{"id":"https://openalex.org/W3176584097","doi":"https://doi.org/10.1109/nems51815.2021.9451514","title":"Nanorobotic Manipulation inside Scanning Electron Microscope for the Electrical and Mechanical Characterization of ZnO nanowires","display_name":"Nanorobotic Manipulation inside Scanning Electron Microscope for the Electrical and Mechanical Characterization of ZnO nanowires","publication_year":2021,"publication_date":"2021-04-25","ids":{"openalex":"https://openalex.org/W3176584097","doi":"https://doi.org/10.1109/nems51815.2021.9451514","mag":"3176584097"},"language":"en","primary_location":{"id":"doi:10.1109/nems51815.2021.9451514","is_oa":false,"landing_page_url":"https://doi.org/10.1109/nems51815.2021.9451514","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2021 IEEE 16th International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)","raw_type":"proceedings-article"},"type":"article","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5100347933","display_name":"Mei Liu","orcid":"https://orcid.org/0000-0003-0078-7029"},"institutions":[{"id":"https://openalex.org/I113940042","display_name":"Shanghai University","ror":"https://ror.org/006teas31","country_code":"CN","type":"education","lineage":["https://openalex.org/I113940042"]}],"countries":["CN"],"is_corresponding":true,"raw_author_name":"Mei Liu","raw_affiliation_strings":["Shanghai Key Laboratory of Intelligent Manufacturing and Robotics, School of Mechatronic Engineering and Automation, Shanghai University, Shanghai, China"],"affiliations":[{"raw_affiliation_string":"Shanghai Key Laboratory of Intelligent Manufacturing and Robotics, School of Mechatronic Engineering and Automation, Shanghai University, Shanghai, China","institution_ids":["https://openalex.org/I113940042"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5016750897","display_name":"Aristide Djoulde","orcid":"https://orcid.org/0000-0002-1944-8919"},"institutions":[{"id":"https://openalex.org/I113940042","display_name":"Shanghai University","ror":"https://ror.org/006teas31","country_code":"CN","type":"education","lineage":["https://openalex.org/I113940042"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Aristide Djoulde","raw_affiliation_strings":["Shanghai Key Laboratory of Intelligent Manufacturing and Robotics, School of Mechatronic Engineering and Automation, Shanghai University, Shanghai, China"],"affiliations":[{"raw_affiliation_string":"Shanghai Key Laboratory of Intelligent Manufacturing and Robotics, School of Mechatronic Engineering and Automation, Shanghai University, Shanghai, China","institution_ids":["https://openalex.org/I113940042"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5101763152","display_name":"Quan Yang","orcid":"https://orcid.org/0000-0003-4308-3646"},"institutions":[{"id":"https://openalex.org/I113940042","display_name":"Shanghai University","ror":"https://ror.org/006teas31","country_code":"CN","type":"education","lineage":["https://openalex.org/I113940042"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Quan Yang","raw_affiliation_strings":["Shanghai Key Laboratory of Intelligent Manufacturing and Robotics, School of Mechatronic Engineering and Automation, Shanghai University, Shanghai, China"],"affiliations":[{"raw_affiliation_string":"Shanghai Key Laboratory of Intelligent Manufacturing and Robotics, School of Mechatronic Engineering and Automation, Shanghai University, Shanghai, China","institution_ids":["https://openalex.org/I113940042"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5072129395","display_name":"Weilin Su","orcid":null},"institutions":[{"id":"https://openalex.org/I113940042","display_name":"Shanghai University","ror":"https://ror.org/006teas31","country_code":"CN","type":"education","lineage":["https://openalex.org/I113940042"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Weilin Su","raw_affiliation_strings":["Shanghai Key Laboratory of Intelligent Manufacturing and Robotics, School of Mechatronic Engineering and Automation, Shanghai University, Shanghai, China"],"affiliations":[{"raw_affiliation_string":"Shanghai Key Laboratory of Intelligent Manufacturing and Robotics, School of Mechatronic Engineering and Automation, Shanghai University, Shanghai, China","institution_ids":["https://openalex.org/I113940042"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5066504881","display_name":"Lingli Kong","orcid":null},"institutions":[{"id":"https://openalex.org/I113940042","display_name":"Shanghai University","ror":"https://ror.org/006teas31","country_code":"CN","type":"education","lineage":["https://openalex.org/I113940042"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Lingli Kong","raw_affiliation_strings":["Shanghai Key Laboratory of Intelligent Manufacturing and Robotics, School of Mechatronic Engineering and Automation, Shanghai University, Shanghai, China"],"affiliations":[{"raw_affiliation_string":"Shanghai Key Laboratory of Intelligent Manufacturing and Robotics, School of Mechatronic Engineering and Automation, Shanghai University, Shanghai, China","institution_ids":["https://openalex.org/I113940042"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5065670089","display_name":"Jinjun Rao","orcid":"https://orcid.org/0000-0001-7998-2091"},"institutions":[{"id":"https://openalex.org/I113940042","display_name":"Shanghai University","ror":"https://ror.org/006teas31","country_code":"CN","type":"education","lineage":["https://openalex.org/I113940042"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Jinjun Rao","raw_affiliation_strings":["Shanghai Key Laboratory of Intelligent Manufacturing and Robotics, School of Mechatronic Engineering and Automation, Shanghai University, Shanghai, China"],"affiliations":[{"raw_affiliation_string":"Shanghai Key Laboratory of Intelligent Manufacturing and Robotics, School of Mechatronic Engineering and Automation, Shanghai University, Shanghai, China","institution_ids":["https://openalex.org/I113940042"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5100666550","display_name":"Jinbo Chen","orcid":"https://orcid.org/0000-0003-0881-6226"},"institutions":[{"id":"https://openalex.org/I113940042","display_name":"Shanghai University","ror":"https://ror.org/006teas31","country_code":"CN","type":"education","lineage":["https://openalex.org/I113940042"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Jinbo Chen","raw_affiliation_strings":["Shanghai Key Laboratory of Intelligent Manufacturing and Robotics, School of Mechatronic Engineering and Automation, Shanghai University, Shanghai, China"],"affiliations":[{"raw_affiliation_string":"Shanghai Key Laboratory of Intelligent Manufacturing and Robotics, School of Mechatronic Engineering and Automation, Shanghai University, Shanghai, China","institution_ids":["https://openalex.org/I113940042"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5100372799","display_name":"Zhiming Wang","orcid":"https://orcid.org/0000-0002-3047-3285"},"institutions":[{"id":"https://openalex.org/I113940042","display_name":"Shanghai University","ror":"https://ror.org/006teas31","country_code":"CN","type":"education","lineage":["https://openalex.org/I113940042"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Zhiming Wang","raw_affiliation_strings":["Shanghai Key Laboratory of Intelligent Manufacturing and Robotics, School of Mechatronic Engineering and Automation, Shanghai University, Shanghai, China"],"affiliations":[{"raw_affiliation_string":"Shanghai Key Laboratory of Intelligent Manufacturing and Robotics, School of Mechatronic Engineering and Automation, Shanghai University, Shanghai, China","institution_ids":["https://openalex.org/I113940042"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":8,"corresponding_author_ids":["https://openalex.org/A5100347933"],"corresponding_institution_ids":["https://openalex.org/I113940042"],"apc_list":null,"apc_paid":null,"fwci":0.2366,"has_fulltext":false,"cited_by_count":5,"citation_normalized_percentile":{"value":0.44253409,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":89,"max":96},"biblio":{"volume":null,"issue":null,"first_page":"919","last_page":"924"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10090","display_name":"ZnO doping and properties","score":0.9998999834060669,"subfield":{"id":"https://openalex.org/subfields/2505","display_name":"Materials Chemistry"},"field":{"id":"https://openalex.org/fields/25","display_name":"Materials Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10090","display_name":"ZnO doping and properties","score":0.9998999834060669,"subfield":{"id":"https://openalex.org/subfields/2505","display_name":"Materials Chemistry"},"field":{"id":"https://openalex.org/fields/25","display_name":"Materials Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11272","display_name":"Nanowire Synthesis and Applications","score":0.9998000264167786,"subfield":{"id":"https://openalex.org/subfields/2204","display_name":"Biomedical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T12588","display_name":"Electronic and Structural Properties of Oxides","score":0.9994999766349792,"subfield":{"id":"https://openalex.org/subfields/2505","display_name":"Materials Chemistry"},"field":{"id":"https://openalex.org/fields/25","display_name":"Materials Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/nanowire","display_name":"Nanowire","score":0.8875292539596558},{"id":"https://openalex.org/keywords/nanoindentation","display_name":"Nanoindentation","score":0.8628480434417725},{"id":"https://openalex.org/keywords/materials-science","display_name":"Materials science","score":0.858300507068634},{"id":"https://openalex.org/keywords/scanning-electron-microscope","display_name":"Scanning electron microscope","score":0.7820335626602173},{"id":"https://openalex.org/keywords/nanotechnology","display_name":"Nanotechnology","score":0.7102653384208679},{"id":"https://openalex.org/keywords/characterization","display_name":"Characterization (materials science)","score":0.5814221501350403},{"id":"https://openalex.org/keywords/nanoscopic-scale","display_name":"Nanoscopic scale","score":0.5572856068611145},{"id":"https://openalex.org/keywords/nanosensor","display_name":"Nanosensor","score":0.5502187013626099},{"id":"https://openalex.org/keywords/tungsten","display_name":"Tungsten","score":0.4166707992553711},{"id":"https://openalex.org/keywords/optoelectronics","display_name":"Optoelectronics","score":0.35359540581703186},{"id":"https://openalex.org/keywords/composite-material","display_name":"Composite material","score":0.29604512453079224},{"id":"https://openalex.org/keywords/metallurgy","display_name":"Metallurgy","score":0.12063977122306824}],"concepts":[{"id":"https://openalex.org/C74214498","wikidata":"https://www.wikidata.org/wiki/Q631739","display_name":"Nanowire","level":2,"score":0.8875292539596558},{"id":"https://openalex.org/C49326732","wikidata":"https://www.wikidata.org/wiki/Q1549892","display_name":"Nanoindentation","level":2,"score":0.8628480434417725},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.858300507068634},{"id":"https://openalex.org/C26771246","wikidata":"https://www.wikidata.org/wiki/Q321095","display_name":"Scanning electron microscope","level":2,"score":0.7820335626602173},{"id":"https://openalex.org/C171250308","wikidata":"https://www.wikidata.org/wiki/Q11468","display_name":"Nanotechnology","level":1,"score":0.7102653384208679},{"id":"https://openalex.org/C2780841128","wikidata":"https://www.wikidata.org/wiki/Q5073781","display_name":"Characterization (materials science)","level":2,"score":0.5814221501350403},{"id":"https://openalex.org/C45206210","wikidata":"https://www.wikidata.org/wiki/Q2415817","display_name":"Nanoscopic scale","level":2,"score":0.5572856068611145},{"id":"https://openalex.org/C41858301","wikidata":"https://www.wikidata.org/wiki/Q2327870","display_name":"Nanosensor","level":2,"score":0.5502187013626099},{"id":"https://openalex.org/C542268612","wikidata":"https://www.wikidata.org/wiki/Q743","display_name":"Tungsten","level":2,"score":0.4166707992553711},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.35359540581703186},{"id":"https://openalex.org/C159985019","wikidata":"https://www.wikidata.org/wiki/Q181790","display_name":"Composite material","level":1,"score":0.29604512453079224},{"id":"https://openalex.org/C191897082","wikidata":"https://www.wikidata.org/wiki/Q11467","display_name":"Metallurgy","level":1,"score":0.12063977122306824}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1109/nems51815.2021.9451514","is_oa":false,"landing_page_url":"https://doi.org/10.1109/nems51815.2021.9451514","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2021 IEEE 16th International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)","raw_type":"proceedings-article"}],"best_oa_location":null,"sustainable_development_goals":[{"id":"https://metadata.un.org/sdg/7","score":0.4000000059604645,"display_name":"Affordable and clean energy"}],"awards":[{"id":"https://openalex.org/G4826466478","display_name":null,"funder_award_id":"51205245,61573236","funder_id":"https://openalex.org/F4320321001","funder_display_name":"National Natural Science Foundation of China"}],"funders":[{"id":"https://openalex.org/F4320321001","display_name":"National Natural Science Foundation of China","ror":"https://ror.org/01h0zpd94"},{"id":"https://openalex.org/F4320336024","display_name":"Specialized Research Fund for the Doctoral Program of Higher Education of China","ror":null}],"has_content":{"pdf":false,"grobid_xml":false},"content_urls":null,"referenced_works_count":23,"referenced_works":["https://openalex.org/W884977040","https://openalex.org/W1589817110","https://openalex.org/W1980873528","https://openalex.org/W2041378573","https://openalex.org/W2057361118","https://openalex.org/W2065052956","https://openalex.org/W2078529521","https://openalex.org/W2078902418","https://openalex.org/W2079930339","https://openalex.org/W2080470749","https://openalex.org/W2095380518","https://openalex.org/W2138736802","https://openalex.org/W2261052827","https://openalex.org/W2472743159","https://openalex.org/W2562823800","https://openalex.org/W2587131337","https://openalex.org/W2588594996","https://openalex.org/W2766871324","https://openalex.org/W2791058028","https://openalex.org/W2883026734","https://openalex.org/W2978516501","https://openalex.org/W3093566157","https://openalex.org/W6668375932"],"related_works":["https://openalex.org/W2377912919","https://openalex.org/W2019128035","https://openalex.org/W2087591640","https://openalex.org/W2072954403","https://openalex.org/W2378057324","https://openalex.org/W2063705945","https://openalex.org/W2045519648","https://openalex.org/W2018120503","https://openalex.org/W2470215200","https://openalex.org/W2030950743"],"abstract_inverted_index":{"Revealing":[0],"novel":[1],"material":[2],"behavior":[3,99],"at":[4],"the":[5,10,17,35,49,67,78,95],"nanoscale":[6,109],"is":[7,25],"hindered":[8],"by":[9,45],"difficulties":[11],"of":[12,40,51,70,84,94,100],"conducting":[13],"well-instrumented":[14],"tests.":[15],"Hence,":[16],"nanorobotic":[18],"manipulation":[19,47],"inside":[20],"scanning":[21,53],"electron":[22,54],"microscope":[23,55,63],"system":[24,59],"considered":[26],"as":[27],"an":[28],"efficient":[29],"method":[30],"in":[31,108],"nano-measurements.":[32],"We":[33,65],"investigate":[34],"electrical":[36,96],"and":[37,60,81,97,112],"mechanical":[38,98],"properties":[39],"Zinc":[41],"oxide":[42],"(ZnO)":[43],"nanowires":[44],"direct":[46],"with":[48],"aid":[50],"a":[52,91,101],"(SEM)":[56],"compatible":[57],"nanomanipulator":[58],"atomic":[61],"force":[62],"(AFM).":[64],"report":[66],"contact":[68],"resistance":[69],"ZnO":[71,85,103],"nanowire-Au/tungsten/ZnO":[72],"nanowire":[73,104],"junctions,":[74],"real-time":[75],"impedance":[76],"analysis,":[77],"nanoindentation":[79],"hardness":[80],"elastic":[82],"modulus":[83],"nanowires.":[86],"This":[87],"research":[88],"will":[89],"provide":[90],"better":[92],"understanding":[93],"single":[102],"for":[105],"future":[106],"applications":[107],"field":[110],"effect-transistors":[111],"nanosensors.":[113]},"counts_by_year":[{"year":2025,"cited_by_count":2},{"year":2023,"cited_by_count":1},{"year":2022,"cited_by_count":2}],"updated_date":"2025-11-06T03:46:38.306776","created_date":"2025-10-10T00:00:00"}