{"id":"https://openalex.org/W3107933370","doi":"https://doi.org/10.1109/nems50311.2020.9265593","title":"A Contour Mode AIN Piezoelectric Resonator based on SOI Substrate","display_name":"A Contour Mode AIN Piezoelectric Resonator based on SOI Substrate","publication_year":2020,"publication_date":"2020-09-27","ids":{"openalex":"https://openalex.org/W3107933370","doi":"https://doi.org/10.1109/nems50311.2020.9265593","mag":"3107933370"},"language":"en","primary_location":{"id":"doi:10.1109/nems50311.2020.9265593","is_oa":false,"landing_page_url":"https://doi.org/10.1109/nems50311.2020.9265593","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2020 IEEE 15th International Conference on Nano/Micro Engineered and Molecular System (NEMS)","raw_type":"proceedings-article"},"type":"article","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5018098698","display_name":"Sitao Fei","orcid":null},"institutions":[{"id":"https://openalex.org/I30809798","display_name":"ShanghaiTech University","ror":"https://ror.org/030bhh786","country_code":"CN","type":"education","lineage":["https://openalex.org/I30809798"]}],"countries":["CN"],"is_corresponding":true,"raw_author_name":"Sitao Fei","raw_affiliation_strings":["School of Information Science and Technology, ShanghaiTech University, Shanghai, P.R. China"],"affiliations":[{"raw_affiliation_string":"School of Information Science and Technology, ShanghaiTech University, Shanghai, P.R. China","institution_ids":["https://openalex.org/I30809798"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5049749678","display_name":"Hao Ren","orcid":"https://orcid.org/0000-0002-5503-924X"},"institutions":[{"id":"https://openalex.org/I30809798","display_name":"ShanghaiTech University","ror":"https://ror.org/030bhh786","country_code":"CN","type":"education","lineage":["https://openalex.org/I30809798"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Hao Ren","raw_affiliation_strings":["School of Information Science and Technology, ShanghaiTech University, Shanghai, P.R. China"],"affiliations":[{"raw_affiliation_string":"School of Information Science and Technology, ShanghaiTech University, Shanghai, P.R. China","institution_ids":["https://openalex.org/I30809798"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":2,"corresponding_author_ids":["https://openalex.org/A5018098698"],"corresponding_institution_ids":["https://openalex.org/I30809798"],"apc_list":null,"apc_paid":null,"fwci":0.2575,"has_fulltext":false,"cited_by_count":4,"citation_normalized_percentile":{"value":0.51957649,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":89,"max":95},"biblio":{"volume":null,"issue":null,"first_page":"180","last_page":"183"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T11160","display_name":"Acoustic Wave Resonator Technologies","score":1.0,"subfield":{"id":"https://openalex.org/subfields/2204","display_name":"Biomedical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T11160","display_name":"Acoustic Wave Resonator Technologies","score":1.0,"subfield":{"id":"https://openalex.org/subfields/2204","display_name":"Biomedical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":0.9998999834060669,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11449","display_name":"Mechanical and Optical Resonators","score":0.9991999864578247,"subfield":{"id":"https://openalex.org/subfields/3107","display_name":"Atomic and Molecular Physics, and Optics"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/resonator","display_name":"Resonator","score":0.7811916470527649},{"id":"https://openalex.org/keywords/materials-science","display_name":"Materials science","score":0.7326844930648804},{"id":"https://openalex.org/keywords/silicon-on-insulator","display_name":"Silicon on insulator","score":0.660874605178833},{"id":"https://openalex.org/keywords/microfabrication","display_name":"Microfabrication","score":0.6593438982963562},{"id":"https://openalex.org/keywords/microelectromechanical-systems","display_name":"Microelectromechanical systems","score":0.5783400535583496},{"id":"https://openalex.org/keywords/piezoelectricity","display_name":"Piezoelectricity","score":0.5632956027984619},{"id":"https://openalex.org/keywords/optoelectronics","display_name":"Optoelectronics","score":0.4838615655899048},{"id":"https://openalex.org/keywords/wafer","display_name":"Wafer","score":0.4562044143676758},{"id":"https://openalex.org/keywords/electronic-engineering","display_name":"Electronic engineering","score":0.3873558044433594},{"id":"https://openalex.org/keywords/silicon","display_name":"Silicon","score":0.38249728083610535},{"id":"https://openalex.org/keywords/optics","display_name":"Optics","score":0.37418752908706665},{"id":"https://openalex.org/keywords/physics","display_name":"Physics","score":0.11357101798057556},{"id":"https://openalex.org/keywords/fabrication","display_name":"Fabrication","score":0.09080967307090759},{"id":"https://openalex.org/keywords/engineering","display_name":"Engineering","score":0.08794379234313965},{"id":"https://openalex.org/keywords/composite-material","display_name":"Composite material","score":0.0860166847705841}],"concepts":[{"id":"https://openalex.org/C97126364","wikidata":"https://www.wikidata.org/wiki/Q349669","display_name":"Resonator","level":2,"score":0.7811916470527649},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.7326844930648804},{"id":"https://openalex.org/C53143962","wikidata":"https://www.wikidata.org/wiki/Q1478788","display_name":"Silicon on insulator","level":3,"score":0.660874605178833},{"id":"https://openalex.org/C527607","wikidata":"https://www.wikidata.org/wiki/Q175538","display_name":"Microfabrication","level":4,"score":0.6593438982963562},{"id":"https://openalex.org/C37977207","wikidata":"https://www.wikidata.org/wiki/Q175561","display_name":"Microelectromechanical systems","level":2,"score":0.5783400535583496},{"id":"https://openalex.org/C100082104","wikidata":"https://www.wikidata.org/wiki/Q183759","display_name":"Piezoelectricity","level":2,"score":0.5632956027984619},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.4838615655899048},{"id":"https://openalex.org/C160671074","wikidata":"https://www.wikidata.org/wiki/Q267131","display_name":"Wafer","level":2,"score":0.4562044143676758},{"id":"https://openalex.org/C24326235","wikidata":"https://www.wikidata.org/wiki/Q126095","display_name":"Electronic engineering","level":1,"score":0.3873558044433594},{"id":"https://openalex.org/C544956773","wikidata":"https://www.wikidata.org/wiki/Q670","display_name":"Silicon","level":2,"score":0.38249728083610535},{"id":"https://openalex.org/C120665830","wikidata":"https://www.wikidata.org/wiki/Q14620","display_name":"Optics","level":1,"score":0.37418752908706665},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.11357101798057556},{"id":"https://openalex.org/C136525101","wikidata":"https://www.wikidata.org/wiki/Q5428139","display_name":"Fabrication","level":3,"score":0.09080967307090759},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.08794379234313965},{"id":"https://openalex.org/C159985019","wikidata":"https://www.wikidata.org/wiki/Q181790","display_name":"Composite material","level":1,"score":0.0860166847705841},{"id":"https://openalex.org/C71924100","wikidata":"https://www.wikidata.org/wiki/Q11190","display_name":"Medicine","level":0,"score":0.0},{"id":"https://openalex.org/C142724271","wikidata":"https://www.wikidata.org/wiki/Q7208","display_name":"Pathology","level":1,"score":0.0},{"id":"https://openalex.org/C204787440","wikidata":"https://www.wikidata.org/wiki/Q188504","display_name":"Alternative medicine","level":2,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1109/nems50311.2020.9265593","is_oa":false,"landing_page_url":"https://doi.org/10.1109/nems50311.2020.9265593","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2020 IEEE 15th International Conference on Nano/Micro Engineered and Molecular System (NEMS)","raw_type":"proceedings-article"}],"best_oa_location":null,"sustainable_development_goals":[],"awards":[],"funders":[],"has_content":{"pdf":false,"grobid_xml":false},"content_urls":null,"referenced_works_count":21,"referenced_works":["https://openalex.org/W1563744894","https://openalex.org/W1968187170","https://openalex.org/W1974798598","https://openalex.org/W2013635414","https://openalex.org/W2018806435","https://openalex.org/W2026648097","https://openalex.org/W2034874214","https://openalex.org/W2047289347","https://openalex.org/W2048584286","https://openalex.org/W2049017687","https://openalex.org/W2087757048","https://openalex.org/W2101024374","https://openalex.org/W2102624141","https://openalex.org/W2149128480","https://openalex.org/W2164010209","https://openalex.org/W2167031476","https://openalex.org/W2467179516","https://openalex.org/W2505177152","https://openalex.org/W2533675480","https://openalex.org/W2751705543","https://openalex.org/W2894502983"],"related_works":["https://openalex.org/W2001476809","https://openalex.org/W2095990703","https://openalex.org/W2085527795","https://openalex.org/W1921407827","https://openalex.org/W2146341803","https://openalex.org/W2171937395","https://openalex.org/W2055226196","https://openalex.org/W4250420135","https://openalex.org/W2081028368","https://openalex.org/W4212850813"],"abstract_inverted_index":{"Aluminum":[0],"nitride":[1,48],"(AIN)":[2],"piezoelectric":[3,44],"MEMS":[4],"resonators":[5],"have":[6],"been":[7],"extensively":[8],"developed":[9],"in":[10,159],"recent":[11],"years":[12],"due":[13],"to":[14,36,72,82,99,122],"their":[15],"small":[16],"size":[17],"and":[18,42,58,65,106,117,144,151],"CMOS":[19],"compatibility.":[20],"In":[21],"this":[22],"paper,":[23],"a":[24,38],"simple":[25],"microfabrication":[26],"process":[27],"based":[28],"on":[29,31],"Silicon":[30],"Insulator":[32],"(SOI)":[33],"is":[34,46,52,70,80,94,97,111,130,138,149],"presented":[35],"fabricate":[37],"contour":[39],"mode":[40],"resonator,":[41],"the":[43,56,74,84,101,107,124,133,142,145],"material":[45],"aluminum":[47],"(AIN).":[49],"SOI":[50],"wafer":[51],"directly":[53],"applied":[54,98,121],"as":[55,60],"substrate":[57],"patterned":[59],"bottom":[61],"electrode.":[62],"Theoretical":[63],"calculation":[64],"finite":[66],"element":[67],"method":[68],"simulation":[69,143],"performed":[71],"estimate":[73],"resonant":[75,136],"frequency.":[76],"X-Ray":[77],"Diffraction":[78],"(XRD)":[79],"used":[81],"detect":[83],"full":[85],"width":[86],"at":[87],"half":[88],"maximum":[89],"(FWHM)":[90],"of":[91,103,135],"AIN":[92,104],"which":[93,148],"0.164\u00b0.":[95],"AFM":[96],"measure":[100,123],"roughness":[102,110],"film":[105],"measured":[108],"RMS":[109],"0.87":[112],"nm.":[113],"Vector":[114],"network":[115],"analyzer":[116],"probe":[118],"stations":[119],"are":[120],"one-":[125],"port":[126],"S":[127],"parameter.":[128],"It":[129],"founded":[131],"that":[132],"result":[134],"frequency":[137],"very":[139],"close":[140],"between":[141],"actual":[146],"measurement":[147],"146.9MHz":[150],"144MHz.":[152],"The":[153],"resonator":[154],"may":[155],"find":[156],"wide":[157],"application":[158],"biosensing.":[160]},"counts_by_year":[{"year":2025,"cited_by_count":1},{"year":2023,"cited_by_count":1},{"year":2022,"cited_by_count":1},{"year":2021,"cited_by_count":1}],"updated_date":"2025-11-06T03:46:38.306776","created_date":"2025-10-10T00:00:00"}