{"id":"https://openalex.org/W1989341023","doi":"https://doi.org/10.1109/robot.2009.5152555","title":"Scanning in atomic force microscopy","display_name":"Scanning in atomic force microscopy","publication_year":2009,"publication_date":"2009-05-01","ids":{"openalex":"https://openalex.org/W1989341023","doi":"https://doi.org/10.1109/robot.2009.5152555","mag":"1989341023"},"language":"en","primary_location":{"id":"doi:10.1109/robot.2009.5152555","is_oa":false,"landing_page_url":"https://doi.org/10.1109/robot.2009.5152555","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2009 IEEE International Conference on Robotics and Automation","raw_type":"proceedings-article"},"type":"conference-paper","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5100416370","display_name":"Dongdong Zhang","orcid":"https://orcid.org/0000-0002-0091-1803"},"institutions":[{"id":"https://openalex.org/I180949307","display_name":"Illinois Institute of Technology","ror":"https://ror.org/037t3ry66","country_code":"US","type":"education","lineage":["https://openalex.org/I180949307"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"Dongdong Zhang","raw_affiliation_strings":["Illinois Institute of Technology, Chicago, IL, USA","Illinois Institute of Technology, Chicago, 60616, USA"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Illinois Institute of Technology, Chicago, IL, USA","institution_ids":["https://openalex.org/I180949307"]},{"raw_affiliation_string":"Illinois Institute of Technology, Chicago, 60616, USA","institution_ids":["https://openalex.org/I180949307"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5053016644","display_name":"Xiaoping Qian","orcid":"https://orcid.org/0000-0002-9159-9877"},"institutions":[{"id":"https://openalex.org/I180949307","display_name":"Illinois Institute of Technology","ror":"https://ror.org/037t3ry66","country_code":"US","type":"education","lineage":["https://openalex.org/I180949307"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"Xiaoping Qian","raw_affiliation_strings":["Illinois Institute of Technology, Chicago, IL, USA","Illinois Institute of Technology, Chicago, 60616, USA"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Illinois Institute of Technology, Chicago, IL, USA","institution_ids":["https://openalex.org/I180949307"]},{"raw_affiliation_string":"Illinois Institute of Technology, Chicago, 60616, USA","institution_ids":["https://openalex.org/I180949307"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":1,"corresponding_author_ids":[],"corresponding_institution_ids":["https://openalex.org/I180949307"],"apc_list":null,"apc_paid":null,"fwci":null,"has_fulltext":false,"cited_by_count":0,"citation_normalized_percentile":null,"cited_by_percentile_year":null,"biblio":{"volume":"26","issue":null,"first_page":"532","last_page":"537"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10923","display_name":"Force Microscopy Techniques and Applications","score":1.0,"subfield":{"id":"https://openalex.org/subfields/3107","display_name":"Atomic and Molecular Physics, and Optics"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10923","display_name":"Force Microscopy Techniques and Applications","score":1.0,"subfield":{"id":"https://openalex.org/subfields/3107","display_name":"Atomic and Molecular Physics, and Optics"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T14117","display_name":"Integrated Circuits and Semiconductor Failure Analysis","score":0.9994999766349792,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T12466","display_name":"Near-Field Optical Microscopy","score":0.9983999729156494,"subfield":{"id":"https://openalex.org/subfields/2204","display_name":"Biomedical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/curvature","display_name":"Curvature","score":0.7643787860870361},{"id":"https://openalex.org/keywords/scanning-probe-microscopy","display_name":"Scanning probe microscopy","score":0.5817062258720398},{"id":"https://openalex.org/keywords/scanning-force-microscopy","display_name":"Scanning Force Microscopy","score":0.558539092540741},{"id":"https://openalex.org/keywords/atomic-force-microscopy","display_name":"Atomic force microscopy","score":0.5169538855552673},{"id":"https://openalex.org/keywords/scan-line","display_name":"Scan line","score":0.49723556637763977},{"id":"https://openalex.org/keywords/microscopy","display_name":"Microscopy","score":0.47763338685035706},{"id":"https://openalex.org/keywords/materials-science","display_name":"Materials science","score":0.42992037534713745},{"id":"https://openalex.org/keywords/optics","display_name":"Optics","score":0.3922802209854126},{"id":"https://openalex.org/keywords/physics","display_name":"Physics","score":0.3032979965209961},{"id":"https://openalex.org/keywords/geometry","display_name":"Geometry","score":0.21511700749397278},{"id":"https://openalex.org/keywords/nanotechnology","display_name":"Nanotechnology","score":0.18069440126419067},{"id":"https://openalex.org/keywords/pixel","display_name":"Pixel","score":0.14839935302734375},{"id":"https://openalex.org/keywords/mathematics","display_name":"Mathematics","score":0.12307214736938477}],"concepts":[{"id":"https://openalex.org/C195065555","wikidata":"https://www.wikidata.org/wiki/Q214881","display_name":"Curvature","level":2,"score":0.7643787860870361},{"id":"https://openalex.org/C36628996","wikidata":"https://www.wikidata.org/wiki/Q907287","display_name":"Scanning probe microscopy","level":2,"score":0.5817062258720398},{"id":"https://openalex.org/C2909055331","wikidata":"https://www.wikidata.org/wiki/Q49295","display_name":"Scanning Force Microscopy","level":3,"score":0.558539092540741},{"id":"https://openalex.org/C102951782","wikidata":"https://www.wikidata.org/wiki/Q49295","display_name":"Atomic force microscopy","level":2,"score":0.5169538855552673},{"id":"https://openalex.org/C142748172","wikidata":"https://www.wikidata.org/wiki/Q3240002","display_name":"Scan line","level":4,"score":0.49723556637763977},{"id":"https://openalex.org/C147080431","wikidata":"https://www.wikidata.org/wiki/Q1074953","display_name":"Microscopy","level":2,"score":0.47763338685035706},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.42992037534713745},{"id":"https://openalex.org/C120665830","wikidata":"https://www.wikidata.org/wiki/Q14620","display_name":"Optics","level":1,"score":0.3922802209854126},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.3032979965209961},{"id":"https://openalex.org/C2524010","wikidata":"https://www.wikidata.org/wiki/Q8087","display_name":"Geometry","level":1,"score":0.21511700749397278},{"id":"https://openalex.org/C171250308","wikidata":"https://www.wikidata.org/wiki/Q11468","display_name":"Nanotechnology","level":1,"score":0.18069440126419067},{"id":"https://openalex.org/C160633673","wikidata":"https://www.wikidata.org/wiki/Q355198","display_name":"Pixel","level":2,"score":0.14839935302734375},{"id":"https://openalex.org/C33923547","wikidata":"https://www.wikidata.org/wiki/Q395","display_name":"Mathematics","level":0,"score":0.12307214736938477},{"id":"https://openalex.org/C78201319","wikidata":"https://www.wikidata.org/wiki/Q685727","display_name":"Grayscale","level":3,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1109/robot.2009.5152555","is_oa":false,"landing_page_url":"https://doi.org/10.1109/robot.2009.5152555","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2009 IEEE International Conference on Robotics and Automation","raw_type":"proceedings-article"}],"best_oa_location":null,"sustainable_development_goals":[{"score":0.6399999856948853,"id":"https://metadata.un.org/sdg/7","display_name":"Affordable and clean energy"}],"awards":[],"funders":[],"has_content":{"pdf":false,"grobid_xml":false},"content_urls":null,"referenced_works_count":22,"referenced_works":["https://openalex.org/W1991811230","https://openalex.org/W1993947032","https://openalex.org/W1995132389","https://openalex.org/W2000081328","https://openalex.org/W2002090291","https://openalex.org/W2013005056","https://openalex.org/W2022802646","https://openalex.org/W2024060504","https://openalex.org/W2040671013","https://openalex.org/W2047828308","https://openalex.org/W2056526779","https://openalex.org/W2088216802","https://openalex.org/W2093603011","https://openalex.org/W2118600801","https://openalex.org/W2119947613","https://openalex.org/W2124008016","https://openalex.org/W2144193392","https://openalex.org/W2167235502","https://openalex.org/W2167863951","https://openalex.org/W3137369665","https://openalex.org/W3146248903","https://openalex.org/W3150248096"],"related_works":["https://openalex.org/W2271022063","https://openalex.org/W4394584065","https://openalex.org/W2478996295","https://openalex.org/W1976834572","https://openalex.org/W1646861040","https://openalex.org/W2032968911","https://openalex.org/W2313752941","https://openalex.org/W2029367975","https://openalex.org/W1993703324","https://openalex.org/W1559834722"],"abstract_inverted_index":{"In":[0],"this":[1,20],"paper,":[2],"we":[3],"present":[4],"an":[5],"adaptive":[6,54,73],"scanning":[7,31,35],"approach":[8,22,43],"for":[9],"atomic":[10],"force":[11],"microscopy":[12],"(AFM)":[13],"imaging.":[14],"Our":[15],"simulation":[16],"results":[17],"demonstrate":[18],"that":[19],"new":[21,42],"can":[23],"achieve":[24],"approximately":[25],"one":[26],"order":[27],"of":[28,40],"magnitude":[29],"better":[30],"efficiency":[32],"over":[33],"current":[34],"method.":[36],"The":[37],"basic":[38],"idea":[39],"our":[41],"is":[44,53,72],"two-fold:":[45],"the":[46,50,56,62,65,69,77],"scan":[47],"speed":[48],"along":[49,68,76],"fast-scan":[51,63],"axis":[52,71],"to":[55,74],"local":[57],"curvature":[58,75],"and":[59],"slope":[60],"in":[61],"direction;":[64],"scan-line":[66],"interval":[67],"slow-scan":[70,78],"direction.":[79]},"counts_by_year":[],"updated_date":"2026-07-14T23:27:15.235271","created_date":"2025-10-10T00:00:00"}