{"id":"https://openalex.org/W2160971697","doi":"https://doi.org/10.1109/robot.2002.1014779","title":"Dynamic analysis of micro touch sensor array synthesized by hydrothermal method","display_name":"Dynamic analysis of micro touch sensor array synthesized by hydrothermal method","publication_year":2003,"publication_date":"2003-06-25","ids":{"openalex":"https://openalex.org/W2160971697","doi":"https://doi.org/10.1109/robot.2002.1014779","mag":"2160971697"},"language":"en","primary_location":{"id":"doi:10.1109/robot.2002.1014779","is_oa":false,"landing_page_url":"https://doi.org/10.1109/robot.2002.1014779","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Proceedings 2002 IEEE International Conference on Robotics and Automation (Cat. No.02CH37292)","raw_type":"proceedings-article"},"type":"article","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5071532418","display_name":"Liqun Du","orcid":"https://orcid.org/0000-0003-0548-7797"},"institutions":[{"id":"https://openalex.org/I60134161","display_name":"Nagoya University","ror":"https://ror.org/04chrp450","country_code":"JP","type":"education","lineage":["https://openalex.org/I60134161"]}],"countries":["JP"],"is_corresponding":true,"raw_author_name":"L. Du","raw_affiliation_strings":["Department of Micro System Engineering, University of Nagoya, Nagoya, Japan"],"affiliations":[{"raw_affiliation_string":"Department of Micro System Engineering, University of Nagoya, Nagoya, Japan","institution_ids":["https://openalex.org/I60134161"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5091532948","display_name":"Fumihito Arai","orcid":"https://orcid.org/0000-0002-2508-1615"},"institutions":[{"id":"https://openalex.org/I60134161","display_name":"Nagoya University","ror":"https://ror.org/04chrp450","country_code":"JP","type":"education","lineage":["https://openalex.org/I60134161"]}],"countries":["JP"],"is_corresponding":false,"raw_author_name":"F. Arai","raw_affiliation_strings":["Department of Micro System Engineering, University of Nagoya, Nagoya, Japan"],"affiliations":[{"raw_affiliation_string":"Department of Micro System Engineering, University of Nagoya, Nagoya, Japan","institution_ids":["https://openalex.org/I60134161"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5111979319","display_name":"G. Kwon","orcid":null},"institutions":[{"id":"https://openalex.org/I60134161","display_name":"Nagoya University","ror":"https://ror.org/04chrp450","country_code":"JP","type":"education","lineage":["https://openalex.org/I60134161"]}],"countries":["JP"],"is_corresponding":false,"raw_author_name":"G. Kwon","raw_affiliation_strings":["Department of Micro System Engineering, University of Nagoya, Nagoya, Japan"],"affiliations":[{"raw_affiliation_string":"Department of Micro System Engineering, University of Nagoya, Nagoya, Japan","institution_ids":["https://openalex.org/I60134161"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5065569192","display_name":"Toshio Fukuda","orcid":"https://orcid.org/0000-0002-3885-7152"},"institutions":[{"id":"https://openalex.org/I60134161","display_name":"Nagoya University","ror":"https://ror.org/04chrp450","country_code":"JP","type":"education","lineage":["https://openalex.org/I60134161"]}],"countries":["JP"],"is_corresponding":false,"raw_author_name":"T. Fukuda","raw_affiliation_strings":["Center for Cooperative Research in Advanced Science and Technology, University of Nagoya, Nagoya, Japan"],"affiliations":[{"raw_affiliation_string":"Center for Cooperative Research in Advanced Science and Technology, University of Nagoya, Nagoya, Japan","institution_ids":["https://openalex.org/I60134161"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5113511292","display_name":"K. Itoigawa","orcid":null},"institutions":[{"id":"https://openalex.org/I4210099619","display_name":"Tokai Rika (Japan)","ror":"https://ror.org/012gxwa15","country_code":"JP","type":"company","lineage":["https://openalex.org/I4210099619"]}],"countries":["JP"],"is_corresponding":false,"raw_author_name":"K. Itoigawa","raw_affiliation_strings":["Tokai Rika Company Limited, Aichi, Japan"],"affiliations":[{"raw_affiliation_string":"Tokai Rika Company Limited, Aichi, Japan","institution_ids":["https://openalex.org/I4210099619"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5035419822","display_name":"Y. Tukahara","orcid":null},"institutions":[{"id":"https://openalex.org/I4210099619","display_name":"Tokai Rika (Japan)","ror":"https://ror.org/012gxwa15","country_code":"JP","type":"company","lineage":["https://openalex.org/I4210099619"]}],"countries":["JP"],"is_corresponding":false,"raw_author_name":"Y. Tukahara","raw_affiliation_strings":["Tokai Rika Company Limited, Aichi, Japan"],"affiliations":[{"raw_affiliation_string":"Tokai Rika Company Limited, Aichi, Japan","institution_ids":["https://openalex.org/I4210099619"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":6,"corresponding_author_ids":["https://openalex.org/A5071532418"],"corresponding_institution_ids":["https://openalex.org/I60134161"],"apc_list":null,"apc_paid":null,"fwci":0.8813,"has_fulltext":false,"cited_by_count":3,"citation_normalized_percentile":{"value":0.75881142,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":null,"biblio":{"volume":"2","issue":null,"first_page":"1649","last_page":"1654"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10338","display_name":"Advanced Sensor and Energy Harvesting Materials","score":0.9984999895095825,"subfield":{"id":"https://openalex.org/subfields/2204","display_name":"Biomedical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10338","display_name":"Advanced Sensor and Energy Harvesting Materials","score":0.9984999895095825,"subfield":{"id":"https://openalex.org/subfields/2204","display_name":"Biomedical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11799","display_name":"Adhesion, Friction, and Surface Interactions","score":0.9973000288009644,"subfield":{"id":"https://openalex.org/subfields/2211","display_name":"Mechanics of Materials"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11160","display_name":"Acoustic Wave Resonator Technologies","score":0.9944999814033508,"subfield":{"id":"https://openalex.org/subfields/2204","display_name":"Biomedical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/materials-science","display_name":"Materials science","score":0.740546703338623},{"id":"https://openalex.org/keywords/cantilever","display_name":"Cantilever","score":0.6631499528884888},{"id":"https://openalex.org/keywords/voltage","display_name":"Voltage","score":0.6300833821296692},{"id":"https://openalex.org/keywords/actuator","display_name":"Actuator","score":0.6234400272369385},{"id":"https://openalex.org/keywords/substrate","display_name":"Substrate (aquarium)","score":0.560302197933197},{"id":"https://openalex.org/keywords/optoelectronics","display_name":"Optoelectronics","score":0.535709023475647},{"id":"https://openalex.org/keywords/electrical-impedance","display_name":"Electrical impedance","score":0.5157464146614075},{"id":"https://openalex.org/keywords/acoustics","display_name":"Acoustics","score":0.43720555305480957},{"id":"https://openalex.org/keywords/computer-science","display_name":"Computer science","score":0.3526129126548767},{"id":"https://openalex.org/keywords/electrical-engineering","display_name":"Electrical engineering","score":0.284201979637146},{"id":"https://openalex.org/keywords/engineering","display_name":"Engineering","score":0.14169436693191528},{"id":"https://openalex.org/keywords/composite-material","display_name":"Composite material","score":0.09326183795928955},{"id":"https://openalex.org/keywords/physics","display_name":"Physics","score":0.0738781988620758}],"concepts":[{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.740546703338623},{"id":"https://openalex.org/C141354745","wikidata":"https://www.wikidata.org/wiki/Q17227","display_name":"Cantilever","level":2,"score":0.6631499528884888},{"id":"https://openalex.org/C165801399","wikidata":"https://www.wikidata.org/wiki/Q25428","display_name":"Voltage","level":2,"score":0.6300833821296692},{"id":"https://openalex.org/C172707124","wikidata":"https://www.wikidata.org/wiki/Q423488","display_name":"Actuator","level":2,"score":0.6234400272369385},{"id":"https://openalex.org/C2777289219","wikidata":"https://www.wikidata.org/wiki/Q7632154","display_name":"Substrate (aquarium)","level":2,"score":0.560302197933197},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.535709023475647},{"id":"https://openalex.org/C17829176","wikidata":"https://www.wikidata.org/wiki/Q179043","display_name":"Electrical impedance","level":2,"score":0.5157464146614075},{"id":"https://openalex.org/C24890656","wikidata":"https://www.wikidata.org/wiki/Q82811","display_name":"Acoustics","level":1,"score":0.43720555305480957},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.3526129126548767},{"id":"https://openalex.org/C119599485","wikidata":"https://www.wikidata.org/wiki/Q43035","display_name":"Electrical engineering","level":1,"score":0.284201979637146},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.14169436693191528},{"id":"https://openalex.org/C159985019","wikidata":"https://www.wikidata.org/wiki/Q181790","display_name":"Composite material","level":1,"score":0.09326183795928955},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.0738781988620758},{"id":"https://openalex.org/C111368507","wikidata":"https://www.wikidata.org/wiki/Q43518","display_name":"Oceanography","level":1,"score":0.0},{"id":"https://openalex.org/C127313418","wikidata":"https://www.wikidata.org/wiki/Q1069","display_name":"Geology","level":0,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1109/robot.2002.1014779","is_oa":false,"landing_page_url":"https://doi.org/10.1109/robot.2002.1014779","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Proceedings 2002 IEEE International Conference on Robotics and Automation (Cat. No.02CH37292)","raw_type":"proceedings-article"}],"best_oa_location":null,"sustainable_development_goals":[{"id":"https://metadata.un.org/sdg/7","display_name":"Affordable and clean energy","score":0.6800000071525574}],"awards":[],"funders":[],"has_content":{"grobid_xml":false,"pdf":false},"content_urls":null,"referenced_works_count":16,"referenced_works":["https://openalex.org/W1544043565","https://openalex.org/W1908425017","https://openalex.org/W2001416172","https://openalex.org/W2008123847","https://openalex.org/W2016355475","https://openalex.org/W2033034144","https://openalex.org/W2065779329","https://openalex.org/W2077557877","https://openalex.org/W2129814717","https://openalex.org/W2132129048","https://openalex.org/W2145401299","https://openalex.org/W2162372488","https://openalex.org/W2166437961","https://openalex.org/W2465690624","https://openalex.org/W6680019167","https://openalex.org/W6719530910"],"related_works":["https://openalex.org/W2107125189","https://openalex.org/W2303727101","https://openalex.org/W2760996480","https://openalex.org/W1974010882","https://openalex.org/W2368223165","https://openalex.org/W2357307510","https://openalex.org/W2104720263","https://openalex.org/W1966104931","https://openalex.org/W2286084298","https://openalex.org/W2889334434"],"abstract_inverted_index":{"We":[0],"have":[1,169],"fabricated":[2],"a":[3,28,82],"micro":[4,35,38,41,65,68,106,138,156],"touch":[5,9,69,78,90,107,139,157],"sensor":[6,10,36,70,79,140,158],"array.":[7],"Every":[8],"unit":[11],"is":[12,43,113],"composed":[13],"of":[14,50,81,85,104,136,154],"Ti":[15],"substrate":[16],"and":[17,31,37,60,123],"PZT":[18,22],"thin":[19,23],"film.":[20],"The":[21,40,53,162],"film":[24],"was":[25,126],"synthesized":[26],"by":[27,63],"hydrothermal":[29],"method":[30],"used":[32,74,114],"as":[33,75],"both":[34],"actuator.":[39],"actuator":[42],"driven":[44],"at":[45],"the":[46,51,64,76,86,102,105,109,117,120,134,137,149,151,155,166],"resonant":[47],"frequency":[48],"point":[49],"structure.":[52],"impedance":[54],"change":[55],"can":[56,72,94],"be":[57,73],"detected":[58],"before":[59],"after":[61],"contact":[62],"sensor.":[66],"This":[67],"array":[71],"controlling":[77],"pad":[80],"car":[83],"instead":[84],"conventional":[87],"capacity":[88],"type":[89],"pad,":[91],"because":[92],"it":[93],"resist":[95],"high":[96],"temperature.":[97],"In":[98],"order":[99],"to":[100,115,130,141],"improve":[101],"property":[103],"sensor,":[108],"mechanics":[110],"model,":[111,150],"which":[112],"analyze":[116],"relationship":[118],"between":[119],"input":[121,143],"voltage":[122,168],"output":[124,167],"voltage,":[125],"set":[127],"up.":[128],"According":[129],"cantilever":[131],"beam":[132],"theory,":[133],"response":[135],"electric":[142],"has":[144,159],"been":[145,160,170],"discussed.":[146],"Based":[147],"on":[148],"structural":[152],"characterization":[153],"evaluated.":[161],"parameters":[163],"that":[164],"affect":[165],"analyzed.":[171]},"counts_by_year":[],"updated_date":"2025-11-06T03:46:38.306776","created_date":"2025-10-10T00:00:00"}