I189196454","https://openalex.org/I4210116723"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5108082534","display_name":"Dan O. Popa","orcid":null},"institutions":[{"id":"https://openalex.org/I189196454","display_name":"The University of Texas at Arlington","ror":"https://ror.org/019kgqr73","country_code":"US","type":"education","lineage":["https://openalex.org/I189196454"]},{"id":"https://openalex.org/I4210116723","display_name":"Robotics Research (United States)","ror":"https://ror.org/020w2fr77","country_code":"US","type":"company","lineage":["https://openalex.org/I4210116723"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"Dan O Popa","raw_affiliation_strings":["Automation & Robotics Research Institute, University of Texas, Arlington, USA","Automation and Robotics Research Institute, The University of Texas at Arlington, USA"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Automation & Robotics Research Institute, University of Texas, Arlington, USA","institution_ids":["https://openalex.org/I4210116723"]},{"raw_affiliation_string":"Automation and Robotics Research Institute, The University of Texas at Arlington, USA","institution_ids":["https://openalex.org/I189196454","https://openalex.org/I4210116723"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":2,"corresponding_author_ids":[],"corresponding_institution_ids":[],"apc_list":null,"apc_paid":null,"fwci":null,"has_fulltext":false,"cited_by_count":8,"citation_normalized_percentile":null,"cited_by_percentile_year":null,"biblio":{"volume":null,"issue":null,"first_page":"488","last_page":"493"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10923","display_name":"Force Microscopy Techniques and Applications","score":0.9973000288009644,"subfield":{"id":"https://openalex.org/subfields/3107","display_name":"Atomic and Molecular Physics, and Optics"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10923","display_name":"Force Microscopy Techniques and Applications","score":0.9973000288009644,"subfield":{"id":"https://openalex.org/subfields/3107","display_name":"Atomic and Molecular Physics, and Optics"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T12224","display_name":"Nanofabrication and Lithography Techniques","score":0.9961000084877014,"subfield":{"id":"https://openalex.org/subfields/2204","display_name":"Biomedical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11301","display_name":"Advanced Surface Polishing Techniques","score":0.9958999752998352,"subfield":{"id":"https://openalex.org/subfields/2204","display_name":"Biomedical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/nanomanufacturing","display_name":"Nanomanufacturing","score":0.8364591598510742},{"id":"https://openalex.org/keywords/robot","display_name":"Robot","score":0.5971018671989441},{"id":"https://openalex.org/keywords/computer-science","display_name":"Computer science","score":0.5538352131843567},{"id":"https://openalex.org/keywords/throughput","display_name":"Throughput","score":0.5494292974472046},{"id":"https://openalex.org/keywords/wafer","display_name":"Wafer","score":0.45431894063949585},{"id":"https://openalex.org/keywords/artificial-intelligence","display_name":"Artificial intelligence","score":0.3423426151275635},{"id":"https://openalex.org/keywords/materials-science","display_name":"Materials science","score":0.2657831311225891},{"id":"https://openalex.org/keywords/nanotechnology","display_name":"Nanotechnology","score":0.17502373456954956}],"concepts":[{"id":"https://openalex.org/C46312889","wikidata":"https://www.wikidata.org/wiki/Q950502","display_name":"Nanomanufacturing","level":2,"score":0.8364591598510742},{"id":"https://openalex.org/C90509273","wikidata":"https://www.wikidata.org/wiki/Q11012","display_name":"Robot","level":2,"score":0.5971018671989441},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.5538352131843567},{"id":"https://openalex.org/C157764524","wikidata":"https://www.wikidata.org/wiki/Q1383412","display_name":"Throughput","level":3,"score":0.5494292974472046},{"id":"https://openalex.org/C160671074","wikidata":"https://www.wikidata.org/wiki/Q267131","display_name":"Wafer","level":2,"score":0.45431894063949585},{"id":"https://openalex.org/C154945302","wikidata":"https://www.wikidata.org/wiki/Q11660","display_name":"Artificial intelligence","level":1,"score":0.3423426151275635},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.2657831311225891},{"id":"https://openalex.org/C171250308","wikidata":"https://www.wikidata.org/wiki/Q11468","display_name":"Nanotechnology","level":1,"score":0.17502373456954956},{"id":"https://openalex.org/C555944384","wikidata":"https://www.wikidata.org/wiki/Q249","display_name":"Wireless","level":2,"score":0.0},{"id":"https://openalex.org/C76155785","wikidata":"https://www.wikidata.org/wiki/Q418","display_name":"Telecommunications","level":1,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1109/robot.2010.5509795","is_oa":false,"landing_page_url":"https://doi.org/10.1109/robot.2010.5509795","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2010 IEEE International Conference on Robotics and Automation","raw_type":"proceedings-article"}],"best_oa_location":null,"sustainable_development_goals":[{"display_name":"Industry, innovation and infrastructure","score":0.4399999976158142,"id":"https://metadata.un.org/sdg/9"}],"awards":[],"funders":[],"has_content":{"pdf":false,"grobid_xml":false},"content_urls":null,"referenced_works_count":13,"referenced_works":["https://openalex.org/W1887667083","https://openalex.org/W1994450846","https://openalex.org/W2025045734","https://openalex.org/W2106824714","https://openalex.org/W2109873998","https://openalex.org/W2127211976","https://openalex.org/W2152479613","https://openalex.org/W2157463321","https://openalex.org/W2330565231","https://openalex.org/W3149262199","https://openalex.org/W4238878907","https://openalex.org/W6648924464","https://openalex.org/W6656575379"],"related_works":["https://openalex.org/W2091351777","https://openalex.org/W2136017496","https://openalex.org/W1496200690","https://openalex.org/W2161197657","https://openalex.org/W2623598930","https://openalex.org/W2107464854","https://openalex.org/W2789387788","https://openalex.org/W2148220661","https://openalex.org/W4307017169","https://openalex.org/W2063976766"],"abstract_inverted_index":{"Current":[0],"top":[1],"down":[2],"manipulation":[3,165],"systems":[4],"used":[5],"in":[6,37,79],"micro":[7],"and":[8,29,63,74,82,97,117,137,149,164],"nanomanufacturing":[9],"are":[10,99,155],"many":[11],"orders":[12],"of":[13,40,140,151],"magnitude":[14],"larger":[15],"than":[16],"the":[17,38,71,93,105,127,152],"parts":[18],"being":[19],"handled,":[20],"leading":[21,85],"to":[22,86],"difficult":[23],"tradeoffs":[24],"between":[25],"their":[26],"precision,":[27],"throughput":[28,53],"cost.":[30],"This":[31],"paper":[32],"presents":[33],"recent":[34,77],"research":[35],"progress":[36,78],"manufacturing":[39],"millimeter":[41],"sized":[42],"robotic":[43],"positioning":[44,131,163],"technology":[45],"that":[46],"allows":[47],"combining":[48,130],"high":[49,52],"precision":[50,143],"with":[51,55],"along":[54],"other":[56],"application-specific":[57],"requirements":[58],"such":[59,145],"as":[60,146,161],"strength,":[61],"dexterity,":[62],"work":[64],"volume.":[65],"The":[66,101],"first":[67],"robot":[68,154],"type":[69],"is":[70,111],"ARRIpede":[72,94],"microcrawler,":[73],"we":[75,118,167],"describe":[76,119],"microrobot":[80,103],"packaging":[81],"backpack":[83],"electronics":[84],"its":[87],"untethered":[88],"operation.":[89],"Precision":[90],"measurements":[91],"describing":[92],"motion":[95],"resolution":[96,150],"repeatability":[98,148],"reported.":[100],"second":[102],"called":[104],"Articulated":[106],"Four":[107],"Axes":[108],"Microrobot":[109],"(AFAM)":[110],"a":[112,169,172,176],"3D":[113],"dexterous":[114],"micromanipulator":[115],"robot,":[116],"nanoindentation":[120,141],"experiments":[121],"using":[122,134],"SPM":[123],"tips":[124],"mounted":[125],"on":[126],"microrobot.":[128],"By":[129],"data":[132],"obtained":[133],"laser":[135],"interferometers":[136],"SEM":[138],"imaging":[139],"data,":[142],"metrics":[144],"accuracy,":[147],"AFAM":[153],"determined.":[156],"Using":[157],"these":[158],"two":[159],"microrobots":[160],"basic":[162],"units,":[166],"propose":[168],"concept":[170],"for":[171],"nanoassembly":[173],"module,":[174],"or":[175],"so-called":[177],"wafer-level":[178],"factory.":[179]},"counts_by_year":[{"year":2022,"cited_by_count":1},{"year":2020,"cited_by_count":2},{"year":2019,"cited_by_count":1},{"year":2018,"cited_by_count":1},{"year":2014,"cited_by_count":1},{"year":2012,"cited_by_count":1}],"updated_date":"2026-07-14T23:27:15.235271","created_date":"2025-10-10T00:00:00"}