{"id":"https://openalex.org/W4281766015","doi":"https://doi.org/10.1109/nems54180.2022.9791174","title":"A Novel Piezoresistive Transducer for Bulk Mode MEMS Resonator","display_name":"A Novel Piezoresistive Transducer for Bulk Mode MEMS Resonator","publication_year":2022,"publication_date":"2022-04-14","ids":{"openalex":"https://openalex.org/W4281766015","doi":"https://doi.org/10.1109/nems54180.2022.9791174"},"language":"en","primary_location":{"id":"doi:10.1109/nems54180.2022.9791174","is_oa":false,"landing_page_url":"https://doi.org/10.1109/nems54180.2022.9791174","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2022 IEEE 17th International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)","raw_type":"proceedings-article"},"type":"article","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5056006683","display_name":"Yupeng Tian","orcid":"https://orcid.org/0000-0003-2811-2066"},"institutions":[{"id":"https://openalex.org/I90610280","display_name":"South China University of Technology","ror":"https://ror.org/0530pts50","country_code":"CN","type":"education","lineage":["https://openalex.org/I90610280"]}],"countries":["CN"],"is_corresponding":true,"raw_author_name":"Yupeng Tian","raw_affiliation_strings":["South China University of Technology,School of Electronic and Information Engineering,Guangzhou,China","School of Electronic and Information Engineering, South China University of Technology, Guangzhou, China"],"affiliations":[{"raw_affiliation_string":"South China University of Technology,School of Electronic and Information Engineering,Guangzhou,China","institution_ids":["https://openalex.org/I90610280"]},{"raw_affiliation_string":"School of Electronic and Information Engineering, South China University of Technology, Guangzhou, China","institution_ids":["https://openalex.org/I90610280"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5061692105","display_name":"Haoshen Zhu","orcid":"https://orcid.org/0000-0001-7972-4789"},"institutions":[{"id":"https://openalex.org/I90610280","display_name":"South China University of Technology","ror":"https://ror.org/0530pts50","country_code":"CN","type":"education","lineage":["https://openalex.org/I90610280"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Haoshen Zhu","raw_affiliation_strings":["South China University of Technology,School of Electronic and Information Engineering,Guangzhou,China","School of Electronic and Information Engineering, South China University of Technology, Guangzhou, China"],"affiliations":[{"raw_affiliation_string":"South China University of Technology,School of Electronic and Information Engineering,Guangzhou,China","institution_ids":["https://openalex.org/I90610280"]},{"raw_affiliation_string":"School of Electronic and Information Engineering, South China University of Technology, Guangzhou, China","institution_ids":["https://openalex.org/I90610280"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5100657319","display_name":"Quan Xue","orcid":"https://orcid.org/0000-0002-4226-2127"},"institutions":[{"id":"https://openalex.org/I90610280","display_name":"South China University of Technology","ror":"https://ror.org/0530pts50","country_code":"CN","type":"education","lineage":["https://openalex.org/I90610280"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Quan Xue","raw_affiliation_strings":["South China University of Technology,School of Electronic and Information Engineering,Guangzhou,China","School of Electronic and Information Engineering, South China University of Technology, Guangzhou, China"],"affiliations":[{"raw_affiliation_string":"South China University of Technology,School of Electronic and Information Engineering,Guangzhou,China","institution_ids":["https://openalex.org/I90610280"]},{"raw_affiliation_string":"School of Electronic and Information Engineering, South China University of Technology, Guangzhou, China","institution_ids":["https://openalex.org/I90610280"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":3,"corresponding_author_ids":["https://openalex.org/A5056006683"],"corresponding_institution_ids":["https://openalex.org/I90610280"],"apc_list":null,"apc_paid":null,"fwci":0.0915,"has_fulltext":false,"cited_by_count":1,"citation_normalized_percentile":{"value":0.38357313,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":90,"max":94},"biblio":{"volume":null,"issue":null,"first_page":"235","last_page":"238"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":1.0,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":1.0,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11160","display_name":"Acoustic Wave Resonator Technologies","score":0.9998999834060669,"subfield":{"id":"https://openalex.org/subfields/2204","display_name":"Biomedical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11449","display_name":"Mechanical and Optical Resonators","score":0.9994999766349792,"subfield":{"id":"https://openalex.org/subfields/3107","display_name":"Atomic and Molecular Physics, and Optics"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/piezoresistive-effect","display_name":"Piezoresistive effect","score":0.9574263095855713},{"id":"https://openalex.org/keywords/transducer","display_name":"Transducer","score":0.834204912185669},{"id":"https://openalex.org/keywords/resonator","display_name":"Resonator","score":0.7518754005432129},{"id":"https://openalex.org/keywords/materials-science","display_name":"Materials science","score":0.7443764209747314},{"id":"https://openalex.org/keywords/microelectromechanical-systems","display_name":"Microelectromechanical systems","score":0.49808669090270996},{"id":"https://openalex.org/keywords/optoelectronics","display_name":"Optoelectronics","score":0.46651020646095276},{"id":"https://openalex.org/keywords/acoustics","display_name":"Acoustics","score":0.3902779221534729},{"id":"https://openalex.org/keywords/physics","display_name":"Physics","score":0.15574929118156433}],"concepts":[{"id":"https://openalex.org/C198490522","wikidata":"https://www.wikidata.org/wiki/Q1932915","display_name":"Piezoresistive effect","level":2,"score":0.9574263095855713},{"id":"https://openalex.org/C56318395","wikidata":"https://www.wikidata.org/wiki/Q215928","display_name":"Transducer","level":2,"score":0.834204912185669},{"id":"https://openalex.org/C97126364","wikidata":"https://www.wikidata.org/wiki/Q349669","display_name":"Resonator","level":2,"score":0.7518754005432129},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.7443764209747314},{"id":"https://openalex.org/C37977207","wikidata":"https://www.wikidata.org/wiki/Q175561","display_name":"Microelectromechanical systems","level":2,"score":0.49808669090270996},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.46651020646095276},{"id":"https://openalex.org/C24890656","wikidata":"https://www.wikidata.org/wiki/Q82811","display_name":"Acoustics","level":1,"score":0.3902779221534729},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.15574929118156433}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1109/nems54180.2022.9791174","is_oa":false,"landing_page_url":"https://doi.org/10.1109/nems54180.2022.9791174","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2022 IEEE 17th International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)","raw_type":"proceedings-article"}],"best_oa_location":null,"sustainable_development_goals":[{"id":"https://metadata.un.org/sdg/7","score":0.8199999928474426,"display_name":"Affordable and clean energy"}],"awards":[],"funders":[{"id":"https://openalex.org/F4320321001","display_name":"National Natural Science Foundation of China","ror":"https://ror.org/01h0zpd94"}],"has_content":{"pdf":false,"grobid_xml":false},"content_urls":null,"referenced_works_count":10,"referenced_works":["https://openalex.org/W1983804852","https://openalex.org/W1986769160","https://openalex.org/W1998318993","https://openalex.org/W2006661615","https://openalex.org/W2018806435","https://openalex.org/W2031096873","https://openalex.org/W2038096857","https://openalex.org/W2106122013","https://openalex.org/W2133438518","https://openalex.org/W2168772655"],"related_works":["https://openalex.org/W2537716684","https://openalex.org/W2326864911","https://openalex.org/W2152087047","https://openalex.org/W2383068986","https://openalex.org/W2090275562","https://openalex.org/W3152005513","https://openalex.org/W2020960496","https://openalex.org/W2030471483","https://openalex.org/W1266100159","https://openalex.org/W2088920587"],"abstract_inverted_index":{"We":[0],"report":[1],"a":[2,77],"novel":[3],"piezoresistive":[4,21,29,61,90,103],"transducer":[5,22,30,62,104],"design":[6],"for":[7,23,85],"square-extensional":[8],"(SE)":[9],"mode":[10,25],"single-crystal-silicon":[11],"(SCS)":[12],"MEMS":[13],"resonator.":[14],"Compared":[15],"to":[16,52],"conventional":[17],"T-shaped":[18,66],"tether":[19],"as":[20],"SE":[24],"resonators,":[26],"the":[27,46,101],"proposed":[28,60,102],"empowers":[31],"SE-mode":[32,57],"resonator":[33,58],"with":[34,59,65,107],"higher":[35],"transduction":[36,73,95],"efficiency":[37,74,96],"and":[38,71,76,79,88,97],"lower":[39],"bias":[40,48],"current":[41,49],"induced":[42],"frequency":[43,83,98],"shift":[44,84,99],"at":[45],"same":[47],"level.":[50],"According":[51],"Finite":[53],"Element":[54],"(FE)":[55],"simulation,":[56],"outperforms":[63],"that":[64],"tether,":[67],"showing":[68],"an":[69,108],"88-fold":[70],"32-fold":[72],"improvement":[75],"1.7-fold":[78],"5-fold":[80],"reduction":[81],"in":[82],"0.5":[86],"\u00b5m":[87],"2\u00b5m":[89],"beam":[91,110],"width":[92],"respectively.":[93],"The":[94],"of":[100],"both":[105],"drop":[106],"increased":[109],"width.":[111]},"counts_by_year":[{"year":2024,"cited_by_count":1}],"updated_date":"2025-11-06T03:46:38.306776","created_date":"2025-10-10T00:00:00"}