{"id":"https://openalex.org/W2132369548","doi":"https://doi.org/10.1109/robio.2010.5723401","title":"A signal conditioning and data acquisition system for micro/nano displacement sensor","display_name":"A signal conditioning and data acquisition system for micro/nano displacement sensor","publication_year":2010,"publication_date":"2010-12-01","ids":{"openalex":"https://openalex.org/W2132369548","doi":"https://doi.org/10.1109/robio.2010.5723401","mag":"2132369548"},"language":"en","primary_location":{"id":"doi:10.1109/robio.2010.5723401","is_oa":false,"landing_page_url":"https://doi.org/10.1109/robio.2010.5723401","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2010 IEEE International Conference on Robotics and Biomimetics","raw_type":"proceedings-article"},"type":"article","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5065458468","display_name":"Hanyu Sun","orcid":"https://orcid.org/0000-0002-3515-0629"},"institutions":[{"id":"https://openalex.org/I126520041","display_name":"University of Science and Technology of China","ror":"https://ror.org/04c4dkn09","country_code":"CN","type":"education","lineage":["https://openalex.org/I126520041","https://openalex.org/I19820366"]},{"id":"https://openalex.org/I4210099079","display_name":"Institute of Intelligent Machines","ror":"https://ror.org/00w0qep84","country_code":"CN","type":"facility","lineage":["https://openalex.org/I19820366","https://openalex.org/I2802624667","https://openalex.org/I4210099079"]}],"countries":["CN"],"is_corresponding":true,"raw_author_name":"Hanyu Sun","raw_affiliation_strings":["Department of Automation, University of Science and Technology, Hefei, Anhui, China","Institute of Intelligent Machines, Chinese Academy and Sciences, Hefei, Anhui, China"],"affiliations":[{"raw_affiliation_string":"Department of Automation, University of Science and Technology, Hefei, Anhui, China","institution_ids":["https://openalex.org/I126520041"]},{"raw_affiliation_string":"Institute of Intelligent Machines, Chinese Academy and Sciences, Hefei, Anhui, China","institution_ids":["https://openalex.org/I4210099079"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5049771866","display_name":"Yong Yu","orcid":"https://orcid.org/0000-0002-5700-4542"},"institutions":[{"id":"https://openalex.org/I107139324","display_name":"Kagoshima University","ror":"https://ror.org/03ss88z23","country_code":"JP","type":"education","lineage":["https://openalex.org/I107139324"]}],"countries":["JP"],"is_corresponding":false,"raw_author_name":"Yong Yu","raw_affiliation_strings":["Department of Mechanical Engineering, Kagoshima University, Kagoshima, Japan"],"affiliations":[{"raw_affiliation_string":"Department of Mechanical Engineering, Kagoshima University, Kagoshima, Japan","institution_ids":["https://openalex.org/I107139324"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5061383546","display_name":"Renbing Chen","orcid":null},"institutions":[{"id":"https://openalex.org/I126520041","display_name":"University of Science and Technology of China","ror":"https://ror.org/04c4dkn09","country_code":"CN","type":"education","lineage":["https://openalex.org/I126520041","https://openalex.org/I19820366"]},{"id":"https://openalex.org/I4210099079","display_name":"Institute of Intelligent Machines","ror":"https://ror.org/00w0qep84","country_code":"CN","type":"facility","lineage":["https://openalex.org/I19820366","https://openalex.org/I2802624667","https://openalex.org/I4210099079"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Renbing Chen","raw_affiliation_strings":["Department of Automation, University of Science and Technology, Hefei, Anhui, China","Institute of Intelligent Machines, Chinese Academy and Sciences, Hefei, Anhui, China"],"affiliations":[{"raw_affiliation_string":"Department of Automation, University of Science and Technology, Hefei, Anhui, China","institution_ids":["https://openalex.org/I126520041"]},{"raw_affiliation_string":"Institute of Intelligent Machines, Chinese Academy and Sciences, Hefei, Anhui, China","institution_ids":["https://openalex.org/I4210099079"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5100520187","display_name":"Yunjian Ge","orcid":null},"institutions":[{"id":"https://openalex.org/I4210099079","display_name":"Institute of Intelligent Machines","ror":"https://ror.org/00w0qep84","country_code":"CN","type":"facility","lineage":["https://openalex.org/I19820366","https://openalex.org/I2802624667","https://openalex.org/I4210099079"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Yunjian Ge","raw_affiliation_strings":["Institute of Intelligent Machines, Chinese Academy and Sciences, Hefei, Anhui, China"],"affiliations":[{"raw_affiliation_string":"Institute of Intelligent Machines, Chinese Academy and Sciences, Hefei, Anhui, China","institution_ids":["https://openalex.org/I4210099079"]}]}],"institutions":[],"countries_distinct_count":2,"institutions_distinct_count":4,"corresponding_author_ids":["https://openalex.org/A5065458468"],"corresponding_institution_ids":["https://openalex.org/I126520041","https://openalex.org/I4210099079"],"apc_list":null,"apc_paid":null,"fwci":0.4318,"has_fulltext":false,"cited_by_count":3,"citation_normalized_percentile":{"value":0.66858188,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":89,"max":94},"biblio":{"volume":"69","issue":null,"first_page":"639","last_page":"644"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10923","display_name":"Force Microscopy Techniques and Applications","score":0.9998999834060669,"subfield":{"id":"https://openalex.org/subfields/3107","display_name":"Atomic and Molecular Physics, and Optics"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10923","display_name":"Force Microscopy Techniques and Applications","score":0.9998999834060669,"subfield":{"id":"https://openalex.org/subfields/3107","display_name":"Atomic and Molecular Physics, and Optics"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11449","display_name":"Mechanical and Optical Resonators","score":0.9995999932289124,"subfield":{"id":"https://openalex.org/subfields/3107","display_name":"Atomic and Molecular Physics, and Optics"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":0.9977999925613403,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/signal-conditioning","display_name":"Signal conditioning","score":0.836927056312561},{"id":"https://openalex.org/keywords/signal","display_name":"SIGNAL (programming language)","score":0.7543662786483765},{"id":"https://openalex.org/keywords/capacitive-sensing","display_name":"Capacitive sensing","score":0.7292534112930298},{"id":"https://openalex.org/keywords/displacement","display_name":"Displacement (psychology)","score":0.6830248236656189},{"id":"https://openalex.org/keywords/data-acquisition","display_name":"Data acquisition","score":0.5663462281227112},{"id":"https://openalex.org/keywords/strain-gauge","display_name":"Strain gauge","score":0.49927401542663574},{"id":"https://openalex.org/keywords/measure","display_name":"Measure (data warehouse)","score":0.49539291858673096},{"id":"https://openalex.org/keywords/actuator","display_name":"Actuator","score":0.47495508193969727},{"id":"https://openalex.org/keywords/hinge","display_name":"Hinge","score":0.4490351676940918},{"id":"https://openalex.org/keywords/electronic-engineering","display_name":"Electronic engineering","score":0.44649991393089294},{"id":"https://openalex.org/keywords/computer-science","display_name":"Computer science","score":0.43261831998825073},{"id":"https://openalex.org/keywords/nano","display_name":"Nano-","score":0.42153415083885193},{"id":"https://openalex.org/keywords/acoustics","display_name":"Acoustics","score":0.38433611392974854},{"id":"https://openalex.org/keywords/materials-science","display_name":"Materials science","score":0.3594381511211395},{"id":"https://openalex.org/keywords/electrical-engineering","display_name":"Electrical engineering","score":0.3199010491371155},{"id":"https://openalex.org/keywords/engineering","display_name":"Engineering","score":0.22604814171791077},{"id":"https://openalex.org/keywords/physics","display_name":"Physics","score":0.15934240818023682},{"id":"https://openalex.org/keywords/mechanical-engineering","display_name":"Mechanical engineering","score":0.1389823853969574},{"id":"https://openalex.org/keywords/power","display_name":"Power (physics)","score":0.11967220902442932},{"id":"https://openalex.org/keywords/artificial-intelligence","display_name":"Artificial intelligence","score":0.11484336853027344}],"concepts":[{"id":"https://openalex.org/C2780412824","wikidata":"https://www.wikidata.org/wiki/Q3686420","display_name":"Signal conditioning","level":3,"score":0.836927056312561},{"id":"https://openalex.org/C2779843651","wikidata":"https://www.wikidata.org/wiki/Q7390335","display_name":"SIGNAL (programming language)","level":2,"score":0.7543662786483765},{"id":"https://openalex.org/C206755178","wikidata":"https://www.wikidata.org/wiki/Q1131271","display_name":"Capacitive sensing","level":2,"score":0.7292534112930298},{"id":"https://openalex.org/C107551265","wikidata":"https://www.wikidata.org/wiki/Q1458245","display_name":"Displacement (psychology)","level":2,"score":0.6830248236656189},{"id":"https://openalex.org/C163985040","wikidata":"https://www.wikidata.org/wiki/Q1172399","display_name":"Data acquisition","level":2,"score":0.5663462281227112},{"id":"https://openalex.org/C60584519","wikidata":"https://www.wikidata.org/wiki/Q610723","display_name":"Strain gauge","level":2,"score":0.49927401542663574},{"id":"https://openalex.org/C2780009758","wikidata":"https://www.wikidata.org/wiki/Q6804172","display_name":"Measure (data warehouse)","level":2,"score":0.49539291858673096},{"id":"https://openalex.org/C172707124","wikidata":"https://www.wikidata.org/wiki/Q423488","display_name":"Actuator","level":2,"score":0.47495508193969727},{"id":"https://openalex.org/C44000306","wikidata":"https://www.wikidata.org/wiki/Q244330","display_name":"Hinge","level":2,"score":0.4490351676940918},{"id":"https://openalex.org/C24326235","wikidata":"https://www.wikidata.org/wiki/Q126095","display_name":"Electronic engineering","level":1,"score":0.44649991393089294},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.43261831998825073},{"id":"https://openalex.org/C2780357685","wikidata":"https://www.wikidata.org/wiki/Q154357","display_name":"Nano-","level":2,"score":0.42153415083885193},{"id":"https://openalex.org/C24890656","wikidata":"https://www.wikidata.org/wiki/Q82811","display_name":"Acoustics","level":1,"score":0.38433611392974854},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.3594381511211395},{"id":"https://openalex.org/C119599485","wikidata":"https://www.wikidata.org/wiki/Q43035","display_name":"Electrical engineering","level":1,"score":0.3199010491371155},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.22604814171791077},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.15934240818023682},{"id":"https://openalex.org/C78519656","wikidata":"https://www.wikidata.org/wiki/Q101333","display_name":"Mechanical engineering","level":1,"score":0.1389823853969574},{"id":"https://openalex.org/C163258240","wikidata":"https://www.wikidata.org/wiki/Q25342","display_name":"Power (physics)","level":2,"score":0.11967220902442932},{"id":"https://openalex.org/C154945302","wikidata":"https://www.wikidata.org/wiki/Q11660","display_name":"Artificial intelligence","level":1,"score":0.11484336853027344},{"id":"https://openalex.org/C62520636","wikidata":"https://www.wikidata.org/wiki/Q944","display_name":"Quantum mechanics","level":1,"score":0.0},{"id":"https://openalex.org/C199360897","wikidata":"https://www.wikidata.org/wiki/Q9143","display_name":"Programming language","level":1,"score":0.0},{"id":"https://openalex.org/C111919701","wikidata":"https://www.wikidata.org/wiki/Q9135","display_name":"Operating system","level":1,"score":0.0},{"id":"https://openalex.org/C159985019","wikidata":"https://www.wikidata.org/wiki/Q181790","display_name":"Composite material","level":1,"score":0.0},{"id":"https://openalex.org/C15744967","wikidata":"https://www.wikidata.org/wiki/Q9418","display_name":"Psychology","level":0,"score":0.0},{"id":"https://openalex.org/C77088390","wikidata":"https://www.wikidata.org/wiki/Q8513","display_name":"Database","level":1,"score":0.0},{"id":"https://openalex.org/C542102704","wikidata":"https://www.wikidata.org/wiki/Q183257","display_name":"Psychotherapist","level":1,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1109/robio.2010.5723401","is_oa":false,"landing_page_url":"https://doi.org/10.1109/robio.2010.5723401","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2010 IEEE International Conference on Robotics and Biomimetics","raw_type":"proceedings-article"}],"best_oa_location":null,"sustainable_development_goals":[{"score":0.6499999761581421,"display_name":"Affordable and clean energy","id":"https://metadata.un.org/sdg/7"}],"awards":[],"funders":[],"has_content":{"pdf":false,"grobid_xml":false},"content_urls":null,"referenced_works_count":19,"referenced_works":["https://openalex.org/W1970730653","https://openalex.org/W1988970245","https://openalex.org/W2042554298","https://openalex.org/W2083517768","https://openalex.org/W2100280167","https://openalex.org/W2124319794","https://openalex.org/W2140348257","https://openalex.org/W2140482630","https://openalex.org/W2149043141","https://openalex.org/W2151433413","https://openalex.org/W2163444133","https://openalex.org/W2163717515","https://openalex.org/W2357688633","https://openalex.org/W2384499338","https://openalex.org/W2984358609","https://openalex.org/W3150248096","https://openalex.org/W6661165077","https://openalex.org/W6683625437","https://openalex.org/W7062235316"],"related_works":["https://openalex.org/W1470273002","https://openalex.org/W2607444811","https://openalex.org/W2886824025","https://openalex.org/W2499406489","https://openalex.org/W2058292462","https://openalex.org/W1976070411","https://openalex.org/W1698666667","https://openalex.org/W2369012846","https://openalex.org/W2047438179","https://openalex.org/W2373508145"],"abstract_inverted_index":{"The":[0,123],"conventional":[1],"method":[2],"to":[3,33,43],"measure":[4,100],"the":[5,11,20,35,45,52,60,69,79,111,114,128,137,140,148,153],"micro/nano":[6,36,144,167],"scale":[7,37],"displacement":[8,38,54,138,168],"is":[9,55,64,104],"using":[10,40],"principle":[12],"of":[13,113,133,139,155],"optical,":[14],"chemical,":[15],"or":[16,74],"capacitive.":[17],"Different":[18],"with":[19,130],"previous":[21],"methods,":[22],"we":[23,150],"designed":[24],"a":[25],"mechanical":[26],"amplification":[27,58],"structure":[28],"based":[29],"on":[30],"flexure":[31],"hinges":[32],"amplify":[34],"and":[39,88,94,162],"strain":[41],"gauges":[42],"convert":[44],"deformation":[46],"into":[47],"electrical":[48,62,71],"signals.":[49],"However,":[50],"after":[51],"original":[53],"amplified":[56],"by":[57],"mechanism,":[59],"output":[61],"signal":[63,72,86,103],"still":[65],"very":[66],"weak.":[67],"Measure":[68],"weak":[70,102],"effectively":[73,99],"not,":[75],"will":[76],"determine":[77],"whether":[78],"sensor":[80,129,149],"can":[81,98,135],"achieve":[82],"nanometer":[83],"resolution.":[84],"A":[85],"conditioning":[87],"data":[89],"acquisition":[90],"system":[91,134],"including":[92],"hardware":[93],"software":[95],"implementation":[96],"which":[97],"such":[101],"presented":[105],"in":[106,143],"this":[107,131],"paper.":[108],"To":[109],"verify":[110],"effectiveness":[112],"whole":[115],"system,":[116],"some":[117],"correlative":[118],"experiments":[119],"have":[120],"been":[121],"made.":[122],"experiment":[124],"results":[125],"show":[126],"that":[127],"set":[132],"detect":[136],"PZT":[141],"actuator":[142],"scale.":[145],"In":[146],"addition,":[147],"proposed":[151],"has":[152],"characteristic":[154],"large":[156],"range,":[157],"high":[158],"resolution,":[159],"small":[160],"size":[161],"low":[163],"cost":[164],"than":[165],"other":[166],"sensor.":[169]},"counts_by_year":[{"year":2015,"cited_by_count":1},{"year":2013,"cited_by_count":1}],"updated_date":"2025-11-06T03:46:38.306776","created_date":"2025-10-10T00:00:00"}