{"id":"https://openalex.org/W3175738305","doi":"https://doi.org/10.1109/nems51815.2021.9451280","title":"Modeling and Simulation of Flexible Vector Shear Flow Sensor Based on COMSOL Multiphysics","display_name":"Modeling and Simulation of Flexible Vector Shear Flow Sensor Based on COMSOL Multiphysics","publication_year":2021,"publication_date":"2021-04-25","ids":{"openalex":"https://openalex.org/W3175738305","doi":"https://doi.org/10.1109/nems51815.2021.9451280","mag":"3175738305"},"language":"en","primary_location":{"id":"doi:10.1109/nems51815.2021.9451280","is_oa":false,"landing_page_url":"https://doi.org/10.1109/nems51815.2021.9451280","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2021 IEEE 16th International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)","raw_type":"proceedings-article"},"type":"conference-paper","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5091831977","display_name":"Guochang Liu","orcid":"https://orcid.org/0000-0003-2551-5388"},"institutions":[{"id":"https://openalex.org/I135714990","display_name":"North University of China","ror":"https://ror.org/047bp1713","country_code":"CN","type":"education","lineage":["https://openalex.org/I135714990"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Guochang Liu","raw_affiliation_strings":["State Key Laboratory of Testing Technology, North University of China, Taiyuan, China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"State Key Laboratory of Testing Technology, North University of China, Taiyuan, China","institution_ids":["https://openalex.org/I135714990"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5046541338","display_name":"Wenping Cao","orcid":"https://orcid.org/0000-0001-6194-6623"},"institutions":[{"id":"https://openalex.org/I135714990","display_name":"North University of China","ror":"https://ror.org/047bp1713","country_code":"CN","type":"education","lineage":["https://openalex.org/I135714990"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Wenping Cao","raw_affiliation_strings":["State Key Laboratory of Testing Technology, North University of China, Taiyuan, China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"State Key Laboratory of Testing Technology, North University of China, Taiyuan, China","institution_ids":["https://openalex.org/I135714990"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5046813626","display_name":"Haoyu Tan","orcid":"https://orcid.org/0000-0001-5673-452X"},"institutions":[{"id":"https://openalex.org/I135714990","display_name":"North University of China","ror":"https://ror.org/047bp1713","country_code":"CN","type":"education","lineage":["https://openalex.org/I135714990"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Haoyu Tan","raw_affiliation_strings":["State Key Laboratory of Testing Technology, North University of China, Taiyuan, China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"State Key Laboratory of Testing Technology, North University of China, Taiyuan, China","institution_ids":["https://openalex.org/I135714990"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5021885614","display_name":"Renxin Wang","orcid":"https://orcid.org/0000-0002-3441-9286"},"institutions":[{"id":"https://openalex.org/I135714990","display_name":"North University of China","ror":"https://ror.org/047bp1713","country_code":"CN","type":"education","lineage":["https://openalex.org/I135714990"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Renxin Wang","raw_affiliation_strings":["State Key Laboratory of Testing Technology, North University of China, Taiyuan, China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"State Key Laboratory of Testing Technology, North University of China, Taiyuan, China","institution_ids":["https://openalex.org/I135714990"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5100739058","display_name":"Wendong Zhang","orcid":"https://orcid.org/0000-0003-1762-9246"},"institutions":[{"id":"https://openalex.org/I135714990","display_name":"North University of China","ror":"https://ror.org/047bp1713","country_code":"CN","type":"education","lineage":["https://openalex.org/I135714990"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Wendong Zhang","raw_affiliation_strings":["State Key Laboratory of Testing Technology, North University of China, Taiyuan, China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"State Key Laboratory of Testing Technology, North University of China, Taiyuan, China","institution_ids":["https://openalex.org/I135714990"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":1,"corresponding_author_ids":[],"corresponding_institution_ids":["https://openalex.org/I135714990"],"apc_list":null,"apc_paid":null,"fwci":0.0,"has_fulltext":false,"cited_by_count":2,"citation_normalized_percentile":{"value":0.1100343,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":95,"max":96},"biblio":{"volume":null,"issue":null,"first_page":"770","last_page":"774"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10338","display_name":"Advanced Sensor and Energy Harvesting Materials","score":0.9998000264167786,"subfield":{"id":"https://openalex.org/subfields/2204","display_name":"Biomedical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10338","display_name":"Advanced Sensor and Energy Harvesting Materials","score":0.9998000264167786,"subfield":{"id":"https://openalex.org/subfields/2204","display_name":"Biomedical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11737","display_name":"Advanced Materials and Mechanics","score":0.9983999729156494,"subfield":{"id":"https://openalex.org/subfields/2210","display_name":"Mechanical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":0.9836000204086304,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/multiphysics","display_name":"Multiphysics","score":0.8968676328659058},{"id":"https://openalex.org/keywords/mechanical-engineering","display_name":"Mechanical engineering","score":0.46694695949554443},{"id":"https://openalex.org/keywords/directivity","display_name":"Directivity","score":0.4313385486602783},{"id":"https://openalex.org/keywords/software","display_name":"Software","score":0.43062102794647217},{"id":"https://openalex.org/keywords/microelectromechanical-systems","display_name":"Microelectromechanical systems","score":0.41713422536849976},{"id":"https://openalex.org/keywords/acoustics","display_name":"Acoustics","score":0.4076187014579773},{"id":"https://openalex.org/keywords/computer-science","display_name":"Computer science","score":0.39139458537101746},{"id":"https://openalex.org/keywords/engineering","display_name":"Engineering","score":0.3581329584121704},{"id":"https://openalex.org/keywords/electronic-engineering","display_name":"Electronic engineering","score":0.3202729821205139},{"id":"https://openalex.org/keywords/physics","display_name":"Physics","score":0.31948330998420715},{"id":"https://openalex.org/keywords/electrical-engineering","display_name":"Electrical engineering","score":0.3022366166114807},{"id":"https://openalex.org/keywords/finite-element-method","display_name":"Finite element method","score":0.3020160496234894},{"id":"https://openalex.org/keywords/structural-engineering","display_name":"Structural engineering","score":0.1987972855567932},{"id":"https://openalex.org/keywords/optoelectronics","display_name":"Optoelectronics","score":0.09676790237426758}],"concepts":[{"id":"https://openalex.org/C46435376","wikidata":"https://www.wikidata.org/wiki/Q1829750","display_name":"Multiphysics","level":3,"score":0.8968676328659058},{"id":"https://openalex.org/C78519656","wikidata":"https://www.wikidata.org/wiki/Q101333","display_name":"Mechanical engineering","level":1,"score":0.46694695949554443},{"id":"https://openalex.org/C189039984","wikidata":"https://www.wikidata.org/wiki/Q8225412","display_name":"Directivity","level":3,"score":0.4313385486602783},{"id":"https://openalex.org/C2777904410","wikidata":"https://www.wikidata.org/wiki/Q7397","display_name":"Software","level":2,"score":0.43062102794647217},{"id":"https://openalex.org/C37977207","wikidata":"https://www.wikidata.org/wiki/Q175561","display_name":"Microelectromechanical systems","level":2,"score":0.41713422536849976},{"id":"https://openalex.org/C24890656","wikidata":"https://www.wikidata.org/wiki/Q82811","display_name":"Acoustics","level":1,"score":0.4076187014579773},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.39139458537101746},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.3581329584121704},{"id":"https://openalex.org/C24326235","wikidata":"https://www.wikidata.org/wiki/Q126095","display_name":"Electronic engineering","level":1,"score":0.3202729821205139},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.31948330998420715},{"id":"https://openalex.org/C119599485","wikidata":"https://www.wikidata.org/wiki/Q43035","display_name":"Electrical engineering","level":1,"score":0.3022366166114807},{"id":"https://openalex.org/C135628077","wikidata":"https://www.wikidata.org/wiki/Q220184","display_name":"Finite element method","level":2,"score":0.3020160496234894},{"id":"https://openalex.org/C66938386","wikidata":"https://www.wikidata.org/wiki/Q633538","display_name":"Structural engineering","level":1,"score":0.1987972855567932},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.09676790237426758},{"id":"https://openalex.org/C21822782","wikidata":"https://www.wikidata.org/wiki/Q131214","display_name":"Antenna (radio)","level":2,"score":0.0},{"id":"https://openalex.org/C199360897","wikidata":"https://www.wikidata.org/wiki/Q9143","display_name":"Programming language","level":1,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1109/nems51815.2021.9451280","is_oa":false,"landing_page_url":"https://doi.org/10.1109/nems51815.2021.9451280","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2021 IEEE 16th International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)","raw_type":"proceedings-article"}],"best_oa_location":null,"sustainable_development_goals":[{"id":"https://metadata.un.org/sdg/14","display_name":"Life below water","score":0.8600000143051147}],"awards":[{"id":"https://openalex.org/G3598529726","display_name":null,"funder_award_id":"51875535","funder_id":"https://openalex.org/F4320321001","funder_display_name":"National Natural Science Foundation of China"}],"funders":[{"id":"https://openalex.org/F4320321001","display_name":"National Natural Science Foundation of China","ror":"https://ror.org/01h0zpd94"}],"has_content":{"pdf":false,"grobid_xml":false},"content_urls":null,"referenced_works_count":22,"referenced_works":["https://openalex.org/W1496814262","https://openalex.org/W2005200966","https://openalex.org/W2008953890","https://openalex.org/W2023266752","https://openalex.org/W2048466622","https://openalex.org/W2065993008","https://openalex.org/W2077373941","https://openalex.org/W2089123823","https://openalex.org/W2102028242","https://openalex.org/W2106354826","https://openalex.org/W2163047333","https://openalex.org/W2167098132","https://openalex.org/W2466922171","https://openalex.org/W2757797215","https://openalex.org/W2760992386","https://openalex.org/W2765116176","https://openalex.org/W2773668590","https://openalex.org/W2780411592","https://openalex.org/W2880870049","https://openalex.org/W2885962677","https://openalex.org/W2899612890","https://openalex.org/W4213028169"],"related_works":["https://openalex.org/W2084426624","https://openalex.org/W3026055904","https://openalex.org/W2792869497","https://openalex.org/W4312133600","https://openalex.org/W2567205727","https://openalex.org/W2361803029","https://openalex.org/W2548694948","https://openalex.org/W2304501688","https://openalex.org/W4312747563","https://openalex.org/W2953240087"],"abstract_inverted_index":{"Three-dimensional":[0],"MEMS":[1],"devices,":[2],"which":[3],"provide":[4],"a":[5,29,54,94,106],"mechanical":[6],"response":[7],"with":[8],"high":[9,74,88],"strain":[10],"deformation,":[11],"have":[12],"been":[13],"widely":[14],"used":[15],"in":[16],"flexible":[17,33],"electronics":[18],"due":[19],"to":[20],"their":[21],"excellent":[22],"properties.":[23],"In":[24],"this":[25],"paper,":[26],"we":[27],"introduce":[28],"kind":[30],"of":[31,43,64,101],"stretchable":[32],"buckling":[34],"crossbeam-cilia":[35],"Vector":[36],"shear":[37,44],"flow":[38,45],"sensor.":[39],"The":[40,59],"transient":[41],"model":[42],"signal":[46,61],"simulation":[47,57],"was":[48],"established":[49],"through":[50],"COMSOL":[51],"Multiphysics":[52],"soft,":[53],"multi-physics":[55],"coupling":[56],"software.":[58],"voltage":[60],"output":[62],"ratio":[63],"the":[65,83,97],"sensor":[66],"X":[67],"channel":[68,71],"and":[69,82,99,103],"Y":[70],"is":[72,86],"as":[73,75,87,89],"0.44%,":[76],"so":[77],"it":[78],"has":[79,92],"good":[80],"directivity,":[81],"velocity":[84],"sensitivity":[85],"6.4\u00d710-3Vms2/kg.":[90],"It":[91],"laid":[93],"foundation":[95],"for":[96,109],"manufacture":[98],"application":[100],"sensors":[102],"opened":[104],"up":[105],"new":[107],"road":[108],"ocean":[110],"exploration.":[111]},"counts_by_year":[{"year":2025,"cited_by_count":2}],"updated_date":"2026-07-29T14:22:42.915294","created_date":"2025-10-10T00:00:00"}