{"id":"https://openalex.org/W3108621929","doi":"https://doi.org/10.1109/nems50311.2020.9265571","title":"Development of an All-Polyimide Flexible Airflow Sensor for Flow-Velocity and Flow-Direction Sensing","display_name":"Development of an All-Polyimide Flexible Airflow Sensor for Flow-Velocity and Flow-Direction Sensing","publication_year":2020,"publication_date":"2020-09-27","ids":{"openalex":"https://openalex.org/W3108621929","doi":"https://doi.org/10.1109/nems50311.2020.9265571","mag":"3108621929"},"language":"en","primary_location":{"id":"doi:10.1109/nems50311.2020.9265571","is_oa":false,"landing_page_url":"https://doi.org/10.1109/nems50311.2020.9265571","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2020 IEEE 15th International Conference on Nano/Micro Engineered and Molecular System (NEMS)","raw_type":"proceedings-article"},"type":"article","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5056888417","display_name":"Dawei Shen","orcid":"https://orcid.org/0000-0002-2182-3415"},"institutions":[{"id":"https://openalex.org/I82880672","display_name":"Beihang University","ror":"https://ror.org/00wk2mp56","country_code":"CN","type":"education","lineage":["https://openalex.org/I82880672"]}],"countries":["CN"],"is_corresponding":true,"raw_author_name":"Dawei Shen","raw_affiliation_strings":["School of Mechanical Engineering and Automation, Beihang University, Beijing, China","Beihang University,School of Mechanical Engineering & Automation,Beijing,China,100191"],"affiliations":[{"raw_affiliation_string":"School of Mechanical Engineering and Automation, Beihang University, Beijing, China","institution_ids":["https://openalex.org/I82880672"]},{"raw_affiliation_string":"Beihang University,School of Mechanical Engineering & Automation,Beijing,China,100191","institution_ids":["https://openalex.org/I82880672"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5077882536","display_name":"Qipei He","orcid":"https://orcid.org/0000-0002-5918-0777"},"institutions":[{"id":"https://openalex.org/I82880672","display_name":"Beihang University","ror":"https://ror.org/00wk2mp56","country_code":"CN","type":"education","lineage":["https://openalex.org/I82880672"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Qipei He","raw_affiliation_strings":["School of Mechanical Engineering and Automation, Beihang University, Beijing, China","Beihang University,School of Mechanical Engineering & Automation,Beijing,China,100191"],"affiliations":[{"raw_affiliation_string":"School of Mechanical Engineering and Automation, Beihang University, Beijing, China","institution_ids":["https://openalex.org/I82880672"]},{"raw_affiliation_string":"Beihang University,School of Mechanical Engineering & Automation,Beijing,China,100191","institution_ids":["https://openalex.org/I82880672"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5067688667","display_name":"Zhiqiang Ma","orcid":"https://orcid.org/0000-0002-7939-9901"},"institutions":[{"id":"https://openalex.org/I82880672","display_name":"Beihang University","ror":"https://ror.org/00wk2mp56","country_code":"CN","type":"education","lineage":["https://openalex.org/I82880672"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Zhiqiang Ma","raw_affiliation_strings":["School of Mechanical Engineering and Automation, Beihang University, Beijing, China","Beihang University,School of Mechanical Engineering & Automation,Beijing,China,100191"],"affiliations":[{"raw_affiliation_string":"School of Mechanical Engineering and Automation, Beihang University, Beijing, China","institution_ids":["https://openalex.org/I82880672"]},{"raw_affiliation_string":"Beihang University,School of Mechanical Engineering & Automation,Beijing,China,100191","institution_ids":["https://openalex.org/I82880672"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5031660185","display_name":"Yonggang Jiang","orcid":"https://orcid.org/0000-0003-1979-996X"},"institutions":[{"id":"https://openalex.org/I82880672","display_name":"Beihang University","ror":"https://ror.org/00wk2mp56","country_code":"CN","type":"education","lineage":["https://openalex.org/I82880672"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Yonggang Jiang","raw_affiliation_strings":["School of Mechanical Engineering and Automation, Beihang University, Beijing, China","Beihang University,School of Mechanical Engineering & Automation,Beijing,China,100191"],"affiliations":[{"raw_affiliation_string":"School of Mechanical Engineering and Automation, Beihang University, Beijing, China","institution_ids":["https://openalex.org/I82880672"]},{"raw_affiliation_string":"Beihang University,School of Mechanical Engineering & Automation,Beijing,China,100191","institution_ids":["https://openalex.org/I82880672"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":4,"corresponding_author_ids":["https://openalex.org/A5056888417"],"corresponding_institution_ids":["https://openalex.org/I82880672"],"apc_list":null,"apc_paid":null,"fwci":0.1717,"has_fulltext":false,"cited_by_count":3,"citation_normalized_percentile":{"value":0.47439695,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":89,"max":94},"biblio":{"volume":null,"issue":null,"first_page":"139","last_page":"142"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10338","display_name":"Advanced Sensor and Energy Harvesting Materials","score":0.9983000159263611,"subfield":{"id":"https://openalex.org/subfields/2204","display_name":"Biomedical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10338","display_name":"Advanced Sensor and Energy Harvesting Materials","score":0.9983000159263611,"subfield":{"id":"https://openalex.org/subfields/2204","display_name":"Biomedical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":0.9957000017166138,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11449","display_name":"Mechanical and Optical Resonators","score":0.9937999844551086,"subfield":{"id":"https://openalex.org/subfields/3107","display_name":"Atomic and Molecular Physics, and Optics"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/polyimide","display_name":"Polyimide","score":0.9264919757843018},{"id":"https://openalex.org/keywords/airflow","display_name":"Airflow","score":0.87645423412323},{"id":"https://openalex.org/keywords/cantilever","display_name":"Cantilever","score":0.8057126998901367},{"id":"https://openalex.org/keywords/materials-science","display_name":"Materials science","score":0.7126396894454956},{"id":"https://openalex.org/keywords/flow-velocity","display_name":"Flow velocity","score":0.6077495813369751},{"id":"https://openalex.org/keywords/nanocomposite","display_name":"Nanocomposite","score":0.606514573097229},{"id":"https://openalex.org/keywords/flow","display_name":"Flow (mathematics)","score":0.6027612090110779},{"id":"https://openalex.org/keywords/graphene","display_name":"Graphene","score":0.4687875509262085},{"id":"https://openalex.org/keywords/acoustics","display_name":"Acoustics","score":0.42563530802726746},{"id":"https://openalex.org/keywords/composite-material","display_name":"Composite material","score":0.37205034494400024},{"id":"https://openalex.org/keywords/optoelectronics","display_name":"Optoelectronics","score":0.3371315002441406},{"id":"https://openalex.org/keywords/nanotechnology","display_name":"Nanotechnology","score":0.3069460391998291},{"id":"https://openalex.org/keywords/mechanical-engineering","display_name":"Mechanical engineering","score":0.28581735491752625},{"id":"https://openalex.org/keywords/mechanics","display_name":"Mechanics","score":0.2844410836696625},{"id":"https://openalex.org/keywords/engineering","display_name":"Engineering","score":0.16569644212722778},{"id":"https://openalex.org/keywords/physics","display_name":"Physics","score":0.14872387051582336},{"id":"https://openalex.org/keywords/layer","display_name":"Layer (electronics)","score":0.14692339301109314}],"concepts":[{"id":"https://openalex.org/C2780965675","wikidata":"https://www.wikidata.org/wiki/Q145958","display_name":"Polyimide","level":3,"score":0.9264919757843018},{"id":"https://openalex.org/C116067010","wikidata":"https://www.wikidata.org/wiki/Q4698686","display_name":"Airflow","level":2,"score":0.87645423412323},{"id":"https://openalex.org/C141354745","wikidata":"https://www.wikidata.org/wiki/Q17227","display_name":"Cantilever","level":2,"score":0.8057126998901367},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.7126396894454956},{"id":"https://openalex.org/C166693061","wikidata":"https://www.wikidata.org/wiki/Q5462119","display_name":"Flow velocity","level":3,"score":0.6077495813369751},{"id":"https://openalex.org/C92880739","wikidata":"https://www.wikidata.org/wiki/Q2639556","display_name":"Nanocomposite","level":2,"score":0.606514573097229},{"id":"https://openalex.org/C38349280","wikidata":"https://www.wikidata.org/wiki/Q1434290","display_name":"Flow (mathematics)","level":2,"score":0.6027612090110779},{"id":"https://openalex.org/C30080830","wikidata":"https://www.wikidata.org/wiki/Q169917","display_name":"Graphene","level":2,"score":0.4687875509262085},{"id":"https://openalex.org/C24890656","wikidata":"https://www.wikidata.org/wiki/Q82811","display_name":"Acoustics","level":1,"score":0.42563530802726746},{"id":"https://openalex.org/C159985019","wikidata":"https://www.wikidata.org/wiki/Q181790","display_name":"Composite material","level":1,"score":0.37205034494400024},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.3371315002441406},{"id":"https://openalex.org/C171250308","wikidata":"https://www.wikidata.org/wiki/Q11468","display_name":"Nanotechnology","level":1,"score":0.3069460391998291},{"id":"https://openalex.org/C78519656","wikidata":"https://www.wikidata.org/wiki/Q101333","display_name":"Mechanical engineering","level":1,"score":0.28581735491752625},{"id":"https://openalex.org/C57879066","wikidata":"https://www.wikidata.org/wiki/Q41217","display_name":"Mechanics","level":1,"score":0.2844410836696625},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.16569644212722778},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.14872387051582336},{"id":"https://openalex.org/C2779227376","wikidata":"https://www.wikidata.org/wiki/Q6505497","display_name":"Layer (electronics)","level":2,"score":0.14692339301109314}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1109/nems50311.2020.9265571","is_oa":false,"landing_page_url":"https://doi.org/10.1109/nems50311.2020.9265571","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2020 IEEE 15th International Conference on Nano/Micro Engineered and Molecular System (NEMS)","raw_type":"proceedings-article"}],"best_oa_location":null,"sustainable_development_goals":[],"awards":[],"funders":[{"id":"https://openalex.org/F4320321001","display_name":"National Natural Science Foundation of China","ror":"https://ror.org/01h0zpd94"}],"has_content":{"grobid_xml":false,"pdf":false},"content_urls":null,"referenced_works_count":10,"referenced_works":["https://openalex.org/W2002511437","https://openalex.org/W2017338788","https://openalex.org/W2037850808","https://openalex.org/W2096747862","https://openalex.org/W2214595767","https://openalex.org/W2804671087","https://openalex.org/W2824563028","https://openalex.org/W2887077098","https://openalex.org/W2905110098","https://openalex.org/W2938032950"],"related_works":["https://openalex.org/W2071100647","https://openalex.org/W4214695150","https://openalex.org/W2916874140","https://openalex.org/W1970751963","https://openalex.org/W2162543021","https://openalex.org/W2070855277","https://openalex.org/W2061896995","https://openalex.org/W2017123568","https://openalex.org/W1970327753","https://openalex.org/W1996005064"],"abstract_inverted_index":{"In":[0],"this":[1],"study,":[2],"we":[3],"developed":[4],"an":[5],"all-polyimide":[6],"flexible":[7],"airflow":[8,43,73],"sensor,":[9],"which":[10,58,122],"consisted":[11],"of":[12,67,94,113],"four":[13],"hair-like":[14,49,72],"curved":[15,50,82],"polyimide":[16],"(PI)":[17],"cantilever":[18,53],"beams":[19,54],"arranged":[20],"in":[21,64],"a":[22,61,97],"cross-form":[23,47],"configuration":[24,48],"and":[25,119],"graphene/polyimide":[26],"(Gr/PI)":[27],"nanocomposite-based":[28,39],"piezoresistors.":[29,69],"Electrical":[30],"breakdown":[31],"process":[32],"was":[33],"applied":[34],"to":[35,60,109,126],"fabricate":[36],"the":[37,46,52,65,68,71,86,91,103,111,116],"Gr/PI":[38],"piezoresistors":[40],".":[41],"As":[42,70],"travels":[44],"through":[45],"cantilevers,":[51],"will":[55],"be":[56],"deformed,":[57],"leads":[59],"corresponding":[62],"change":[63],"resistances":[66],"sensor":[74,99,106],"is":[75,100,107,123],"fully":[76],"flexible,":[77],"it":[78],"can":[79],"fit":[80],"on":[81,90],"surfaces.":[83],"To":[84],"compensate":[85],"ambient":[87],"temperature":[88,98],"fluctuation":[89],"measurement":[92],"accuracy":[93],"flow":[95,117,120],"velocity,":[96],"integrated":[101],"nearby":[102],"cantilevers.":[104],"The":[105],"designed":[108],"have":[110],"ability":[112],"measuring":[114],"both":[115],"velocity":[118],"direction,":[121],"very":[124],"crucial":[125],"many":[127],"practical":[128],"applications.":[129]},"counts_by_year":[{"year":2024,"cited_by_count":1},{"year":2023,"cited_by_count":1},{"year":2021,"cited_by_count":1}],"updated_date":"2025-11-06T03:46:38.306776","created_date":"2025-10-10T00:00:00"}
