{"id":"https://openalex.org/W4385413299","doi":"https://doi.org/10.1109/nems57332.2023.10190894","title":"Influence of microstructure parameters and magnetic intensity on flexible pressure sensor with variable stiffness","display_name":"Influence of microstructure parameters and magnetic intensity on flexible pressure sensor with variable stiffness","publication_year":2023,"publication_date":"2023-05-14","ids":{"openalex":"https://openalex.org/W4385413299","doi":"https://doi.org/10.1109/nems57332.2023.10190894"},"language":"en","primary_location":{"id":"doi:10.1109/nems57332.2023.10190894","is_oa":false,"landing_page_url":"http://dx.doi.org/10.1109/nems57332.2023.10190894","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2023 IEEE 18th International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)","raw_type":"proceedings-article"},"type":"article","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5100609638","display_name":"Xinying Li","orcid":"https://orcid.org/0000-0003-1429-5439"},"institutions":[{"id":"https://openalex.org/I75867142","display_name":"Xiamen University of Technology","ror":"https://ror.org/01285e189","country_code":"CN","type":"education","lineage":["https://openalex.org/I75867142"]}],"countries":["CN"],"is_corresponding":true,"raw_author_name":"Xinying Li","raw_affiliation_strings":["Xiamen University,Pen-Tung Sah Institute of Micro-Nano Science and Technology,Xiamen,China","Pen-Tung Sah Institute of Micro-Nano Science and Technology, Xiamen University, Xiamen, China"],"affiliations":[{"raw_affiliation_string":"Xiamen University,Pen-Tung Sah Institute of Micro-Nano Science and Technology,Xiamen,China","institution_ids":["https://openalex.org/I75867142"]},{"raw_affiliation_string":"Pen-Tung Sah Institute of Micro-Nano Science and Technology, Xiamen University, Xiamen, China","institution_ids":["https://openalex.org/I75867142"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5101773689","display_name":"Tian Xie","orcid":"https://orcid.org/0000-0003-2916-6250"},"institutions":[{"id":"https://openalex.org/I75867142","display_name":"Xiamen University of Technology","ror":"https://ror.org/01285e189","country_code":"CN","type":"education","lineage":["https://openalex.org/I75867142"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Tian Xie","raw_affiliation_strings":["Xiamen University,Pen-Tung Sah Institute of Micro-Nano Science and Technology,Xiamen,China","Pen-Tung Sah Institute of Micro-Nano Science and Technology, Xiamen University, Xiamen, China"],"affiliations":[{"raw_affiliation_string":"Xiamen University,Pen-Tung Sah Institute of Micro-Nano Science and Technology,Xiamen,China","institution_ids":["https://openalex.org/I75867142"]},{"raw_affiliation_string":"Pen-Tung Sah Institute of Micro-Nano Science and Technology, Xiamen University, Xiamen, China","institution_ids":["https://openalex.org/I75867142"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5043794139","display_name":"Wenjun Xu","orcid":"https://orcid.org/0000-0002-6671-5493"},"institutions":[{"id":"https://openalex.org/I75867142","display_name":"Xiamen University of Technology","ror":"https://ror.org/01285e189","country_code":"CN","type":"education","lineage":["https://openalex.org/I75867142"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Wenjun Xu","raw_affiliation_strings":["Xiamen University,Pen-Tung Sah Institute of Micro-Nano Science and Technology,Xiamen,China","Pen-Tung Sah Institute of Micro-Nano Science and Technology, Xiamen University, Xiamen, China"],"affiliations":[{"raw_affiliation_string":"Xiamen University,Pen-Tung Sah Institute of Micro-Nano Science and Technology,Xiamen,China","institution_ids":["https://openalex.org/I75867142"]},{"raw_affiliation_string":"Pen-Tung Sah Institute of Micro-Nano Science and Technology, Xiamen University, Xiamen, China","institution_ids":["https://openalex.org/I75867142"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5044508291","display_name":"Wei Zhou","orcid":"https://orcid.org/0000-0002-9820-556X"},"institutions":[{"id":"https://openalex.org/I75867142","display_name":"Xiamen University of Technology","ror":"https://ror.org/01285e189","country_code":"CN","type":"education","lineage":["https://openalex.org/I75867142"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Wei Zhou","raw_affiliation_strings":["Xiamen University,Pen-Tung Sah Institute of Micro-Nano Science and Technology,Xiamen,China","Pen-Tung Sah Institute of Micro-Nano Science and Technology, Xiamen University, Xiamen, China"],"affiliations":[{"raw_affiliation_string":"Xiamen University,Pen-Tung Sah Institute of Micro-Nano Science and Technology,Xiamen,China","institution_ids":["https://openalex.org/I75867142"]},{"raw_affiliation_string":"Pen-Tung Sah Institute of Micro-Nano Science and Technology, Xiamen University, Xiamen, China","institution_ids":["https://openalex.org/I75867142"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":4,"corresponding_author_ids":["https://openalex.org/A5100609638"],"corresponding_institution_ids":["https://openalex.org/I75867142"],"apc_list":null,"apc_paid":null,"fwci":0.0,"has_fulltext":false,"cited_by_count":0,"citation_normalized_percentile":{"value":0.09507094,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":null,"biblio":{"volume":"6","issue":null,"first_page":"91","last_page":"94"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10338","display_name":"Advanced Sensor and Energy Harvesting Materials","score":0.9997000098228455,"subfield":{"id":"https://openalex.org/subfields/2204","display_name":"Biomedical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10338","display_name":"Advanced Sensor and Energy Harvesting Materials","score":0.9997000098228455,"subfield":{"id":"https://openalex.org/subfields/2204","display_name":"Biomedical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11799","display_name":"Adhesion, Friction, and Surface Interactions","score":0.9979000091552734,"subfield":{"id":"https://openalex.org/subfields/2211","display_name":"Mechanics of Materials"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":0.9970999956130981,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/microstructure","display_name":"Microstructure","score":0.7905933260917664},{"id":"https://openalex.org/keywords/materials-science","display_name":"Materials science","score":0.7792420983314514},{"id":"https://openalex.org/keywords/linearity","display_name":"Linearity","score":0.7421562671661377},{"id":"https://openalex.org/keywords/intensity","display_name":"Intensity (physics)","score":0.6511057615280151},{"id":"https://openalex.org/keywords/stiffness","display_name":"Stiffness","score":0.6164238452911377},{"id":"https://openalex.org/keywords/magnetic-field","display_name":"Magnetic field","score":0.5978541374206543},{"id":"https://openalex.org/keywords/fabrication","display_name":"Fabrication","score":0.5731724500656128},{"id":"https://openalex.org/keywords/pressure-sensor","display_name":"Pressure sensor","score":0.4901886582374573},{"id":"https://openalex.org/keywords/sensitivity","display_name":"Sensitivity (control systems)","score":0.4564424157142639},{"id":"https://openalex.org/keywords/electrode","display_name":"Electrode","score":0.4477866590023041},{"id":"https://openalex.org/keywords/magnet","display_name":"Magnet","score":0.4396510124206543},{"id":"https://openalex.org/keywords/composite-material","display_name":"Composite material","score":0.39147526025772095},{"id":"https://openalex.org/keywords/optoelectronics","display_name":"Optoelectronics","score":0.33596372604370117},{"id":"https://openalex.org/keywords/optics","display_name":"Optics","score":0.24962639808654785},{"id":"https://openalex.org/keywords/electronic-engineering","display_name":"Electronic engineering","score":0.20985448360443115},{"id":"https://openalex.org/keywords/electrical-engineering","display_name":"Electrical engineering","score":0.1733778417110443},{"id":"https://openalex.org/keywords/mechanical-engineering","display_name":"Mechanical engineering","score":0.10566291213035583},{"id":"https://openalex.org/keywords/chemistry","display_name":"Chemistry","score":0.07535925507545471},{"id":"https://openalex.org/keywords/physics","display_name":"Physics","score":0.07372042536735535},{"id":"https://openalex.org/keywords/engineering","display_name":"Engineering","score":0.058492451906204224}],"concepts":[{"id":"https://openalex.org/C87976508","wikidata":"https://www.wikidata.org/wiki/Q1498213","display_name":"Microstructure","level":2,"score":0.7905933260917664},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.7792420983314514},{"id":"https://openalex.org/C77170095","wikidata":"https://www.wikidata.org/wiki/Q1753188","display_name":"Linearity","level":2,"score":0.7421562671661377},{"id":"https://openalex.org/C93038891","wikidata":"https://www.wikidata.org/wiki/Q1061524","display_name":"Intensity (physics)","level":2,"score":0.6511057615280151},{"id":"https://openalex.org/C2779372316","wikidata":"https://www.wikidata.org/wiki/Q569057","display_name":"Stiffness","level":2,"score":0.6164238452911377},{"id":"https://openalex.org/C115260700","wikidata":"https://www.wikidata.org/wiki/Q11408","display_name":"Magnetic field","level":2,"score":0.5978541374206543},{"id":"https://openalex.org/C136525101","wikidata":"https://www.wikidata.org/wiki/Q5428139","display_name":"Fabrication","level":3,"score":0.5731724500656128},{"id":"https://openalex.org/C41325743","wikidata":"https://www.wikidata.org/wiki/Q1261040","display_name":"Pressure sensor","level":2,"score":0.4901886582374573},{"id":"https://openalex.org/C21200559","wikidata":"https://www.wikidata.org/wiki/Q7451068","display_name":"Sensitivity (control systems)","level":2,"score":0.4564424157142639},{"id":"https://openalex.org/C17525397","wikidata":"https://www.wikidata.org/wiki/Q176140","display_name":"Electrode","level":2,"score":0.4477866590023041},{"id":"https://openalex.org/C16389437","wikidata":"https://www.wikidata.org/wiki/Q11421","display_name":"Magnet","level":2,"score":0.4396510124206543},{"id":"https://openalex.org/C159985019","wikidata":"https://www.wikidata.org/wiki/Q181790","display_name":"Composite material","level":1,"score":0.39147526025772095},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.33596372604370117},{"id":"https://openalex.org/C120665830","wikidata":"https://www.wikidata.org/wiki/Q14620","display_name":"Optics","level":1,"score":0.24962639808654785},{"id":"https://openalex.org/C24326235","wikidata":"https://www.wikidata.org/wiki/Q126095","display_name":"Electronic engineering","level":1,"score":0.20985448360443115},{"id":"https://openalex.org/C119599485","wikidata":"https://www.wikidata.org/wiki/Q43035","display_name":"Electrical engineering","level":1,"score":0.1733778417110443},{"id":"https://openalex.org/C78519656","wikidata":"https://www.wikidata.org/wiki/Q101333","display_name":"Mechanical engineering","level":1,"score":0.10566291213035583},{"id":"https://openalex.org/C185592680","wikidata":"https://www.wikidata.org/wiki/Q2329","display_name":"Chemistry","level":0,"score":0.07535925507545471},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.07372042536735535},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.058492451906204224},{"id":"https://openalex.org/C147789679","wikidata":"https://www.wikidata.org/wiki/Q11372","display_name":"Physical chemistry","level":1,"score":0.0},{"id":"https://openalex.org/C71924100","wikidata":"https://www.wikidata.org/wiki/Q11190","display_name":"Medicine","level":0,"score":0.0},{"id":"https://openalex.org/C62520636","wikidata":"https://www.wikidata.org/wiki/Q944","display_name":"Quantum mechanics","level":1,"score":0.0},{"id":"https://openalex.org/C142724271","wikidata":"https://www.wikidata.org/wiki/Q7208","display_name":"Pathology","level":1,"score":0.0},{"id":"https://openalex.org/C204787440","wikidata":"https://www.wikidata.org/wiki/Q188504","display_name":"Alternative medicine","level":2,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1109/nems57332.2023.10190894","is_oa":false,"landing_page_url":"http://dx.doi.org/10.1109/nems57332.2023.10190894","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2023 IEEE 18th International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)","raw_type":"proceedings-article"}],"best_oa_location":null,"sustainable_development_goals":[{"display_name":"Affordable and clean energy","score":0.6399999856948853,"id":"https://metadata.un.org/sdg/7"}],"awards":[],"funders":[],"has_content":{"grobid_xml":false,"pdf":false},"content_urls":null,"referenced_works_count":15,"referenced_works":["https://openalex.org/W1978240589","https://openalex.org/W2065600020","https://openalex.org/W2346396809","https://openalex.org/W2783189944","https://openalex.org/W2991055446","https://openalex.org/W2996781232","https://openalex.org/W3033965659","https://openalex.org/W3194701314","https://openalex.org/W3198942331","https://openalex.org/W4200178165","https://openalex.org/W4206422751","https://openalex.org/W4207012876","https://openalex.org/W4220875580","https://openalex.org/W6748307339","https://openalex.org/W6804357088"],"related_works":["https://openalex.org/W2023858428","https://openalex.org/W4247324130","https://openalex.org/W2538259895","https://openalex.org/W2126963364","https://openalex.org/W4400804331","https://openalex.org/W2218509615","https://openalex.org/W2051287254","https://openalex.org/W2370937376","https://openalex.org/W2727522171","https://openalex.org/W4366203988"],"abstract_inverted_index":{"This":[0],"paper":[1],"systematically":[2],"studies":[3],"the":[4,21,26,56,73,88,102,108,118,123,130,136,139],"Influence":[5],"of":[6,44,72,87,126,138],"microstructure":[7,27,57,76],"parameters":[8],"and":[9,37,40,59,154],"magnetic":[10,30,83,94,103,131],"intensity":[11,104,132],"on":[12,50],"flexible":[13,67],"pressure":[14,68,115,127,144,156],"sensor":[15,89,109,140],"with":[16,29,122],"variable":[17,65],"stiffness.":[18],"As":[19],"for":[20],"fabrication,":[22],"we":[23,54],"firstly":[24],"fabricate":[25],"array":[28,58],"induction":[31],"characteristic":[32],"by":[33,80],"3D":[34],"dynamic":[35],"laser,":[36],"than":[38],"sputter":[39],"pattern":[41],"a":[42,64,82],"pair":[43],"80":[45],"nm":[46],"thick":[47],"Au":[48],"electrodes":[49],"PET":[51,60],"film.":[52],"Finally,":[53],"package":[55],"film":[61],"to":[62],"get":[63],"stiffness":[66,71],"sensor.":[69],"The":[70,85,96],"magnetically":[74],"induced":[75],"can":[77],"be":[78],"increased":[79],"applying":[81],"field.":[84],"performance":[86],"was":[90],"tested":[91],"under":[92,113,142,151],"different":[93],"intensity.":[95],"experimental":[97],"results":[98],"show":[99],"that":[100],"when":[101],"is":[105,133],"0":[106],"mT,":[107,135],"had":[110,148],"higher":[111],"sensitivity":[112,137],"low":[114,143,153],"load,":[116,145],"but":[117,146],"linearity":[119,150],"became":[120],"worse":[121],"continuous":[124],"increase":[125],"load.":[128,157],"When":[129],"250":[134],"decreases":[141],"it":[147],"good":[149],"both":[152],"high":[155]},"counts_by_year":[],"updated_date":"2025-12-21T01:58:51.020947","created_date":"2025-10-10T00:00:00"}