{"id":"https://openalex.org/W3176752811","doi":"https://doi.org/10.1109/nems51815.2021.9451367","title":"Research on the Stability Threshold and Subharmonic Oscillation in a Parametric Excitation MEMS Resonator","display_name":"Research on the Stability Threshold and Subharmonic Oscillation in a Parametric Excitation MEMS Resonator","publication_year":2021,"publication_date":"2021-04-25","ids":{"openalex":"https://openalex.org/W3176752811","doi":"https://doi.org/10.1109/nems51815.2021.9451367","mag":"3176752811"},"language":"en","primary_location":{"id":"doi:10.1109/nems51815.2021.9451367","is_oa":false,"landing_page_url":"https://doi.org/10.1109/nems51815.2021.9451367","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2021 IEEE 16th International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)","raw_type":"proceedings-article"},"type":"article","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5023670888","display_name":"Kuo Lu","orcid":"https://orcid.org/0000-0001-6496-7905"},"institutions":[{"id":"https://openalex.org/I170215575","display_name":"National University of Defense Technology","ror":"https://ror.org/05d2yfz11","country_code":"CN","type":"education","lineage":["https://openalex.org/I170215575"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Kuo Lu","raw_affiliation_strings":["College of Intelligence Science, National University of Defense Technology, Changsha, Hunan, China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"College of Intelligence Science, National University of Defense Technology, Changsha, Hunan, China","institution_ids":["https://openalex.org/I170215575"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5019258983","display_name":"Kai Wu","orcid":"https://orcid.org/0000-0003-4467-1597"},"institutions":[{"id":"https://openalex.org/I170215575","display_name":"National University of Defense Technology","ror":"https://ror.org/05d2yfz11","country_code":"CN","type":"education","lineage":["https://openalex.org/I170215575"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Kai Wu","raw_affiliation_strings":["College of Intelligence Science, National University of Defense Technology, Changsha, Hunan, China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"College of Intelligence Science, National University of Defense Technology, Changsha, Hunan, China","institution_ids":["https://openalex.org/I170215575"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5100679657","display_name":"Qingsong Li","orcid":"https://orcid.org/0000-0002-2476-7041"},"institutions":[{"id":"https://openalex.org/I170215575","display_name":"National University of Defense Technology","ror":"https://ror.org/05d2yfz11","country_code":"CN","type":"education","lineage":["https://openalex.org/I170215575"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Qingsong Li","raw_affiliation_strings":["National University of Defense Technology, Changsha, Hunan, China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"National University of Defense Technology, Changsha, Hunan, China","institution_ids":["https://openalex.org/I170215575"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5101423749","display_name":"Xin Zhou","orcid":"https://orcid.org/0000-0002-7259-4325"},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"Xin Zhou","raw_affiliation_strings":["Hunan MEMS Research Center, Changsha, Huna, China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Hunan MEMS Research Center, Changsha, Huna, China","institution_ids":[]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5018426574","display_name":"Yongmeng Zhang","orcid":"https://orcid.org/0000-0002-3314-5818"},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"Yongmeng Zhang","raw_affiliation_strings":["Hunan MEMS Research Center, Changsha, Huna, China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Hunan MEMS Research Center, Changsha, Huna, China","institution_ids":[]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5111712733","display_name":"Ming Zhuo","orcid":null},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"Ming Zhuo","raw_affiliation_strings":["Hunan MEMS Research Center, Changsha, Huna, China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Hunan MEMS Research Center, Changsha, Huna, China","institution_ids":[]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5100861826","display_name":"Xuezhong Wu","orcid":null},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"Xuezhong Wu","raw_affiliation_strings":["Hunan MEMS Research Center, Changsha, Huna, China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Hunan MEMS Research Center, Changsha, Huna, China","institution_ids":[]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5088900085","display_name":"Dingbang Xiao","orcid":"https://orcid.org/0000-0002-1591-7220"},"institutions":[{"id":"https://openalex.org/I170215575","display_name":"National University of Defense Technology","ror":"https://ror.org/05d2yfz11","country_code":"CN","type":"education","lineage":["https://openalex.org/I170215575"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Dingbang Xiao","raw_affiliation_strings":["National University of Defense Technology, Changsha, Hunan, China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"National University of Defense Technology, Changsha, Hunan, China","institution_ids":["https://openalex.org/I170215575"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":8,"corresponding_author_ids":[],"corresponding_institution_ids":[],"apc_list":null,"apc_paid":null,"fwci":0.0,"has_fulltext":false,"cited_by_count":0,"citation_normalized_percentile":{"value":0.08586971,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":null,"biblio":{"volume":null,"issue":null,"first_page":"1817","last_page":"1822"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T11449","display_name":"Mechanical and Optical Resonators","score":1.0,"subfield":{"id":"https://openalex.org/subfields/3107","display_name":"Atomic and Molecular Physics, and Optics"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T11449","display_name":"Mechanical and Optical Resonators","score":1.0,"subfield":{"id":"https://openalex.org/subfields/3107","display_name":"Atomic and Molecular Physics, and Optics"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":0.9998999834060669,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11160","display_name":"Acoustic Wave Resonator Technologies","score":0.9998000264167786,"subfield":{"id":"https://openalex.org/subfields/2204","display_name":"Biomedical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/resonator","display_name":"Resonator","score":0.8019047975540161},{"id":"https://openalex.org/keywords/parametric-statistics","display_name":"Parametric statistics","score":0.6437724828720093},{"id":"https://openalex.org/keywords/control-theory","display_name":"Control theory (sociology)","score":0.6085447669029236},{"id":"https://openalex.org/keywords/signal","display_name":"SIGNAL (programming language)","score":0.5895116329193115},{"id":"https://openalex.org/keywords/oscillation","display_name":"Oscillation (cell signaling)","score":0.5665296316146851},{"id":"https://openalex.org/keywords/physics","display_name":"Physics","score":0.519446074962616},{"id":"https://openalex.org/keywords/parametric-oscillator","display_name":"Parametric oscillator","score":0.509395182132721},{"id":"https://openalex.org/keywords/excitation","display_name":"Excitation","score":0.48160287737846375},{"id":"https://openalex.org/keywords/amplitude","display_name":"Amplitude","score":0.46118125319480896},{"id":"https://openalex.org/keywords/vibration","display_name":"Vibration","score":0.42078205943107605},{"id":"https://openalex.org/keywords/acoustics","display_name":"Acoustics","score":0.4025634527206421},{"id":"https://openalex.org/keywords/optics","display_name":"Optics","score":0.2159644067287445},{"id":"https://openalex.org/keywords/computer-science","display_name":"Computer science","score":0.1716524064540863},{"id":"https://openalex.org/keywords/mathematics","display_name":"Mathematics","score":0.16625908017158508}],"concepts":[{"id":"https://openalex.org/C97126364","wikidata":"https://www.wikidata.org/wiki/Q349669","display_name":"Resonator","level":2,"score":0.8019047975540161},{"id":"https://openalex.org/C117251300","wikidata":"https://www.wikidata.org/wiki/Q1849855","display_name":"Parametric statistics","level":2,"score":0.6437724828720093},{"id":"https://openalex.org/C47446073","wikidata":"https://www.wikidata.org/wiki/Q5165890","display_name":"Control theory (sociology)","level":3,"score":0.6085447669029236},{"id":"https://openalex.org/C2779843651","wikidata":"https://www.wikidata.org/wiki/Q7390335","display_name":"SIGNAL (programming language)","level":2,"score":0.5895116329193115},{"id":"https://openalex.org/C2778439541","wikidata":"https://www.wikidata.org/wiki/Q7106412","display_name":"Oscillation (cell signaling)","level":2,"score":0.5665296316146851},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.519446074962616},{"id":"https://openalex.org/C164466805","wikidata":"https://www.wikidata.org/wiki/Q2632607","display_name":"Parametric oscillator","level":2,"score":0.509395182132721},{"id":"https://openalex.org/C83581075","wikidata":"https://www.wikidata.org/wiki/Q1361503","display_name":"Excitation","level":2,"score":0.48160287737846375},{"id":"https://openalex.org/C180205008","wikidata":"https://www.wikidata.org/wiki/Q159190","display_name":"Amplitude","level":2,"score":0.46118125319480896},{"id":"https://openalex.org/C198394728","wikidata":"https://www.wikidata.org/wiki/Q3695508","display_name":"Vibration","level":2,"score":0.42078205943107605},{"id":"https://openalex.org/C24890656","wikidata":"https://www.wikidata.org/wiki/Q82811","display_name":"Acoustics","level":1,"score":0.4025634527206421},{"id":"https://openalex.org/C120665830","wikidata":"https://www.wikidata.org/wiki/Q14620","display_name":"Optics","level":1,"score":0.2159644067287445},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.1716524064540863},{"id":"https://openalex.org/C33923547","wikidata":"https://www.wikidata.org/wiki/Q395","display_name":"Mathematics","level":0,"score":0.16625908017158508},{"id":"https://openalex.org/C54355233","wikidata":"https://www.wikidata.org/wiki/Q7162","display_name":"Genetics","level":1,"score":0.0},{"id":"https://openalex.org/C199360897","wikidata":"https://www.wikidata.org/wiki/Q9143","display_name":"Programming language","level":1,"score":0.0},{"id":"https://openalex.org/C105795698","wikidata":"https://www.wikidata.org/wiki/Q12483","display_name":"Statistics","level":1,"score":0.0},{"id":"https://openalex.org/C62520636","wikidata":"https://www.wikidata.org/wiki/Q944","display_name":"Quantum mechanics","level":1,"score":0.0},{"id":"https://openalex.org/C2775924081","wikidata":"https://www.wikidata.org/wiki/Q55608371","display_name":"Control (management)","level":2,"score":0.0},{"id":"https://openalex.org/C154945302","wikidata":"https://www.wikidata.org/wiki/Q11660","display_name":"Artificial intelligence","level":1,"score":0.0},{"id":"https://openalex.org/C86803240","wikidata":"https://www.wikidata.org/wiki/Q420","display_name":"Biology","level":0,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1109/nems51815.2021.9451367","is_oa":false,"landing_page_url":"https://doi.org/10.1109/nems51815.2021.9451367","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2021 IEEE 16th International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)","raw_type":"proceedings-article"}],"best_oa_location":null,"sustainable_development_goals":[{"id":"https://metadata.un.org/sdg/7","display_name":"Affordable and clean energy","score":0.6499999761581421}],"awards":[{"id":"https://openalex.org/G4215143903","display_name":null,"funder_award_id":"51705527","funder_id":"https://openalex.org/F4320321001","funder_display_name":"National Natural Science Foundation of China"},{"id":"https://openalex.org/G8260399550","display_name":null,"funder_award_id":"2018YFB2002304","funder_id":"https://openalex.org/F4320335777","funder_display_name":"National Key Research and Development Program of China"}],"funders":[{"id":"https://openalex.org/F4320321001","display_name":"National Natural Science Foundation of China","ror":"https://ror.org/01h0zpd94"},{"id":"https://openalex.org/F4320335777","display_name":"National Key Research and Development Program of China","ror":null}],"has_content":{"grobid_xml":false,"pdf":false},"content_urls":null,"referenced_works_count":14,"referenced_works":["https://openalex.org/W930220367","https://openalex.org/W1482570919","https://openalex.org/W1972896610","https://openalex.org/W1979659095","https://openalex.org/W2015007559","https://openalex.org/W2089008891","https://openalex.org/W2526996018","https://openalex.org/W2745256127","https://openalex.org/W2973043741","https://openalex.org/W2982569761","https://openalex.org/W3022506078","https://openalex.org/W3118632991","https://openalex.org/W4231409469","https://openalex.org/W6654396138"],"related_works":["https://openalex.org/W2767192496","https://openalex.org/W2050925970","https://openalex.org/W3142132231","https://openalex.org/W2015007559","https://openalex.org/W2164515121","https://openalex.org/W2469550379","https://openalex.org/W1523130940","https://openalex.org/W2047328016","https://openalex.org/W1975557087","https://openalex.org/W1495494621"],"abstract_inverted_index":{"The":[0,182],"parametric":[1,45,60,70,97,112,137,149,197],"excitation":[2,46,198],"is":[3,16,50,54,78,141,170],"an":[4,157],"effective":[5],"method":[6],"to":[7,126,155,163],"improve":[8],"the":[9,26,37,59,67,74,81,83,93,96,99,108,111,119,131,147,151,179,192,202],"quality":[10],"factor":[11],"of":[12,58,69,95,110,173,194,204],"nano-micro":[13],"resonators,":[14],"which":[15,62,140],"achieved":[17],"by":[18,66],"superimposing":[19],"a":[20,34,44,55,88,135,164,171],"twice":[21],"frequency":[22,28,101,121],"pump":[23,71,75,113],"signal":[24,103,114],"on":[25,36,178],"fundamental":[27,100,120],"driving":[29,102,122],"signal.":[30,72],"This":[31],"paper":[32,187],"presents":[33],"research":[35],"stability":[38,56,117,195],"threshold":[39,68],"and":[40,91,176,201],"subharmonic":[41,143,152,205],"oscillation":[42,180],"in":[43,134,161,185,196],"MEMS":[47,199],"resonator.":[48],"It":[49],"demonstrated":[51],"that":[52,168],"there":[53],"boundary":[57],"excitation,":[61,150],"can":[63,188],"be":[64],"defined":[65],"When":[73],"signal's":[76],"amplitude":[77,109],"lower":[79],"than":[80],"threshold,":[82,118],"resonator's":[84],"response":[85,153,160],"will":[86,104,124],"remain":[87],"stable":[89,148],"vibration":[90],"with":[92,146],"increasing":[94],"voltage":[98,123],"decrease.":[105],"Especially,":[106],"when":[107],"reaches":[115],"its":[116],"drop":[125],"zero.":[127],"In":[128],"this":[129,186],"case,":[130],"resonator":[132],"operates":[133],"generalized":[136],"resonance":[138],"condition,":[139],"called":[142],"oscillation.":[144,206],"Compared":[145],"proves":[154],"have":[156],"additional":[158],"time-varying":[159],"addition":[162],"steady-state":[165],"response,":[166],"indicating":[167],"it":[169],"combination":[172],"different":[174],"signals":[175],"depends":[177],"time.":[181],"work":[183],"presented":[184],"help":[189],"better":[190],"understand":[191],"principle":[193],"resonators":[200],"impact":[203]},"counts_by_year":[],"updated_date":"2026-06-11T09:08:48.828518","created_date":"2025-10-10T00:00:00"}