{"id":"https://openalex.org/W4285014926","doi":"https://doi.org/10.1109/prime55000.2022.9816795","title":"Interaction between forming pulse and integration process flow in ePCM","display_name":"Interaction between forming pulse and integration process flow in ePCM","publication_year":2022,"publication_date":"2022-06-12","ids":{"openalex":"https://openalex.org/W4285014926","doi":"https://doi.org/10.1109/prime55000.2022.9816795"},"language":"en","primary_location":{"id":"doi:10.1109/prime55000.2022.9816795","is_oa":false,"landing_page_url":"https://doi.org/10.1109/prime55000.2022.9816795","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2022 17th Conference on Ph.D Research in Microelectronics and Electronics (PRIME)","raw_type":"proceedings-article"},"type":"article","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5076986301","display_name":"M. Baldo","orcid":"https://orcid.org/0000-0002-7639-5542"},"institutions":[{"id":"https://openalex.org/I4210154781","display_name":"STMicroelectronics (Italy)","ror":"https://ror.org/053bqv655","country_code":"IT","type":"company","lineage":["https://openalex.org/I131827901","https://openalex.org/I4210154781"]}],"countries":["IT"],"is_corresponding":false,"raw_author_name":"Matteo Baldo","raw_affiliation_strings":["STMicroelectronics,Agrate Brianza,Italy","STMicroelectronics, Agrate Brianza, Italy"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"STMicroelectronics,Agrate Brianza,Italy","institution_ids":["https://openalex.org/I4210154781"]},{"raw_affiliation_string":"STMicroelectronics, Agrate Brianza, Italy","institution_ids":["https://openalex.org/I4210154781"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5067239485","display_name":"Elisa Petroni","orcid":"https://orcid.org/0000-0001-5534-6058"},"institutions":[{"id":"https://openalex.org/I4210154781","display_name":"STMicroelectronics (Italy)","ror":"https://ror.org/053bqv655","country_code":"IT","type":"company","lineage":["https://openalex.org/I131827901","https://openalex.org/I4210154781"]}],"countries":["IT"],"is_corresponding":false,"raw_author_name":"Elisa Petroni","raw_affiliation_strings":["STMicroelectronics,Agrate Brianza,Italy","STMicroelectronics, Agrate Brianza, Italy"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"STMicroelectronics,Agrate Brianza,Italy","institution_ids":["https://openalex.org/I4210154781"]},{"raw_affiliation_string":"STMicroelectronics, Agrate Brianza, Italy","institution_ids":["https://openalex.org/I4210154781"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5032886977","display_name":"Luca Laurin","orcid":null},"institutions":[{"id":"https://openalex.org/I4210154781","display_name":"STMicroelectronics (Italy)","ror":"https://ror.org/053bqv655","country_code":"IT","type":"company","lineage":["https://openalex.org/I131827901","https://openalex.org/I4210154781"]}],"countries":["IT"],"is_corresponding":false,"raw_author_name":"Luca Laurin","raw_affiliation_strings":["STMicroelectronics,Agrate Brianza,Italy","STMicroelectronics, Agrate Brianza, Italy"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"STMicroelectronics,Agrate Brianza,Italy","institution_ids":["https://openalex.org/I4210154781"]},{"raw_affiliation_string":"STMicroelectronics, Agrate Brianza, Italy","institution_ids":["https://openalex.org/I4210154781"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5070520226","display_name":"G. Samanni","orcid":null},"institutions":[{"id":"https://openalex.org/I4210154781","display_name":"STMicroelectronics (Italy)","ror":"https://ror.org/053bqv655","country_code":"IT","type":"company","lineage":["https://openalex.org/I131827901","https://openalex.org/I4210154781"]}],"countries":["IT"],"is_corresponding":false,"raw_author_name":"Giulia Samanni","raw_affiliation_strings":["STMicroelectronics,Agrate Brianza,Italy","STMicroelectronics, Agrate Brianza, Italy"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"STMicroelectronics,Agrate Brianza,Italy","institution_ids":["https://openalex.org/I4210154781"]},{"raw_affiliation_string":"STMicroelectronics, Agrate Brianza, Italy","institution_ids":["https://openalex.org/I4210154781"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5044959827","display_name":"O. Melnic","orcid":"https://orcid.org/0000-0001-9192-3254"},"institutions":[{"id":"https://openalex.org/I93860229","display_name":"Politecnico di Milano","ror":"https://ror.org/01nffqt88","country_code":"IT","type":"education","lineage":["https://openalex.org/I93860229"]}],"countries":["IT"],"is_corresponding":false,"raw_author_name":"Octavian Melnic","raw_affiliation_strings":["DEIB,Politecnico di Milano,Milano,Italy","Politecnico di Milano, DEIB, Milano, Italy"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"DEIB,Politecnico di Milano,Milano,Italy","institution_ids":["https://openalex.org/I93860229"]},{"raw_affiliation_string":"Politecnico di Milano, DEIB, Milano, Italy","institution_ids":["https://openalex.org/I93860229"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5054173368","display_name":"Daniele Ielmini","orcid":"https://orcid.org/0000-0002-1853-1614"},"institutions":[{"id":"https://openalex.org/I93860229","display_name":"Politecnico di Milano","ror":"https://ror.org/01nffqt88","country_code":"IT","type":"education","lineage":["https://openalex.org/I93860229"]}],"countries":["IT"],"is_corresponding":false,"raw_author_name":"Daniele Ielmini","raw_affiliation_strings":["DEIB,Politecnico di Milano,Milano,Italy","Politecnico di Milano, DEIB, Milano, Italy"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"DEIB,Politecnico di Milano,Milano,Italy","institution_ids":["https://openalex.org/I93860229"]},{"raw_affiliation_string":"Politecnico di Milano, DEIB, Milano, Italy","institution_ids":["https://openalex.org/I93860229"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5072146941","display_name":"Andrea Redaelli","orcid":"https://orcid.org/0000-0002-9690-5052"},"institutions":[{"id":"https://openalex.org/I4210154781","display_name":"STMicroelectronics (Italy)","ror":"https://ror.org/053bqv655","country_code":"IT","type":"company","lineage":["https://openalex.org/I131827901","https://openalex.org/I4210154781"]}],"countries":["IT"],"is_corresponding":false,"raw_author_name":"Andrea Redaelli","raw_affiliation_strings":["STMicroelectronics,Agrate Brianza,Italy","STMicroelectronics, Agrate Brianza, Italy"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"STMicroelectronics,Agrate Brianza,Italy","institution_ids":["https://openalex.org/I4210154781"]},{"raw_affiliation_string":"STMicroelectronics, Agrate Brianza, Italy","institution_ids":["https://openalex.org/I4210154781"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":7,"corresponding_author_ids":[],"corresponding_institution_ids":[],"apc_list":null,"apc_paid":null,"fwci":0.2262,"has_fulltext":false,"cited_by_count":3,"citation_normalized_percentile":{"value":0.41487417,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":90,"max":95},"biblio":{"volume":null,"issue":null,"first_page":"145","last_page":"148"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T11315","display_name":"Phase-change materials and chalcogenides","score":0.9998999834060669,"subfield":{"id":"https://openalex.org/subfields/2505","display_name":"Materials Chemistry"},"field":{"id":"https://openalex.org/fields/25","display_name":"Materials Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T11315","display_name":"Phase-change materials and chalcogenides","score":0.9998999834060669,"subfield":{"id":"https://openalex.org/subfields/2505","display_name":"Materials Chemistry"},"field":{"id":"https://openalex.org/fields/25","display_name":"Materials Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10590","display_name":"Chalcogenide Semiconductor Thin Films","score":0.9955000281333923,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11025","display_name":"Nonlinear Optical Materials Research","score":0.9819999933242798,"subfield":{"id":"https://openalex.org/subfields/2504","display_name":"Electronic, Optical and Magnetic Materials"},"field":{"id":"https://openalex.org/fields/25","display_name":"Materials Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/chalcogenide","display_name":"Chalcogenide","score":0.6947526335716248},{"id":"https://openalex.org/keywords/back-end-of-line","display_name":"Back end of line","score":0.6307302117347717},{"id":"https://openalex.org/keywords/fabrication","display_name":"Fabrication","score":0.5617809295654297},{"id":"https://openalex.org/keywords/process","display_name":"Process (computing)","score":0.542488157749176},{"id":"https://openalex.org/keywords/materials-science","display_name":"Materials science","score":0.5221255421638489},{"id":"https://openalex.org/keywords/automotive-industry","display_name":"Automotive industry","score":0.47771739959716797},{"id":"https://openalex.org/keywords/optoelectronics","display_name":"Optoelectronics","score":0.4752728044986725},{"id":"https://openalex.org/keywords/phase-change-memory","display_name":"Phase-change memory","score":0.46680477261543274},{"id":"https://openalex.org/keywords/computer-science","display_name":"Computer science","score":0.3756997585296631},{"id":"https://openalex.org/keywords/embedded-system","display_name":"Embedded system","score":0.3498474359512329},{"id":"https://openalex.org/keywords/nanotechnology","display_name":"Nanotechnology","score":0.29771336913108826},{"id":"https://openalex.org/keywords/engineering","display_name":"Engineering","score":0.21903753280639648},{"id":"https://openalex.org/keywords/operating-system","display_name":"Operating system","score":0.09333330392837524}],"concepts":[{"id":"https://openalex.org/C2778177714","wikidata":"https://www.wikidata.org/wiki/Q898920","display_name":"Chalcogenide","level":2,"score":0.6947526335716248},{"id":"https://openalex.org/C2776628375","wikidata":"https://www.wikidata.org/wiki/Q4839229","display_name":"Back end of line","level":3,"score":0.6307302117347717},{"id":"https://openalex.org/C136525101","wikidata":"https://www.wikidata.org/wiki/Q5428139","display_name":"Fabrication","level":3,"score":0.5617809295654297},{"id":"https://openalex.org/C98045186","wikidata":"https://www.wikidata.org/wiki/Q205663","display_name":"Process (computing)","level":2,"score":0.542488157749176},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.5221255421638489},{"id":"https://openalex.org/C526921623","wikidata":"https://www.wikidata.org/wiki/Q190117","display_name":"Automotive industry","level":2,"score":0.47771739959716797},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.4752728044986725},{"id":"https://openalex.org/C64142963","wikidata":"https://www.wikidata.org/wiki/Q1153902","display_name":"Phase-change memory","level":3,"score":0.46680477261543274},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.3756997585296631},{"id":"https://openalex.org/C149635348","wikidata":"https://www.wikidata.org/wiki/Q193040","display_name":"Embedded system","level":1,"score":0.3498474359512329},{"id":"https://openalex.org/C171250308","wikidata":"https://www.wikidata.org/wiki/Q11468","display_name":"Nanotechnology","level":1,"score":0.29771336913108826},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.21903753280639648},{"id":"https://openalex.org/C111919701","wikidata":"https://www.wikidata.org/wiki/Q9135","display_name":"Operating system","level":1,"score":0.09333330392837524},{"id":"https://openalex.org/C142724271","wikidata":"https://www.wikidata.org/wiki/Q7208","display_name":"Pathology","level":1,"score":0.0},{"id":"https://openalex.org/C2779227376","wikidata":"https://www.wikidata.org/wiki/Q6505497","display_name":"Layer (electronics)","level":2,"score":0.0},{"id":"https://openalex.org/C146978453","wikidata":"https://www.wikidata.org/wiki/Q3798668","display_name":"Aerospace engineering","level":1,"score":0.0},{"id":"https://openalex.org/C133386390","wikidata":"https://www.wikidata.org/wiki/Q184996","display_name":"Dielectric","level":2,"score":0.0},{"id":"https://openalex.org/C204787440","wikidata":"https://www.wikidata.org/wiki/Q188504","display_name":"Alternative medicine","level":2,"score":0.0},{"id":"https://openalex.org/C71924100","wikidata":"https://www.wikidata.org/wiki/Q11190","display_name":"Medicine","level":0,"score":0.0}],"mesh":[],"locations_count":2,"locations":[{"id":"doi:10.1109/prime55000.2022.9816795","is_oa":false,"landing_page_url":"https://doi.org/10.1109/prime55000.2022.9816795","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2022 17th Conference on Ph.D Research in Microelectronics and Electronics (PRIME)","raw_type":"proceedings-article"},{"id":"pmh:oai:re.public.polimi.it:11311/1255017","is_oa":false,"landing_page_url":"https://hdl.handle.net/11311/1255017","pdf_url":null,"source":{"id":"https://openalex.org/S4306400312","display_name":"Virtual Community of Pathological Anatomy (University of Castilla La Mancha)","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"host_organization":"https://openalex.org/I79189158","host_organization_name":"University of Castilla-La Mancha","host_organization_lineage":["https://openalex.org/I79189158"],"host_organization_lineage_names":[],"type":"repository"},"license":null,"license_id":null,"version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"","raw_type":"info:eu-repo/semantics/conferenceObject"}],"best_oa_location":null,"sustainable_development_goals":[{"score":0.4300000071525574,"display_name":"Industry, innovation and infrastructure","id":"https://metadata.un.org/sdg/9"}],"awards":[],"funders":[],"has_content":{"pdf":false,"grobid_xml":false},"content_urls":null,"referenced_works_count":6,"referenced_works":["https://openalex.org/W2482732662","https://openalex.org/W3101314412","https://openalex.org/W3137434587","https://openalex.org/W4200276902","https://openalex.org/W4200288180","https://openalex.org/W4232804453"],"related_works":["https://openalex.org/W2120286148","https://openalex.org/W1972678038","https://openalex.org/W2086937600","https://openalex.org/W1983958623","https://openalex.org/W1990827130","https://openalex.org/W1967674726","https://openalex.org/W1529967344","https://openalex.org/W1606280582","https://openalex.org/W2091588437","https://openalex.org/W1506711168"],"abstract_inverted_index":{"Ge":[0],"enrichment":[1],"of":[2,33,65,69],"the":[3,17,23,31,34,41,63,70,75],"GeSbTe":[4],"(GST)":[5],"chalcogenide":[6],"made":[7],"possible":[8],"for":[9],"embedded":[10],"phase":[11],"change":[12],"memories":[13],"(ePCM)":[14],"to":[15,21,48],"guarantee":[16],"retention":[18],"level":[19],"necessary":[20,55],"satisfy":[22],"automotive":[24],"market\u2019s":[25],"requirements.":[26],"In":[27,57],"Ge-GST":[28],"devices":[29],"at":[30],"end":[32,68],"fabrication":[35],"process":[36,80],"memory":[37],"cells":[38],"are":[39],"in":[40,46],"pristine":[42],"state":[43,77],"(virgin)":[44],"and,":[45],"order":[47],"be":[49],"programmed,":[50],"an":[51,60],"activation":[52],"step":[53],"is":[54,81,93],"(forming).":[56],"this":[58],"work":[59],"investigation":[61],"on":[62,74],"influence":[64],"two":[66],"back":[67],"line":[71],"(BEOL)":[72],"processes":[73],"virgin":[76],"and":[78,90],"forming":[79],"presented.":[82],"A":[83],"model":[84],"that":[85],"accurately":[86],"replicates":[87],"both":[88],"physical":[89],"electrical":[91],"trends":[92],"also":[94],"shown.":[95]},"counts_by_year":[{"year":2025,"cited_by_count":1},{"year":2024,"cited_by_count":1},{"year":2023,"cited_by_count":1}],"updated_date":"2026-06-11T09:08:48.828518","created_date":"2025-10-10T00:00:00"}