{"id":"https://openalex.org/W3173154639","doi":"https://doi.org/10.1109/nems51815.2021.9451379","title":"Equivalent Electrical Model and Experimental Analysis of a Novel Needle-ring Atmospheric Pressure Plasma Microjets Array","display_name":"Equivalent Electrical Model and Experimental Analysis of a Novel Needle-ring Atmospheric Pressure Plasma Microjets Array","publication_year":2021,"publication_date":"2021-04-25","ids":{"openalex":"https://openalex.org/W3173154639","doi":"https://doi.org/10.1109/nems51815.2021.9451379","mag":"3173154639"},"language":"en","primary_location":{"id":"doi:10.1109/nems51815.2021.9451379","is_oa":false,"landing_page_url":"https://doi.org/10.1109/nems51815.2021.9451379","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2021 IEEE 16th International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)","raw_type":"proceedings-article"},"type":"conference-paper","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5101090276","display_name":"Lingju Xia","orcid":null},"institutions":[{"id":"https://openalex.org/I126520041","display_name":"University of Science and Technology of China","ror":"https://ror.org/04c4dkn09","country_code":"CN","type":"education","lineage":["https://openalex.org/I126520041","https://openalex.org/I19820366"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Lingju Xia","raw_affiliation_strings":["University of Science and Technology of China, Hefei, Anhui, P.R.China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"University of Science and Technology of China, Hefei, Anhui, P.R.China","institution_ids":["https://openalex.org/I126520041"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5028642102","display_name":"Junfeng Yang","orcid":"https://orcid.org/0000-0002-6962-8926"},"institutions":[{"id":"https://openalex.org/I126520041","display_name":"University of Science and Technology of China","ror":"https://ror.org/04c4dkn09","country_code":"CN","type":"education","lineage":["https://openalex.org/I126520041","https://openalex.org/I19820366"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Junfeng Yang","raw_affiliation_strings":["University of Science and Technology of China, Hefei, Anhui, P.R.China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"University of Science and Technology of China, Hefei, Anhui, P.R.China","institution_ids":["https://openalex.org/I126520041"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5041362389","display_name":"Wen Li","orcid":"https://orcid.org/0000-0002-5362-8147"},"institutions":[{"id":"https://openalex.org/I126520041","display_name":"University of Science and Technology of China","ror":"https://ror.org/04c4dkn09","country_code":"CN","type":"education","lineage":["https://openalex.org/I126520041","https://openalex.org/I19820366"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Li Wen","raw_affiliation_strings":["University of Science and Technology of China, Hefei, Anhui, P.R.China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"University of Science and Technology of China, Hefei, Anhui, P.R.China","institution_ids":["https://openalex.org/I126520041"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":1,"corresponding_author_ids":[],"corresponding_institution_ids":["https://openalex.org/I126520041"],"apc_list":null,"apc_paid":null,"fwci":0.2981,"has_fulltext":false,"cited_by_count":1,"citation_normalized_percentile":{"value":0.47718571,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":90,"max":94},"biblio":{"volume":null,"issue":null,"first_page":"986","last_page":"989"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10642","display_name":"Plasma Applications and Diagnostics","score":0.9991000294685364,"subfield":{"id":"https://openalex.org/subfields/2741","display_name":"Radiology, Nuclear Medicine and Imaging"},"field":{"id":"https://openalex.org/fields/27","display_name":"Medicine"},"domain":{"id":"https://openalex.org/domains/4","display_name":"Health Sciences"}},"topics":[{"id":"https://openalex.org/T10642","display_name":"Plasma Applications and Diagnostics","score":0.9991000294685364,"subfield":{"id":"https://openalex.org/subfields/2741","display_name":"Radiology, Nuclear Medicine and Imaging"},"field":{"id":"https://openalex.org/fields/27","display_name":"Medicine"},"domain":{"id":"https://openalex.org/domains/4","display_name":"Health Sciences"}},{"id":"https://openalex.org/T10781","display_name":"Plasma Diagnostics and Applications","score":0.9955000281333923,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T12776","display_name":"Electrohydrodynamics and Fluid Dynamics","score":0.9595999717712402,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/microfabrication","display_name":"Microfabrication","score":0.7197475433349609},{"id":"https://openalex.org/keywords/materials-science","display_name":"Materials science","score":0.7070241570472717},{"id":"https://openalex.org/keywords/dielectric-barrier-discharge","display_name":"Dielectric barrier discharge","score":0.7050840854644775},{"id":"https://openalex.org/keywords/plasma","display_name":"Plasma","score":0.6007882356643677},{"id":"https://openalex.org/keywords/atmospheric-pressure","display_name":"Atmospheric pressure","score":0.5989015698432922},{"id":"https://openalex.org/keywords/dielectric","display_name":"Dielectric","score":0.5604880452156067},{"id":"https://openalex.org/keywords/etching","display_name":"Etching (microfabrication)","score":0.494321346282959},{"id":"https://openalex.org/keywords/atmospheric-pressure-plasma","display_name":"Atmospheric-pressure plasma","score":0.4823112487792969},{"id":"https://openalex.org/keywords/plasma-processing","display_name":"Plasma processing","score":0.4769793450832367},{"id":"https://openalex.org/keywords/plasma-etching","display_name":"Plasma etching","score":0.44776543974876404},{"id":"https://openalex.org/keywords/optoelectronics","display_name":"Optoelectronics","score":0.40762653946876526},{"id":"https://openalex.org/keywords/nanotechnology","display_name":"Nanotechnology","score":0.252838134765625},{"id":"https://openalex.org/keywords/physics","display_name":"Physics","score":0.12041282653808594},{"id":"https://openalex.org/keywords/layer","display_name":"Layer (electronics)","score":0.11493805050849915}],"concepts":[{"id":"https://openalex.org/C527607","wikidata":"https://www.wikidata.org/wiki/Q175538","display_name":"Microfabrication","level":4,"score":0.7197475433349609},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.7070241570472717},{"id":"https://openalex.org/C89448510","wikidata":"https://www.wikidata.org/wiki/Q58313","display_name":"Dielectric barrier discharge","level":3,"score":0.7050840854644775},{"id":"https://openalex.org/C82706917","wikidata":"https://www.wikidata.org/wiki/Q10251","display_name":"Plasma","level":2,"score":0.6007882356643677},{"id":"https://openalex.org/C200239111","wikidata":"https://www.wikidata.org/wiki/Q81809","display_name":"Atmospheric pressure","level":2,"score":0.5989015698432922},{"id":"https://openalex.org/C133386390","wikidata":"https://www.wikidata.org/wiki/Q184996","display_name":"Dielectric","level":2,"score":0.5604880452156067},{"id":"https://openalex.org/C100460472","wikidata":"https://www.wikidata.org/wiki/Q2368605","display_name":"Etching (microfabrication)","level":3,"score":0.494321346282959},{"id":"https://openalex.org/C85344455","wikidata":"https://www.wikidata.org/wiki/Q757518","display_name":"Atmospheric-pressure plasma","level":3,"score":0.4823112487792969},{"id":"https://openalex.org/C145738678","wikidata":"https://www.wikidata.org/wiki/Q4364316","display_name":"Plasma processing","level":3,"score":0.4769793450832367},{"id":"https://openalex.org/C107187091","wikidata":"https://www.wikidata.org/wiki/Q2392011","display_name":"Plasma etching","level":4,"score":0.44776543974876404},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.40762653946876526},{"id":"https://openalex.org/C171250308","wikidata":"https://www.wikidata.org/wiki/Q11468","display_name":"Nanotechnology","level":1,"score":0.252838134765625},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.12041282653808594},{"id":"https://openalex.org/C2779227376","wikidata":"https://www.wikidata.org/wiki/Q6505497","display_name":"Layer (electronics)","level":2,"score":0.11493805050849915},{"id":"https://openalex.org/C136525101","wikidata":"https://www.wikidata.org/wiki/Q5428139","display_name":"Fabrication","level":3,"score":0.0},{"id":"https://openalex.org/C153294291","wikidata":"https://www.wikidata.org/wiki/Q25261","display_name":"Meteorology","level":1,"score":0.0},{"id":"https://openalex.org/C62520636","wikidata":"https://www.wikidata.org/wiki/Q944","display_name":"Quantum mechanics","level":1,"score":0.0},{"id":"https://openalex.org/C142724271","wikidata":"https://www.wikidata.org/wiki/Q7208","display_name":"Pathology","level":1,"score":0.0},{"id":"https://openalex.org/C204787440","wikidata":"https://www.wikidata.org/wiki/Q188504","display_name":"Alternative medicine","level":2,"score":0.0},{"id":"https://openalex.org/C71924100","wikidata":"https://www.wikidata.org/wiki/Q11190","display_name":"Medicine","level":0,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1109/nems51815.2021.9451379","is_oa":false,"landing_page_url":"https://doi.org/10.1109/nems51815.2021.9451379","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2021 IEEE 16th International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)","raw_type":"proceedings-article"}],"best_oa_location":null,"sustainable_development_goals":[],"awards":[{"id":"https://openalex.org/G877548911","display_name":null,"funder_award_id":"51375469","funder_id":"https://openalex.org/F4320321001","funder_display_name":"National Natural Science Foundation of China"}],"funders":[{"id":"https://openalex.org/F4320321001","display_name":"National Natural Science Foundation of China","ror":"https://ror.org/01h0zpd94"}],"has_content":{"pdf":false,"grobid_xml":false},"content_urls":null,"referenced_works_count":12,"referenced_works":["https://openalex.org/W2030012245","https://openalex.org/W2036572833","https://openalex.org/W2170078310","https://openalex.org/W2343362156","https://openalex.org/W2509094452","https://openalex.org/W2520854204","https://openalex.org/W2609522902","https://openalex.org/W2747783419","https://openalex.org/W2777307875","https://openalex.org/W2880502092","https://openalex.org/W2910387666","https://openalex.org/W3016650475"],"related_works":["https://openalex.org/W4313429705","https://openalex.org/W2950499252","https://openalex.org/W3197419717","https://openalex.org/W2012136830","https://openalex.org/W2512799013","https://openalex.org/W2517187278","https://openalex.org/W2493452624","https://openalex.org/W2922294649","https://openalex.org/W4388375970","https://openalex.org/W3096066515"],"abstract_inverted_index":{"We":[0],"present":[1],"a":[2],"novel":[3],"atmospheric":[4],"pressure":[5],"plasma":[6,53],"microjets":[7],"(APP\u03bcJ)":[8],"array":[9,81],"to":[10,47,82],"achieve":[11],"the":[12,26,60,92],"localized":[13,85],"mask-free":[14],"parallel":[15,86],"processing":[16],"for":[17],"material.":[18],"Benefited":[19],"from":[20],"ease":[21],"and":[22,28,91,98],"low-cost":[23],"microfabrication":[24],"technology,":[25],"dimension":[27],"distance":[29],"of":[30,43,52,88],"adjacent":[31],"jets":[32],"can":[33],"be":[34],"designed":[35],"at":[36],"micro/nano":[37],"scale.":[38],"The":[39,55],"equivalent":[40],"electrical":[41,50],"model":[42],"APP\u03bcJ":[44,80],"is":[45,62],"developed":[46],"investigate":[48],"discharge":[49,61],"mechanism":[51],"microjets.":[54],"simulation":[56],"results":[57,93],"show":[58],"that":[59],"in":[63],"Dielectric":[64],"Barrier":[65],"Discharge":[66],"(DBD)":[67],"mode,":[68],"which":[69],"has":[70],"good":[71,95],"consistency":[72],"with":[73],"experiment":[74],"measurement.":[75],"In":[76],"addition,":[77],"we":[78],"use":[79],"realize":[83],"maskless":[84],"etching":[87],"graphene":[89],"film,":[90],"exhibit":[94],"surface":[96],"quality":[97],"uniformity.":[99]},"counts_by_year":[{"year":2023,"cited_by_count":1}],"updated_date":"2026-07-29T14:22:42.915294","created_date":"2025-10-10T00:00:00"}