{"id":"https://openalex.org/W3175972296","doi":"https://doi.org/10.1109/nems51815.2021.9451328","title":"Research on the resolution of submicron lithographic projection system based on DMD for optical fiber end face","display_name":"Research on the resolution of submicron lithographic projection system based on DMD for optical fiber end face","publication_year":2021,"publication_date":"2021-04-25","ids":{"openalex":"https://openalex.org/W3175972296","doi":"https://doi.org/10.1109/nems51815.2021.9451328","mag":"3175972296"},"language":"en","primary_location":{"id":"doi:10.1109/nems51815.2021.9451328","is_oa":false,"landing_page_url":"https://doi.org/10.1109/nems51815.2021.9451328","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2021 IEEE 16th International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)","raw_type":"proceedings-article"},"type":"conference-paper","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5017011656","display_name":"Qingwang Meng","orcid":null},"institutions":[{"id":"https://openalex.org/I927504317","display_name":"Nanchang Hangkong University","ror":"https://ror.org/0369pvp92","country_code":"CN","type":"education","lineage":["https://openalex.org/I927504317"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Qingwang Meng","raw_affiliation_strings":["Ministry of Education, Key Laboratory of Opto-Electronic Information Science and Technology of Jiangxi Province, and Key Laboratory of Nondestructive Test, Nanchang Hangkong University, Nanchang, China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Ministry of Education, Key Laboratory of Opto-Electronic Information Science and Technology of Jiangxi Province, and Key Laboratory of Nondestructive Test, Nanchang Hangkong University, Nanchang, China","institution_ids":["https://openalex.org/I927504317"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5100406520","display_name":"Zhimin Zhang","orcid":"https://orcid.org/0000-0002-0531-9112"},"institutions":[{"id":"https://openalex.org/I927504317","display_name":"Nanchang Hangkong University","ror":"https://ror.org/0369pvp92","country_code":"CN","type":"education","lineage":["https://openalex.org/I927504317"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Zhimin Zhang","raw_affiliation_strings":["Ministry of Education, Key Laboratory of Opto-Electronic Information Science and Technology of Jiangxi Province, and Key Laboratory of Nondestructive Test, Nanchang Hangkong University, Nanchang, China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Ministry of Education, Key Laboratory of Opto-Electronic Information Science and Technology of Jiangxi Province, and Key Laboratory of Nondestructive Test, Nanchang Hangkong University, Nanchang, China","institution_ids":["https://openalex.org/I927504317"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5029928316","display_name":"Ningning Luo","orcid":"https://orcid.org/0000-0002-2325-5917"},"institutions":[{"id":"https://openalex.org/I927504317","display_name":"Nanchang Hangkong University","ror":"https://ror.org/0369pvp92","country_code":"CN","type":"education","lineage":["https://openalex.org/I927504317"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Ningning Luo","raw_affiliation_strings":["Ministry of Education, Key Laboratory of Opto-Electronic Information Science and Technology of Jiangxi Province, and Key Laboratory of Nondestructive Test, Nanchang Hangkong University, Nanchang, China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Ministry of Education, Key Laboratory of Opto-Electronic Information Science and Technology of Jiangxi Province, and Key Laboratory of Nondestructive Test, Nanchang Hangkong University, Nanchang, China","institution_ids":["https://openalex.org/I927504317"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5100644586","display_name":"Luming Wang","orcid":"https://orcid.org/0000-0001-6364-6739"},"institutions":[{"id":"https://openalex.org/I927504317","display_name":"Nanchang Hangkong University","ror":"https://ror.org/0369pvp92","country_code":"CN","type":"education","lineage":["https://openalex.org/I927504317"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Luming Wang","raw_affiliation_strings":["Ministry of Education, Key Laboratory of Opto-Electronic Information Science and Technology of Jiangxi Province, and Key Laboratory of Nondestructive Test, Nanchang Hangkong University, Nanchang, China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Ministry of Education, Key Laboratory of Opto-Electronic Information Science and Technology of Jiangxi Province, and Key Laboratory of Nondestructive Test, Nanchang Hangkong University, Nanchang, China","institution_ids":["https://openalex.org/I927504317"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5069888443","display_name":"Menghan Xiong","orcid":null},"institutions":[{"id":"https://openalex.org/I927504317","display_name":"Nanchang Hangkong University","ror":"https://ror.org/0369pvp92","country_code":"CN","type":"education","lineage":["https://openalex.org/I927504317"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Menghan Xiong","raw_affiliation_strings":["Ministry of Education, Key Laboratory of Opto-Electronic Information Science and Technology of Jiangxi Province, and Key Laboratory of Nondestructive Test, Nanchang Hangkong University, Nanchang, China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Ministry of Education, Key Laboratory of Opto-Electronic Information Science and Technology of Jiangxi Province, and Key Laboratory of Nondestructive Test, Nanchang Hangkong University, Nanchang, China","institution_ids":["https://openalex.org/I927504317"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":1,"corresponding_author_ids":[],"corresponding_institution_ids":["https://openalex.org/I927504317"],"apc_list":null,"apc_paid":null,"fwci":0.0,"has_fulltext":false,"cited_by_count":1,"citation_normalized_percentile":{"value":0.07516096,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":91,"max":95},"biblio":{"volume":null,"issue":null,"first_page":"571","last_page":"575"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T11338","display_name":"Advancements in Photolithography Techniques","score":0.9984999895095825,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T11338","display_name":"Advancements in Photolithography Techniques","score":0.9984999895095825,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T12224","display_name":"Nanofabrication and Lithography Techniques","score":0.9958999752998352,"subfield":{"id":"https://openalex.org/subfields/2204","display_name":"Biomedical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11517","display_name":"Advanced optical system design","score":0.9955999851226807,"subfield":{"id":"https://openalex.org/subfields/2204","display_name":"Biomedical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/digital-micromirror-device","display_name":"Digital micromirror device","score":0.8005555868148804},{"id":"https://openalex.org/keywords/lithography","display_name":"Lithography","score":0.7303261160850525},{"id":"https://openalex.org/keywords/materials-science","display_name":"Materials science","score":0.7074386477470398},{"id":"https://openalex.org/keywords/optics","display_name":"Optics","score":0.6917150020599365},{"id":"https://openalex.org/keywords/magnification","display_name":"Magnification","score":0.6449893116950989},{"id":"https://openalex.org/keywords/optical-fiber","display_name":"Optical fiber","score":0.5532078146934509},{"id":"https://openalex.org/keywords/lens","display_name":"Lens (geology)","score":0.5145687460899353},{"id":"https://openalex.org/keywords/fiber","display_name":"Fiber","score":0.4938378930091858},{"id":"https://openalex.org/keywords/pixel","display_name":"Pixel","score":0.46563827991485596},{"id":"https://openalex.org/keywords/photoresist","display_name":"Photoresist","score":0.45544978976249695},{"id":"https://openalex.org/keywords/numerical-aperture","display_name":"Numerical aperture","score":0.4427129626274109},{"id":"https://openalex.org/keywords/optoelectronics","display_name":"Optoelectronics","score":0.40884387493133545},{"id":"https://openalex.org/keywords/physics","display_name":"Physics","score":0.16797864437103271},{"id":"https://openalex.org/keywords/nanotechnology","display_name":"Nanotechnology","score":0.12792900204658508}],"concepts":[{"id":"https://openalex.org/C18645525","wikidata":"https://www.wikidata.org/wiki/Q1369469","display_name":"Digital micromirror device","level":2,"score":0.8005555868148804},{"id":"https://openalex.org/C204223013","wikidata":"https://www.wikidata.org/wiki/Q133036","display_name":"Lithography","level":2,"score":0.7303261160850525},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.7074386477470398},{"id":"https://openalex.org/C120665830","wikidata":"https://www.wikidata.org/wiki/Q14620","display_name":"Optics","level":1,"score":0.6917150020599365},{"id":"https://openalex.org/C4144372","wikidata":"https://www.wikidata.org/wiki/Q675287","display_name":"Magnification","level":2,"score":0.6449893116950989},{"id":"https://openalex.org/C194232370","wikidata":"https://www.wikidata.org/wiki/Q162","display_name":"Optical fiber","level":2,"score":0.5532078146934509},{"id":"https://openalex.org/C15336307","wikidata":"https://www.wikidata.org/wiki/Q1766051","display_name":"Lens (geology)","level":2,"score":0.5145687460899353},{"id":"https://openalex.org/C519885992","wikidata":"https://www.wikidata.org/wiki/Q161","display_name":"Fiber","level":2,"score":0.4938378930091858},{"id":"https://openalex.org/C160633673","wikidata":"https://www.wikidata.org/wiki/Q355198","display_name":"Pixel","level":2,"score":0.46563827991485596},{"id":"https://openalex.org/C134406635","wikidata":"https://www.wikidata.org/wiki/Q1439684","display_name":"Photoresist","level":3,"score":0.45544978976249695},{"id":"https://openalex.org/C159108749","wikidata":"https://www.wikidata.org/wiki/Q898896","display_name":"Numerical aperture","level":3,"score":0.4427129626274109},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.40884387493133545},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.16797864437103271},{"id":"https://openalex.org/C171250308","wikidata":"https://www.wikidata.org/wiki/Q11468","display_name":"Nanotechnology","level":1,"score":0.12792900204658508},{"id":"https://openalex.org/C159985019","wikidata":"https://www.wikidata.org/wiki/Q181790","display_name":"Composite material","level":1,"score":0.0},{"id":"https://openalex.org/C2779227376","wikidata":"https://www.wikidata.org/wiki/Q6505497","display_name":"Layer (electronics)","level":2,"score":0.0},{"id":"https://openalex.org/C6260449","wikidata":"https://www.wikidata.org/wiki/Q41364","display_name":"Wavelength","level":2,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1109/nems51815.2021.9451328","is_oa":false,"landing_page_url":"https://doi.org/10.1109/nems51815.2021.9451328","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2021 IEEE 16th International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)","raw_type":"proceedings-article"}],"best_oa_location":null,"sustainable_development_goals":[],"awards":[{"id":"https://openalex.org/G182658477","display_name":null,"funder_award_id":"61704070,61464008","funder_id":"https://openalex.org/F4320321001","funder_display_name":"National Natural Science Foundation of China"},{"id":"https://openalex.org/G5612683228","display_name":null,"funder_award_id":"20202BAB202012","funder_id":"https://openalex.org/F4320322665","funder_display_name":"Natural Science Foundation of Jiangxi Province"}],"funders":[{"id":"https://openalex.org/F4320321001","display_name":"National Natural Science Foundation of China","ror":"https://ror.org/01h0zpd94"},{"id":"https://openalex.org/F4320322665","display_name":"Natural Science Foundation of Jiangxi Province","ror":null}],"has_content":{"grobid_xml":false,"pdf":false},"content_urls":null,"referenced_works_count":7,"referenced_works":["https://openalex.org/W1980284953","https://openalex.org/W2086267665","https://openalex.org/W2208316269","https://openalex.org/W2467929717","https://openalex.org/W2544627173","https://openalex.org/W2730391514","https://openalex.org/W2734715747"],"related_works":["https://openalex.org/W1994967022","https://openalex.org/W2029829910","https://openalex.org/W1977083628","https://openalex.org/W2129122970","https://openalex.org/W2183602760","https://openalex.org/W2083762784","https://openalex.org/W2059260584","https://openalex.org/W2006234123","https://openalex.org/W2109390985","https://openalex.org/W2173254501"],"abstract_inverted_index":{"We":[0],"report":[1],"a":[2,107],"direct":[3],"and":[4,102,121,128,135,144],"facile":[5],"method":[6],"to":[7,142],"study":[8],"the":[9,24,46,51,58,62,66,69,75,97,100,113,116,122,126,131,136,146,150],"limit":[10],"resolution":[11],"of":[12,28,61,68,89,99,104,110,115,130],"optical":[13,76],"fiber":[14,25,71,77],"microlithography,":[15],"which":[16],"is":[17],"based":[18],"on":[19,65,125],"DMD":[20,59],"(digital":[21],"micromirror":[22],"device)":[23],"end":[26,72,78],"face":[27],"submicron":[29],"uv":[30,36],"lithography":[31,137],"system,":[32],"with":[33,118],"365":[34],"nm":[35,41],"light,":[37],"supplemented":[38],"by":[39],"620-630":[40],"red":[42],"light":[43,48,64],"for":[44],"focusing":[45],"reference":[47],"source,":[49],"using":[50],"Reduced":[52],"projection":[53],"objective":[54,101],"lens":[55],"will":[56],"focus":[57],"modulation":[60],"ultraviolet":[63],"spin":[67],"photoresist":[70],"face,":[73],"realize":[74],"surface":[79],"microstructure":[80,132],"(single":[81],"exposure":[82,87],"precision":[83,127],"900":[84],"nanometers,":[85],"single":[86,108],"area":[88],"more":[90],"than":[91],"hundred":[92],"microns)":[93],"preparation.":[94],"By":[95],"changing":[96],"magnification":[98,120],"Number":[103],"pixels":[105],"in":[106],"cycle":[109],"digital":[111],"mask,":[112],"influence":[114],"Objectives":[117],"different":[119],"pixel":[123],"point":[124],"integrity":[129],"was":[133,139],"analyzed,":[134],"experiment":[138],"carried":[140],"out":[141],"verify":[143],"get":[145],"optimal":[147],"solution":[148],"between":[149],"two":[151],"factors.":[152]},"counts_by_year":[{"year":2025,"cited_by_count":1}],"updated_date":"2026-07-29T14:22:42.915294","created_date":"2025-10-10T00:00:00"}