{"id":"https://openalex.org/W2105380167","doi":"https://doi.org/10.1109/robot.2009.5152195","title":"Piezoelectrically driven silicon microgrippers integrated with sidewall piezoresistive sensor","display_name":"Piezoelectrically driven silicon microgrippers integrated with sidewall piezoresistive sensor","publication_year":2009,"publication_date":"2009-05-01","ids":{"openalex":"https://openalex.org/W2105380167","doi":"https://doi.org/10.1109/robot.2009.5152195","mag":"2105380167"},"language":"en","primary_location":{"id":"doi:10.1109/robot.2009.5152195","is_oa":false,"landing_page_url":"https://doi.org/10.1109/robot.2009.5152195","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2009 IEEE International Conference on Robotics and Automation","raw_type":"proceedings-article"},"type":"conference-paper","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5100765926","display_name":"Tao Chen","orcid":"https://orcid.org/0000-0003-3550-2310"},"institutions":[{"id":"https://openalex.org/I204983213","display_name":"Harbin Institute of Technology","ror":"https://ror.org/01yqg2h08","country_code":"CN","type":"education","lineage":["https://openalex.org/I204983213"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Tao Chen","raw_affiliation_strings":["State Key Laboratory of Robotics and System, Robotics Institute, Harbin Institute of Technology, Harbin, China","State Key Laboratory of Robotics and System, Robotics Institute, Harbin Institute of Technology, 150080, CHINA"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"State Key Laboratory of Robotics and System, Robotics Institute, Harbin Institute of Technology, Harbin, China","institution_ids":["https://openalex.org/I204983213"]},{"raw_affiliation_string":"State Key Laboratory of Robotics and System, Robotics Institute, Harbin Institute of Technology, 150080, CHINA","institution_ids":["https://openalex.org/I204983213"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5102011281","display_name":"Liguo Chen","orcid":"https://orcid.org/0000-0002-5898-3148"},"institutions":[{"id":"https://openalex.org/I204983213","display_name":"Harbin Institute of Technology","ror":"https://ror.org/01yqg2h08","country_code":"CN","type":"education","lineage":["https://openalex.org/I204983213"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Liguo Chen","raw_affiliation_strings":["State Key Laboratory of Robotics and System, Robotics Institute, Harbin Institute of Technology, Harbin, China","State Key Laboratory of Robotics and System, Robotics Institute, Harbin Institute of Technology, 150080, CHINA"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"State Key Laboratory of Robotics and System, Robotics Institute, Harbin Institute of Technology, Harbin, China","institution_ids":["https://openalex.org/I204983213"]},{"raw_affiliation_string":"State Key Laboratory of Robotics and System, Robotics Institute, Harbin Institute of Technology, 150080, CHINA","institution_ids":["https://openalex.org/I204983213"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5103061771","display_name":"Lining Sun","orcid":"https://orcid.org/0000-0002-9354-735X"},"institutions":[{"id":"https://openalex.org/I204983213","display_name":"Harbin Institute of Technology","ror":"https://ror.org/01yqg2h08","country_code":"CN","type":"education","lineage":["https://openalex.org/I204983213"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Lining Sun","raw_affiliation_strings":["State Key Laboratory of Robotics and System, Robotics Institute, Harbin Institute of Technology, Harbin, China","State Key Laboratory of Robotics and System, Robotics Institute, Harbin Institute of Technology, 150080, CHINA"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"State Key Laboratory of Robotics and System, Robotics Institute, Harbin Institute of Technology, Harbin, China","institution_ids":["https://openalex.org/I204983213"]},{"raw_affiliation_string":"State Key Laboratory of Robotics and System, Robotics Institute, Harbin Institute of Technology, 150080, CHINA","institution_ids":["https://openalex.org/I204983213"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":1,"corresponding_author_ids":[],"corresponding_institution_ids":["https://openalex.org/I204983213"],"apc_list":null,"apc_paid":null,"fwci":null,"has_fulltext":false,"cited_by_count":11,"citation_normalized_percentile":null,"cited_by_percentile_year":null,"biblio":{"volume":null,"issue":null,"first_page":"2989","last_page":"2994"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":1.0,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":1.0,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11449","display_name":"Mechanical and Optical Resonators","score":0.9997000098228455,"subfield":{"id":"https://openalex.org/subfields/3107","display_name":"Atomic and Molecular Physics, and Optics"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10923","display_name":"Force Microscopy Techniques and Applications","score":0.9994000196456909,"subfield":{"id":"https://openalex.org/subfields/3107","display_name":"Atomic and Molecular Physics, and Optics"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/piezoresistive-effect","display_name":"Piezoresistive effect","score":0.9370791912078857},{"id":"https://openalex.org/keywords/microactuator","display_name":"Microactuator","score":0.7970391511917114},{"id":"https://openalex.org/keywords/materials-science","display_name":"Materials science","score":0.7965942621231079},{"id":"https://openalex.org/keywords/cantilever","display_name":"Cantilever","score":0.7635797262191772},{"id":"https://openalex.org/keywords/wafer","display_name":"Wafer","score":0.6453962922096252},{"id":"https://openalex.org/keywords/surface-micromachining","display_name":"Surface micromachining","score":0.6308643817901611},{"id":"https://openalex.org/keywords/etching","display_name":"Etching (microfabrication)","score":0.568480372428894},{"id":"https://openalex.org/keywords/microelectromechanical-systems","display_name":"Microelectromechanical systems","score":0.5532467365264893},{"id":"https://openalex.org/keywords/optoelectronics","display_name":"Optoelectronics","score":0.541883111000061},{"id":"https://openalex.org/keywords/fabrication","display_name":"Fabrication","score":0.5064734220504761},{"id":"https://openalex.org/keywords/silicon","display_name":"Silicon","score":0.501884937286377},{"id":"https://openalex.org/keywords/bulk-micromachining","display_name":"Bulk micromachining","score":0.4914432764053345},{"id":"https://openalex.org/keywords/bar","display_name":"Bar (unit)","score":0.44563838839530945},{"id":"https://openalex.org/keywords/grippers","display_name":"Grippers","score":0.4424574673175812},{"id":"https://openalex.org/keywords/acoustics","display_name":"Acoustics","score":0.39616990089416504},{"id":"https://openalex.org/keywords/electrical-engineering","display_name":"Electrical engineering","score":0.2631152272224426},{"id":"https://openalex.org/keywords/nanotechnology","display_name":"Nanotechnology","score":0.25639933347702026},{"id":"https://openalex.org/keywords/mechanical-engineering","display_name":"Mechanical engineering","score":0.223348468542099},{"id":"https://openalex.org/keywords/actuator","display_name":"Actuator","score":0.20510488748550415},{"id":"https://openalex.org/keywords/engineering","display_name":"Engineering","score":0.19027504324913025},{"id":"https://openalex.org/keywords/composite-material","display_name":"Composite material","score":0.12345960736274719}],"concepts":[{"id":"https://openalex.org/C198490522","wikidata":"https://www.wikidata.org/wiki/Q1932915","display_name":"Piezoresistive effect","level":2,"score":0.9370791912078857},{"id":"https://openalex.org/C58373989","wikidata":"https://www.wikidata.org/wiki/Q6839208","display_name":"Microactuator","level":3,"score":0.7970391511917114},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.7965942621231079},{"id":"https://openalex.org/C141354745","wikidata":"https://www.wikidata.org/wiki/Q17227","display_name":"Cantilever","level":2,"score":0.7635797262191772},{"id":"https://openalex.org/C160671074","wikidata":"https://www.wikidata.org/wiki/Q267131","display_name":"Wafer","level":2,"score":0.6453962922096252},{"id":"https://openalex.org/C145667562","wikidata":"https://www.wikidata.org/wiki/Q7646003","display_name":"Surface micromachining","level":4,"score":0.6308643817901611},{"id":"https://openalex.org/C100460472","wikidata":"https://www.wikidata.org/wiki/Q2368605","display_name":"Etching (microfabrication)","level":3,"score":0.568480372428894},{"id":"https://openalex.org/C37977207","wikidata":"https://www.wikidata.org/wiki/Q175561","display_name":"Microelectromechanical systems","level":2,"score":0.5532467365264893},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.541883111000061},{"id":"https://openalex.org/C136525101","wikidata":"https://www.wikidata.org/wiki/Q5428139","display_name":"Fabrication","level":3,"score":0.5064734220504761},{"id":"https://openalex.org/C544956773","wikidata":"https://www.wikidata.org/wiki/Q670","display_name":"Silicon","level":2,"score":0.501884937286377},{"id":"https://openalex.org/C41075158","wikidata":"https://www.wikidata.org/wiki/Q4996485","display_name":"Bulk micromachining","level":5,"score":0.4914432764053345},{"id":"https://openalex.org/C188721877","wikidata":"https://www.wikidata.org/wiki/Q103510","display_name":"Bar (unit)","level":2,"score":0.44563838839530945},{"id":"https://openalex.org/C2775960376","wikidata":"https://www.wikidata.org/wiki/Q1435859","display_name":"Grippers","level":2,"score":0.4424574673175812},{"id":"https://openalex.org/C24890656","wikidata":"https://www.wikidata.org/wiki/Q82811","display_name":"Acoustics","level":1,"score":0.39616990089416504},{"id":"https://openalex.org/C119599485","wikidata":"https://www.wikidata.org/wiki/Q43035","display_name":"Electrical engineering","level":1,"score":0.2631152272224426},{"id":"https://openalex.org/C171250308","wikidata":"https://www.wikidata.org/wiki/Q11468","display_name":"Nanotechnology","level":1,"score":0.25639933347702026},{"id":"https://openalex.org/C78519656","wikidata":"https://www.wikidata.org/wiki/Q101333","display_name":"Mechanical engineering","level":1,"score":0.223348468542099},{"id":"https://openalex.org/C172707124","wikidata":"https://www.wikidata.org/wiki/Q423488","display_name":"Actuator","level":2,"score":0.20510488748550415},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.19027504324913025},{"id":"https://openalex.org/C159985019","wikidata":"https://www.wikidata.org/wiki/Q181790","display_name":"Composite material","level":1,"score":0.12345960736274719},{"id":"https://openalex.org/C71924100","wikidata":"https://www.wikidata.org/wiki/Q11190","display_name":"Medicine","level":0,"score":0.0},{"id":"https://openalex.org/C204787440","wikidata":"https://www.wikidata.org/wiki/Q188504","display_name":"Alternative medicine","level":2,"score":0.0},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.0},{"id":"https://openalex.org/C153294291","wikidata":"https://www.wikidata.org/wiki/Q25261","display_name":"Meteorology","level":1,"score":0.0},{"id":"https://openalex.org/C2779227376","wikidata":"https://www.wikidata.org/wiki/Q6505497","display_name":"Layer (electronics)","level":2,"score":0.0},{"id":"https://openalex.org/C142724271","wikidata":"https://www.wikidata.org/wiki/Q7208","display_name":"Pathology","level":1,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1109/robot.2009.5152195","is_oa":false,"landing_page_url":"https://doi.org/10.1109/robot.2009.5152195","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2009 IEEE International Conference on Robotics and Automation","raw_type":"proceedings-article"}],"best_oa_location":null,"sustainable_development_goals":[{"score":0.49000000953674316,"display_name":"Affordable and clean energy","id":"https://metadata.un.org/sdg/7"}],"awards":[],"funders":[],"has_content":{"pdf":false,"grobid_xml":false},"content_urls":null,"referenced_works_count":18,"referenced_works":["https://openalex.org/W15299909","https://openalex.org/W2019701651","https://openalex.org/W2032811538","https://openalex.org/W2045121907","https://openalex.org/W2053254070","https://openalex.org/W2057189462","https://openalex.org/W2059366127","https://openalex.org/W2106767637","https://openalex.org/W2112274618","https://openalex.org/W2118297421","https://openalex.org/W2149950223","https://openalex.org/W2160317468","https://openalex.org/W2162885200","https://openalex.org/W2211240601","https://openalex.org/W2295789906","https://openalex.org/W3009835395","https://openalex.org/W6676917501","https://openalex.org/W6688146035"],"related_works":["https://openalex.org/W1991787930","https://openalex.org/W2296264082","https://openalex.org/W1501419981","https://openalex.org/W3215636742","https://openalex.org/W2096478611","https://openalex.org/W1991559067","https://openalex.org/W2022641457","https://openalex.org/W199926285","https://openalex.org/W2061864336","https://openalex.org/W2059967747"],"abstract_inverted_index":{"This":[0],"paper":[1],"presents":[2],"the":[3,20,36,54,61,78,90,94,104,121,125,128,131,143,155,164],"design,":[4],"fabrication,":[5],"and":[6,24,33,81,163],"application":[7],"of":[8,35,60,124,130,154],"an":[9],"piezoelectrically":[10,83,100],"driven":[11,84],"microgripper":[12,37],"integrated":[13,70],"sidewall":[14,45,145],"piezoresistive":[15,72,156],"force":[16,91],"sensor":[17,34,73],"for":[18],"measuring":[19],"gripping":[21,79],"force.":[22],"Surface":[23],"bulk":[25],"micromachining":[26],"technology":[27],"is":[28,50,86,115,133,150,158,166],"employed":[29],"to":[30,52,76,88,92,117],"fabricate":[31],"end-effectors":[32,59,106],"from":[38],"a":[39,82,108],"single":[40],"crystal":[41],"silicon":[42,105],"wafer.":[43],"Vertical":[44],"surface":[46,146],"piezoresistor":[47,147],"etching":[48,148],"technique":[49,149],"used":[51],"form":[53],"side":[55],"direction":[56],"sensors.":[57],"The":[58,99,152],"gripper":[62],"are":[63,74],"four-bar":[64],"structures.":[65],"Two":[66],"fixed":[67],"cantilever":[68],"beams":[69],"with":[71,103],"designed":[75,87],"sense":[77],"force,":[80],"microactuator":[85],"provide":[89],"operate":[93],"other":[95],"two":[96],"movable":[97],"bars.":[98],"driver":[101],"adhered":[102],"generates":[107],"linear":[109],"horizontal":[110],"motion":[111],"9":[112],"mum,":[113],"which":[114],"amplified":[116],"30":[118],"mum":[119,135],"at":[120],"bar":[122],"tip":[123],"microgripper.":[126],"Then":[127],"range":[129],"operation":[132],"25":[134],"-":[136],"140":[137],"mum.":[138],"Testing":[139],"results":[140],"verify":[141],"that":[142],"vertical":[144],"effective.":[151],"sensitivity":[153],"sensors":[157],"better":[159,167],"than":[160,168],"72":[161],"V/N,":[162],"resolution":[165],"3":[169],"muN.":[170]},"counts_by_year":[{"year":2023,"cited_by_count":1},{"year":2019,"cited_by_count":1},{"year":2017,"cited_by_count":2},{"year":2016,"cited_by_count":1},{"year":2014,"cited_by_count":2},{"year":2013,"cited_by_count":1},{"year":2012,"cited_by_count":1}],"updated_date":"2026-07-14T23:27:15.235271","created_date":"2025-10-10T00:00:00"}