{"id":"https://openalex.org/W2964624876","doi":"https://doi.org/10.1109/prime.2019.8787833","title":"Mechanical Test Structures for the Determination of Normal Stress in Multilayer Freestanding MEMS-Membranes","display_name":"Mechanical Test Structures for the Determination of Normal Stress in Multilayer Freestanding MEMS-Membranes","publication_year":2019,"publication_date":"2019-07-01","ids":{"openalex":"https://openalex.org/W2964624876","doi":"https://doi.org/10.1109/prime.2019.8787833","mag":"2964624876"},"language":"en","primary_location":{"id":"doi:10.1109/prime.2019.8787833","is_oa":false,"landing_page_url":"https://doi.org/10.1109/prime.2019.8787833","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2019 15th Conference on Ph.D Research in Microelectronics and Electronics (PRIME)","raw_type":"proceedings-article"},"type":"article","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5040074984","display_name":"Marvin Michel","orcid":"https://orcid.org/0000-0002-8747-975X"},"institutions":[{"id":"https://openalex.org/I4210100127","display_name":"Fraunhofer Institute for Microelectronic Circuits and Systems","ror":"https://ror.org/01243c877","country_code":"DE","type":"facility","lineage":["https://openalex.org/I4210100127","https://openalex.org/I4923324"]}],"countries":["DE"],"is_corresponding":true,"raw_author_name":"Marvin Michel","raw_affiliation_strings":["Optical Sensors and Applications, Fraunhofer Institute for Microelectromechanic Circuits and Systems, 47057 Duisburg, Germany"],"affiliations":[{"raw_affiliation_string":"Optical Sensors and Applications, Fraunhofer Institute for Microelectromechanic Circuits and Systems, 47057 Duisburg, Germany","institution_ids":["https://openalex.org/I4210100127"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5032788526","display_name":"H. Vogt","orcid":"https://orcid.org/0000-0001-8006-8598"},"institutions":[{"id":"https://openalex.org/I4210100127","display_name":"Fraunhofer Institute for Microelectronic Circuits and Systems","ror":"https://ror.org/01243c877","country_code":"DE","type":"facility","lineage":["https://openalex.org/I4210100127","https://openalex.org/I4923324"]}],"countries":["DE"],"is_corresponding":false,"raw_author_name":"Holger Vogt","raw_affiliation_strings":["Department of Electronic Components and Circuits, University Duisburg-Essen and Fraunhofer Institute for Microelectromechanic Circuits and Systems, 47057 Duisburg, Germany"],"affiliations":[{"raw_affiliation_string":"Department of Electronic Components and Circuits, University Duisburg-Essen and Fraunhofer Institute for Microelectromechanic Circuits and Systems, 47057 Duisburg, Germany","institution_ids":["https://openalex.org/I4210100127"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":2,"corresponding_author_ids":["https://openalex.org/A5040074984"],"corresponding_institution_ids":["https://openalex.org/I4210100127"],"apc_list":null,"apc_paid":null,"fwci":0.0,"has_fulltext":false,"cited_by_count":0,"citation_normalized_percentile":{"value":0.06413412,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":null,"biblio":{"volume":"9819","issue":null,"first_page":"301","last_page":"304"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":0.9998999834060669,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":0.9998999834060669,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11449","display_name":"Mechanical and Optical Resonators","score":0.9987000226974487,"subfield":{"id":"https://openalex.org/subfields/3107","display_name":"Atomic and Molecular Physics, and Optics"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10338","display_name":"Advanced Sensor and Energy Harvesting Materials","score":0.9973999857902527,"subfield":{"id":"https://openalex.org/subfields/2204","display_name":"Biomedical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/membrane","display_name":"Membrane","score":0.8307568430900574},{"id":"https://openalex.org/keywords/microelectromechanical-systems","display_name":"Microelectromechanical systems","score":0.8288910388946533},{"id":"https://openalex.org/keywords/materials-science","display_name":"Materials science","score":0.8039767146110535},{"id":"https://openalex.org/keywords/cantilever","display_name":"Cantilever","score":0.7109217643737793},{"id":"https://openalex.org/keywords/deflection","display_name":"Deflection (physics)","score":0.6896361708641052},{"id":"https://openalex.org/keywords/passivation","display_name":"Passivation","score":0.6535528302192688},{"id":"https://openalex.org/keywords/stress-relaxation","display_name":"Stress relaxation","score":0.5603699088096619},{"id":"https://openalex.org/keywords/composite-material","display_name":"Composite material","score":0.4925857186317444},{"id":"https://openalex.org/keywords/silicon","display_name":"Silicon","score":0.47233930230140686},{"id":"https://openalex.org/keywords/stress","display_name":"Stress (linguistics)","score":0.4315760135650635},{"id":"https://openalex.org/keywords/substrate","display_name":"Substrate (aquarium)","score":0.431308388710022},{"id":"https://openalex.org/keywords/layer","display_name":"Layer (electronics)","score":0.4190968871116638},{"id":"https://openalex.org/keywords/nanotechnology","display_name":"Nanotechnology","score":0.3351134657859802},{"id":"https://openalex.org/keywords/optoelectronics","display_name":"Optoelectronics","score":0.33025074005126953},{"id":"https://openalex.org/keywords/optics","display_name":"Optics","score":0.1270105242729187},{"id":"https://openalex.org/keywords/chemistry","display_name":"Chemistry","score":0.08736175298690796},{"id":"https://openalex.org/keywords/creep","display_name":"Creep","score":0.05480030179023743}],"concepts":[{"id":"https://openalex.org/C41625074","wikidata":"https://www.wikidata.org/wiki/Q176088","display_name":"Membrane","level":2,"score":0.8307568430900574},{"id":"https://openalex.org/C37977207","wikidata":"https://www.wikidata.org/wiki/Q175561","display_name":"Microelectromechanical systems","level":2,"score":0.8288910388946533},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.8039767146110535},{"id":"https://openalex.org/C141354745","wikidata":"https://www.wikidata.org/wiki/Q17227","display_name":"Cantilever","level":2,"score":0.7109217643737793},{"id":"https://openalex.org/C2781355719","wikidata":"https://www.wikidata.org/wiki/Q2080698","display_name":"Deflection (physics)","level":2,"score":0.6896361708641052},{"id":"https://openalex.org/C33574316","wikidata":"https://www.wikidata.org/wiki/Q917260","display_name":"Passivation","level":3,"score":0.6535528302192688},{"id":"https://openalex.org/C202974441","wikidata":"https://www.wikidata.org/wiki/Q2576844","display_name":"Stress relaxation","level":3,"score":0.5603699088096619},{"id":"https://openalex.org/C159985019","wikidata":"https://www.wikidata.org/wiki/Q181790","display_name":"Composite material","level":1,"score":0.4925857186317444},{"id":"https://openalex.org/C544956773","wikidata":"https://www.wikidata.org/wiki/Q670","display_name":"Silicon","level":2,"score":0.47233930230140686},{"id":"https://openalex.org/C21036866","wikidata":"https://www.wikidata.org/wiki/Q181767","display_name":"Stress (linguistics)","level":2,"score":0.4315760135650635},{"id":"https://openalex.org/C2777289219","wikidata":"https://www.wikidata.org/wiki/Q7632154","display_name":"Substrate (aquarium)","level":2,"score":0.431308388710022},{"id":"https://openalex.org/C2779227376","wikidata":"https://www.wikidata.org/wiki/Q6505497","display_name":"Layer (electronics)","level":2,"score":0.4190968871116638},{"id":"https://openalex.org/C171250308","wikidata":"https://www.wikidata.org/wiki/Q11468","display_name":"Nanotechnology","level":1,"score":0.3351134657859802},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.33025074005126953},{"id":"https://openalex.org/C120665830","wikidata":"https://www.wikidata.org/wiki/Q14620","display_name":"Optics","level":1,"score":0.1270105242729187},{"id":"https://openalex.org/C185592680","wikidata":"https://www.wikidata.org/wiki/Q2329","display_name":"Chemistry","level":0,"score":0.08736175298690796},{"id":"https://openalex.org/C149912024","wikidata":"https://www.wikidata.org/wiki/Q462188","display_name":"Creep","level":2,"score":0.05480030179023743},{"id":"https://openalex.org/C111368507","wikidata":"https://www.wikidata.org/wiki/Q43518","display_name":"Oceanography","level":1,"score":0.0},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.0},{"id":"https://openalex.org/C41895202","wikidata":"https://www.wikidata.org/wiki/Q8162","display_name":"Linguistics","level":1,"score":0.0},{"id":"https://openalex.org/C55493867","wikidata":"https://www.wikidata.org/wiki/Q7094","display_name":"Biochemistry","level":1,"score":0.0},{"id":"https://openalex.org/C138885662","wikidata":"https://www.wikidata.org/wiki/Q5891","display_name":"Philosophy","level":0,"score":0.0},{"id":"https://openalex.org/C127313418","wikidata":"https://www.wikidata.org/wiki/Q1069","display_name":"Geology","level":0,"score":0.0}],"mesh":[],"locations_count":4,"locations":[{"id":"doi:10.1109/prime.2019.8787833","is_oa":false,"landing_page_url":"https://doi.org/10.1109/prime.2019.8787833","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2019 15th Conference on Ph.D Research in Microelectronics and Electronics (PRIME)","raw_type":"proceedings-article"},{"id":"pmh:oai:bibliographie.ub.uni-due.de:ubo_mods_00137636","is_oa":false,"landing_page_url":"https://doi.org/10.1109/PRIME.2019.8787833","pdf_url":null,"source":{"id":"https://openalex.org/S7407055102","display_name":"Universit\u00e4tsbibliographie, Universit\u00e4t Duisburg-Essen","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"host_organization":null,"host_organization_name":null,"host_organization_lineage":[],"host_organization_lineage_names":[],"type":"repository"},"license":null,"license_id":null,"version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":null,"raw_type":"Buchaufsatz/Kapitel"},{"id":"pmh:oai:fraunhofer.de:N-555048","is_oa":false,"landing_page_url":"http://publica.fraunhofer.de/documents/N-555048.html","pdf_url":null,"source":{"id":"https://openalex.org/S4306400801","display_name":"Publikationsdatenbank der Fraunhofer-Gesellschaft (Fraunhofer-Gesellschaft)","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"host_organization":"https://openalex.org/I4923324","host_organization_name":"Fraunhofer-Gesellschaft","host_organization_lineage":["https://openalex.org/I4923324"],"host_organization_lineage_names":[],"type":"repository"},"license":null,"license_id":null,"version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"Fraunhofer IMS","raw_type":"Conference Paper"},{"id":"pmh:oai:publica.fraunhofer.de:publica/405031","is_oa":false,"landing_page_url":"https://publica.fraunhofer.de/handle/publica/405031","pdf_url":null,"source":{"id":"https://openalex.org/S4306400318","display_name":"Fraunhofer-Publica (Fraunhofer-Gesellschaft)","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"host_organization":"https://openalex.org/I4923324","host_organization_name":"Fraunhofer-Gesellschaft","host_organization_lineage":["https://openalex.org/I4923324"],"host_organization_lineage_names":[],"type":"repository"},"license":null,"license_id":null,"version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":null,"raw_type":"conference paper"}],"best_oa_location":null,"sustainable_development_goals":[],"awards":[],"funders":[],"has_content":{"pdf":false,"grobid_xml":false},"content_urls":null,"referenced_works_count":13,"referenced_works":["https://openalex.org/W1964334669","https://openalex.org/W1970613751","https://openalex.org/W1984550395","https://openalex.org/W1988992722","https://openalex.org/W1991899235","https://openalex.org/W2030778118","https://openalex.org/W2047864849","https://openalex.org/W2066874036","https://openalex.org/W2070687157","https://openalex.org/W2095146775","https://openalex.org/W2111390511","https://openalex.org/W2141812131","https://openalex.org/W2509584184"],"related_works":["https://openalex.org/W2893117232","https://openalex.org/W2368982584","https://openalex.org/W957405543","https://openalex.org/W2100154643","https://openalex.org/W2048171849","https://openalex.org/W2113391978","https://openalex.org/W4366570393","https://openalex.org/W2613977768","https://openalex.org/W4294739349","https://openalex.org/W2372176723"],"abstract_inverted_index":{"Understanding":[0],"the":[1,31,66,75,79],"mechanical":[2,76],"behavior":[3],"of":[4,11,23,40,78,88],"free":[5],"standing":[6],"membranes":[7,68,98],"is":[8,71],"a":[9,18,24,50],"point":[10],"common":[12],"interest":[13],"for":[14],"MEMS":[15,42],"structures,":[16],"where":[17],"certain":[19],"distance":[20],"or":[21,26],"deflection":[22],"cantilever":[25],"membrane":[27],"refers":[28],"directly":[29,61],"to":[30,85,91],"detectors":[32],"performance.":[33],"A":[34],"material":[35,81,94],"system":[36],"with":[37],"different":[38],"types":[39],"basic":[41],"materials":[43],"like":[44],"doped":[45],"silicon":[46],"as":[47,49],"well":[48],"conducting":[51],"and":[52,64,96],"passivation":[53],"layer":[54],"was":[55,59],"characterized.":[56],"Mechanical":[57],"stress":[58,77],"measured":[60],"after":[62],"deposition":[63,95],"at":[65],"freestanding":[67],"itself.":[69],"It":[70],"found":[72],"out,":[73],"that":[74],"investigated":[80],"systems":[82],"decreases":[83],"up":[84],"two":[86],"orders":[87],"magnitude":[89],"due":[90],"relaxation":[92],"between":[93],"releasing":[97],"from":[99],"substrate.":[100]},"counts_by_year":[],"updated_date":"2026-03-02T08:37:19.008085","created_date":"2025-10-10T00:00:00"}