{"id":"https://openalex.org/W3173457904","doi":"https://doi.org/10.1109/nems51815.2021.9451403","title":"Silicon Nanowire Array Sensor for Highly Sensitive and Selective Detection of Nerve Agent Simulant Vapor via Surface Hydroxyl Groups","display_name":"Silicon Nanowire Array Sensor for Highly Sensitive and Selective Detection of Nerve Agent Simulant Vapor via Surface Hydroxyl Groups","publication_year":2021,"publication_date":"2021-04-25","ids":{"openalex":"https://openalex.org/W3173457904","doi":"https://doi.org/10.1109/nems51815.2021.9451403","mag":"3173457904"},"language":"en","primary_location":{"id":"doi:10.1109/nems51815.2021.9451403","is_oa":false,"landing_page_url":"https://doi.org/10.1109/nems51815.2021.9451403","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2021 IEEE 16th International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)","raw_type":"proceedings-article"},"type":"article","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5103142230","display_name":"Xingqi Liu","orcid":"https://orcid.org/0000-0001-7228-2295"},"institutions":[{"id":"https://openalex.org/I4210147322","display_name":"Shanghai Institute of Microsystem and Information Technology","ror":"https://ror.org/04nytyj38","country_code":"CN","type":"facility","lineage":["https://openalex.org/I19820366","https://openalex.org/I4210147322"]}],"countries":["CN"],"is_corresponding":true,"raw_author_name":"Xingqi Liu","raw_affiliation_strings":["Science and Technology on Microsystem Laboratory, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, Shanghai, China"],"affiliations":[{"raw_affiliation_string":"Science and Technology on Microsystem Laboratory, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, Shanghai, China","institution_ids":["https://openalex.org/I4210147322"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5036085392","display_name":"Hongpeng Zhang","orcid":"https://orcid.org/0000-0003-3172-600X"},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"Hongpeng Zhang","raw_affiliation_strings":["Institute of NBC Defense, PLA Army, Beijing, China"],"affiliations":[{"raw_affiliation_string":"Institute of NBC Defense, PLA Army, Beijing, China","institution_ids":[]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5045072485","display_name":"Zhiping Huang","orcid":"https://orcid.org/0000-0001-8539-0199"},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"Zhiping Huang","raw_affiliation_strings":["Institute of NBC Defense, PLA Army, Beijing, China"],"affiliations":[{"raw_affiliation_string":"Institute of NBC Defense, PLA Army, Beijing, China","institution_ids":[]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5032697838","display_name":"Xuanlin Yang","orcid":"https://orcid.org/0000-0001-8361-6764"},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"Xuanlin Yang","raw_affiliation_strings":["Institute of NBC Defense, PLA Army, Beijing, China"],"affiliations":[{"raw_affiliation_string":"Institute of NBC Defense, PLA Army, Beijing, China","institution_ids":[]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5052837255","display_name":"Shixing Chen","orcid":null},"institutions":[{"id":"https://openalex.org/I4210147322","display_name":"Shanghai Institute of Microsystem and Information Technology","ror":"https://ror.org/04nytyj38","country_code":"CN","type":"facility","lineage":["https://openalex.org/I19820366","https://openalex.org/I4210147322"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Shixing Chen","raw_affiliation_strings":["Science and Technology on Microsystem Laboratory, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, Shanghai, China"],"affiliations":[{"raw_affiliation_string":"Science and Technology on Microsystem Laboratory, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, Shanghai, China","institution_ids":["https://openalex.org/I4210147322"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5101759741","display_name":"Yuelin Wang","orcid":"https://orcid.org/0000-0001-9360-5903"},"institutions":[{"id":"https://openalex.org/I4210147322","display_name":"Shanghai Institute of Microsystem and Information Technology","ror":"https://ror.org/04nytyj38","country_code":"CN","type":"facility","lineage":["https://openalex.org/I19820366","https://openalex.org/I4210147322"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Yuelin Wang","raw_affiliation_strings":["Science and Technology on Microsystem Laboratory, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, Shanghai, China"],"affiliations":[{"raw_affiliation_string":"Science and Technology on Microsystem Laboratory, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, Shanghai, China","institution_ids":["https://openalex.org/I4210147322"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5100754630","display_name":"Tie Li","orcid":"https://orcid.org/0000-0001-9907-0188"},"institutions":[{"id":"https://openalex.org/I4210147322","display_name":"Shanghai Institute of Microsystem and Information Technology","ror":"https://ror.org/04nytyj38","country_code":"CN","type":"facility","lineage":["https://openalex.org/I19820366","https://openalex.org/I4210147322"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Tie Li","raw_affiliation_strings":["Science and Technology on Microsystem Laboratory, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, Shanghai, China"],"affiliations":[{"raw_affiliation_string":"Science and Technology on Microsystem Laboratory, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, Shanghai, China","institution_ids":["https://openalex.org/I4210147322"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5089702954","display_name":"Zhenxing Cheng","orcid":"https://orcid.org/0000-0003-1817-4802"},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"Zhenxing Cheng","raw_affiliation_strings":["Institute of NBC Defense, PLA Army, Beijing, China"],"affiliations":[{"raw_affiliation_string":"Institute of NBC Defense, PLA Army, Beijing, China","institution_ids":[]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":8,"corresponding_author_ids":["https://openalex.org/A5103142230"],"corresponding_institution_ids":["https://openalex.org/I4210147322"],"apc_list":null,"apc_paid":null,"fwci":0.0,"has_fulltext":false,"cited_by_count":2,"citation_normalized_percentile":{"value":0.06286737,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":95,"max":96},"biblio":{"volume":null,"issue":null,"first_page":"30","last_page":"33"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T11272","display_name":"Nanowire Synthesis and Applications","score":0.9991999864578247,"subfield":{"id":"https://openalex.org/subfields/2204","display_name":"Biomedical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T11272","display_name":"Nanowire Synthesis and Applications","score":0.9991999864578247,"subfield":{"id":"https://openalex.org/subfields/2204","display_name":"Biomedical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11472","display_name":"Analytical Chemistry and Sensors","score":0.9970999956130981,"subfield":{"id":"https://openalex.org/subfields/1502","display_name":"Bioengineering"},"field":{"id":"https://openalex.org/fields/15","display_name":"Chemical Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11601","display_name":"Neuroscience and Neural Engineering","score":0.9922000169754028,"subfield":{"id":"https://openalex.org/subfields/2804","display_name":"Cellular and Molecular Neuroscience"},"field":{"id":"https://openalex.org/fields/28","display_name":"Neuroscience"},"domain":{"id":"https://openalex.org/domains/1","display_name":"Life Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/dimethyl-methylphosphonate","display_name":"Dimethyl methylphosphonate","score":0.820098876953125},{"id":"https://openalex.org/keywords/nanowire","display_name":"Nanowire","score":0.818842887878418},{"id":"https://openalex.org/keywords/materials-science","display_name":"Materials science","score":0.7491219639778137},{"id":"https://openalex.org/keywords/silicon","display_name":"Silicon","score":0.6851416826248169},{"id":"https://openalex.org/keywords/fabrication","display_name":"Fabrication","score":0.6173173189163208},{"id":"https://openalex.org/keywords/detection-limit","display_name":"Detection limit","score":0.6017983555793762},{"id":"https://openalex.org/keywords/silicon-nanowires","display_name":"Silicon nanowires","score":0.5934604406356812},{"id":"https://openalex.org/keywords/nanotechnology","display_name":"Nanotechnology","score":0.5162601470947266},{"id":"https://openalex.org/keywords/sensor-array","display_name":"Sensor array","score":0.499361515045166},{"id":"https://openalex.org/keywords/optoelectronics","display_name":"Optoelectronics","score":0.37954390048980713},{"id":"https://openalex.org/keywords/inorganic-chemistry","display_name":"Inorganic chemistry","score":0.1636955738067627},{"id":"https://openalex.org/keywords/chemistry","display_name":"Chemistry","score":0.15958324074745178},{"id":"https://openalex.org/keywords/chromatography","display_name":"Chromatography","score":0.09638279676437378},{"id":"https://openalex.org/keywords/computer-science","display_name":"Computer science","score":0.05188906192779541}],"concepts":[{"id":"https://openalex.org/C2776470967","wikidata":"https://www.wikidata.org/wiki/Q417529","display_name":"Dimethyl methylphosphonate","level":2,"score":0.820098876953125},{"id":"https://openalex.org/C74214498","wikidata":"https://www.wikidata.org/wiki/Q631739","display_name":"Nanowire","level":2,"score":0.818842887878418},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.7491219639778137},{"id":"https://openalex.org/C544956773","wikidata":"https://www.wikidata.org/wiki/Q670","display_name":"Silicon","level":2,"score":0.6851416826248169},{"id":"https://openalex.org/C136525101","wikidata":"https://www.wikidata.org/wiki/Q5428139","display_name":"Fabrication","level":3,"score":0.6173173189163208},{"id":"https://openalex.org/C119128265","wikidata":"https://www.wikidata.org/wiki/Q900165","display_name":"Detection limit","level":2,"score":0.6017983555793762},{"id":"https://openalex.org/C2986665194","wikidata":"https://www.wikidata.org/wiki/Q28324872","display_name":"Silicon nanowires","level":3,"score":0.5934604406356812},{"id":"https://openalex.org/C171250308","wikidata":"https://www.wikidata.org/wiki/Q11468","display_name":"Nanotechnology","level":1,"score":0.5162601470947266},{"id":"https://openalex.org/C66251956","wikidata":"https://www.wikidata.org/wiki/Q7451086","display_name":"Sensor array","level":2,"score":0.499361515045166},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.37954390048980713},{"id":"https://openalex.org/C179104552","wikidata":"https://www.wikidata.org/wiki/Q11165","display_name":"Inorganic chemistry","level":1,"score":0.1636955738067627},{"id":"https://openalex.org/C185592680","wikidata":"https://www.wikidata.org/wiki/Q2329","display_name":"Chemistry","level":0,"score":0.15958324074745178},{"id":"https://openalex.org/C43617362","wikidata":"https://www.wikidata.org/wiki/Q170050","display_name":"Chromatography","level":1,"score":0.09638279676437378},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.05188906192779541},{"id":"https://openalex.org/C71924100","wikidata":"https://www.wikidata.org/wiki/Q11190","display_name":"Medicine","level":0,"score":0.0},{"id":"https://openalex.org/C204787440","wikidata":"https://www.wikidata.org/wiki/Q188504","display_name":"Alternative medicine","level":2,"score":0.0},{"id":"https://openalex.org/C119857082","wikidata":"https://www.wikidata.org/wiki/Q2539","display_name":"Machine learning","level":1,"score":0.0},{"id":"https://openalex.org/C142724271","wikidata":"https://www.wikidata.org/wiki/Q7208","display_name":"Pathology","level":1,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1109/nems51815.2021.9451403","is_oa":false,"landing_page_url":"https://doi.org/10.1109/nems51815.2021.9451403","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2021 IEEE 16th International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)","raw_type":"proceedings-article"}],"best_oa_location":null,"sustainable_development_goals":[],"awards":[{"id":"https://openalex.org/G3158571385","display_name":null,"funder_award_id":"31900937","funder_id":"https://openalex.org/F4320321001","funder_display_name":"National Natural Science Foundation of China"},{"id":"https://openalex.org/G7770931560","display_name":null,"funder_award_id":"2017YFA0207100,2017YFB0405403","funder_id":"https://openalex.org/F4320335777","funder_display_name":"National Key Research and Development Program of China"}],"funders":[{"id":"https://openalex.org/F4320321001","display_name":"National Natural Science Foundation of China","ror":"https://ror.org/01h0zpd94"},{"id":"https://openalex.org/F4320335777","display_name":"National Key Research and Development Program of China","ror":null}],"has_content":{"grobid_xml":false,"pdf":false},"content_urls":null,"referenced_works_count":10,"referenced_works":["https://openalex.org/W1975236307","https://openalex.org/W2062631841","https://openalex.org/W2084331498","https://openalex.org/W2143930580","https://openalex.org/W2278623434","https://openalex.org/W2319674217","https://openalex.org/W2578790744","https://openalex.org/W2754898422","https://openalex.org/W2969972676","https://openalex.org/W4210962267"],"related_works":["https://openalex.org/W2460388370","https://openalex.org/W2788293068","https://openalex.org/W3143516596","https://openalex.org/W2736734471","https://openalex.org/W169031141","https://openalex.org/W1992851326","https://openalex.org/W2014118584","https://openalex.org/W2089236473","https://openalex.org/W4229003319","https://openalex.org/W2102347200"],"abstract_inverted_index":{"Silicon":[0],"nanowire":[1,32,67,103],"array":[2,33,50,68],"with":[3,39,52,77],"high":[4,22],"density":[5],"of":[6,15,20,30,99],"hydroxyl":[7],"groups":[8],"is":[9],"presented":[10],"here":[11],"to":[12,62,82,89],"detect":[13,74],"vapor":[14,76,107],"methylphosphonate":[16],"(DMMP),":[17],"a":[18,55,78],"simulant":[19],"the":[21,46,85],"toxic":[23],"nerve":[24],"agent.":[25],"The":[26,65],"whole":[27],"fabrication":[28],"process":[29],"silicon":[31,66],"sensor":[34,69],"device":[35],"was":[36,43],"highly":[37],"compatible":[38],"CMOS":[40],"technology.":[41],"It":[42],"found":[44],"that":[45],"current":[47],"in":[48],"nanowires":[49],"treated":[51],"plasma":[53],"exhibited":[54],"large":[56],"and":[57,72,101],"reversible":[58],"change":[59],"when":[60],"exposed":[61],"DMMP":[63,75,106],"vapor.":[64],"can":[70],"easily":[71],"rapidly":[73],"detection":[79],"limit":[80],"down":[81],"0.2":[83],"ppm,":[84],"highest":[86],"sensitivity":[87],"reported":[88],"date.":[90],"These":[91],"initial":[92],"promising":[93],"results":[94],"provide":[95],"opportunities":[96],"for":[97,105],"manufacture":[98],"ultra-sensitive":[100],"low-cost":[102],"sensors":[104],"detection.":[108]},"counts_by_year":[{"year":2025,"cited_by_count":2}],"updated_date":"2025-11-06T03:46:38.306776","created_date":"2025-10-10T00:00:00"}