{"id":"https://openalex.org/W4379876691","doi":"https://doi.org/10.1109/plans53410.2023.10140027","title":"Atomic Layer Deposition and Sputtering of Piezoelectric Thin Films for Improved IMU Performance","display_name":"Atomic Layer Deposition and Sputtering of Piezoelectric Thin Films for Improved IMU Performance","publication_year":2023,"publication_date":"2023-04-24","ids":{"openalex":"https://openalex.org/W4379876691","doi":"https://doi.org/10.1109/plans53410.2023.10140027"},"language":"en","primary_location":{"id":"doi:10.1109/plans53410.2023.10140027","is_oa":false,"landing_page_url":"http://dx.doi.org/10.1109/plans53410.2023.10140027","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2023 IEEE/ION Position, Location and Navigation Symposium (PLANS)","raw_type":"proceedings-article"},"type":"article","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5028629692","display_name":"Nicholas A. Strnad","orcid":"https://orcid.org/0000-0003-1621-521X"},"institutions":[{"id":"https://openalex.org/I2802705668","display_name":"United States Army Combat Capabilities Development Command","ror":"https://ror.org/02rdkx920","country_code":"US","type":"other","lineage":["https://openalex.org/I1304082316","https://openalex.org/I1330347796","https://openalex.org/I2802705668","https://openalex.org/I4210154437"]},{"id":"https://openalex.org/I166416128","display_name":"DEVCOM Army Research Laboratory","ror":"https://ror.org/011hc8f90","country_code":"US","type":"government","lineage":["https://openalex.org/I1304082316","https://openalex.org/I1330347796","https://openalex.org/I166416128","https://openalex.org/I2802705668","https://openalex.org/I4210154437"]}],"countries":["US"],"is_corresponding":true,"raw_author_name":"Nicholas A. Strnad","raw_affiliation_strings":["Army Research Directorate DEVCOM Army Research Laboratory,Adelphi,MD,USA","Army Research Directorate DEVCOM Army Research Laboratory, Adelphi, MD, USA"],"affiliations":[{"raw_affiliation_string":"Army Research Directorate DEVCOM Army Research Laboratory,Adelphi,MD,USA","institution_ids":["https://openalex.org/I166416128","https://openalex.org/I2802705668"]},{"raw_affiliation_string":"Army Research Directorate DEVCOM Army Research Laboratory, Adelphi, MD, USA","institution_ids":["https://openalex.org/I166416128","https://openalex.org/I2802705668"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5053461600","display_name":"Ryan Knight","orcid":"https://orcid.org/0000-0002-8074-6448"},"institutions":[{"id":"https://openalex.org/I166416128","display_name":"DEVCOM Army Research Laboratory","ror":"https://ror.org/011hc8f90","country_code":"US","type":"government","lineage":["https://openalex.org/I1304082316","https://openalex.org/I1330347796","https://openalex.org/I166416128","https://openalex.org/I2802705668","https://openalex.org/I4210154437"]},{"id":"https://openalex.org/I2802705668","display_name":"United States Army Combat Capabilities Development Command","ror":"https://ror.org/02rdkx920","country_code":"US","type":"other","lineage":["https://openalex.org/I1304082316","https://openalex.org/I1330347796","https://openalex.org/I2802705668","https://openalex.org/I4210154437"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"Ryan R. Knight","raw_affiliation_strings":["Army Research Directorate DEVCOM Army Research Laboratory,Adelphi,MD,USA","Army Research Directorate DEVCOM Army Research Laboratory, Adelphi, MD, USA"],"affiliations":[{"raw_affiliation_string":"Army Research Directorate DEVCOM Army Research Laboratory,Adelphi,MD,USA","institution_ids":["https://openalex.org/I166416128","https://openalex.org/I2802705668"]},{"raw_affiliation_string":"Army Research Directorate DEVCOM Army Research Laboratory, Adelphi, MD, USA","institution_ids":["https://openalex.org/I166416128","https://openalex.org/I2802705668"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5012537042","display_name":"Ryan Q. Rudy","orcid":"https://orcid.org/0000-0001-6775-2600"},"institutions":[{"id":"https://openalex.org/I166416128","display_name":"DEVCOM Army Research Laboratory","ror":"https://ror.org/011hc8f90","country_code":"US","type":"government","lineage":["https://openalex.org/I1304082316","https://openalex.org/I1330347796","https://openalex.org/I166416128","https://openalex.org/I2802705668","https://openalex.org/I4210154437"]},{"id":"https://openalex.org/I2802705668","display_name":"United States Army Combat Capabilities Development Command","ror":"https://ror.org/02rdkx920","country_code":"US","type":"other","lineage":["https://openalex.org/I1304082316","https://openalex.org/I1330347796","https://openalex.org/I2802705668","https://openalex.org/I4210154437"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"Ryan Q. Rudy","raw_affiliation_strings":["Army Research Directorate DEVCOM Army Research Laboratory,Adelphi,MD,USA","Army Research Directorate DEVCOM Army Research Laboratory, Adelphi, MD, USA"],"affiliations":[{"raw_affiliation_string":"Army Research Directorate DEVCOM Army Research Laboratory,Adelphi,MD,USA","institution_ids":["https://openalex.org/I166416128","https://openalex.org/I2802705668"]},{"raw_affiliation_string":"Army Research Directorate DEVCOM Army Research Laboratory, Adelphi, MD, USA","institution_ids":["https://openalex.org/I166416128","https://openalex.org/I2802705668"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5042900416","display_name":"Robert R. Benoit","orcid":"https://orcid.org/0000-0002-3728-6706"},"institutions":[{"id":"https://openalex.org/I166416128","display_name":"DEVCOM Army Research Laboratory","ror":"https://ror.org/011hc8f90","country_code":"US","type":"government","lineage":["https://openalex.org/I1304082316","https://openalex.org/I1330347796","https://openalex.org/I166416128","https://openalex.org/I2802705668","https://openalex.org/I4210154437"]},{"id":"https://openalex.org/I2802705668","display_name":"United States Army Combat Capabilities Development Command","ror":"https://ror.org/02rdkx920","country_code":"US","type":"other","lineage":["https://openalex.org/I1304082316","https://openalex.org/I1330347796","https://openalex.org/I2802705668","https://openalex.org/I4210154437"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"Robert R. Benoit","raw_affiliation_strings":["Army Research Directorate DEVCOM Army Research Laboratory,Adelphi,MD,USA","Army Research Directorate DEVCOM Army Research Laboratory, Adelphi, MD, USA"],"affiliations":[{"raw_affiliation_string":"Army Research Directorate DEVCOM Army Research Laboratory,Adelphi,MD,USA","institution_ids":["https://openalex.org/I166416128","https://openalex.org/I2802705668"]},{"raw_affiliation_string":"Army Research Directorate DEVCOM Army Research Laboratory, Adelphi, MD, USA","institution_ids":["https://openalex.org/I166416128","https://openalex.org/I2802705668"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5047250641","display_name":"Wendy L. Sarney","orcid":"https://orcid.org/0000-0003-4024-1186"},"institutions":[{"id":"https://openalex.org/I166416128","display_name":"DEVCOM Army Research Laboratory","ror":"https://ror.org/011hc8f90","country_code":"US","type":"government","lineage":["https://openalex.org/I1304082316","https://openalex.org/I1330347796","https://openalex.org/I166416128","https://openalex.org/I2802705668","https://openalex.org/I4210154437"]},{"id":"https://openalex.org/I2802705668","display_name":"United States Army Combat Capabilities Development Command","ror":"https://ror.org/02rdkx920","country_code":"US","type":"other","lineage":["https://openalex.org/I1304082316","https://openalex.org/I1330347796","https://openalex.org/I2802705668","https://openalex.org/I4210154437"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"Wendy L. Sarney","raw_affiliation_strings":["Army Research Directorate DEVCOM Army Research Laboratory,Adelphi,MD,USA","Army Research Directorate DEVCOM Army Research Laboratory, Adelphi, MD, USA"],"affiliations":[{"raw_affiliation_string":"Army Research Directorate DEVCOM Army Research Laboratory,Adelphi,MD,USA","institution_ids":["https://openalex.org/I166416128","https://openalex.org/I2802705668"]},{"raw_affiliation_string":"Army Research Directorate DEVCOM Army Research Laboratory, Adelphi, MD, USA","institution_ids":["https://openalex.org/I166416128","https://openalex.org/I2802705668"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5103192468","display_name":"Jeffrey S. Pulskamp","orcid":"https://orcid.org/0009-0006-2802-9659"},"institutions":[{"id":"https://openalex.org/I166416128","display_name":"DEVCOM Army Research Laboratory","ror":"https://ror.org/011hc8f90","country_code":"US","type":"government","lineage":["https://openalex.org/I1304082316","https://openalex.org/I1330347796","https://openalex.org/I166416128","https://openalex.org/I2802705668","https://openalex.org/I4210154437"]},{"id":"https://openalex.org/I2802705668","display_name":"United States Army Combat Capabilities Development Command","ror":"https://ror.org/02rdkx920","country_code":"US","type":"other","lineage":["https://openalex.org/I1304082316","https://openalex.org/I1330347796","https://openalex.org/I2802705668","https://openalex.org/I4210154437"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"Jeffrey S. Pulskamp","raw_affiliation_strings":["Army Research Directorate DEVCOM Army Research Laboratory,Adelphi,MD,USA","Army Research Directorate DEVCOM Army Research Laboratory, Adelphi, MD, USA"],"affiliations":[{"raw_affiliation_string":"Army Research Directorate DEVCOM Army Research Laboratory,Adelphi,MD,USA","institution_ids":["https://openalex.org/I166416128","https://openalex.org/I2802705668"]},{"raw_affiliation_string":"Army Research Directorate DEVCOM Army Research Laboratory, Adelphi, MD, USA","institution_ids":["https://openalex.org/I166416128","https://openalex.org/I2802705668"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":6,"corresponding_author_ids":["https://openalex.org/A5028629692"],"corresponding_institution_ids":["https://openalex.org/I166416128","https://openalex.org/I2802705668"],"apc_list":null,"apc_paid":null,"fwci":0.225,"has_fulltext":false,"cited_by_count":2,"citation_normalized_percentile":{"value":0.4657016,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":89,"max":95},"biblio":{"volume":null,"issue":null,"first_page":"10","last_page":"17"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T11160","display_name":"Acoustic Wave Resonator Technologies","score":0.9998000264167786,"subfield":{"id":"https://openalex.org/subfields/2204","display_name":"Biomedical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T11160","display_name":"Acoustic Wave Resonator Technologies","score":0.9998000264167786,"subfield":{"id":"https://openalex.org/subfields/2204","display_name":"Biomedical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":0.9995999932289124,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10107","display_name":"Ferroelectric and Piezoelectric Materials","score":0.9968000054359436,"subfield":{"id":"https://openalex.org/subfields/2505","display_name":"Materials Chemistry"},"field":{"id":"https://openalex.org/fields/25","display_name":"Materials Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/piezoelectricity","display_name":"Piezoelectricity","score":0.7924531102180481},{"id":"https://openalex.org/keywords/thin-film","display_name":"Thin film","score":0.6573311686515808},{"id":"https://openalex.org/keywords/gyroscope","display_name":"Gyroscope","score":0.6335630416870117},{"id":"https://openalex.org/keywords/materials-science","display_name":"Materials science","score":0.6222484111785889},{"id":"https://openalex.org/keywords/atomic-layer-deposition","display_name":"Atomic layer deposition","score":0.5865184664726257},{"id":"https://openalex.org/keywords/sputtering","display_name":"Sputtering","score":0.5024664402008057},{"id":"https://openalex.org/keywords/substrate","display_name":"Substrate (aquarium)","score":0.4925285279750824},{"id":"https://openalex.org/keywords/deposition","display_name":"Deposition (geology)","score":0.48858150839805603},{"id":"https://openalex.org/keywords/lead-zirconate-titanate","display_name":"Lead zirconate titanate","score":0.4651307463645935},{"id":"https://openalex.org/keywords/microelectromechanical-systems","display_name":"Microelectromechanical systems","score":0.4527285099029541},{"id":"https://openalex.org/keywords/ferroelectricity","display_name":"Ferroelectricity","score":0.4517946243286133},{"id":"https://openalex.org/keywords/inertial-measurement-unit","display_name":"Inertial measurement unit","score":0.42952072620391846},{"id":"https://openalex.org/keywords/nanotechnology","display_name":"Nanotechnology","score":0.39945241808891296},{"id":"https://openalex.org/keywords/optoelectronics","display_name":"Optoelectronics","score":0.37592145800590515},{"id":"https://openalex.org/keywords/dielectric","display_name":"Dielectric","score":0.2858140468597412},{"id":"https://openalex.org/keywords/computer-science","display_name":"Computer science","score":0.25038743019104004},{"id":"https://openalex.org/keywords/composite-material","display_name":"Composite material","score":0.21031755208969116},{"id":"https://openalex.org/keywords/artificial-intelligence","display_name":"Artificial intelligence","score":0.10583990812301636},{"id":"https://openalex.org/keywords/aerospace-engineering","display_name":"Aerospace engineering","score":0.10151389241218567},{"id":"https://openalex.org/keywords/engineering","display_name":"Engineering","score":0.08808073401451111}],"concepts":[{"id":"https://openalex.org/C100082104","wikidata":"https://www.wikidata.org/wiki/Q183759","display_name":"Piezoelectricity","level":2,"score":0.7924531102180481},{"id":"https://openalex.org/C19067145","wikidata":"https://www.wikidata.org/wiki/Q1137203","display_name":"Thin film","level":2,"score":0.6573311686515808},{"id":"https://openalex.org/C158488048","wikidata":"https://www.wikidata.org/wiki/Q483400","display_name":"Gyroscope","level":2,"score":0.6335630416870117},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.6222484111785889},{"id":"https://openalex.org/C69544855","wikidata":"https://www.wikidata.org/wiki/Q757625","display_name":"Atomic layer deposition","level":3,"score":0.5865184664726257},{"id":"https://openalex.org/C22423302","wikidata":"https://www.wikidata.org/wiki/Q898444","display_name":"Sputtering","level":3,"score":0.5024664402008057},{"id":"https://openalex.org/C2777289219","wikidata":"https://www.wikidata.org/wiki/Q7632154","display_name":"Substrate (aquarium)","level":2,"score":0.4925285279750824},{"id":"https://openalex.org/C64297162","wikidata":"https://www.wikidata.org/wiki/Q1987070","display_name":"Deposition (geology)","level":3,"score":0.48858150839805603},{"id":"https://openalex.org/C2781128178","wikidata":"https://www.wikidata.org/wiki/Q883484","display_name":"Lead zirconate titanate","level":4,"score":0.4651307463645935},{"id":"https://openalex.org/C37977207","wikidata":"https://www.wikidata.org/wiki/Q175561","display_name":"Microelectromechanical systems","level":2,"score":0.4527285099029541},{"id":"https://openalex.org/C79090758","wikidata":"https://www.wikidata.org/wiki/Q1045739","display_name":"Ferroelectricity","level":3,"score":0.4517946243286133},{"id":"https://openalex.org/C79061980","wikidata":"https://www.wikidata.org/wiki/Q941680","display_name":"Inertial measurement unit","level":2,"score":0.42952072620391846},{"id":"https://openalex.org/C171250308","wikidata":"https://www.wikidata.org/wiki/Q11468","display_name":"Nanotechnology","level":1,"score":0.39945241808891296},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.37592145800590515},{"id":"https://openalex.org/C133386390","wikidata":"https://www.wikidata.org/wiki/Q184996","display_name":"Dielectric","level":2,"score":0.2858140468597412},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.25038743019104004},{"id":"https://openalex.org/C159985019","wikidata":"https://www.wikidata.org/wiki/Q181790","display_name":"Composite material","level":1,"score":0.21031755208969116},{"id":"https://openalex.org/C154945302","wikidata":"https://www.wikidata.org/wiki/Q11660","display_name":"Artificial intelligence","level":1,"score":0.10583990812301636},{"id":"https://openalex.org/C146978453","wikidata":"https://www.wikidata.org/wiki/Q3798668","display_name":"Aerospace engineering","level":1,"score":0.10151389241218567},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.08808073401451111},{"id":"https://openalex.org/C151730666","wikidata":"https://www.wikidata.org/wiki/Q7205","display_name":"Paleontology","level":1,"score":0.0},{"id":"https://openalex.org/C2816523","wikidata":"https://www.wikidata.org/wiki/Q180184","display_name":"Sediment","level":2,"score":0.0},{"id":"https://openalex.org/C111368507","wikidata":"https://www.wikidata.org/wiki/Q43518","display_name":"Oceanography","level":1,"score":0.0},{"id":"https://openalex.org/C86803240","wikidata":"https://www.wikidata.org/wiki/Q420","display_name":"Biology","level":0,"score":0.0},{"id":"https://openalex.org/C127313418","wikidata":"https://www.wikidata.org/wiki/Q1069","display_name":"Geology","level":0,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1109/plans53410.2023.10140027","is_oa":false,"landing_page_url":"http://dx.doi.org/10.1109/plans53410.2023.10140027","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2023 IEEE/ION Position, Location and Navigation Symposium (PLANS)","raw_type":"proceedings-article"}],"best_oa_location":null,"sustainable_development_goals":[{"display_name":"Affordable and clean energy","score":0.7200000286102295,"id":"https://metadata.un.org/sdg/7"}],"awards":[],"funders":[],"has_content":{"pdf":false,"grobid_xml":false},"content_urls":null,"referenced_works_count":21,"referenced_works":["https://openalex.org/W134221864","https://openalex.org/W1927448789","https://openalex.org/W1972951425","https://openalex.org/W2062840440","https://openalex.org/W2067208702","https://openalex.org/W2321771490","https://openalex.org/W2571302887","https://openalex.org/W2739057418","https://openalex.org/W2766702552","https://openalex.org/W2897215953","https://openalex.org/W2914257528","https://openalex.org/W2951759015","https://openalex.org/W2987797173","https://openalex.org/W3093054635","https://openalex.org/W3115930685","https://openalex.org/W3133902321","https://openalex.org/W3175871232","https://openalex.org/W3189709539","https://openalex.org/W4200074344","https://openalex.org/W4280537673","https://openalex.org/W6769827614"],"related_works":["https://openalex.org/W1973973903","https://openalex.org/W4287084017","https://openalex.org/W3195533899","https://openalex.org/W3179745820","https://openalex.org/W3208523813","https://openalex.org/W2545638156","https://openalex.org/W2359095091","https://openalex.org/W4238176532","https://openalex.org/W2061166944","https://openalex.org/W2188647373"],"abstract_inverted_index":{"We":[0,283],"discuss":[1,98,286],"recent":[2,287],"research":[3],"and":[4,12,25,51,60,108,216,269,309,326],"development":[5],"efforts":[6,99,110,288],"towards":[7],"low":[8],"cost,":[9],"size,":[10],"weight,":[11],"power":[13],"gyroscopes":[14,330],"based":[15],"on":[16,137,145,265,273,314],"piezoelectric":[17,24,68,143,158,164,190,197,229],"MEMS":[18,281],"technology.":[19],"The":[20],"potential":[21],"advantages":[22],"of":[23,70,134,142,170,211,252,276,311,323],"ferroelectric":[26,248,327],"material":[27],"integration":[28,275],"into":[29,279],"high":[30,138,146,302],"performance":[31,93,333],"inertial":[32],"sensors":[33],"include":[34],"the":[35,156,168,256,274],"following:":[36],"significantly":[37],"increased":[38],"drive":[39,63,183,191],"amplitudes":[40,184],"for":[41,185,196,214,242],"Coriolis":[42],"Vibratory":[43],"Gyroscopes":[44],"relative":[45],"to":[46,90,100,111,176,188,259,289,329,331],"electrostatic":[47],"actuators,":[48],"dynamically":[49],"equalized":[50],"stabilized":[52],"Quality":[53],"Factor":[54],"mismatch":[55],"(>>10\u00d7)":[56],"in":[57,338],"mode-match":[58],"gyroscopes,":[59],"greatly":[61],"improved":[62,340],"amplitude":[64],"(through":[65],"3D,":[66,113],"sidewall":[67],"integration)":[69],"mode-split":[71],"gyroscopes.":[72],"Piezoelectric":[73],"thin":[74,103,125,135],"films":[75,136,144,198,231,300],"with":[76,301],"large":[77],"electromechanical":[78],"coupling":[79],"coefficients":[80],"such":[81,149,199],"as":[82,150,200],"lead":[83,220],"zirconate":[84],"titanate":[85,222],"(PbZr<inf>x</inf>Th<inf>1-x</inf>O<inf>3</inf>,":[86],"PZT)":[87],"can":[88],"help":[89],"enable":[91,131],"these":[92],"benefits.":[94],"Specifically,":[95],"we":[96,237],"will":[97,284,319],"optimize":[101],"PZT":[102,115,201,215],"film":[104,126,263],"deposition":[105,133],"using":[106,116],"sputtering":[107],"new":[109,257],"deposit":[112],"conformal":[114,132],"Atomic":[117],"Layer":[118],"Deposition":[119],"(ALD).":[120],"ALD":[121,141,194,212,243,277],"is":[122],"a":[123,171,217,233,239],"well-established":[124],"growth":[127],"technique":[128],"that":[129],"may":[130,154],"aspect-ratio":[139,147],"features.":[140],"features,":[148],"arrayed":[151],"actuator":[152],"elements,":[153],"improve":[155,332],"areal":[157],"energy":[159,165],"density":[160],"(the":[161],"total":[162],"maximum":[163],"projected":[166],"onto":[167],"area":[169],"planar":[172,189],"substrate)":[173],"by":[174,292],"up":[175],"200x":[177],"or":[178,202],"more,":[179],"yielding":[180,228],"proportionally":[181],"larger":[182],"CVGs":[186],"compared":[187],"elements.":[192],"However,":[193],"processes":[195,213],"AlN":[203,291],"are":[204],"not":[205],"widely":[206],"reported.":[207],"Recent":[208],"laboratory":[209],"demonstrations":[210],"structural":[218],"isomorph":[219],"hafnate":[221],"(PbHf<inf>x</inf>Th<inf>1-</inf><inf>x</inf>O<inf>3</inf>,":[223],"PHT)":[224],"have":[225,295],"been":[226],"successful,":[227],"perovskite":[230],"following":[232],"post-deposition":[234],"anneal.":[235],"Here,":[236],"present":[238,270,321],"modified":[240],"process":[241,258],"PHT":[244,262,278],"which":[245,294],"has":[246],"yielded":[247,296],"remanent":[249],"polarizations":[250],"(2P<inf>r</inf>)":[251],"68":[253],"\u03bcC/cm<sup>2</sup>,":[254],"apply":[255],"\u2018ALL":[260],"ALD\u2019":[261],"stacks":[264],"3D-MEMS":[266],"comb":[267],"structures,":[268],"initial":[271],"results":[272,322],"\u2018planar\u2019":[280],"QMG.":[282],"also":[285,320],"grow":[290],"ALD,":[293],"c-axis":[297],"oriented":[298],"polycrystalline":[299],"dielectric":[303],"breakdown":[304],"voltage":[305],">":[306],"10":[307],"MV/cm":[308],"e<inf>31,f</inf>":[310],"\u22120.53":[312],"C/m<sup>2</sup>":[313],"platinized":[315],"substrates.":[316],"This":[317],"paper":[318],"applying":[324],"piezo-":[325],"materials":[328],"including":[334],"50%":[335],"Q-tuning":[336],"resulting":[337],"a>>10x":[339],"quality":[341],"factor":[342],"mismatch.":[343]},"counts_by_year":[{"year":2025,"cited_by_count":1},{"year":2023,"cited_by_count":1}],"updated_date":"2025-12-24T23:09:58.560324","created_date":"2025-10-10T00:00:00"}