{"id":"https://openalex.org/W2132235560","doi":"https://doi.org/10.1109/robot.2005.1570111","title":"Step Modelling of a High Precision 2DoF (Linear-Angular) Microsystem","display_name":"Step Modelling of a High Precision 2DoF (Linear-Angular) Microsystem","publication_year":2006,"publication_date":"2006-01-18","ids":{"openalex":"https://openalex.org/W2132235560","doi":"https://doi.org/10.1109/robot.2005.1570111","mag":"2132235560"},"language":"en","primary_location":{"id":"doi:10.1109/robot.2005.1570111","is_oa":false,"landing_page_url":"https://doi.org/10.1109/robot.2005.1570111","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Proceedings of the 2005 IEEE International Conference on Robotics and Automation","raw_type":"proceedings-article"},"type":"article","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5019160451","display_name":"Micky Rakotondrabe","orcid":"https://orcid.org/0000-0002-6413-7271"},"institutions":[{"id":"https://openalex.org/I53262699","display_name":"\u00c9cole Nationale Sup\u00e9rieure de M\u00e9canique et des Microtechniques","ror":"https://ror.org/05813w841","country_code":"FR","type":"education","lineage":["https://openalex.org/I53262699"]},{"id":"https://openalex.org/I90843659","display_name":"Universit\u00e9 de franche-comt\u00e9","ror":"https://ror.org/03pcc9z86","country_code":"FR","type":"education","lineage":["https://openalex.org/I90843659"]},{"id":"https://openalex.org/I1294671590","display_name":"Centre National de la Recherche Scientifique","ror":"https://ror.org/02feahw73","country_code":"FR","type":"funder","lineage":["https://openalex.org/I1294671590"]}],"countries":["FR"],"is_corresponding":true,"raw_author_name":"M. Rakotondrabe","raw_affiliation_strings":["Laboratoire d'Automatique de Besan\u00e7on-CNRS UMR6596, Universita de Franche-Comt\u00e9-ENSMM, Besancon, France","Laboratoire d\u2019Automatique de Besan\u00e7on - CNRS UMR6596 Universit\u00e9 de Franche-Comt\u00e9 - ENSMM 24, rue Alain Savary 25000 Besan\u00e7on - France mrakoton@ens2m.fr"],"affiliations":[{"raw_affiliation_string":"Laboratoire d'Automatique de Besan\u00e7on-CNRS UMR6596, Universita de Franche-Comt\u00e9-ENSMM, Besancon, France","institution_ids":["https://openalex.org/I90843659","https://openalex.org/I1294671590","https://openalex.org/I53262699"]},{"raw_affiliation_string":"Laboratoire d\u2019Automatique de Besan\u00e7on - CNRS UMR6596 Universit\u00e9 de Franche-Comt\u00e9 - ENSMM 24, rue Alain Savary 25000 Besan\u00e7on - France mrakoton@ens2m.fr","institution_ids":["https://openalex.org/I90843659","https://openalex.org/I1294671590"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5018599664","display_name":"Yassine Haddab","orcid":"https://orcid.org/0000-0001-7931-2645"},"institutions":[{"id":"https://openalex.org/I90843659","display_name":"Universit\u00e9 de franche-comt\u00e9","ror":"https://ror.org/03pcc9z86","country_code":"FR","type":"education","lineage":["https://openalex.org/I90843659"]},{"id":"https://openalex.org/I1294671590","display_name":"Centre National de la Recherche Scientifique","ror":"https://ror.org/02feahw73","country_code":"FR","type":"funder","lineage":["https://openalex.org/I1294671590"]},{"id":"https://openalex.org/I53262699","display_name":"\u00c9cole Nationale Sup\u00e9rieure de M\u00e9canique et des Microtechniques","ror":"https://ror.org/05813w841","country_code":"FR","type":"education","lineage":["https://openalex.org/I53262699"]}],"countries":["FR"],"is_corresponding":false,"raw_author_name":"Y. Haddab","raw_affiliation_strings":["Laboratoire d'Automatique de Besan\u00e7on-CNRS UMR6596, Universita de Franche-Comt\u00e9-ENSMM, Besancon, France","Laboratoire d'automatique de Besan\u00e7on"],"affiliations":[{"raw_affiliation_string":"Laboratoire d'Automatique de Besan\u00e7on-CNRS UMR6596, Universita de Franche-Comt\u00e9-ENSMM, Besancon, France","institution_ids":["https://openalex.org/I90843659","https://openalex.org/I1294671590","https://openalex.org/I53262699"]},{"raw_affiliation_string":"Laboratoire d'automatique de Besan\u00e7on","institution_ids":[]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5074838137","display_name":"Philippe Lutz","orcid":"https://orcid.org/0000-0002-8918-8155"},"institutions":[{"id":"https://openalex.org/I90843659","display_name":"Universit\u00e9 de franche-comt\u00e9","ror":"https://ror.org/03pcc9z86","country_code":"FR","type":"education","lineage":["https://openalex.org/I90843659"]},{"id":"https://openalex.org/I1294671590","display_name":"Centre National de la Recherche Scientifique","ror":"https://ror.org/02feahw73","country_code":"FR","type":"funder","lineage":["https://openalex.org/I1294671590"]},{"id":"https://openalex.org/I53262699","display_name":"\u00c9cole Nationale Sup\u00e9rieure de M\u00e9canique et des Microtechniques","ror":"https://ror.org/05813w841","country_code":"FR","type":"education","lineage":["https://openalex.org/I53262699"]}],"countries":["FR"],"is_corresponding":false,"raw_author_name":"P. Lutz","raw_affiliation_strings":["Laboratoire d'Automatique de Besan\u00e7on-CNRS UMR6596, Universita de Franche-Comt\u00e9-ENSMM, Besancon, France","Laboratoire d'automatique de Besan\u00e7on"],"affiliations":[{"raw_affiliation_string":"Laboratoire d'Automatique de Besan\u00e7on-CNRS UMR6596, Universita de Franche-Comt\u00e9-ENSMM, Besancon, France","institution_ids":["https://openalex.org/I90843659","https://openalex.org/I1294671590","https://openalex.org/I53262699"]},{"raw_affiliation_string":"Laboratoire d'automatique de Besan\u00e7on","institution_ids":[]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":3,"corresponding_author_ids":["https://openalex.org/A5019160451"],"corresponding_institution_ids":["https://openalex.org/I1294671590","https://openalex.org/I53262699","https://openalex.org/I90843659"],"apc_list":null,"apc_paid":null,"fwci":1.5044,"has_fulltext":false,"cited_by_count":4,"citation_normalized_percentile":{"value":0.83714779,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":null,"biblio":{"volume":null,"issue":null,"first_page":"150","last_page":"156"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":0.9998000264167786,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":0.9998000264167786,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11749","display_name":"Iterative Learning Control Systems","score":0.9993000030517578,"subfield":{"id":"https://openalex.org/subfields/2207","display_name":"Control and Systems Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11525","display_name":"Piezoelectric Actuators and Control","score":0.9987999796867371,"subfield":{"id":"https://openalex.org/subfields/2207","display_name":"Control and Systems Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/microsystem","display_name":"Microsystem","score":0.9694392681121826},{"id":"https://openalex.org/keywords/microactuator","display_name":"Microactuator","score":0.9416455030441284},{"id":"https://openalex.org/keywords/linear-motion","display_name":"Linear motion","score":0.5962224006652832},{"id":"https://openalex.org/keywords/linear-system","display_name":"Linear system","score":0.5241915583610535},{"id":"https://openalex.org/keywords/control-theory","display_name":"Control theory (sociology)","score":0.5148455500602722},{"id":"https://openalex.org/keywords/finite-element-method","display_name":"Finite element method","score":0.44809016585350037},{"id":"https://openalex.org/keywords/linear-approximation","display_name":"Linear approximation","score":0.42502155900001526},{"id":"https://openalex.org/keywords/angular-velocity","display_name":"Angular velocity","score":0.41344061493873596},{"id":"https://openalex.org/keywords/computer-science","display_name":"Computer science","score":0.36347654461860657},{"id":"https://openalex.org/keywords/engineering","display_name":"Engineering","score":0.33077472448349},{"id":"https://openalex.org/keywords/mechanical-engineering","display_name":"Mechanical engineering","score":0.2806050181388855},{"id":"https://openalex.org/keywords/physics","display_name":"Physics","score":0.24698802828788757},{"id":"https://openalex.org/keywords/materials-science","display_name":"Materials science","score":0.24315404891967773},{"id":"https://openalex.org/keywords/mathematics","display_name":"Mathematics","score":0.20320215821266174},{"id":"https://openalex.org/keywords/nonlinear-system","display_name":"Nonlinear system","score":0.19183680415153503},{"id":"https://openalex.org/keywords/classical-mechanics","display_name":"Classical mechanics","score":0.16460353136062622},{"id":"https://openalex.org/keywords/actuator","display_name":"Actuator","score":0.16120284795761108},{"id":"https://openalex.org/keywords/mathematical-analysis","display_name":"Mathematical analysis","score":0.147599995136261},{"id":"https://openalex.org/keywords/linear-motor","display_name":"Linear motor","score":0.12270408868789673},{"id":"https://openalex.org/keywords/nanotechnology","display_name":"Nanotechnology","score":0.11792108416557312},{"id":"https://openalex.org/keywords/structural-engineering","display_name":"Structural engineering","score":0.09425222873687744},{"id":"https://openalex.org/keywords/artificial-intelligence","display_name":"Artificial intelligence","score":0.0809335708618164}],"concepts":[{"id":"https://openalex.org/C151054161","wikidata":"https://www.wikidata.org/wiki/Q379385","display_name":"Microsystem","level":2,"score":0.9694392681121826},{"id":"https://openalex.org/C58373989","wikidata":"https://www.wikidata.org/wiki/Q6839208","display_name":"Microactuator","level":3,"score":0.9416455030441284},{"id":"https://openalex.org/C98068282","wikidata":"https://www.wikidata.org/wiki/Q2035846","display_name":"Linear motion","level":3,"score":0.5962224006652832},{"id":"https://openalex.org/C6802819","wikidata":"https://www.wikidata.org/wiki/Q1072174","display_name":"Linear system","level":2,"score":0.5241915583610535},{"id":"https://openalex.org/C47446073","wikidata":"https://www.wikidata.org/wiki/Q5165890","display_name":"Control theory (sociology)","level":3,"score":0.5148455500602722},{"id":"https://openalex.org/C135628077","wikidata":"https://www.wikidata.org/wiki/Q220184","display_name":"Finite element method","level":2,"score":0.44809016585350037},{"id":"https://openalex.org/C160824197","wikidata":"https://www.wikidata.org/wiki/Q2071054","display_name":"Linear approximation","level":3,"score":0.42502155900001526},{"id":"https://openalex.org/C5594486","wikidata":"https://www.wikidata.org/wiki/Q161635","display_name":"Angular velocity","level":2,"score":0.41344061493873596},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.36347654461860657},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.33077472448349},{"id":"https://openalex.org/C78519656","wikidata":"https://www.wikidata.org/wiki/Q101333","display_name":"Mechanical engineering","level":1,"score":0.2806050181388855},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.24698802828788757},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.24315404891967773},{"id":"https://openalex.org/C33923547","wikidata":"https://www.wikidata.org/wiki/Q395","display_name":"Mathematics","level":0,"score":0.20320215821266174},{"id":"https://openalex.org/C158622935","wikidata":"https://www.wikidata.org/wiki/Q660848","display_name":"Nonlinear system","level":2,"score":0.19183680415153503},{"id":"https://openalex.org/C74650414","wikidata":"https://www.wikidata.org/wiki/Q11397","display_name":"Classical mechanics","level":1,"score":0.16460353136062622},{"id":"https://openalex.org/C172707124","wikidata":"https://www.wikidata.org/wiki/Q423488","display_name":"Actuator","level":2,"score":0.16120284795761108},{"id":"https://openalex.org/C134306372","wikidata":"https://www.wikidata.org/wiki/Q7754","display_name":"Mathematical analysis","level":1,"score":0.147599995136261},{"id":"https://openalex.org/C46150780","wikidata":"https://www.wikidata.org/wiki/Q1164566","display_name":"Linear motor","level":2,"score":0.12270408868789673},{"id":"https://openalex.org/C171250308","wikidata":"https://www.wikidata.org/wiki/Q11468","display_name":"Nanotechnology","level":1,"score":0.11792108416557312},{"id":"https://openalex.org/C66938386","wikidata":"https://www.wikidata.org/wiki/Q633538","display_name":"Structural engineering","level":1,"score":0.09425222873687744},{"id":"https://openalex.org/C154945302","wikidata":"https://www.wikidata.org/wiki/Q11660","display_name":"Artificial intelligence","level":1,"score":0.0809335708618164},{"id":"https://openalex.org/C2775924081","wikidata":"https://www.wikidata.org/wiki/Q55608371","display_name":"Control (management)","level":2,"score":0.0},{"id":"https://openalex.org/C62520636","wikidata":"https://www.wikidata.org/wiki/Q944","display_name":"Quantum mechanics","level":1,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1109/robot.2005.1570111","is_oa":false,"landing_page_url":"https://doi.org/10.1109/robot.2005.1570111","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Proceedings of the 2005 IEEE International Conference on Robotics and Automation","raw_type":"proceedings-article"}],"best_oa_location":null,"sustainable_development_goals":[],"awards":[],"funders":[],"has_content":{"pdf":false,"grobid_xml":false},"content_urls":null,"referenced_works_count":6,"referenced_works":["https://openalex.org/W1592369130","https://openalex.org/W2076717436","https://openalex.org/W2102895971","https://openalex.org/W2166271005","https://openalex.org/W2533298832","https://openalex.org/W2626863359"],"related_works":["https://openalex.org/W1854974761","https://openalex.org/W2529505344","https://openalex.org/W1956427519","https://openalex.org/W2132235560","https://openalex.org/W2000442883","https://openalex.org/W1544543734","https://openalex.org/W404289616","https://openalex.org/W622640540","https://openalex.org/W2094910373","https://openalex.org/W4387702022"],"abstract_inverted_index":{"In":[0],"this":[1],"paper,":[2],"a":[3,11,48],"new":[4],"type":[5],"of":[6,28,51,67],"microsystem":[7,46],"is":[8,24,32,42,61],"presented":[9],":":[10],"system":[12,54],"able":[13],"to":[14],"perform":[15],"linear":[16,56],"and":[17,47,57,64],"angular":[18,59],"motion.":[19],"First,":[20],"the":[21,29,45,52],"microactuator":[22,40],"used":[23,41],"studied.":[25,72],"An":[26],"approximation":[27],"working":[30],"equations":[31],"proposed":[33],"in":[34,44,55,58],"accordance":[35],"with":[36],"Finite-Element":[37],"simulation.":[38],"The":[39],"inserted":[43],"separated":[49],"modelling":[50],"whole":[53],"motion":[60,69],"given.":[62],"Stick":[63],"skid":[65],"phases":[66],"each":[68],"are":[70],"independently":[71]},"counts_by_year":[],"updated_date":"2025-11-06T03:46:38.306776","created_date":"2025-10-10T00:00:00"}