{"id":"https://openalex.org/W4385413187","doi":"https://doi.org/10.1109/nems57332.2023.10190864","title":"Design of a novel MEMS Interrupter Device","display_name":"Design of a novel MEMS Interrupter Device","publication_year":2023,"publication_date":"2023-05-14","ids":{"openalex":"https://openalex.org/W4385413187","doi":"https://doi.org/10.1109/nems57332.2023.10190864"},"language":"en","primary_location":{"id":"doi:10.1109/nems57332.2023.10190864","is_oa":false,"landing_page_url":"https://doi.org/10.1109/nems57332.2023.10190864","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2023 IEEE 18th International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)","raw_type":"proceedings-article"},"type":"conference-paper","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5101793050","display_name":"He Wang","orcid":"https://orcid.org/0009-0002-9046-1259"},"institutions":[{"id":"https://openalex.org/I36399199","display_name":"Nanjing University of Science and Technology","ror":"https://ror.org/00xp9wg62","country_code":"CN","type":"education","lineage":["https://openalex.org/I36399199"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"He Wang","raw_affiliation_strings":["Nanjing University of Science and Technology,School of Mechanical Engineering,Nanjing,China","School of Mechanical Engineering, Nanjing University of Science and Technology, Nanjing, China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Nanjing University of Science and Technology,School of Mechanical Engineering,Nanjing,China","institution_ids":["https://openalex.org/I36399199"]},{"raw_affiliation_string":"School of Mechanical Engineering, Nanjing University of Science and Technology, Nanjing, China","institution_ids":["https://openalex.org/I36399199"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5059210513","display_name":"Weirong Nie","orcid":"https://orcid.org/0000-0002-5578-2455"},"institutions":[{"id":"https://openalex.org/I36399199","display_name":"Nanjing University of Science and Technology","ror":"https://ror.org/00xp9wg62","country_code":"CN","type":"education","lineage":["https://openalex.org/I36399199"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Weirong Nie","raw_affiliation_strings":["Nanjing University of Science and Technology,School of Mechanical Engineering,Nanjing,China","School of Mechanical Engineering, Nanjing University of Science and Technology, Nanjing, China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Nanjing University of Science and Technology,School of Mechanical Engineering,Nanjing,China","institution_ids":["https://openalex.org/I36399199"]},{"raw_affiliation_string":"School of Mechanical Engineering, Nanjing University of Science and Technology, Nanjing, China","institution_ids":["https://openalex.org/I36399199"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5036036693","display_name":"Yun Cao","orcid":"https://orcid.org/0000-0002-5376-2362"},"institutions":[{"id":"https://openalex.org/I36399199","display_name":"Nanjing University of Science and Technology","ror":"https://ror.org/00xp9wg62","country_code":"CN","type":"education","lineage":["https://openalex.org/I36399199"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Yun Cao","raw_affiliation_strings":["Nanjing University of Science and Technology,School of Mechanical Engineering,Nanjing,China","School of Mechanical Engineering, Nanjing University of Science and Technology, Nanjing, China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Nanjing University of Science and Technology,School of Mechanical Engineering,Nanjing,China","institution_ids":["https://openalex.org/I36399199"]},{"raw_affiliation_string":"School of Mechanical Engineering, Nanjing University of Science and Technology, Nanjing, China","institution_ids":["https://openalex.org/I36399199"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5089317672","display_name":"Shenghong Lei","orcid":"https://orcid.org/0000-0003-3165-1327"},"institutions":[{"id":"https://openalex.org/I36399199","display_name":"Nanjing University of Science and Technology","ror":"https://ror.org/00xp9wg62","country_code":"CN","type":"education","lineage":["https://openalex.org/I36399199"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Shenghong Lei","raw_affiliation_strings":["Nanjing University of Science and Technology,School of Mechanical Engineering,Nanjing,China","School of Mechanical Engineering, Nanjing University of Science and Technology, Nanjing, China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Nanjing University of Science and Technology,School of Mechanical Engineering,Nanjing,China","institution_ids":["https://openalex.org/I36399199"]},{"raw_affiliation_string":"School of Mechanical Engineering, Nanjing University of Science and Technology, Nanjing, China","institution_ids":["https://openalex.org/I36399199"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5063510779","display_name":"Xiaoyu Kong","orcid":"https://orcid.org/0000-0003-0175-4923"},"institutions":[{"id":"https://openalex.org/I36399199","display_name":"Nanjing University of Science and Technology","ror":"https://ror.org/00xp9wg62","country_code":"CN","type":"education","lineage":["https://openalex.org/I36399199"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Xiaoyu Kong","raw_affiliation_strings":["Nanjing University of Science and Technology,School of Mechanical Engineering,Nanjing,China","School of Mechanical Engineering, Nanjing University of Science and Technology, Nanjing, China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Nanjing University of Science and Technology,School of Mechanical Engineering,Nanjing,China","institution_ids":["https://openalex.org/I36399199"]},{"raw_affiliation_string":"School of Mechanical Engineering, Nanjing University of Science and Technology, Nanjing, China","institution_ids":["https://openalex.org/I36399199"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5108579919","display_name":"Junlin Lu","orcid":null},"institutions":[{"id":"https://openalex.org/I36399199","display_name":"Nanjing University of Science and Technology","ror":"https://ror.org/00xp9wg62","country_code":"CN","type":"education","lineage":["https://openalex.org/I36399199"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Junlin Lu","raw_affiliation_strings":["Nanjing University of Science and Technology,School of Mechanical Engineering,Nanjing,China","School of Mechanical Engineering, Nanjing University of Science and Technology, Nanjing, China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Nanjing University of Science and Technology,School of Mechanical Engineering,Nanjing,China","institution_ids":["https://openalex.org/I36399199"]},{"raw_affiliation_string":"School of Mechanical Engineering, Nanjing University of Science and Technology, Nanjing, China","institution_ids":["https://openalex.org/I36399199"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":1,"corresponding_author_ids":[],"corresponding_institution_ids":["https://openalex.org/I36399199"],"apc_list":null,"apc_paid":null,"fwci":null,"has_fulltext":false,"cited_by_count":4,"citation_normalized_percentile":null,"cited_by_percentile_year":null,"biblio":{"volume":null,"issue":null,"first_page":"237","last_page":"241"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":0.998199999332428,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":0.998199999332428,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11301","display_name":"Advanced Surface Polishing Techniques","score":0.9817000031471252,"subfield":{"id":"https://openalex.org/subfields/2204","display_name":"Biomedical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10781","display_name":"Plasma Diagnostics and Applications","score":0.9545999765396118,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/interrupter","display_name":"Interrupter","score":0.9795954823493958},{"id":"https://openalex.org/keywords/reliability","display_name":"Reliability (semiconductor)","score":0.6035177111625671},{"id":"https://openalex.org/keywords/microelectromechanical-systems","display_name":"Microelectromechanical systems","score":0.5186730623245239},{"id":"https://openalex.org/keywords/engineering","display_name":"Engineering","score":0.4963589310646057},{"id":"https://openalex.org/keywords/centrifugal-force","display_name":"Centrifugal force","score":0.47239989042282104},{"id":"https://openalex.org/keywords/circuit-breaker","display_name":"Circuit breaker","score":0.44439899921417236},{"id":"https://openalex.org/keywords/electrical-engineering","display_name":"Electrical engineering","score":0.4374256730079651},{"id":"https://openalex.org/keywords/process","display_name":"Process (computing)","score":0.436013400554657},{"id":"https://openalex.org/keywords/displacement","display_name":"Displacement (psychology)","score":0.42716217041015625},{"id":"https://openalex.org/keywords/computer-science","display_name":"Computer science","score":0.38486430048942566},{"id":"https://openalex.org/keywords/materials-science","display_name":"Materials science","score":0.32787802815437317},{"id":"https://openalex.org/keywords/mechanical-engineering","display_name":"Mechanical engineering","score":0.24509596824645996},{"id":"https://openalex.org/keywords/optoelectronics","display_name":"Optoelectronics","score":0.1586582362651825},{"id":"https://openalex.org/keywords/physics","display_name":"Physics","score":0.13134276866912842},{"id":"https://openalex.org/keywords/power","display_name":"Power (physics)","score":0.07655099034309387}],"concepts":[{"id":"https://openalex.org/C21778337","wikidata":"https://www.wikidata.org/wiki/Q6056647","display_name":"Interrupter","level":2,"score":0.9795954823493958},{"id":"https://openalex.org/C43214815","wikidata":"https://www.wikidata.org/wiki/Q7310987","display_name":"Reliability (semiconductor)","level":3,"score":0.6035177111625671},{"id":"https://openalex.org/C37977207","wikidata":"https://www.wikidata.org/wiki/Q175561","display_name":"Microelectromechanical systems","level":2,"score":0.5186730623245239},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.4963589310646057},{"id":"https://openalex.org/C50735335","wikidata":"https://www.wikidata.org/wiki/Q178733","display_name":"Centrifugal force","level":3,"score":0.47239989042282104},{"id":"https://openalex.org/C61352017","wikidata":"https://www.wikidata.org/wiki/Q211058","display_name":"Circuit breaker","level":2,"score":0.44439899921417236},{"id":"https://openalex.org/C119599485","wikidata":"https://www.wikidata.org/wiki/Q43035","display_name":"Electrical engineering","level":1,"score":0.4374256730079651},{"id":"https://openalex.org/C98045186","wikidata":"https://www.wikidata.org/wiki/Q205663","display_name":"Process (computing)","level":2,"score":0.436013400554657},{"id":"https://openalex.org/C107551265","wikidata":"https://www.wikidata.org/wiki/Q1458245","display_name":"Displacement (psychology)","level":2,"score":0.42716217041015625},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.38486430048942566},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.32787802815437317},{"id":"https://openalex.org/C78519656","wikidata":"https://www.wikidata.org/wiki/Q101333","display_name":"Mechanical engineering","level":1,"score":0.24509596824645996},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.1586582362651825},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.13134276866912842},{"id":"https://openalex.org/C163258240","wikidata":"https://www.wikidata.org/wiki/Q25342","display_name":"Power (physics)","level":2,"score":0.07655099034309387},{"id":"https://openalex.org/C15744967","wikidata":"https://www.wikidata.org/wiki/Q9418","display_name":"Psychology","level":0,"score":0.0},{"id":"https://openalex.org/C542102704","wikidata":"https://www.wikidata.org/wiki/Q183257","display_name":"Psychotherapist","level":1,"score":0.0},{"id":"https://openalex.org/C81063470","wikidata":"https://www.wikidata.org/wiki/Q1256787","display_name":"Rotational speed","level":2,"score":0.0},{"id":"https://openalex.org/C62520636","wikidata":"https://www.wikidata.org/wiki/Q944","display_name":"Quantum mechanics","level":1,"score":0.0},{"id":"https://openalex.org/C111919701","wikidata":"https://www.wikidata.org/wiki/Q9135","display_name":"Operating system","level":1,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1109/nems57332.2023.10190864","is_oa":false,"landing_page_url":"https://doi.org/10.1109/nems57332.2023.10190864","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2023 IEEE 18th International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)","raw_type":"proceedings-article"}],"best_oa_location":null,"sustainable_development_goals":[],"awards":[],"funders":[],"has_content":{"pdf":false,"grobid_xml":false},"content_urls":null,"referenced_works_count":7,"referenced_works":["https://openalex.org/W98150109","https://openalex.org/W2303727010","https://openalex.org/W2559513590","https://openalex.org/W2569097803","https://openalex.org/W2806607878","https://openalex.org/W2890619464","https://openalex.org/W2898220099"],"related_works":["https://openalex.org/W4244155346","https://openalex.org/W2056970761","https://openalex.org/W2886695863","https://openalex.org/W2010231411","https://openalex.org/W2104082443","https://openalex.org/W2023790772","https://openalex.org/W2535175815","https://openalex.org/W1508687512","https://openalex.org/W1904352326","https://openalex.org/W2000856338"],"abstract_inverted_index":{"This":[0],"paper":[1],"proposes":[2],"a":[3,134],"novel":[4],"MEMS":[5,20],"interrupter":[6,31,37,90,98,110,127,143,154],"device":[7,24,69,155],"to":[8,70,123,130],"achieve":[9],"the":[10,30,33,36,45,49,55,67,72,77,89,92,97,100,103,107,109,118,126,131,138,142,152,159],"requirements":[11],"of":[12,19,29,66,76,137,141,151],"high":[13],"isolation":[14],"reliability":[15,75],"and":[16,22,32,48,61,74,86,95,115],"stable":[17,113],"latching":[18,93],"safety":[21],"arming":[23,50,132],"(SAD).":[25],"It":[26],"mainly":[27,83],"consists":[28],"frame,":[34],"where":[35],"plays":[38],"an":[39],"essential":[40],"role":[41],"in":[42,146],"switching":[43],"between":[44],"safe":[46],"position":[47,51],"by":[52,117,158],"moving":[53],"under":[54],"centrifugal":[56,104],"force.":[57],"The":[58,80,149],"locking":[59,62,68,78,81,119],"head":[60],"beam":[63,82],"together":[64],"consist":[65],"ensure":[71,124],"stability":[73],"process.":[79],"provides":[84],"friction":[85],"resistance":[87],"for":[88],"during":[91],"process":[94],"locks":[96],"after":[99],"latching.":[101],"When":[102],"force":[105],"reaches":[106],"threshold,":[108],"can":[111,128],"be":[112],"latching,":[114],"locked":[116],"beam.":[120],"In":[121],"order":[122],"that":[125],"move":[129],"displacement,":[133],"theoretical":[135],"model":[136],"displacement":[139],"response":[140],"is":[144,156],"proposed":[145],"this":[147],"paper.":[148],"feasibility":[150],"designed":[153],"demonstrated":[157],"finite":[160],"element":[161],"analysis.":[162]},"counts_by_year":[{"year":2026,"cited_by_count":1},{"year":2025,"cited_by_count":3}],"updated_date":"2026-07-25T15:57:00.446498","created_date":"2025-10-10T00:00:00"}