{"id":"https://openalex.org/W3174738752","doi":"https://doi.org/10.1109/nems51815.2021.9451498","title":"Efficient Manufacturing of Microdome Array for Advanced Electronic and Optical Devices","display_name":"Efficient Manufacturing of Microdome Array for Advanced Electronic and Optical Devices","publication_year":2021,"publication_date":"2021-04-25","ids":{"openalex":"https://openalex.org/W3174738752","doi":"https://doi.org/10.1109/nems51815.2021.9451498","mag":"3174738752"},"language":"en","primary_location":{"id":"doi:10.1109/nems51815.2021.9451498","is_oa":false,"landing_page_url":"https://doi.org/10.1109/nems51815.2021.9451498","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2021 IEEE 16th International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)","raw_type":"proceedings-article"},"type":"article","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5030324756","display_name":"Zehua Xiang","orcid":"https://orcid.org/0000-0003-0487-4031"},"institutions":[{"id":"https://openalex.org/I4210119392","display_name":"Institute of Microelectronics","ror":"https://ror.org/02s6gs133","country_code":"CN","type":"facility","lineage":["https://openalex.org/I19820366","https://openalex.org/I4210119392"]},{"id":"https://openalex.org/I20231570","display_name":"Peking University","ror":"https://ror.org/02v51f717","country_code":"CN","type":"education","lineage":["https://openalex.org/I20231570"]}],"countries":["CN"],"is_corresponding":true,"raw_author_name":"Zehua Xiang","raw_affiliation_strings":["National Key Laboratory of Science and Technology on Micro/Nano Fabrication, Institute of Microelectronics, Peking University,China","National Key Laboratory of Science and Technology on Micro/Nano Fabrication, Institute of Microelectronics, Peking University, China"],"affiliations":[{"raw_affiliation_string":"National Key Laboratory of Science and Technology on Micro/Nano Fabrication, Institute of Microelectronics, Peking University,China","institution_ids":["https://openalex.org/I4210119392"]},{"raw_affiliation_string":"National Key Laboratory of Science and Technology on Micro/Nano Fabrication, Institute of Microelectronics, Peking University, China","institution_ids":["https://openalex.org/I20231570","https://openalex.org/I4210119392"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5069496806","display_name":"Haobin Wang","orcid":"https://orcid.org/0000-0002-2003-131X"},"institutions":[{"id":"https://openalex.org/I20231570","display_name":"Peking University","ror":"https://ror.org/02v51f717","country_code":"CN","type":"education","lineage":["https://openalex.org/I20231570"]},{"id":"https://openalex.org/I4210119392","display_name":"Institute of Microelectronics","ror":"https://ror.org/02s6gs133","country_code":"CN","type":"facility","lineage":["https://openalex.org/I19820366","https://openalex.org/I4210119392"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Haobin Wang","raw_affiliation_strings":["National Key Laboratory of Science and Technology on Micro/Nano Fabrication, Institute of Microelectronics, Peking University,China","National Key Laboratory of Science and Technology on Micro/Nano Fabrication, Institute of Microelectronics, Peking University, China"],"affiliations":[{"raw_affiliation_string":"National Key Laboratory of Science and Technology on Micro/Nano Fabrication, Institute of Microelectronics, Peking University,China","institution_ids":["https://openalex.org/I4210119392"]},{"raw_affiliation_string":"National Key Laboratory of Science and Technology on Micro/Nano Fabrication, Institute of Microelectronics, Peking University, China","institution_ids":["https://openalex.org/I20231570","https://openalex.org/I4210119392"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5102979334","display_name":"Hang Guo","orcid":"https://orcid.org/0000-0003-0933-9011"},"institutions":[{"id":"https://openalex.org/I20231570","display_name":"Peking University","ror":"https://ror.org/02v51f717","country_code":"CN","type":"education","lineage":["https://openalex.org/I20231570"]},{"id":"https://openalex.org/I4210160507","display_name":"Center for Life Sciences","ror":"https://ror.org/05kje8j93","country_code":"CN","type":"education","lineage":["https://openalex.org/I20231570","https://openalex.org/I4210160507","https://openalex.org/I99065089"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Hang Guo","raw_affiliation_strings":["Academy for Advanced Interdisciplinary Studies, Peking University,China","Academy for Advanced Interdisciplinary Studies, Peking University, China"],"affiliations":[{"raw_affiliation_string":"Academy for Advanced Interdisciplinary Studies, Peking University,China","institution_ids":["https://openalex.org/I4210160507","https://openalex.org/I20231570"]},{"raw_affiliation_string":"Academy for Advanced Interdisciplinary Studies, Peking University, China","institution_ids":["https://openalex.org/I20231570"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5101927816","display_name":"Ji Wan","orcid":"https://orcid.org/0000-0002-6232-2908"},"institutions":[{"id":"https://openalex.org/I20231570","display_name":"Peking University","ror":"https://ror.org/02v51f717","country_code":"CN","type":"education","lineage":["https://openalex.org/I20231570"]},{"id":"https://openalex.org/I4210119392","display_name":"Institute of Microelectronics","ror":"https://ror.org/02s6gs133","country_code":"CN","type":"facility","lineage":["https://openalex.org/I19820366","https://openalex.org/I4210119392"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Ji Wan","raw_affiliation_strings":["National Key Laboratory of Science and Technology on Micro/Nano Fabrication, Institute of Microelectronics, Peking University,China","National Key Laboratory of Science and Technology on Micro/Nano Fabrication, Institute of Microelectronics, Peking University, China"],"affiliations":[{"raw_affiliation_string":"National Key Laboratory of Science and Technology on Micro/Nano Fabrication, Institute of Microelectronics, Peking University,China","institution_ids":["https://openalex.org/I4210119392"]},{"raw_affiliation_string":"National Key Laboratory of Science and Technology on Micro/Nano Fabrication, Institute of Microelectronics, Peking University, China","institution_ids":["https://openalex.org/I20231570","https://openalex.org/I4210119392"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5100385733","display_name":"Xu Chen","orcid":"https://orcid.org/0000-0002-7754-9814"},"institutions":[{"id":"https://openalex.org/I20231570","display_name":"Peking University","ror":"https://ror.org/02v51f717","country_code":"CN","type":"education","lineage":["https://openalex.org/I20231570"]},{"id":"https://openalex.org/I4210160507","display_name":"Center for Life Sciences","ror":"https://ror.org/05kje8j93","country_code":"CN","type":"education","lineage":["https://openalex.org/I20231570","https://openalex.org/I4210160507","https://openalex.org/I99065089"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Chen Xu","raw_affiliation_strings":["Academy for Advanced Interdisciplinary Studies, Peking University,China","Academy for Advanced Interdisciplinary Studies, Peking University, China"],"affiliations":[{"raw_affiliation_string":"Academy for Advanced Interdisciplinary Studies, Peking University,China","institution_ids":["https://openalex.org/I4210160507","https://openalex.org/I20231570"]},{"raw_affiliation_string":"Academy for Advanced Interdisciplinary Studies, Peking University, China","institution_ids":["https://openalex.org/I20231570"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5082340230","display_name":"Liming Miao","orcid":"https://orcid.org/0000-0003-2164-5476"},"institutions":[{"id":"https://openalex.org/I20231570","display_name":"Peking University","ror":"https://ror.org/02v51f717","country_code":"CN","type":"education","lineage":["https://openalex.org/I20231570"]},{"id":"https://openalex.org/I4210119392","display_name":"Institute of Microelectronics","ror":"https://ror.org/02s6gs133","country_code":"CN","type":"facility","lineage":["https://openalex.org/I19820366","https://openalex.org/I4210119392"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Liming Miao","raw_affiliation_strings":["National Key Laboratory of Science and Technology on Micro/Nano Fabrication, Institute of Microelectronics, Peking University,China","National Key Laboratory of Science and Technology on Micro/Nano Fabrication, Institute of Microelectronics, Peking University, China"],"affiliations":[{"raw_affiliation_string":"National Key Laboratory of Science and Technology on Micro/Nano Fabrication, Institute of Microelectronics, Peking University,China","institution_ids":["https://openalex.org/I4210119392"]},{"raw_affiliation_string":"National Key Laboratory of Science and Technology on Micro/Nano Fabrication, Institute of Microelectronics, Peking University, China","institution_ids":["https://openalex.org/I20231570","https://openalex.org/I4210119392"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5020203925","display_name":"Mengdi Han","orcid":"https://orcid.org/0000-0002-7552-7398"},"institutions":[{"id":"https://openalex.org/I20231570","display_name":"Peking University","ror":"https://ror.org/02v51f717","country_code":"CN","type":"education","lineage":["https://openalex.org/I20231570"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Mengdi Han","raw_affiliation_strings":["College of Future Technology, Peking University,Department of Biomedical Engineering,China"],"affiliations":[{"raw_affiliation_string":"College of Future Technology, Peking University,Department of Biomedical Engineering,China","institution_ids":["https://openalex.org/I20231570"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5100375644","display_name":"Haixia Zhang","orcid":"https://orcid.org/0000-0003-4565-4123"},"institutions":[{"id":"https://openalex.org/I20231570","display_name":"Peking University","ror":"https://ror.org/02v51f717","country_code":"CN","type":"education","lineage":["https://openalex.org/I20231570"]},{"id":"https://openalex.org/I4210160507","display_name":"Center for Life Sciences","ror":"https://ror.org/05kje8j93","country_code":"CN","type":"education","lineage":["https://openalex.org/I20231570","https://openalex.org/I4210160507","https://openalex.org/I99065089"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Haixia Zhang","raw_affiliation_strings":["Academy for Advanced Interdisciplinary Studies, Peking University,China","Academy for Advanced Interdisciplinary Studies, Peking University, China"],"affiliations":[{"raw_affiliation_string":"Academy for Advanced Interdisciplinary Studies, Peking University,China","institution_ids":["https://openalex.org/I4210160507","https://openalex.org/I20231570"]},{"raw_affiliation_string":"Academy for Advanced Interdisciplinary Studies, Peking University, China","institution_ids":["https://openalex.org/I20231570"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":8,"corresponding_author_ids":["https://openalex.org/A5030324756"],"corresponding_institution_ids":["https://openalex.org/I20231570","https://openalex.org/I4210119392"],"apc_list":null,"apc_paid":null,"fwci":0.0,"has_fulltext":false,"cited_by_count":0,"citation_normalized_percentile":{"value":0.06487259,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":null,"biblio":{"volume":"81","issue":null,"first_page":"148","last_page":"151"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10338","display_name":"Advanced Sensor and Energy Harvesting Materials","score":0.9966999888420105,"subfield":{"id":"https://openalex.org/subfields/2204","display_name":"Biomedical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10338","display_name":"Advanced Sensor and Energy Harvesting Materials","score":0.9966999888420105,"subfield":{"id":"https://openalex.org/subfields/2204","display_name":"Biomedical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11429","display_name":"Semiconductor Lasers and Optical Devices","score":0.9925000071525574,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11737","display_name":"Advanced Materials and Mechanics","score":0.9890000224113464,"subfield":{"id":"https://openalex.org/subfields/2210","display_name":"Mechanical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/polydimethylsiloxane","display_name":"Polydimethylsiloxane","score":0.8159250020980835},{"id":"https://openalex.org/keywords/materials-science","display_name":"Materials science","score":0.7362971305847168},{"id":"https://openalex.org/keywords/lithography","display_name":"Lithography","score":0.5430241823196411},{"id":"https://openalex.org/keywords/surface-roughness","display_name":"Surface roughness","score":0.4805343747138977},{"id":"https://openalex.org/keywords/compensation","display_name":"Compensation (psychology)","score":0.46342265605926514},{"id":"https://openalex.org/keywords/3d-printing","display_name":"3D printing","score":0.45262759923934937},{"id":"https://openalex.org/keywords/optoelectronics","display_name":"Optoelectronics","score":0.44143033027648926},{"id":"https://openalex.org/keywords/microstructure","display_name":"Microstructure","score":0.4255119860172272},{"id":"https://openalex.org/keywords/electronics","display_name":"Electronics","score":0.4153193235397339},{"id":"https://openalex.org/keywords/optics","display_name":"Optics","score":0.337959349155426},{"id":"https://openalex.org/keywords/nanotechnology","display_name":"Nanotechnology","score":0.336505651473999},{"id":"https://openalex.org/keywords/composite-material","display_name":"Composite material","score":0.207867830991745},{"id":"https://openalex.org/keywords/electrical-engineering","display_name":"Electrical engineering","score":0.1122637391090393}],"concepts":[{"id":"https://openalex.org/C2779849746","wikidata":"https://www.wikidata.org/wiki/Q411955","display_name":"Polydimethylsiloxane","level":2,"score":0.8159250020980835},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.7362971305847168},{"id":"https://openalex.org/C204223013","wikidata":"https://www.wikidata.org/wiki/Q133036","display_name":"Lithography","level":2,"score":0.5430241823196411},{"id":"https://openalex.org/C107365816","wikidata":"https://www.wikidata.org/wiki/Q114817","display_name":"Surface roughness","level":2,"score":0.4805343747138977},{"id":"https://openalex.org/C2780023022","wikidata":"https://www.wikidata.org/wiki/Q1338171","display_name":"Compensation (psychology)","level":2,"score":0.46342265605926514},{"id":"https://openalex.org/C524769229","wikidata":"https://www.wikidata.org/wiki/Q229367","display_name":"3D printing","level":2,"score":0.45262759923934937},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.44143033027648926},{"id":"https://openalex.org/C87976508","wikidata":"https://www.wikidata.org/wiki/Q1498213","display_name":"Microstructure","level":2,"score":0.4255119860172272},{"id":"https://openalex.org/C138331895","wikidata":"https://www.wikidata.org/wiki/Q11650","display_name":"Electronics","level":2,"score":0.4153193235397339},{"id":"https://openalex.org/C120665830","wikidata":"https://www.wikidata.org/wiki/Q14620","display_name":"Optics","level":1,"score":0.337959349155426},{"id":"https://openalex.org/C171250308","wikidata":"https://www.wikidata.org/wiki/Q11468","display_name":"Nanotechnology","level":1,"score":0.336505651473999},{"id":"https://openalex.org/C159985019","wikidata":"https://www.wikidata.org/wiki/Q181790","display_name":"Composite material","level":1,"score":0.207867830991745},{"id":"https://openalex.org/C119599485","wikidata":"https://www.wikidata.org/wiki/Q43035","display_name":"Electrical engineering","level":1,"score":0.1122637391090393},{"id":"https://openalex.org/C11171543","wikidata":"https://www.wikidata.org/wiki/Q41630","display_name":"Psychoanalysis","level":1,"score":0.0},{"id":"https://openalex.org/C15744967","wikidata":"https://www.wikidata.org/wiki/Q9418","display_name":"Psychology","level":0,"score":0.0},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.0},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1109/nems51815.2021.9451498","is_oa":false,"landing_page_url":"https://doi.org/10.1109/nems51815.2021.9451498","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2021 IEEE 16th International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)","raw_type":"proceedings-article"}],"best_oa_location":null,"sustainable_development_goals":[{"score":0.7799999713897705,"display_name":"Affordable and clean energy","id":"https://metadata.un.org/sdg/7"}],"awards":[],"funders":[],"has_content":{"pdf":false,"grobid_xml":false},"content_urls":null,"referenced_works_count":10,"referenced_works":["https://openalex.org/W2087440215","https://openalex.org/W2195956780","https://openalex.org/W2252512975","https://openalex.org/W2770520638","https://openalex.org/W2986940038","https://openalex.org/W2990605642","https://openalex.org/W2991431668","https://openalex.org/W3014814551","https://openalex.org/W3015682198","https://openalex.org/W3098203388"],"related_works":["https://openalex.org/W1985565313","https://openalex.org/W2259450050","https://openalex.org/W2751709156","https://openalex.org/W2750029803","https://openalex.org/W2170016567","https://openalex.org/W2969481005","https://openalex.org/W2111365092","https://openalex.org/W205179978","https://openalex.org/W2140032130","https://openalex.org/W4225894732"],"abstract_inverted_index":{"Aiming":[0],"at":[1],"improving":[2],"the":[3,80,90],"precision":[4],"and":[5,24,40,63,78,87,102,112],"decreasing":[6],"roughness":[7],"of":[8,30,32,35,52,82,121],"micro-manufacturing,":[9],"this":[10,44],"work":[11],"proposes":[12],"a":[13,50,96,105],"new":[14],"method":[15,45],"that":[16],"combines":[17],"non-uniform":[18],"graphic":[19],"compensation":[20],"for":[21,108],"template":[22],"preparation":[23],"demolding":[25],"with":[26,99],"viscous":[27],"fluid":[28],"composed":[29],"mixtures":[31],"two":[33],"types":[34],"polydimethylsiloxane":[36],"(PDMS),":[37],"Sylgard":[38],"184":[39],"SE":[41],"1700.":[42],"Notably,":[43],"can":[46,93],"widely":[47],"apply":[48],"to":[49,69,116],"bounty":[51],"micro-manufacturing":[53],"methods,":[54],"such":[55,83],"as":[56,95],"laser":[57],"direct":[58],"writing":[59],"(LDW),":[60],"3D":[61],"printing,":[62],"lithography.":[64],"This":[65],"paper":[66],"exploits":[67],"LDW":[68],"fabricate":[70],"smooth":[71],"convex":[72],"microdome":[73],"array":[74],"(MA)":[75],"on":[76],"PDMS,":[77],"demonstrates":[79],"applications":[81],"microstructures":[84],"in":[85],"electronics":[86],"optics.":[88],"Specifically,":[89],"multifunctional":[91],"microstructure":[92],"serve":[94],"pressure":[97],"sensor":[98],"high":[100],"sensitivity":[101],"broad":[103],"range,":[104],"strain":[106,110],"senor":[107],"biaxial":[109],"sensing":[111],"an":[113],"anti-reflection":[114],"film":[115],"improve":[117],"photoelectric":[118],"conversion":[119],"efficiency":[120],"solar":[122],"cells.":[123]},"counts_by_year":[],"updated_date":"2025-11-06T03:46:38.306776","created_date":"2025-10-10T00:00:00"}