{"id":"https://openalex.org/W3013705992","doi":"https://doi.org/10.1109/nvmts47818.2019.9043368","title":"Ferroelectric Hf<sub>1-x</sub>Zr<sub>x</sub>O<sub>2</sub> memories: device reliability and depolarization fields","display_name":"Ferroelectric Hf<sub>1-x</sub>Zr<sub>x</sub>O<sub>2</sub> memories: device reliability and depolarization fields","publication_year":2019,"publication_date":"2019-10-01","ids":{"openalex":"https://openalex.org/W3013705992","doi":"https://doi.org/10.1109/nvmts47818.2019.9043368","mag":"3013705992"},"language":"en","primary_location":{"id":"doi:10.1109/nvmts47818.2019.9043368","is_oa":false,"landing_page_url":"https://doi.org/10.1109/nvmts47818.2019.9043368","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2019 19th Non-Volatile Memory Technology Symposium (NVMTS)","raw_type":"proceedings-article"},"type":"article","indexed_in":["crossref"],"open_access":{"is_oa":true,"oa_status":"green","oa_url":"https://tud.qucosa.de/id/qucosa%3A77004","any_repository_has_fulltext":true},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5051312800","display_name":"Patrick D. Lomenzo","orcid":"https://orcid.org/0000-0001-8208-3871"},"institutions":[{"id":"https://openalex.org/I4210122489","display_name":"NaMLab (Germany)","ror":"https://ror.org/028070c57","country_code":"DE","type":"company","lineage":["https://openalex.org/I4210122489","https://openalex.org/I78650965"]}],"countries":["DE"],"is_corresponding":true,"raw_author_name":"Patrick D. Lomenzo","raw_affiliation_strings":["NaMLab gGmbH\nDresden, Germany","NaMLab gGmbH, Dresden, Germany"],"affiliations":[{"raw_affiliation_string":"NaMLab gGmbH\nDresden, Germany","institution_ids":["https://openalex.org/I4210122489"]},{"raw_affiliation_string":"NaMLab gGmbH, Dresden, Germany","institution_ids":["https://openalex.org/I4210122489"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5072907754","display_name":"Stefan Slesazeck","orcid":"https://orcid.org/0000-0002-0414-0321"},"institutions":[{"id":"https://openalex.org/I4210122489","display_name":"NaMLab (Germany)","ror":"https://ror.org/028070c57","country_code":"DE","type":"company","lineage":["https://openalex.org/I4210122489","https://openalex.org/I78650965"]}],"countries":["DE"],"is_corresponding":false,"raw_author_name":"Stefan Slesazeck","raw_affiliation_strings":["NaMLab gGmbH\nDresden, Germany","NaMLab gGmbH, Dresden, Germany"],"affiliations":[{"raw_affiliation_string":"NaMLab gGmbH\nDresden, Germany","institution_ids":["https://openalex.org/I4210122489"]},{"raw_affiliation_string":"NaMLab gGmbH, Dresden, Germany","institution_ids":["https://openalex.org/I4210122489"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5078160379","display_name":"Michael Hoffmann","orcid":"https://orcid.org/0000-0001-6493-3457"},"institutions":[{"id":"https://openalex.org/I4210122489","display_name":"NaMLab (Germany)","ror":"https://ror.org/028070c57","country_code":"DE","type":"company","lineage":["https://openalex.org/I4210122489","https://openalex.org/I78650965"]}],"countries":["DE"],"is_corresponding":false,"raw_author_name":"Michael Hoffmann","raw_affiliation_strings":["NaMLab gGmbH\nDresden, Germany","NaMLab gGmbH, Dresden, Germany"],"affiliations":[{"raw_affiliation_string":"NaMLab gGmbH\nDresden, Germany","institution_ids":["https://openalex.org/I4210122489"]},{"raw_affiliation_string":"NaMLab gGmbH, Dresden, Germany","institution_ids":["https://openalex.org/I4210122489"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5003850300","display_name":"Thomas Mikolajick","orcid":"https://orcid.org/0000-0003-3814-0378"},"institutions":[{"id":"https://openalex.org/I4210122489","display_name":"NaMLab (Germany)","ror":"https://ror.org/028070c57","country_code":"DE","type":"company","lineage":["https://openalex.org/I4210122489","https://openalex.org/I78650965"]},{"id":"https://openalex.org/I78650965","display_name":"Technische Universit\u00e4t Dresden","ror":"https://ror.org/042aqky30","country_code":"DE","type":"education","lineage":["https://openalex.org/I78650965"]}],"countries":["DE"],"is_corresponding":false,"raw_author_name":"Thomas Mikolajick","raw_affiliation_strings":["Chair of Nanoelectronic Materials\nTU Dresden\nDresden, Germany","NaMLab gGmbH\nDresden, Germany","NaMLab gGmbH, Dresden, Germany"],"affiliations":[{"raw_affiliation_string":"Chair of Nanoelectronic Materials\nTU Dresden\nDresden, Germany","institution_ids":["https://openalex.org/I78650965"]},{"raw_affiliation_string":"NaMLab gGmbH\nDresden, Germany","institution_ids":["https://openalex.org/I4210122489"]},{"raw_affiliation_string":"NaMLab gGmbH, Dresden, Germany","institution_ids":["https://openalex.org/I4210122489"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5023007303","display_name":"Uwe Schroeder","orcid":"https://orcid.org/0000-0002-6824-2386"},"institutions":[{"id":"https://openalex.org/I4210122489","display_name":"NaMLab (Germany)","ror":"https://ror.org/028070c57","country_code":"DE","type":"company","lineage":["https://openalex.org/I4210122489","https://openalex.org/I78650965"]}],"countries":["DE"],"is_corresponding":false,"raw_author_name":"Uwe Schroeder","raw_affiliation_strings":["NaMLab gGmbH\nDresden, Germany","NaMLab gGmbH, Dresden, Germany"],"affiliations":[{"raw_affiliation_string":"NaMLab gGmbH\nDresden, Germany","institution_ids":["https://openalex.org/I4210122489"]},{"raw_affiliation_string":"NaMLab gGmbH, Dresden, Germany","institution_ids":["https://openalex.org/I4210122489"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5073269358","display_name":"Benjamin Max","orcid":"https://orcid.org/0000-0002-6468-6596"},"institutions":[{"id":"https://openalex.org/I78650965","display_name":"Technische Universit\u00e4t Dresden","ror":"https://ror.org/042aqky30","country_code":"DE","type":"education","lineage":["https://openalex.org/I78650965"]}],"countries":["DE"],"is_corresponding":false,"raw_author_name":"Benjamin Max","raw_affiliation_strings":["Chair of Nanoelectronic Materials\nTU Dresden\nDresden, Germany","Department of Nanoelectronic Materials, Technical University of Dresden, Dresden, Germany"],"affiliations":[{"raw_affiliation_string":"Chair of Nanoelectronic Materials\nTU Dresden\nDresden, Germany","institution_ids":["https://openalex.org/I78650965"]},{"raw_affiliation_string":"Department of Nanoelectronic Materials, Technical University of Dresden, Dresden, Germany","institution_ids":["https://openalex.org/I78650965"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5003850300","display_name":"Thomas Mikolajick","orcid":"https://orcid.org/0000-0003-3814-0378"},"institutions":[{"id":"https://openalex.org/I4210122489","display_name":"NaMLab (Germany)","ror":"https://ror.org/028070c57","country_code":"DE","type":"company","lineage":["https://openalex.org/I4210122489","https://openalex.org/I78650965"]},{"id":"https://openalex.org/I78650965","display_name":"Technische Universit\u00e4t Dresden","ror":"https://ror.org/042aqky30","country_code":"DE","type":"education","lineage":["https://openalex.org/I78650965"]}],"countries":["DE"],"is_corresponding":false,"raw_author_name":"Thomas Mikolajick","raw_affiliation_strings":["Chair of Nanoelectronic Materials\nTU Dresden\nDresden, Germany","NaMLab gGmbH\nDresden, Germany"],"affiliations":[{"raw_affiliation_string":"Chair of Nanoelectronic Materials\nTU Dresden\nDresden, Germany","institution_ids":["https://openalex.org/I78650965"]},{"raw_affiliation_string":"NaMLab gGmbH\nDresden, Germany","institution_ids":["https://openalex.org/I4210122489"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":7,"corresponding_author_ids":["https://openalex.org/A5051312800"],"corresponding_institution_ids":["https://openalex.org/I4210122489"],"apc_list":null,"apc_paid":null,"fwci":2.05,"has_fulltext":false,"cited_by_count":35,"citation_normalized_percentile":{"value":0.87615418,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":97,"max":99},"biblio":{"volume":null,"issue":null,"first_page":"1","last_page":"8"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T12808","display_name":"Ferroelectric and Negative Capacitance Devices","score":1.0,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T12808","display_name":"Ferroelectric and Negative Capacitance Devices","score":1.0,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T12046","display_name":"MXene and MAX Phase Materials","score":0.9941999912261963,"subfield":{"id":"https://openalex.org/subfields/2505","display_name":"Materials Chemistry"},"field":{"id":"https://openalex.org/fields/25","display_name":"Materials Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10472","display_name":"Semiconductor materials and devices","score":0.9923999905586243,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/ferroelectricity","display_name":"Ferroelectricity","score":0.594366192817688},{"id":"https://openalex.org/keywords/depolarization","display_name":"Depolarization","score":0.5522336363792419},{"id":"https://openalex.org/keywords/materials-science","display_name":"Materials science","score":0.3784795105457306},{"id":"https://openalex.org/keywords/physics","display_name":"Physics","score":0.35866495966911316},{"id":"https://openalex.org/keywords/dielectric","display_name":"Dielectric","score":0.21746230125427246},{"id":"https://openalex.org/keywords/optoelectronics","display_name":"Optoelectronics","score":0.197139710187912},{"id":"https://openalex.org/keywords/biology","display_name":"Biology","score":0.06980845332145691}],"concepts":[{"id":"https://openalex.org/C79090758","wikidata":"https://www.wikidata.org/wiki/Q1045739","display_name":"Ferroelectricity","level":3,"score":0.594366192817688},{"id":"https://openalex.org/C4141045","wikidata":"https://www.wikidata.org/wiki/Q83183","display_name":"Depolarization","level":2,"score":0.5522336363792419},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.3784795105457306},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.35866495966911316},{"id":"https://openalex.org/C133386390","wikidata":"https://www.wikidata.org/wiki/Q184996","display_name":"Dielectric","level":2,"score":0.21746230125427246},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.197139710187912},{"id":"https://openalex.org/C86803240","wikidata":"https://www.wikidata.org/wiki/Q420","display_name":"Biology","level":0,"score":0.06980845332145691},{"id":"https://openalex.org/C134018914","wikidata":"https://www.wikidata.org/wiki/Q162606","display_name":"Endocrinology","level":1,"score":0.0}],"mesh":[],"locations_count":2,"locations":[{"id":"doi:10.1109/nvmts47818.2019.9043368","is_oa":false,"landing_page_url":"https://doi.org/10.1109/nvmts47818.2019.9043368","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2019 19th Non-Volatile Memory Technology Symposium (NVMTS)","raw_type":"proceedings-article"},{"id":"pmh:oai:qucosa:de:qucosa:77004","is_oa":true,"landing_page_url":"https://tud.qucosa.de/id/qucosa%3A77004","pdf_url":null,"source":{"id":"https://openalex.org/S4377196312","display_name":"Qucosa (Saxon State and University Library Dresden)","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"host_organization":"https://openalex.org/I3132420320","host_organization_name":"SLUB Dresden","host_organization_lineage":["https://openalex.org/I3132420320"],"host_organization_lineage_names":[],"type":"repository"},"license":"other-oa","license_id":"https://openalex.org/licenses/other-oa","version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":null,"raw_type":"doc-type:Text"}],"best_oa_location":{"id":"pmh:oai:qucosa:de:qucosa:77004","is_oa":true,"landing_page_url":"https://tud.qucosa.de/id/qucosa%3A77004","pdf_url":null,"source":{"id":"https://openalex.org/S4377196312","display_name":"Qucosa (Saxon State and University Library Dresden)","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"host_organization":"https://openalex.org/I3132420320","host_organization_name":"SLUB Dresden","host_organization_lineage":["https://openalex.org/I3132420320"],"host_organization_lineage_names":[],"type":"repository"},"license":"other-oa","license_id":"https://openalex.org/licenses/other-oa","version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":null,"raw_type":"doc-type:Text"},"sustainable_development_goals":[{"display_name":"Affordable and clean energy","id":"https://metadata.un.org/sdg/7","score":0.6000000238418579}],"awards":[],"funders":[],"has_content":{"grobid_xml":false,"pdf":false},"content_urls":null,"referenced_works_count":26,"referenced_works":["https://openalex.org/W1647406517","https://openalex.org/W1976902828","https://openalex.org/W2000399637","https://openalex.org/W2013183053","https://openalex.org/W2016302109","https://openalex.org/W2018452678","https://openalex.org/W2031084595","https://openalex.org/W2044683682","https://openalex.org/W2051157602","https://openalex.org/W2053302507","https://openalex.org/W2086370274","https://openalex.org/W2150392432","https://openalex.org/W2291334276","https://openalex.org/W2346962696","https://openalex.org/W2482978312","https://openalex.org/W2483506684","https://openalex.org/W2500525874","https://openalex.org/W2585278086","https://openalex.org/W2786159202","https://openalex.org/W2799717108","https://openalex.org/W2885718248","https://openalex.org/W2964484716","https://openalex.org/W2967305557","https://openalex.org/W2971109244","https://openalex.org/W2972186689","https://openalex.org/W4252896820"],"related_works":["https://openalex.org/W2899084033","https://openalex.org/W2935759653","https://openalex.org/W3105167352","https://openalex.org/W54078636","https://openalex.org/W2954470139","https://openalex.org/W1501425562","https://openalex.org/W2902782467","https://openalex.org/W3084825885","https://openalex.org/W2298861036","https://openalex.org/W3148032049"],"abstract_inverted_index":{"The":[0,59,82],"influence":[1],"of":[2,47,61,71,100],"depolarization":[3,63,123],"and":[4,42,85,125],"its":[5],"role":[6],"in":[7,12,88],"causing":[8],"data":[9,126],"retention":[10,127],"failure":[11],"ferroelectric":[13],"memories":[14],"is":[15,65,94,116,128],"investigated.":[16],"Ferroelectric":[17],"Hf":[18],"<sub":[19,23,27,50,54,74,78,102,106],"xmlns:mml=\"http://www.w3.org/1998/Math/MathML\"":[20,24,28,51,55,75,79,103,107],"xmlns:xlink=\"http://www.w3.org/1999/xlink\">0.5</sub>":[21,25],"Zr":[22],"O":[26,53,77,105],"xmlns:xlink=\"http://www.w3.org/1999/xlink\">2</sub>":[29,52,76,104],"thin":[30],"films":[31],"8":[32],"nm":[33],"thick":[34],"incorporated":[35],"into":[36],"a":[37],"metal-ferroelectric-metal":[38],"capacitor":[39],"are":[40],"fabricated":[41],"characterized":[43],"with":[44,90,121],"varying":[45],"thicknesses":[46],"an":[48],"Al":[49,73,101],"xmlns:xlink=\"http://www.w3.org/1999/xlink\">3</sub>":[56,80,108],"interfacial":[57],"layer.":[58,81],"magnitude":[60],"the":[62,69,72,86,98,110],"field":[64,92],"adjusted":[66],"by":[67,97],"controlling":[68],"thickness":[70],"initial":[83],"polarization":[84,89,114],"change":[87],"electric":[91],"cycling":[93],"strongly":[95],"impacted":[96],"insertion":[99],"within":[109],"device":[111],"stack.":[112],"Transient":[113],"loss":[115],"shown":[117],"to":[118,131],"get":[119],"worse":[120],"larger":[122],"fields":[124],"evaluated":[129],"up":[130],"85":[132],"\u00b0C.":[133]},"counts_by_year":[{"year":2026,"cited_by_count":1},{"year":2025,"cited_by_count":6},{"year":2024,"cited_by_count":6},{"year":2023,"cited_by_count":5},{"year":2022,"cited_by_count":5},{"year":2021,"cited_by_count":7},{"year":2020,"cited_by_count":5}],"updated_date":"2026-03-20T23:20:44.827607","created_date":"2025-10-10T00:00:00"}