{"id":"https://openalex.org/W3173202707","doi":"https://doi.org/10.1109/nems51815.2021.9451433","title":"Humidity Sensor with High Resolution and Fast Response Based on AlN Cantilever with Two Groups of Segmented Electrodes","display_name":"Humidity Sensor with High Resolution and Fast Response Based on AlN Cantilever with Two Groups of Segmented Electrodes","publication_year":2021,"publication_date":"2021-04-25","ids":{"openalex":"https://openalex.org/W3173202707","doi":"https://doi.org/10.1109/nems51815.2021.9451433","mag":"3173202707"},"language":"en","primary_location":{"id":"doi:10.1109/nems51815.2021.9451433","is_oa":false,"landing_page_url":"https://doi.org/10.1109/nems51815.2021.9451433","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2021 IEEE 16th International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)","raw_type":"proceedings-article"},"type":"article","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5100440904","display_name":"Dongsheng Li","orcid":"https://orcid.org/0000-0001-9962-1373"},"institutions":[{"id":"https://openalex.org/I76130692","display_name":"Zhejiang University","ror":"https://ror.org/00a2xv884","country_code":"CN","type":"education","lineage":["https://openalex.org/I76130692"]}],"countries":["CN"],"is_corresponding":true,"raw_author_name":"Dongsheng Li","raw_affiliation_strings":["State Key Laboratory of Fluid Power and Mechatronic Systems, Zhejiang University, Hangzhou, Zhejiang, China"],"affiliations":[{"raw_affiliation_string":"State Key Laboratory of Fluid Power and Mechatronic Systems, Zhejiang University, Hangzhou, Zhejiang, China","institution_ids":["https://openalex.org/I76130692"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5021638953","display_name":"Hanyong Dong","orcid":null},"institutions":[{"id":"https://openalex.org/I76130692","display_name":"Zhejiang University","ror":"https://ror.org/00a2xv884","country_code":"CN","type":"education","lineage":["https://openalex.org/I76130692"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Hanyong Dong","raw_affiliation_strings":["State Key Laboratory of Fluid Power and Mechatronic Systems, Zhejiang University, Hangzhou, Zhejiang, China"],"affiliations":[{"raw_affiliation_string":"State Key Laboratory of Fluid Power and Mechatronic Systems, Zhejiang University, Hangzhou, Zhejiang, China","institution_ids":["https://openalex.org/I76130692"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5020878353","display_name":"Zihao Xie","orcid":"https://orcid.org/0009-0004-4945-6364"},"institutions":[{"id":"https://openalex.org/I76130692","display_name":"Zhejiang University","ror":"https://ror.org/00a2xv884","country_code":"CN","type":"education","lineage":["https://openalex.org/I76130692"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Zihao Xie","raw_affiliation_strings":["State Key Laboratory of Fluid Power and Mechatronic Systems, Zhejiang University, Hangzhou, Zhejiang, China"],"affiliations":[{"raw_affiliation_string":"State Key Laboratory of Fluid Power and Mechatronic Systems, Zhejiang University, Hangzhou, Zhejiang, China","institution_ids":["https://openalex.org/I76130692"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5007644852","display_name":"Mengjiao Qu","orcid":"https://orcid.org/0009-0001-5270-1912"},"institutions":[{"id":"https://openalex.org/I76130692","display_name":"Zhejiang University","ror":"https://ror.org/00a2xv884","country_code":"CN","type":"education","lineage":["https://openalex.org/I76130692"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Mengjiao Qu","raw_affiliation_strings":["State Key Laboratory of Fluid Power and Mechatronic Systems, Zhejiang University, Hangzhou, Zhejiang, China"],"affiliations":[{"raw_affiliation_string":"State Key Laboratory of Fluid Power and Mechatronic Systems, Zhejiang University, Hangzhou, Zhejiang, China","institution_ids":["https://openalex.org/I76130692"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5115603610","display_name":"Qian Zhang","orcid":"https://orcid.org/0000-0001-5975-9781"},"institutions":[{"id":"https://openalex.org/I76130692","display_name":"Zhejiang University","ror":"https://ror.org/00a2xv884","country_code":"CN","type":"education","lineage":["https://openalex.org/I76130692"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Qian Zhang","raw_affiliation_strings":["State Key Laboratory of Fluid Power and Mechatronic Systems, Zhejiang University, Hangzhou, Zhejiang, China"],"affiliations":[{"raw_affiliation_string":"State Key Laboratory of Fluid Power and Mechatronic Systems, Zhejiang University, Hangzhou, Zhejiang, China","institution_ids":["https://openalex.org/I76130692"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5060103378","display_name":"Jin Xie","orcid":"https://orcid.org/0000-0003-3942-3046"},"institutions":[{"id":"https://openalex.org/I76130692","display_name":"Zhejiang University","ror":"https://ror.org/00a2xv884","country_code":"CN","type":"education","lineage":["https://openalex.org/I76130692"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Jin Xie","raw_affiliation_strings":["State Key Laboratory of Fluid Power and Mechatronic Systems, Zhejiang University, Hangzhou, Zhejiang, China"],"affiliations":[{"raw_affiliation_string":"State Key Laboratory of Fluid Power and Mechatronic Systems, Zhejiang University, Hangzhou, Zhejiang, China","institution_ids":["https://openalex.org/I76130692"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":6,"corresponding_author_ids":["https://openalex.org/A5100440904"],"corresponding_institution_ids":["https://openalex.org/I76130692"],"apc_list":null,"apc_paid":null,"fwci":0.1003,"has_fulltext":false,"cited_by_count":1,"citation_normalized_percentile":{"value":0.41399492,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":89,"max":94},"biblio":{"volume":null,"issue":null,"first_page":"1419","last_page":"1422"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10461","display_name":"Gas Sensing Nanomaterials and Sensors","score":0.9995999932289124,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10461","display_name":"Gas Sensing Nanomaterials and Sensors","score":0.9995999932289124,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11449","display_name":"Mechanical and Optical Resonators","score":0.9991999864578247,"subfield":{"id":"https://openalex.org/subfields/3107","display_name":"Atomic and Molecular Physics, and Optics"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11160","display_name":"Acoustic Wave Resonator Technologies","score":0.9988999962806702,"subfield":{"id":"https://openalex.org/subfields/2204","display_name":"Biomedical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/cantilever","display_name":"Cantilever","score":0.8450519442558289},{"id":"https://openalex.org/keywords/humidity","display_name":"Humidity","score":0.798591136932373},{"id":"https://openalex.org/keywords/materials-science","display_name":"Materials science","score":0.6430272459983826},{"id":"https://openalex.org/keywords/electrode","display_name":"Electrode","score":0.5336756110191345},{"id":"https://openalex.org/keywords/resonator","display_name":"Resonator","score":0.5051844716072083},{"id":"https://openalex.org/keywords/sensitivity","display_name":"Sensitivity (control systems)","score":0.4722656011581421},{"id":"https://openalex.org/keywords/noise","display_name":"Noise (video)","score":0.46421006321907043},{"id":"https://openalex.org/keywords/piezoelectricity","display_name":"Piezoelectricity","score":0.4422690272331238},{"id":"https://openalex.org/keywords/repeatability","display_name":"Repeatability","score":0.43842169642448425},{"id":"https://openalex.org/keywords/hysteresis","display_name":"Hysteresis","score":0.42481529712677},{"id":"https://openalex.org/keywords/relative-humidity","display_name":"Relative humidity","score":0.4206581711769104},{"id":"https://openalex.org/keywords/optoelectronics","display_name":"Optoelectronics","score":0.41454190015792847},{"id":"https://openalex.org/keywords/analytical-chemistry","display_name":"Analytical Chemistry (journal)","score":0.4088791608810425},{"id":"https://openalex.org/keywords/composite-material","display_name":"Composite material","score":0.25764358043670654},{"id":"https://openalex.org/keywords/chemistry","display_name":"Chemistry","score":0.19116055965423584},{"id":"https://openalex.org/keywords/electronic-engineering","display_name":"Electronic engineering","score":0.18295711278915405},{"id":"https://openalex.org/keywords/physics","display_name":"Physics","score":0.14987844228744507},{"id":"https://openalex.org/keywords/computer-science","display_name":"Computer science","score":0.13396912813186646},{"id":"https://openalex.org/keywords/chromatography","display_name":"Chromatography","score":0.11206215620040894},{"id":"https://openalex.org/keywords/meteorology","display_name":"Meteorology","score":0.07317620515823364}],"concepts":[{"id":"https://openalex.org/C141354745","wikidata":"https://www.wikidata.org/wiki/Q17227","display_name":"Cantilever","level":2,"score":0.8450519442558289},{"id":"https://openalex.org/C151420433","wikidata":"https://www.wikidata.org/wiki/Q180600","display_name":"Humidity","level":2,"score":0.798591136932373},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.6430272459983826},{"id":"https://openalex.org/C17525397","wikidata":"https://www.wikidata.org/wiki/Q176140","display_name":"Electrode","level":2,"score":0.5336756110191345},{"id":"https://openalex.org/C97126364","wikidata":"https://www.wikidata.org/wiki/Q349669","display_name":"Resonator","level":2,"score":0.5051844716072083},{"id":"https://openalex.org/C21200559","wikidata":"https://www.wikidata.org/wiki/Q7451068","display_name":"Sensitivity (control systems)","level":2,"score":0.4722656011581421},{"id":"https://openalex.org/C99498987","wikidata":"https://www.wikidata.org/wiki/Q2210247","display_name":"Noise (video)","level":3,"score":0.46421006321907043},{"id":"https://openalex.org/C100082104","wikidata":"https://www.wikidata.org/wiki/Q183759","display_name":"Piezoelectricity","level":2,"score":0.4422690272331238},{"id":"https://openalex.org/C154020017","wikidata":"https://www.wikidata.org/wiki/Q520171","display_name":"Repeatability","level":2,"score":0.43842169642448425},{"id":"https://openalex.org/C123299182","wikidata":"https://www.wikidata.org/wiki/Q190837","display_name":"Hysteresis","level":2,"score":0.42481529712677},{"id":"https://openalex.org/C158960510","wikidata":"https://www.wikidata.org/wiki/Q180600","display_name":"Relative humidity","level":2,"score":0.4206581711769104},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.41454190015792847},{"id":"https://openalex.org/C113196181","wikidata":"https://www.wikidata.org/wiki/Q485223","display_name":"Analytical Chemistry (journal)","level":2,"score":0.4088791608810425},{"id":"https://openalex.org/C159985019","wikidata":"https://www.wikidata.org/wiki/Q181790","display_name":"Composite material","level":1,"score":0.25764358043670654},{"id":"https://openalex.org/C185592680","wikidata":"https://www.wikidata.org/wiki/Q2329","display_name":"Chemistry","level":0,"score":0.19116055965423584},{"id":"https://openalex.org/C24326235","wikidata":"https://www.wikidata.org/wiki/Q126095","display_name":"Electronic engineering","level":1,"score":0.18295711278915405},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.14987844228744507},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.13396912813186646},{"id":"https://openalex.org/C43617362","wikidata":"https://www.wikidata.org/wiki/Q170050","display_name":"Chromatography","level":1,"score":0.11206215620040894},{"id":"https://openalex.org/C153294291","wikidata":"https://www.wikidata.org/wiki/Q25261","display_name":"Meteorology","level":1,"score":0.07317620515823364},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.0},{"id":"https://openalex.org/C147789679","wikidata":"https://www.wikidata.org/wiki/Q11372","display_name":"Physical chemistry","level":1,"score":0.0},{"id":"https://openalex.org/C115961682","wikidata":"https://www.wikidata.org/wiki/Q860623","display_name":"Image (mathematics)","level":2,"score":0.0},{"id":"https://openalex.org/C62520636","wikidata":"https://www.wikidata.org/wiki/Q944","display_name":"Quantum mechanics","level":1,"score":0.0},{"id":"https://openalex.org/C154945302","wikidata":"https://www.wikidata.org/wiki/Q11660","display_name":"Artificial intelligence","level":1,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1109/nems51815.2021.9451433","is_oa":false,"landing_page_url":"https://doi.org/10.1109/nems51815.2021.9451433","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2021 IEEE 16th International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)","raw_type":"proceedings-article"}],"best_oa_location":null,"sustainable_development_goals":[{"score":0.4099999964237213,"display_name":"Affordable and clean energy","id":"https://metadata.un.org/sdg/7"}],"awards":[{"id":"https://openalex.org/G860819630","display_name":null,"funder_award_id":"51875521","funder_id":"https://openalex.org/F4320321001","funder_display_name":"National Natural Science Foundation of China"}],"funders":[{"id":"https://openalex.org/F4320321001","display_name":"National Natural Science Foundation of China","ror":"https://ror.org/01h0zpd94"}],"has_content":{"pdf":false,"grobid_xml":false},"content_urls":null,"referenced_works_count":16,"referenced_works":["https://openalex.org/W1969959993","https://openalex.org/W2043709721","https://openalex.org/W2054414447","https://openalex.org/W2068935998","https://openalex.org/W2084547969","https://openalex.org/W2124159666","https://openalex.org/W2611066795","https://openalex.org/W2622879533","https://openalex.org/W2735149555","https://openalex.org/W2803173254","https://openalex.org/W2809589226","https://openalex.org/W2902406591","https://openalex.org/W2912747569","https://openalex.org/W2935518681","https://openalex.org/W2972686961","https://openalex.org/W3099253985"],"related_works":["https://openalex.org/W2481168506","https://openalex.org/W2107125189","https://openalex.org/W2893816048","https://openalex.org/W4288084846","https://openalex.org/W2013511864","https://openalex.org/W1586733611","https://openalex.org/W2366365583","https://openalex.org/W2181379992","https://openalex.org/W1642018725","https://openalex.org/W2380249611"],"abstract_inverted_index":{"Piezoelectric":[0],"resonant":[1],"cantilever":[2,26,43,65,81],"is":[3,44,93,103,108],"one":[4],"of":[5,36,41,49,59,63,88,117,120,123],"the":[6,42,60,64,74,83,86,89,101,118,121,148],"most":[7],"promising":[8],"real-time":[9],"humidity":[10,17,75,91,102,136,150,165],"sensing":[11,34,137],"platforms.":[12],"This":[13],"paper":[14],"presents":[15],"a":[16,29,33,56,69,79,130,134],"sensor":[18,76,92,128,151],"based":[19,77],"on":[20,78],"an":[21],"aluminum":[22],"nitride":[23],"(AIN)":[24],"piezoelectric":[25],"operated":[27,67],"at":[28,68],"high-order":[30,70],"mode":[31],"and":[32,160],"layer":[35],"MoS2.":[37],"The":[38,106,127],"top":[39],"electrode":[40],"divided":[45],"into":[46],"two":[47],"groups":[48],"segmented":[50],"electrodes":[51],"in":[52,133],"order":[53],"to":[54,97,110,125,141,164],"obtain":[55],"high":[57],"intensity":[58],"resonance":[61],"peak":[62],"resonator":[66],"mode.":[71],"Compared":[72],"with":[73,82],"standard":[80],"same":[84],"dimension,":[85],"sensitivity":[87,124],"proposed":[90,149],"increased":[94,109],"from":[95,139],"5.99":[96],"778":[98],"Hz/%RH":[99],"when":[100],"about":[104],"80%RH.":[105],"resolution":[107],"0.025":[111],"<sup":[112,143],"xmlns:mml=\"http://www.w3.org/1998/Math/MathML\"":[113,144],"xmlns:xlink=\"http://www.w3.org/1999/xlink\">%</sup>":[114,145],"RH":[115],"because":[116],"improvement":[119],"ratio":[122],"noise.":[126],"shows":[129],"low":[131],"hysteresis":[132],"wide":[135],"range":[138],"10%RH":[140],"90":[142],"RH.":[146],"Moreover,":[147],"has":[152],"good":[153],"short-term":[154],"repeatability,":[155],"fast":[156],"response":[157],"(0.6":[158],"s)":[159,163],"recovery":[161],"(8":[162],"changes,":[166],"indicating":[167],"its":[168],"great":[169],"potential":[170],"for":[171],"fast-response":[172],"detection.":[173]},"counts_by_year":[{"year":2022,"cited_by_count":1}],"updated_date":"2025-11-06T03:46:38.306776","created_date":"2025-10-10T00:00:00"}