{"id":"https://openalex.org/W3174604336","doi":"https://doi.org/10.1109/nems51815.2021.9451404","title":"Micro-fabricated alkali vapor cells for atomic spin gyroscope study","display_name":"Micro-fabricated alkali vapor cells for atomic spin gyroscope study","publication_year":2021,"publication_date":"2021-04-25","ids":{"openalex":"https://openalex.org/W3174604336","doi":"https://doi.org/10.1109/nems51815.2021.9451404","mag":"3174604336"},"language":"en","primary_location":{"id":"doi:10.1109/nems51815.2021.9451404","is_oa":false,"landing_page_url":"https://doi.org/10.1109/nems51815.2021.9451404","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2021 IEEE 16th International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)","raw_type":"proceedings-article"},"type":"article","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5036471771","display_name":"Yao Chen","orcid":"https://orcid.org/0000-0002-8467-324X"},"institutions":[{"id":"https://openalex.org/I87445476","display_name":"Xi'an Jiaotong University","ror":"https://ror.org/017zhmm22","country_code":"CN","type":"education","lineage":["https://openalex.org/I87445476"]}],"countries":["CN"],"is_corresponding":true,"raw_author_name":"Yao Chen","raw_affiliation_strings":["School of Mechanical Engineering, Xi'an Jiaotong University, Xi'an, Shaanxi, China"],"affiliations":[{"raw_affiliation_string":"School of Mechanical Engineering, Xi'an Jiaotong University, Xi'an, Shaanxi, China","institution_ids":["https://openalex.org/I87445476"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5090854987","display_name":"Mingzhi Yu","orcid":"https://orcid.org/0000-0003-4706-0863"},"institutions":[{"id":"https://openalex.org/I87445476","display_name":"Xi'an Jiaotong University","ror":"https://ror.org/017zhmm22","country_code":"CN","type":"education","lineage":["https://openalex.org/I87445476"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Mingzhi Yu","raw_affiliation_strings":["School of Mechanical Engineering, Xi'an Jiaotong University, Xi'an, Shaanxi, China"],"affiliations":[{"raw_affiliation_string":"School of Mechanical Engineering, Xi'an Jiaotong University, Xi'an, Shaanxi, China","institution_ids":["https://openalex.org/I87445476"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5087543145","display_name":"Yintao Ma","orcid":"https://orcid.org/0000-0001-6790-7801"},"institutions":[{"id":"https://openalex.org/I87445476","display_name":"Xi'an Jiaotong University","ror":"https://ror.org/017zhmm22","country_code":"CN","type":"education","lineage":["https://openalex.org/I87445476"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Yintao Ma","raw_affiliation_strings":["School of Mechanical Engineering, Xi'an Jiaotong University, Xi'an, Shaanxi, China"],"affiliations":[{"raw_affiliation_string":"School of Mechanical Engineering, Xi'an Jiaotong University, Xi'an, Shaanxi, China","institution_ids":["https://openalex.org/I87445476"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5013245200","display_name":"Guoxi Luo","orcid":"https://orcid.org/0000-0003-1864-179X"},"institutions":[{"id":"https://openalex.org/I87445476","display_name":"Xi'an Jiaotong University","ror":"https://ror.org/017zhmm22","country_code":"CN","type":"education","lineage":["https://openalex.org/I87445476"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Guoxi Luo","raw_affiliation_strings":["School of Mechanical Engineering, Xi'an Jiaotong University, Xi'an, Shaanxi, China"],"affiliations":[{"raw_affiliation_string":"School of Mechanical Engineering, Xi'an Jiaotong University, Xi'an, Shaanxi, China","institution_ids":["https://openalex.org/I87445476"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5062577404","display_name":"Zhuangde Jiang","orcid":"https://orcid.org/0000-0002-8452-6768"},"institutions":[{"id":"https://openalex.org/I87445476","display_name":"Xi'an Jiaotong University","ror":"https://ror.org/017zhmm22","country_code":"CN","type":"education","lineage":["https://openalex.org/I87445476"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Zhuangde Jiang","raw_affiliation_strings":["School of Mechanical Engineering, Xi'an Jiaotong University, Xi'an, Shaanxi, China"],"affiliations":[{"raw_affiliation_string":"School of Mechanical Engineering, Xi'an Jiaotong University, Xi'an, Shaanxi, China","institution_ids":["https://openalex.org/I87445476"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5101670768","display_name":"Yu Bai","orcid":"https://orcid.org/0009-0005-0415-3404"},"institutions":[{"id":"https://openalex.org/I4210125878","display_name":"Suzhou Research Institute","ror":"https://ror.org/03ebk0c60","country_code":"CN","type":"facility","lineage":["https://openalex.org/I4210125878"]},{"id":"https://openalex.org/I87445476","display_name":"Xi'an Jiaotong University","ror":"https://ror.org/017zhmm22","country_code":"CN","type":"education","lineage":["https://openalex.org/I87445476"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Yu Bai","raw_affiliation_strings":["Suzhou Research institute, Xi'an Jiaotong University, Suzhou, Jiangsu, China"],"affiliations":[{"raw_affiliation_string":"Suzhou Research institute, Xi'an Jiaotong University, Suzhou, Jiangsu, China","institution_ids":["https://openalex.org/I4210125878","https://openalex.org/I87445476"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5072118178","display_name":"Libo Zhao","orcid":"https://orcid.org/0000-0001-6101-8173"},"institutions":[{"id":"https://openalex.org/I87445476","display_name":"Xi'an Jiaotong University","ror":"https://ror.org/017zhmm22","country_code":"CN","type":"education","lineage":["https://openalex.org/I87445476"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Libo Zhao","raw_affiliation_strings":["School of Mechanical Engineering, Xi'an Jiaotong University, Xi'an, Shaanxi, China"],"affiliations":[{"raw_affiliation_string":"School of Mechanical Engineering, Xi'an Jiaotong University, Xi'an, Shaanxi, China","institution_ids":["https://openalex.org/I87445476"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":7,"corresponding_author_ids":["https://openalex.org/A5036471771"],"corresponding_institution_ids":["https://openalex.org/I87445476"],"apc_list":null,"apc_paid":null,"fwci":0.3005,"has_fulltext":false,"cited_by_count":2,"citation_normalized_percentile":{"value":0.57939218,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":89,"max":94},"biblio":{"volume":"111","issue":null,"first_page":"282","last_page":"285"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T11993","display_name":"Atomic and Subatomic Physics Research","score":1.0,"subfield":{"id":"https://openalex.org/subfields/3107","display_name":"Atomic and Molecular Physics, and Optics"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T11993","display_name":"Atomic and Subatomic Physics Research","score":1.0,"subfield":{"id":"https://openalex.org/subfields/3107","display_name":"Atomic and Molecular Physics, and Optics"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10378","display_name":"Advanced MRI Techniques and Applications","score":0.9973000288009644,"subfield":{"id":"https://openalex.org/subfields/2741","display_name":"Radiology, Nuclear Medicine and Imaging"},"field":{"id":"https://openalex.org/fields/27","display_name":"Medicine"},"domain":{"id":"https://openalex.org/domains/4","display_name":"Health Sciences"}},{"id":"https://openalex.org/T11414","display_name":"Quantum optics and atomic interactions","score":0.9972000122070312,"subfield":{"id":"https://openalex.org/subfields/3107","display_name":"Atomic and Molecular Physics, and Optics"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/alkali-metal","display_name":"Alkali metal","score":0.7459931969642639},{"id":"https://openalex.org/keywords/glovebox","display_name":"Glovebox","score":0.5708439946174622},{"id":"https://openalex.org/keywords/anodic-bonding","display_name":"Anodic bonding","score":0.48497724533081055},{"id":"https://openalex.org/keywords/atomic-clock","display_name":"Atomic clock","score":0.47040754556655884},{"id":"https://openalex.org/keywords/materials-science","display_name":"Materials science","score":0.4313015937805176},{"id":"https://openalex.org/keywords/spin","display_name":"Spin (aerodynamics)","score":0.4113295376300812},{"id":"https://openalex.org/keywords/analytical-chemistry","display_name":"Analytical Chemistry (journal)","score":0.38793644309043884},{"id":"https://openalex.org/keywords/chemistry","display_name":"Chemistry","score":0.3503367304801941},{"id":"https://openalex.org/keywords/atomic-physics","display_name":"Atomic physics","score":0.3479606509208679},{"id":"https://openalex.org/keywords/nanotechnology","display_name":"Nanotechnology","score":0.3091522455215454},{"id":"https://openalex.org/keywords/physics","display_name":"Physics","score":0.19730180501937866}],"concepts":[{"id":"https://openalex.org/C198091228","wikidata":"https://www.wikidata.org/wiki/Q19557","display_name":"Alkali metal","level":2,"score":0.7459931969642639},{"id":"https://openalex.org/C5379308","wikidata":"https://www.wikidata.org/wiki/Q387158","display_name":"Glovebox","level":2,"score":0.5708439946174622},{"id":"https://openalex.org/C201414436","wikidata":"https://www.wikidata.org/wiki/Q567503","display_name":"Anodic bonding","level":3,"score":0.48497724533081055},{"id":"https://openalex.org/C196597080","wikidata":"https://www.wikidata.org/wiki/Q227467","display_name":"Atomic clock","level":2,"score":0.47040754556655884},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.4313015937805176},{"id":"https://openalex.org/C42704618","wikidata":"https://www.wikidata.org/wiki/Q910917","display_name":"Spin (aerodynamics)","level":2,"score":0.4113295376300812},{"id":"https://openalex.org/C113196181","wikidata":"https://www.wikidata.org/wiki/Q485223","display_name":"Analytical Chemistry (journal)","level":2,"score":0.38793644309043884},{"id":"https://openalex.org/C185592680","wikidata":"https://www.wikidata.org/wiki/Q2329","display_name":"Chemistry","level":0,"score":0.3503367304801941},{"id":"https://openalex.org/C184779094","wikidata":"https://www.wikidata.org/wiki/Q26383","display_name":"Atomic physics","level":1,"score":0.3479606509208679},{"id":"https://openalex.org/C171250308","wikidata":"https://www.wikidata.org/wiki/Q11468","display_name":"Nanotechnology","level":1,"score":0.3091522455215454},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.19730180501937866},{"id":"https://openalex.org/C43617362","wikidata":"https://www.wikidata.org/wiki/Q170050","display_name":"Chromatography","level":1,"score":0.0},{"id":"https://openalex.org/C2779227376","wikidata":"https://www.wikidata.org/wiki/Q6505497","display_name":"Layer (electronics)","level":2,"score":0.0},{"id":"https://openalex.org/C97355855","wikidata":"https://www.wikidata.org/wiki/Q11473","display_name":"Thermodynamics","level":1,"score":0.0},{"id":"https://openalex.org/C178790620","wikidata":"https://www.wikidata.org/wiki/Q11351","display_name":"Organic chemistry","level":1,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1109/nems51815.2021.9451404","is_oa":false,"landing_page_url":"https://doi.org/10.1109/nems51815.2021.9451404","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2021 IEEE 16th International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)","raw_type":"proceedings-article"}],"best_oa_location":null,"sustainable_development_goals":[],"awards":[{"id":"https://openalex.org/G7667194917","display_name":null,"funder_award_id":"2020M683462","funder_id":"https://openalex.org/F4320321543","funder_display_name":"China Postdoctoral Science Foundation"}],"funders":[{"id":"https://openalex.org/F4320321543","display_name":"China Postdoctoral Science Foundation","ror":"https://ror.org/0426zh255"}],"has_content":{"grobid_xml":false,"pdf":false},"content_urls":null,"referenced_works_count":11,"referenced_works":["https://openalex.org/W1979016926","https://openalex.org/W1998320990","https://openalex.org/W2033695844","https://openalex.org/W2144418720","https://openalex.org/W2167136240","https://openalex.org/W2554356373","https://openalex.org/W2791262811","https://openalex.org/W2795591891","https://openalex.org/W2796793542","https://openalex.org/W2885295284","https://openalex.org/W3121097914"],"related_works":["https://openalex.org/W2076049858","https://openalex.org/W2163319948","https://openalex.org/W2133938528","https://openalex.org/W2066988992","https://openalex.org/W2619247083","https://openalex.org/W2151803024","https://openalex.org/W2521661845","https://openalex.org/W3111911440","https://openalex.org/W2018504571","https://openalex.org/W2106591386"],"abstract_inverted_index":{"The":[0,147,179],"combination":[1],"of":[2,17,105,128,155,183],"MEMS":[3],"technology":[4],"with":[5,164],"atomic":[6,13,19,43,84,88,175],"spin":[7,44,89,176,180],"devices":[8,20],"could":[9],"fabricate":[10],"chip":[11],"scale":[12],"sensors.":[14],"In":[15,47],"most":[16],"the":[18,25,48,91,112,118,125,129,135,184],"based":[21,143],"on":[22,144],"alkali":[23,30,37,49,52,157],"metals,":[24],"key":[26],"component":[27],"is":[28,54,141,150,187],"an":[29,36,57,83,87,156],"vapor":[31,38,50,158],"cell.":[32,159],"Here":[33],"we":[34],"describe":[35],"cell":[39],"fabrication":[40,136],"technic":[41],"for":[42],"gyroscope":[45],"study.":[46,191],"cell,":[51],"metal":[53],"filled":[55],"in":[56,86,111,134,189],"oxygen":[58],"and":[59,63,73,172],"water":[60],"free":[61],"glovebox":[62],"noble":[64,94,185],"gas":[65],"isotopes":[66],"such":[67],"as":[68],"<sup":[69,74],"xmlns:mml=\"http://www.w3.org/1998/Math/MathML\"":[70,75],"xmlns:xlink=\"http://www.w3.org/1999/xlink\">129</sup>":[71],"Xe":[72,77],"xmlns:xlink=\"http://www.w3.org/1999/xlink\">131</sup>":[76],"are":[78,96],"also":[79],"filled.":[80],"Compared":[81],"to":[82,102,124],"magnetometer,":[85],"gyroscope,":[90],"isotope":[92],"enriched":[93],"gases":[95,108,119,186],"typically":[97],"very":[98,152],"expensive.":[99],"We":[100,160],"need":[101],"do":[103],"recycling":[104,139],"these":[106],"expensive":[107],"after":[109],"filling":[110],"anode":[113,130],"bonding":[114,131],"chamber":[115,132],"or":[116],"else":[117],"will":[120],"be":[121],"wasted.":[122],"Due":[123],"large":[126],"volume":[127],"utilized":[133],"process,":[137],"a":[138,151,162],"platform":[140,163],"built":[142],"liquid":[145],"nitrogen.":[146],"relaxation":[148,181],"time":[149,182],"important":[153],"parameter":[154],"developed":[161],"magnetic":[165],"field":[166,170],"shielding":[167],"system,":[168],"non-magnetic":[169],"heating":[171],"single":[173],"beam":[174],"detection":[177],"subsystem.":[178],"tested":[188],"this":[190]},"counts_by_year":[{"year":2023,"cited_by_count":1},{"year":2022,"cited_by_count":1}],"updated_date":"2025-11-06T03:46:38.306776","created_date":"2025-10-10T00:00:00"}