{"id":"https://openalex.org/W3174824416","doi":"https://doi.org/10.1109/nems51815.2021.9451398","title":"An adaptive octree level set simulation method of the wet etching process for the fabrication of micro structure on sapphire crystal","display_name":"An adaptive octree level set simulation method of the wet etching process for the fabrication of micro structure on sapphire crystal","publication_year":2021,"publication_date":"2021-04-25","ids":{"openalex":"https://openalex.org/W3174824416","doi":"https://doi.org/10.1109/nems51815.2021.9451398","mag":"3174824416"},"language":"en","primary_location":{"id":"doi:10.1109/nems51815.2021.9451398","is_oa":false,"landing_page_url":"https://doi.org/10.1109/nems51815.2021.9451398","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2021 IEEE 16th International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)","raw_type":"proceedings-article"},"type":"article","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5100359090","display_name":"Ye Chen","orcid":"https://orcid.org/0000-0001-9649-4540"},"institutions":[{"id":"https://openalex.org/I76569877","display_name":"Southeast University","ror":"https://ror.org/04ct4d772","country_code":"CN","type":"education","lineage":["https://openalex.org/I76569877"]}],"countries":["CN"],"is_corresponding":true,"raw_author_name":"Ye Chen","raw_affiliation_strings":["Jiangsu Key Laboratory for Design and Manufacture of Micro-Nano Biomedical Instruments, School of Mechanical Engineering, Southeast University, Nanjing, China"],"affiliations":[{"raw_affiliation_string":"Jiangsu Key Laboratory for Design and Manufacture of Micro-Nano Biomedical Instruments, School of Mechanical Engineering, Southeast University, Nanjing, China","institution_ids":["https://openalex.org/I76569877"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5101547664","display_name":"Jin Qian","orcid":"https://orcid.org/0000-0003-0164-6084"},"institutions":[{"id":"https://openalex.org/I76569877","display_name":"Southeast University","ror":"https://ror.org/04ct4d772","country_code":"CN","type":"education","lineage":["https://openalex.org/I76569877"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Jin Qian","raw_affiliation_strings":["Jiangsu Key Laboratory for Design and Manufacture of Micro-Nano Biomedical Instruments, School of Mechanical Engineering, Southeast University, Nanjing, China"],"affiliations":[{"raw_affiliation_string":"Jiangsu Key Laboratory for Design and Manufacture of Micro-Nano Biomedical Instruments, School of Mechanical Engineering, Southeast University, Nanjing, China","institution_ids":["https://openalex.org/I76569877"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5102158462","display_name":"Xinyan Guo","orcid":null},"institutions":[{"id":"https://openalex.org/I76569877","display_name":"Southeast University","ror":"https://ror.org/04ct4d772","country_code":"CN","type":"education","lineage":["https://openalex.org/I76569877"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Xinyan Guo","raw_affiliation_strings":["Jiangsu Key Laboratory for Design and Manufacture of Micro-Nano Biomedical Instruments, School of Mechanical Engineering, Southeast University, Nanjing, China"],"affiliations":[{"raw_affiliation_string":"Jiangsu Key Laboratory for Design and Manufacture of Micro-Nano Biomedical Instruments, School of Mechanical Engineering, Southeast University, Nanjing, China","institution_ids":["https://openalex.org/I76569877"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5054085833","display_name":"Yan Xing","orcid":"https://orcid.org/0000-0001-8443-2000"},"institutions":[{"id":"https://openalex.org/I76569877","display_name":"Southeast University","ror":"https://ror.org/04ct4d772","country_code":"CN","type":"education","lineage":["https://openalex.org/I76569877"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Yan Xing","raw_affiliation_strings":["Jiangsu Key Laboratory for Design and Manufacture of Micro-Nano Biomedical Instruments, School of Mechanical Engineering, Southeast University, Nanjing, China"],"affiliations":[{"raw_affiliation_string":"Jiangsu Key Laboratory for Design and Manufacture of Micro-Nano Biomedical Instruments, School of Mechanical Engineering, Southeast University, Nanjing, China","institution_ids":["https://openalex.org/I76569877"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":4,"corresponding_author_ids":["https://openalex.org/A5100359090"],"corresponding_institution_ids":["https://openalex.org/I76569877"],"apc_list":null,"apc_paid":null,"fwci":0.2005,"has_fulltext":false,"cited_by_count":2,"citation_normalized_percentile":{"value":0.49707826,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":89,"max":94},"biblio":{"volume":null,"issue":null,"first_page":"882","last_page":"886"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10781","display_name":"Plasma Diagnostics and Applications","score":0.9810000061988831,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10781","display_name":"Plasma Diagnostics and Applications","score":0.9810000061988831,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11301","display_name":"Advanced Surface Polishing Techniques","score":0.9800999760627747,"subfield":{"id":"https://openalex.org/subfields/2204","display_name":"Biomedical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T12696","display_name":"Icing and De-icing Technologies","score":0.9726999998092651,"subfield":{"id":"https://openalex.org/subfields/2202","display_name":"Aerospace Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/octree","display_name":"Octree","score":0.9582691192626953},{"id":"https://openalex.org/keywords/microelectromechanical-systems","display_name":"Microelectromechanical systems","score":0.698667049407959},{"id":"https://openalex.org/keywords/sapphire","display_name":"Sapphire","score":0.6782239079475403},{"id":"https://openalex.org/keywords/etching","display_name":"Etching (microfabrication)","score":0.6433944702148438},{"id":"https://openalex.org/keywords/interpolation","display_name":"Interpolation (computer graphics)","score":0.6022459268569946},{"id":"https://openalex.org/keywords/computer-science","display_name":"Computer science","score":0.5638946890830994},{"id":"https://openalex.org/keywords/process","display_name":"Process (computing)","score":0.49186038970947266},{"id":"https://openalex.org/keywords/materials-science","display_name":"Materials science","score":0.48632463812828064},{"id":"https://openalex.org/keywords/computational-science","display_name":"Computational science","score":0.4722180664539337},{"id":"https://openalex.org/keywords/set","display_name":"Set (abstract data type)","score":0.4419056177139282},{"id":"https://openalex.org/keywords/grid","display_name":"Grid","score":0.42566001415252686},{"id":"https://openalex.org/keywords/fabrication","display_name":"Fabrication","score":0.4184223413467407},{"id":"https://openalex.org/keywords/optoelectronics","display_name":"Optoelectronics","score":0.2791745662689209},{"id":"https://openalex.org/keywords/algorithm","display_name":"Algorithm","score":0.2537809908390045},{"id":"https://openalex.org/keywords/computer-graphics","display_name":"Computer graphics (images)","score":0.22894984483718872},{"id":"https://openalex.org/keywords/optics","display_name":"Optics","score":0.1812206208705902},{"id":"https://openalex.org/keywords/nanotechnology","display_name":"Nanotechnology","score":0.14827540516853333},{"id":"https://openalex.org/keywords/laser","display_name":"Laser","score":0.10833412408828735},{"id":"https://openalex.org/keywords/geometry","display_name":"Geometry","score":0.1055155098438263},{"id":"https://openalex.org/keywords/mathematics","display_name":"Mathematics","score":0.09208217263221741},{"id":"https://openalex.org/keywords/physics","display_name":"Physics","score":0.07775008678436279}],"concepts":[{"id":"https://openalex.org/C141297171","wikidata":"https://www.wikidata.org/wiki/Q1143237","display_name":"Octree","level":2,"score":0.9582691192626953},{"id":"https://openalex.org/C37977207","wikidata":"https://www.wikidata.org/wiki/Q175561","display_name":"Microelectromechanical systems","level":2,"score":0.698667049407959},{"id":"https://openalex.org/C2780064504","wikidata":"https://www.wikidata.org/wiki/Q127583","display_name":"Sapphire","level":3,"score":0.6782239079475403},{"id":"https://openalex.org/C100460472","wikidata":"https://www.wikidata.org/wiki/Q2368605","display_name":"Etching (microfabrication)","level":3,"score":0.6433944702148438},{"id":"https://openalex.org/C137800194","wikidata":"https://www.wikidata.org/wiki/Q11713455","display_name":"Interpolation (computer graphics)","level":3,"score":0.6022459268569946},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.5638946890830994},{"id":"https://openalex.org/C98045186","wikidata":"https://www.wikidata.org/wiki/Q205663","display_name":"Process (computing)","level":2,"score":0.49186038970947266},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.48632463812828064},{"id":"https://openalex.org/C459310","wikidata":"https://www.wikidata.org/wiki/Q117801","display_name":"Computational science","level":1,"score":0.4722180664539337},{"id":"https://openalex.org/C177264268","wikidata":"https://www.wikidata.org/wiki/Q1514741","display_name":"Set (abstract data type)","level":2,"score":0.4419056177139282},{"id":"https://openalex.org/C187691185","wikidata":"https://www.wikidata.org/wiki/Q2020720","display_name":"Grid","level":2,"score":0.42566001415252686},{"id":"https://openalex.org/C136525101","wikidata":"https://www.wikidata.org/wiki/Q5428139","display_name":"Fabrication","level":3,"score":0.4184223413467407},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.2791745662689209},{"id":"https://openalex.org/C11413529","wikidata":"https://www.wikidata.org/wiki/Q8366","display_name":"Algorithm","level":1,"score":0.2537809908390045},{"id":"https://openalex.org/C121684516","wikidata":"https://www.wikidata.org/wiki/Q7600677","display_name":"Computer graphics (images)","level":1,"score":0.22894984483718872},{"id":"https://openalex.org/C120665830","wikidata":"https://www.wikidata.org/wiki/Q14620","display_name":"Optics","level":1,"score":0.1812206208705902},{"id":"https://openalex.org/C171250308","wikidata":"https://www.wikidata.org/wiki/Q11468","display_name":"Nanotechnology","level":1,"score":0.14827540516853333},{"id":"https://openalex.org/C520434653","wikidata":"https://www.wikidata.org/wiki/Q38867","display_name":"Laser","level":2,"score":0.10833412408828735},{"id":"https://openalex.org/C2524010","wikidata":"https://www.wikidata.org/wiki/Q8087","display_name":"Geometry","level":1,"score":0.1055155098438263},{"id":"https://openalex.org/C33923547","wikidata":"https://www.wikidata.org/wiki/Q395","display_name":"Mathematics","level":0,"score":0.09208217263221741},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.07775008678436279},{"id":"https://openalex.org/C204787440","wikidata":"https://www.wikidata.org/wiki/Q188504","display_name":"Alternative medicine","level":2,"score":0.0},{"id":"https://openalex.org/C71924100","wikidata":"https://www.wikidata.org/wiki/Q11190","display_name":"Medicine","level":0,"score":0.0},{"id":"https://openalex.org/C199360897","wikidata":"https://www.wikidata.org/wiki/Q9143","display_name":"Programming language","level":1,"score":0.0},{"id":"https://openalex.org/C142724271","wikidata":"https://www.wikidata.org/wiki/Q7208","display_name":"Pathology","level":1,"score":0.0},{"id":"https://openalex.org/C2779227376","wikidata":"https://www.wikidata.org/wiki/Q6505497","display_name":"Layer (electronics)","level":2,"score":0.0},{"id":"https://openalex.org/C502989409","wikidata":"https://www.wikidata.org/wiki/Q11425","display_name":"Animation","level":2,"score":0.0},{"id":"https://openalex.org/C111919701","wikidata":"https://www.wikidata.org/wiki/Q9135","display_name":"Operating system","level":1,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1109/nems51815.2021.9451398","is_oa":false,"landing_page_url":"https://doi.org/10.1109/nems51815.2021.9451398","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2021 IEEE 16th International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)","raw_type":"proceedings-article"}],"best_oa_location":null,"sustainable_development_goals":[],"awards":[{"id":"https://openalex.org/G5025390902","display_name":null,"funder_award_id":"51875104","funder_id":"https://openalex.org/F4320321001","funder_display_name":"National Natural Science Foundation of China"},{"id":"https://openalex.org/G955275908","display_name":null,"funder_award_id":"2018YFB2002600","funder_id":"https://openalex.org/F4320335777","funder_display_name":"National Key Research and Development Program of China"}],"funders":[{"id":"https://openalex.org/F4320321001","display_name":"National Natural Science Foundation of China","ror":"https://ror.org/01h0zpd94"},{"id":"https://openalex.org/F4320335777","display_name":"National Key Research and Development Program of China","ror":null}],"has_content":{"grobid_xml":false,"pdf":false},"content_urls":null,"referenced_works_count":6,"referenced_works":["https://openalex.org/W2093834886","https://openalex.org/W2744523685","https://openalex.org/W2791335224","https://openalex.org/W2969556466","https://openalex.org/W2980446452","https://openalex.org/W3034076494"],"related_works":["https://openalex.org/W1990831804","https://openalex.org/W2075152870","https://openalex.org/W4295128303","https://openalex.org/W3125509749","https://openalex.org/W3196835088","https://openalex.org/W3120681047","https://openalex.org/W4311256036","https://openalex.org/W2073633980","https://openalex.org/W1451632959","https://openalex.org/W2320335999"],"abstract_inverted_index":{"This":[0],"paper":[1],"introduces":[2],"a":[3],"MEMS":[4,36,123],"wet":[5,37,95,124],"etching":[6,38,96,125],"process":[7,121],"simulation":[8,33,91,99],"platform":[9],"based":[10,82],"on":[11,83],"adaptive":[12,24,84],"octree":[13,27,49,85],"level":[14,31],"set":[15,32],"method":[16,104],"(LSM).":[17],"Under":[18],"the":[19,22,30,54,61,66,90,107,111,116,120],"limited":[20],"memory,":[21],"mesh":[23],"technique":[25],"for":[26],"can":[28,58,105],"solve":[29],"problem":[34],"of":[35,65,92,122],"with":[39],"large":[40],"scale,":[41],"high":[42],"aspect":[43],"ratio":[44],"and":[45,53,114],"fine":[46],"structure.":[47],"The":[48,98],"grid":[50],"is":[51,73,87],"nonuniform,":[52],"advanced":[55,70],"interpolation":[56,71],"technology":[57,72,86],"accurately":[59],"obtain":[60],"signed":[62],"distance":[63],"value":[64],"neighbor":[67],"grid.":[68],"An":[69],"also":[74],"proposed":[75],"to":[76,89],"solving":[77],"this":[78,103],"problem.":[79],"Finally,":[80],"LSM":[81],"applied":[88],"C-plane":[93],"sapphire":[94],"process.":[97],"results":[100],"indicate":[101],"that":[102],"improve":[106],"calculation":[108,112,117],"accuracy,":[109],"reduce":[110,115],"memory":[113],"time":[118],"in":[119],"simulation.":[126]},"counts_by_year":[{"year":2024,"cited_by_count":1},{"year":2023,"cited_by_count":1}],"updated_date":"2025-11-06T03:46:38.306776","created_date":"2025-10-10T00:00:00"}