{"id":"https://openalex.org/W3175050749","doi":"https://doi.org/10.1109/nems51815.2021.9451416","title":"An Ultralow-Ripple Polarization Voltage Generator based on High-Voltage Bandgap Reference for MEMS Gyroscopes","display_name":"An Ultralow-Ripple Polarization Voltage Generator based on High-Voltage Bandgap Reference for MEMS Gyroscopes","publication_year":2021,"publication_date":"2021-04-25","ids":{"openalex":"https://openalex.org/W3175050749","doi":"https://doi.org/10.1109/nems51815.2021.9451416","mag":"3175050749"},"language":"en","primary_location":{"id":"doi:10.1109/nems51815.2021.9451416","is_oa":false,"landing_page_url":"https://doi.org/10.1109/nems51815.2021.9451416","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2021 IEEE 16th International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)","raw_type":"proceedings-article"},"type":"conference-paper","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5100380229","display_name":"Hua Chen","orcid":"https://orcid.org/0000-0002-9634-9105"},"institutions":[{"id":"https://openalex.org/I4210119392","display_name":"Institute of Microelectronics","ror":"https://ror.org/02s6gs133","country_code":"CN","type":"facility","lineage":["https://openalex.org/I19820366","https://openalex.org/I4210119392"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Hua Chen","raw_affiliation_strings":["Institute of Microelectronics CAS"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Institute of Microelectronics CAS","institution_ids":["https://openalex.org/I4210119392"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5009519419","display_name":"Zhen Meng","orcid":"https://orcid.org/0000-0001-5756-9159"},"institutions":[{"id":"https://openalex.org/I4210119392","display_name":"Institute of Microelectronics","ror":"https://ror.org/02s6gs133","country_code":"CN","type":"facility","lineage":["https://openalex.org/I19820366","https://openalex.org/I4210119392"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Zhen Meng","raw_affiliation_strings":["Institute of Microelectronics CAS"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Institute of Microelectronics CAS","institution_ids":["https://openalex.org/I4210119392"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5089209851","display_name":"Xingcheng Zhang","orcid":null},"institutions":[{"id":"https://openalex.org/I19820366","display_name":"Chinese Academy of Sciences","ror":"https://ror.org/034t30j35","country_code":"CN","type":"government","lineage":["https://openalex.org/I19820366"]},{"id":"https://openalex.org/I4210119392","display_name":"Institute of Microelectronics","ror":"https://ror.org/02s6gs133","country_code":"CN","type":"facility","lineage":["https://openalex.org/I19820366","https://openalex.org/I4210119392"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Xingcheng Zhang","raw_affiliation_strings":["Smart Sensing Center, Institute of Microelectronics Chinese Academy of Sciences (CAS), Beijing, China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Smart Sensing Center, Institute of Microelectronics Chinese Academy of Sciences (CAS), Beijing, China","institution_ids":["https://openalex.org/I19820366","https://openalex.org/I4210119392"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5100349852","display_name":"Ke Liu","orcid":"https://orcid.org/0000-0002-4683-9325"},"institutions":[{"id":"https://openalex.org/I19820366","display_name":"Chinese Academy of Sciences","ror":"https://ror.org/034t30j35","country_code":"CN","type":"government","lineage":["https://openalex.org/I19820366"]},{"id":"https://openalex.org/I4210119392","display_name":"Institute of Microelectronics","ror":"https://ror.org/02s6gs133","country_code":"CN","type":"facility","lineage":["https://openalex.org/I19820366","https://openalex.org/I4210119392"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Ke Liu","raw_affiliation_strings":["Smart Sensing Center, Institute of Microelectronics Chinese Academy of Sciences (CAS), Beijing, China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Smart Sensing Center, Institute of Microelectronics Chinese Academy of Sciences (CAS), Beijing, China","institution_ids":["https://openalex.org/I19820366","https://openalex.org/I4210119392"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":2,"corresponding_author_ids":[],"corresponding_institution_ids":[],"apc_list":null,"apc_paid":null,"fwci":0.0,"has_fulltext":false,"cited_by_count":0,"citation_normalized_percentile":{"value":0.07261744,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":null,"biblio":{"volume":null,"issue":null,"first_page":"197","last_page":"200"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":0.9998000264167786,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":0.9998000264167786,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11230","display_name":"Innovative Energy Harvesting Technologies","score":0.9994000196456909,"subfield":{"id":"https://openalex.org/subfields/2210","display_name":"Mechanical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11449","display_name":"Mechanical and Optical Resonators","score":0.9983999729156494,"subfield":{"id":"https://openalex.org/subfields/3107","display_name":"Atomic and Molecular Physics, and Optics"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/ripple","display_name":"Ripple","score":0.7961148023605347},{"id":"https://openalex.org/keywords/capacitance","display_name":"Capacitance","score":0.6146153807640076},{"id":"https://openalex.org/keywords/electrical-engineering","display_name":"Electrical engineering","score":0.6109141707420349},{"id":"https://openalex.org/keywords/settling-time","display_name":"Settling time","score":0.5814286470413208},{"id":"https://openalex.org/keywords/voltage","display_name":"Voltage","score":0.551548957824707},{"id":"https://openalex.org/keywords/generator","display_name":"Generator (circuit theory)","score":0.5137702226638794},{"id":"https://openalex.org/keywords/microelectromechanical-systems","display_name":"Microelectromechanical systems","score":0.45426008105278015},{"id":"https://openalex.org/keywords/materials-science","display_name":"Materials science","score":0.4126584529876709},{"id":"https://openalex.org/keywords/physics","display_name":"Physics","score":0.40220728516578674},{"id":"https://openalex.org/keywords/optoelectronics","display_name":"Optoelectronics","score":0.34277433156967163},{"id":"https://openalex.org/keywords/power","display_name":"Power (physics)","score":0.30442625284194946},{"id":"https://openalex.org/keywords/engineering","display_name":"Engineering","score":0.2351466417312622},{"id":"https://openalex.org/keywords/step-response","display_name":"Step response","score":0.05828714370727539},{"id":"https://openalex.org/keywords/electrode","display_name":"Electrode","score":0.049113720655441284}],"concepts":[{"id":"https://openalex.org/C2779599953","wikidata":"https://www.wikidata.org/wiki/Q1776117","display_name":"Ripple","level":3,"score":0.7961148023605347},{"id":"https://openalex.org/C30066665","wikidata":"https://www.wikidata.org/wiki/Q164399","display_name":"Capacitance","level":3,"score":0.6146153807640076},{"id":"https://openalex.org/C119599485","wikidata":"https://www.wikidata.org/wiki/Q43035","display_name":"Electrical engineering","level":1,"score":0.6109141707420349},{"id":"https://openalex.org/C14781684","wikidata":"https://www.wikidata.org/wiki/Q3983320","display_name":"Settling time","level":3,"score":0.5814286470413208},{"id":"https://openalex.org/C165801399","wikidata":"https://www.wikidata.org/wiki/Q25428","display_name":"Voltage","level":2,"score":0.551548957824707},{"id":"https://openalex.org/C2780992000","wikidata":"https://www.wikidata.org/wiki/Q17016113","display_name":"Generator (circuit theory)","level":3,"score":0.5137702226638794},{"id":"https://openalex.org/C37977207","wikidata":"https://www.wikidata.org/wiki/Q175561","display_name":"Microelectromechanical systems","level":2,"score":0.45426008105278015},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.4126584529876709},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.40220728516578674},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.34277433156967163},{"id":"https://openalex.org/C163258240","wikidata":"https://www.wikidata.org/wiki/Q25342","display_name":"Power (physics)","level":2,"score":0.30442625284194946},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.2351466417312622},{"id":"https://openalex.org/C160030872","wikidata":"https://www.wikidata.org/wiki/Q2142864","display_name":"Step response","level":2,"score":0.05828714370727539},{"id":"https://openalex.org/C17525397","wikidata":"https://www.wikidata.org/wiki/Q176140","display_name":"Electrode","level":2,"score":0.049113720655441284},{"id":"https://openalex.org/C133731056","wikidata":"https://www.wikidata.org/wiki/Q4917288","display_name":"Control engineering","level":1,"score":0.0},{"id":"https://openalex.org/C62520636","wikidata":"https://www.wikidata.org/wiki/Q944","display_name":"Quantum mechanics","level":1,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1109/nems51815.2021.9451416","is_oa":false,"landing_page_url":"https://doi.org/10.1109/nems51815.2021.9451416","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2021 IEEE 16th International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)","raw_type":"proceedings-article"}],"best_oa_location":null,"sustainable_development_goals":[{"display_name":"Affordable and clean energy","id":"https://metadata.un.org/sdg/7","score":0.8700000047683716}],"awards":[],"funders":[],"has_content":{"pdf":false,"grobid_xml":false},"content_urls":null,"referenced_works_count":15,"referenced_works":["https://openalex.org/W1487088597","https://openalex.org/W2006594940","https://openalex.org/W2034124782","https://openalex.org/W2111323554","https://openalex.org/W2119807774","https://openalex.org/W2133201500","https://openalex.org/W2560778774","https://openalex.org/W2564812472","https://openalex.org/W2590309679","https://openalex.org/W2811436806","https://openalex.org/W2897215953","https://openalex.org/W2899824005","https://openalex.org/W2953276061","https://openalex.org/W3093540725","https://openalex.org/W6784339944"],"related_works":["https://openalex.org/W2272290532","https://openalex.org/W4229441739","https://openalex.org/W4303411445","https://openalex.org/W4207040089","https://openalex.org/W2384455639","https://openalex.org/W1519622926","https://openalex.org/W3109306766","https://openalex.org/W4286587111","https://openalex.org/W2944076747","https://openalex.org/W2999364115"],"abstract_inverted_index":{"This":[0],"paper":[1],"proposes":[2],"an":[3,34,56],"ultralow-ripple":[4],"direct-current":[5],"(DC)":[6],"bias":[7],"voltage":[8,85],"generator":[9,19,88],"for":[10,66],"the":[11,62,79,82,87,106,114],"polarization":[12],"requirement":[13],"of":[14,86,95,102,124],"high-performance":[15],"MEMS":[16,80],"gyroscopes.":[17],"The":[18,39],"is":[20,31,59,89,109,116],"based":[21],"on":[22],"a":[23,44,49,72,93,99,121],"high-voltage":[24],"(HV)":[25],"bandgap":[26,64],"reference":[27,65],"whose":[28],"power":[29],"supply":[30],"provided":[32],"by":[33,78],"integrated":[35],"Dickson-type":[36],"DC-DC":[37,40],"converter.":[38],"converter":[41],"can":[42],"output":[43,84],"25":[45],"V":[46,91],"source":[47],"with":[48,92],"400":[50],"\u03bcA":[51],"load":[52,75,107],"current.":[53],"In":[54],"addition,":[55],"HV":[57,63],"buffer":[58],"connected":[60],"behind":[61],"isolation":[67],"and":[68],"better":[69],"driving.":[70],"With":[71],"10":[73],"pF":[74],"capacitance":[76,108],"exhibited":[77],"gyroscope,":[81],"post-simulated":[83],"20":[90],"ripple":[94,115],"5":[96],"m":[97],"Vp-pand":[98],"settling":[100,122],"time":[101,123],"13.5":[103],"\u03bcs.":[104,126],"If":[105],"increased":[110],"to":[111,118],"50":[112],"pF,":[113],"reduced":[117],"1":[119],"mVp-pwith":[120],"16.7":[125]},"counts_by_year":[],"updated_date":"2026-07-29T14:22:42.915294","created_date":"2025-10-10T00:00:00"}