{"id":"https://openalex.org/W4413978953","doi":"https://doi.org/10.1109/rcar65431.2025.11139734","title":"A High-Precision Wafer Defect Inspection System Integrating DMD-Based Parallel Confocal Imaging, Bright-Field Inspection, and MutexMatch Semi-Supervised Learning<sup>1</sup>","display_name":"A High-Precision Wafer Defect Inspection System Integrating DMD-Based Parallel Confocal Imaging, Bright-Field Inspection, and MutexMatch Semi-Supervised Learning<sup>1</sup>","publication_year":2025,"publication_date":"2025-06-01","ids":{"openalex":"https://openalex.org/W4413978953","doi":"https://doi.org/10.1109/rcar65431.2025.11139734"},"language":"en","primary_location":{"id":"doi:10.1109/rcar65431.2025.11139734","is_oa":false,"landing_page_url":"https://doi.org/10.1109/rcar65431.2025.11139734","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2025 IEEE International Conference on Real-time Computing and Robotics (RCAR)","raw_type":"proceedings-article"},"type":"conference-paper","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5113340165","display_name":"Congrui Xu","orcid":null},"institutions":[{"id":"https://openalex.org/I24943067","display_name":"Fudan University","ror":"https://ror.org/013q1eq08","country_code":"CN","type":"education","lineage":["https://openalex.org/I24943067"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Congrui Xu","raw_affiliation_strings":["Fudan University,Academy for Engineering and Technology,Shanghai,China,200433"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Fudan University,Academy for Engineering and Technology,Shanghai,China,200433","institution_ids":["https://openalex.org/I24943067"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5111343730","display_name":"Zhanmin Lv","orcid":"https://orcid.org/0009-0009-0291-1207"},"institutions":[{"id":"https://openalex.org/I24943067","display_name":"Fudan University","ror":"https://ror.org/013q1eq08","country_code":"CN","type":"education","lineage":["https://openalex.org/I24943067"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Zijin Lv","raw_affiliation_strings":["Fudan University,Academy for Engineering and Technology,Shanghai,China,200433"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Fudan University,Academy for Engineering and Technology,Shanghai,China,200433","institution_ids":["https://openalex.org/I24943067"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5043004257","display_name":"Jiaxuan Liang","orcid":"https://orcid.org/0009-0002-6975-1788"},"institutions":[{"id":"https://openalex.org/I24943067","display_name":"Fudan University","ror":"https://ror.org/013q1eq08","country_code":"CN","type":"education","lineage":["https://openalex.org/I24943067"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Jiaxuan Liang","raw_affiliation_strings":["Fudan University,Academy for Engineering and Technology,Shanghai,China,200433"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Fudan University,Academy for Engineering and Technology,Shanghai,China,200433","institution_ids":["https://openalex.org/I24943067"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5100599724","display_name":"Yunlong Zhu","orcid":"https://orcid.org/0000-0002-5594-299X"},"institutions":[{"id":"https://openalex.org/I24943067","display_name":"Fudan University","ror":"https://ror.org/013q1eq08","country_code":"CN","type":"education","lineage":["https://openalex.org/I24943067"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Yunlong Zhu","raw_affiliation_strings":["Fudan University,Academy for Engineering and Technology,Shanghai,China,200433"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Fudan University,Academy for Engineering and Technology,Shanghai,China,200433","institution_ids":["https://openalex.org/I24943067"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5035413140","display_name":"Chenyao Bai","orcid":"https://orcid.org/0000-0003-3510-390X"},"institutions":[{"id":"https://openalex.org/I24943067","display_name":"Fudan University","ror":"https://ror.org/013q1eq08","country_code":"CN","type":"education","lineage":["https://openalex.org/I24943067"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Chenyao Bai","raw_affiliation_strings":["Fudan University,Academy for Engineering and Technology,Shanghai,China,200433"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Fudan University,Academy for Engineering and Technology,Shanghai,China,200433","institution_ids":["https://openalex.org/I24943067"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":1,"corresponding_author_ids":[],"corresponding_institution_ids":["https://openalex.org/I24943067"],"apc_list":null,"apc_paid":null,"fwci":0.0,"has_fulltext":false,"cited_by_count":0,"citation_normalized_percentile":{"value":0.35337919,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":null,"biblio":{"volume":null,"issue":null,"first_page":"618","last_page":"623"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T12111","display_name":"Industrial Vision Systems and Defect Detection","score":0.996999979019165,"subfield":{"id":"https://openalex.org/subfields/2209","display_name":"Industrial and Manufacturing Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T12111","display_name":"Industrial Vision Systems and Defect Detection","score":0.996999979019165,"subfield":{"id":"https://openalex.org/subfields/2209","display_name":"Industrial and Manufacturing Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T13114","display_name":"Image Processing Techniques and Applications","score":0.9887999892234802,"subfield":{"id":"https://openalex.org/subfields/2214","display_name":"Media Technology"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T14117","display_name":"Integrated Circuits and Semiconductor Failure Analysis","score":0.9837999939918518,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/wafer","display_name":"Wafer","score":0.7358822822570801},{"id":"https://openalex.org/keywords/confocal","display_name":"Confocal","score":0.561223030090332},{"id":"https://openalex.org/keywords/computer-science","display_name":"Computer science","score":0.5384820103645325},{"id":"https://openalex.org/keywords/field","display_name":"Field (mathematics)","score":0.5323816537857056},{"id":"https://openalex.org/keywords/artificial-intelligence","display_name":"Artificial intelligence","score":0.5178568363189697},{"id":"https://openalex.org/keywords/computer-vision","display_name":"Computer vision","score":0.4831763803958893},{"id":"https://openalex.org/keywords/visualization","display_name":"Visualization","score":0.45488691329956055},{"id":"https://openalex.org/keywords/computer-graphics","display_name":"Computer graphics (images)","score":0.34369468688964844},{"id":"https://openalex.org/keywords/optics","display_name":"Optics","score":0.31482231616973877},{"id":"https://openalex.org/keywords/materials-science","display_name":"Materials science","score":0.3081522583961487},{"id":"https://openalex.org/keywords/physics","display_name":"Physics","score":0.2342904806137085},{"id":"https://openalex.org/keywords/nanotechnology","display_name":"Nanotechnology","score":0.22112804651260376},{"id":"https://openalex.org/keywords/mathematics","display_name":"Mathematics","score":0.0874846875667572}],"concepts":[{"id":"https://openalex.org/C160671074","wikidata":"https://www.wikidata.org/wiki/Q267131","display_name":"Wafer","level":2,"score":0.7358822822570801},{"id":"https://openalex.org/C136009344","wikidata":"https://www.wikidata.org/wiki/Q336201","display_name":"Confocal","level":2,"score":0.561223030090332},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.5384820103645325},{"id":"https://openalex.org/C9652623","wikidata":"https://www.wikidata.org/wiki/Q190109","display_name":"Field (mathematics)","level":2,"score":0.5323816537857056},{"id":"https://openalex.org/C154945302","wikidata":"https://www.wikidata.org/wiki/Q11660","display_name":"Artificial intelligence","level":1,"score":0.5178568363189697},{"id":"https://openalex.org/C31972630","wikidata":"https://www.wikidata.org/wiki/Q844240","display_name":"Computer vision","level":1,"score":0.4831763803958893},{"id":"https://openalex.org/C36464697","wikidata":"https://www.wikidata.org/wiki/Q451553","display_name":"Visualization","level":2,"score":0.45488691329956055},{"id":"https://openalex.org/C121684516","wikidata":"https://www.wikidata.org/wiki/Q7600677","display_name":"Computer graphics (images)","level":1,"score":0.34369468688964844},{"id":"https://openalex.org/C120665830","wikidata":"https://www.wikidata.org/wiki/Q14620","display_name":"Optics","level":1,"score":0.31482231616973877},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.3081522583961487},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.2342904806137085},{"id":"https://openalex.org/C171250308","wikidata":"https://www.wikidata.org/wiki/Q11468","display_name":"Nanotechnology","level":1,"score":0.22112804651260376},{"id":"https://openalex.org/C33923547","wikidata":"https://www.wikidata.org/wiki/Q395","display_name":"Mathematics","level":0,"score":0.0874846875667572},{"id":"https://openalex.org/C202444582","wikidata":"https://www.wikidata.org/wiki/Q837863","display_name":"Pure mathematics","level":1,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1109/rcar65431.2025.11139734","is_oa":false,"landing_page_url":"https://doi.org/10.1109/rcar65431.2025.11139734","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2025 IEEE International Conference on Real-time Computing and Robotics (RCAR)","raw_type":"proceedings-article"}],"best_oa_location":null,"sustainable_development_goals":[],"awards":[],"funders":[],"has_content":{"grobid_xml":false,"pdf":false},"content_urls":null,"referenced_works_count":24,"referenced_works":["https://openalex.org/W1983320747","https://openalex.org/W1986587559","https://openalex.org/W1990334093","https://openalex.org/W2038820696","https://openalex.org/W2124952331","https://openalex.org/W2741922878","https://openalex.org/W2964137095","https://openalex.org/W3035680157","https://openalex.org/W3109620645","https://openalex.org/W3110446398","https://openalex.org/W3118895125","https://openalex.org/W3193736071","https://openalex.org/W3196266030","https://openalex.org/W4226283974","https://openalex.org/W4293499215","https://openalex.org/W4312105387","https://openalex.org/W4312108898","https://openalex.org/W4312973985","https://openalex.org/W4390872613","https://openalex.org/W4391827343","https://openalex.org/W4393147410","https://openalex.org/W4393156560","https://openalex.org/W4399169034","https://openalex.org/W4401426664"],"related_works":["https://openalex.org/W1998662473","https://openalex.org/W1988252515","https://openalex.org/W2068608913","https://openalex.org/W2075391483","https://openalex.org/W2742348144","https://openalex.org/W2038820605","https://openalex.org/W1985417357","https://openalex.org/W2115053376","https://openalex.org/W2367528910","https://openalex.org/W1991489478"],"abstract_inverted_index":{"Wafer":[0],"defect":[1,55,65,88,180],"inspection":[2,23,77,89],"is":[3],"a":[4,21,62,106,113,173],"critical":[5],"process":[6],"in":[7,160,191],"semiconductor":[8,193],"manufacturing,":[9],"directly":[10],"impacting":[11],"product":[12],"yield":[13,190],"and":[14,47,53,104,116,121,145,166,175,189],"overall":[15],"production":[16],"quality.":[17],"This":[18],"study":[19],"presents":[20],"high-precision":[22],"system":[24,39,74,171],"that":[25,154],"integrates":[26],"bright-field":[27,76],"imaging":[28],"with":[29,43,127,133],"digital":[30],"micromirror":[31],"device":[32],"(DMD)-based":[33],"parallel":[34],"confocal":[35],"laser":[36],"scanning.":[37],"The":[38,83],"was":[40,68],"physically":[41],"implemented":[42],"an":[44],"optimized":[45],"optical":[46,79],"mechanical":[48],"design":[49],"to":[50],"achieve":[51],"fast":[52],"accurate":[54],"detection.":[56],"To":[57,91],"simulate":[58],"real":[59],"industrial":[60],"scenarios,":[61,100],"simulated":[63],"wafer":[64,87,179],"image":[66],"dataset":[67,84],"constructed":[69],"using":[70],"the":[71,169],"proposed":[72,170],"prototype":[73],"via":[75],"of":[78],"standard":[80],"test":[81],"boards.":[82],"approximates":[85],"actual":[86],"conditions.":[90],"further":[92],"enhance":[93],"classification":[94,124,161],"performance":[95,125],"under":[96],"limited":[97],"labeled":[98,136],"data":[99],"we":[101],"have":[102],"incorporated":[103],"improved":[105],"semi-supervised":[107],"learning":[108],"approach,":[109],"MutexMatch,":[110],"which":[111],"introduces":[112],"dynamic,":[114],"adaptive":[115],"class-wise":[117],"high-confidence":[118],"threshold":[119],"mechanism":[120],"achieves":[122],"excellent":[123],"even":[126],"extremely":[128],"scarce":[129],"annotations-reaching":[130],"84.12%":[131],"accuracy":[132],"only":[134],"one":[135],"sample":[137],"per":[138],"class.":[139],"It":[140],"significantly":[141],"improves":[142],"pseudo-label":[143],"utilization":[144],"reduces":[146],"reliance":[147],"on":[148],"manual":[149],"labeling.":[150],"Experimental":[151],"results":[152],"show":[153],"MutexMatch":[155],"outperforms":[156],"multiple":[157],"baseline":[158],"methods":[159],"accuracy,":[162],"demonstrating":[163],"strong":[164],"robustness":[165],"effectiveness.":[167],"Overall,":[168],"provides":[172],"stable":[174],"efficient":[176],"solution":[177],"for":[178,185],"inspection,":[181],"offering":[182],"substantial":[183],"potential":[184],"enhancing":[186],"quality":[187],"control":[188],"advanced":[192],"manufacturing.":[194]},"counts_by_year":[],"updated_date":"2026-07-29T14:22:42.915294","created_date":"2025-10-10T00:00:00"}