{"id":"https://openalex.org/W2115709318","doi":"https://doi.org/10.1109/robot.1986.1087565","title":"A color vision system for microelectronics: Application to oxide thickness measurements","display_name":"A color vision system for microelectronics: Application to oxide thickness measurements","publication_year":1986,"publication_date":"1986-01-01","ids":{"openalex":"https://openalex.org/W2115709318","doi":"https://doi.org/10.1109/robot.1986.1087565","mag":"2115709318"},"language":"en","primary_location":{"id":"doi:10.1109/robot.1986.1087565","is_oa":false,"landing_page_url":"https://doi.org/10.1109/robot.1986.1087565","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Proceedings. 1986 IEEE International Conference on Robotics and Automation","raw_type":"proceedings-article"},"type":"article","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5077257353","display_name":"Matthew Barth","orcid":"https://orcid.org/0000-0002-4735-5859"},"institutions":[{"id":"https://openalex.org/I154570441","display_name":"University of California, Santa Barbara","ror":"https://ror.org/02t274463","country_code":"US","type":"education","lineage":["https://openalex.org/I154570441"]}],"countries":["US"],"is_corresponding":true,"raw_author_name":"M. Barth","raw_affiliation_strings":["University of California, Santa Barbara","University of California,Santa Barbara,"],"affiliations":[{"raw_affiliation_string":"University of California, Santa Barbara","institution_ids":["https://openalex.org/I154570441"]},{"raw_affiliation_string":"University of California,Santa Barbara,","institution_ids":["https://openalex.org/I154570441"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5103091951","display_name":"Srinivas Parthasarathy","orcid":"https://orcid.org/0000-0001-8928-9821"},"institutions":[{"id":"https://openalex.org/I154570441","display_name":"University of California, Santa Barbara","ror":"https://ror.org/02t274463","country_code":"US","type":"education","lineage":["https://openalex.org/I154570441"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"S. Parthasarathy","raw_affiliation_strings":["Department of Computer Science, UCSB","[Department of Computer Science, UCSB]"],"affiliations":[{"raw_affiliation_string":"Department of Computer Science, UCSB","institution_ids":[]},{"raw_affiliation_string":"[Department of Computer Science, UCSB]","institution_ids":["https://openalex.org/I154570441"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5100378578","display_name":"Jing Wang","orcid":"https://orcid.org/0000-0002-7566-1212"},"institutions":[{"id":"https://openalex.org/I154570441","display_name":"University of California, Santa Barbara","ror":"https://ror.org/02t274463","country_code":"US","type":"education","lineage":["https://openalex.org/I154570441"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"Jing Wang","raw_affiliation_strings":["Department of Computer Science, UCSB","[Department of Computer Science, UCSB]"],"affiliations":[{"raw_affiliation_string":"Department of Computer Science, UCSB","institution_ids":[]},{"raw_affiliation_string":"[Department of Computer Science, UCSB]","institution_ids":["https://openalex.org/I154570441"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5109282542","display_name":"Evelyn Hu","orcid":"https://orcid.org/0009-0007-4913-3014"},"institutions":[{"id":"https://openalex.org/I154570441","display_name":"University of California, Santa Barbara","ror":"https://ror.org/02t274463","country_code":"US","type":"education","lineage":["https://openalex.org/I154570441"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"E. Hu","raw_affiliation_strings":["Department of Electrical and Computer Engineering, UCSB","[Department of Electrical and Computer Engineering, UCSB]"],"affiliations":[{"raw_affiliation_string":"Department of Electrical and Computer Engineering, UCSB","institution_ids":[]},{"raw_affiliation_string":"[Department of Electrical and Computer Engineering, UCSB]","institution_ids":["https://openalex.org/I154570441"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5071312791","display_name":"S. Hackwood","orcid":null},"institutions":[{"id":"https://openalex.org/I154570441","display_name":"University of California, Santa Barbara","ror":"https://ror.org/02t274463","country_code":"US","type":"education","lineage":["https://openalex.org/I154570441"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"S. Hackwood","raw_affiliation_strings":["Department of Electrical and Computer Engineering, UCSB","[Department of Electrical and Computer Engineering, UCSB]"],"affiliations":[{"raw_affiliation_string":"Department of Electrical and Computer Engineering, UCSB","institution_ids":[]},{"raw_affiliation_string":"[Department of Electrical and Computer Engineering, UCSB]","institution_ids":["https://openalex.org/I154570441"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5109279537","display_name":"G. Beni","orcid":null},"institutions":[{"id":"https://openalex.org/I154570441","display_name":"University of California, Santa Barbara","ror":"https://ror.org/02t274463","country_code":"US","type":"education","lineage":["https://openalex.org/I154570441"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"G. Beni","raw_affiliation_strings":["Department of Electrical and Computer Engineering, UCSB","[Department of Electrical and Computer Engineering, UCSB]"],"affiliations":[{"raw_affiliation_string":"Department of Electrical and Computer Engineering, UCSB","institution_ids":[]},{"raw_affiliation_string":"[Department of Electrical and Computer Engineering, UCSB]","institution_ids":["https://openalex.org/I154570441"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":6,"corresponding_author_ids":["https://openalex.org/A5077257353"],"corresponding_institution_ids":["https://openalex.org/I154570441"],"apc_list":null,"apc_paid":null,"fwci":0.0,"has_fulltext":false,"cited_by_count":15,"citation_normalized_percentile":{"value":0.32672414,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":null,"biblio":{"volume":null,"issue":null,"first_page":"1242","last_page":"1247"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T12111","display_name":"Industrial Vision Systems and Defect Detection","score":0.9980999827384949,"subfield":{"id":"https://openalex.org/subfields/2209","display_name":"Industrial and Manufacturing Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T12111","display_name":"Industrial Vision Systems and Defect Detection","score":0.9980999827384949,"subfield":{"id":"https://openalex.org/subfields/2209","display_name":"Industrial and Manufacturing Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T13114","display_name":"Image Processing Techniques and Applications","score":0.9977999925613403,"subfield":{"id":"https://openalex.org/subfields/2214","display_name":"Media Technology"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11338","display_name":"Advancements in Photolithography Techniques","score":0.9966999888420105,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/microelectronics","display_name":"Microelectronics","score":0.9158440828323364},{"id":"https://openalex.org/keywords/computer-science","display_name":"Computer science","score":0.5915976762771606},{"id":"https://openalex.org/keywords/image-resolution","display_name":"Image resolution","score":0.5278244614601135},{"id":"https://openalex.org/keywords/optics","display_name":"Optics","score":0.4989500045776367},{"id":"https://openalex.org/keywords/computer-vision","display_name":"Computer vision","score":0.46165239810943604},{"id":"https://openalex.org/keywords/hue","display_name":"Hue","score":0.4462830722332001},{"id":"https://openalex.org/keywords/artificial-intelligence","display_name":"Artificial intelligence","score":0.40632471442222595},{"id":"https://openalex.org/keywords/materials-science","display_name":"Materials science","score":0.3953174650669098},{"id":"https://openalex.org/keywords/optoelectronics","display_name":"Optoelectronics","score":0.25369739532470703},{"id":"https://openalex.org/keywords/physics","display_name":"Physics","score":0.1059904396533966}],"concepts":[{"id":"https://openalex.org/C187937830","wikidata":"https://www.wikidata.org/wiki/Q175403","display_name":"Microelectronics","level":2,"score":0.9158440828323364},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.5915976762771606},{"id":"https://openalex.org/C205372480","wikidata":"https://www.wikidata.org/wiki/Q210521","display_name":"Image resolution","level":2,"score":0.5278244614601135},{"id":"https://openalex.org/C120665830","wikidata":"https://www.wikidata.org/wiki/Q14620","display_name":"Optics","level":1,"score":0.4989500045776367},{"id":"https://openalex.org/C31972630","wikidata":"https://www.wikidata.org/wiki/Q844240","display_name":"Computer vision","level":1,"score":0.46165239810943604},{"id":"https://openalex.org/C126537357","wikidata":"https://www.wikidata.org/wiki/Q372948","display_name":"Hue","level":2,"score":0.4462830722332001},{"id":"https://openalex.org/C154945302","wikidata":"https://www.wikidata.org/wiki/Q11660","display_name":"Artificial intelligence","level":1,"score":0.40632471442222595},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.3953174650669098},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.25369739532470703},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.1059904396533966}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1109/robot.1986.1087565","is_oa":false,"landing_page_url":"https://doi.org/10.1109/robot.1986.1087565","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Proceedings. 1986 IEEE International Conference on Robotics and Automation","raw_type":"proceedings-article"}],"best_oa_location":null,"sustainable_development_goals":[{"score":0.5,"display_name":"Reduced inequalities","id":"https://metadata.un.org/sdg/10"},{"score":0.5,"display_name":"Peace, Justice and strong institutions","id":"https://metadata.un.org/sdg/16"}],"awards":[],"funders":[],"has_content":{"grobid_xml":false,"pdf":false},"content_urls":null,"referenced_works_count":9,"referenced_works":["https://openalex.org/W1499545388","https://openalex.org/W1590283725","https://openalex.org/W1671850802","https://openalex.org/W1993017961","https://openalex.org/W2008840310","https://openalex.org/W2035034108","https://openalex.org/W2088053908","https://openalex.org/W2093572707","https://openalex.org/W2131727039"],"related_works":["https://openalex.org/W4320518079","https://openalex.org/W1981400123","https://openalex.org/W2039822179","https://openalex.org/W4386771591","https://openalex.org/W3016525403","https://openalex.org/W1520169471","https://openalex.org/W2972873516","https://openalex.org/W3206835165","https://openalex.org/W2527728814","https://openalex.org/W1986765550"],"abstract_inverted_index":{"We":[0,37],"present":[1],"a":[2,25,115],"new":[3],"method":[4,12,41,127],"of":[5,8,29,50,56,125,131],"automated":[6],"inspection":[7,33],"microelectronic":[9,69],"structures.":[10,70],"The":[11,71],"is":[13,24,59,128],"based":[14],"on":[15],"color":[16,30,66],"rather":[17],"than":[18,142],"black":[19],"and":[20,23,42,111,134],"white":[21],"vision,":[22],"first":[26],"such":[27,149],"application":[28],"vision":[31],"to":[32,60,76,82],"for":[34,65],"microelectronics":[35],"fabrication.":[36],"describe":[38],"the":[39,48,90,129],"general":[40],"demonstrate":[43],"its":[44],"practical":[45],"implementation":[46],"in":[47,68,79,140],"measurement":[49],"oxide":[51,80,137],"thicknesses.":[52],"A":[53],"key":[54],"result":[55],"this":[57],"work":[58],"have":[61],"established":[62],"sensitivity":[63],"criteria":[64],"detection":[67],"resolution":[72],"achieved":[73],"allows":[74],"us":[75],"measure":[77],"differences":[78],"thickness":[81,138],"approximately":[83],"30":[84],"Angstroms":[85],"or":[86],"better.":[87],"By":[88],"using":[89],"Ohta":[91],"coordinates,":[92],"our":[93,126],"system":[94],"can":[95,103,143],"discrimimate":[96],"between":[97],"cyclically":[98],"repeating":[99],"hues.":[100],"This":[101],"determination":[102],"be":[104,144],"done":[105],"very":[106],"rapidly":[107],"(approximately":[108],"100":[109],"milliseconds)":[110],"does":[112],"not":[113],"require":[114],"complex":[116],"(and":[117],"thus":[118],"expensive)":[119],"computer":[120],"system.":[121],"An":[122],"additional":[123],"advantage":[124],"possibility":[130],"more":[132],"easily":[133],"flexibly":[135],"performing":[136],"measurements":[139],"situ,":[141],"accomplished":[145],"with":[146],"standard":[147],"techniques,":[148],"as":[150],"ellipsometry.":[151]},"counts_by_year":[],"updated_date":"2025-11-06T03:46:38.306776","created_date":"2025-10-10T00:00:00"}