{"id":"https://openalex.org/W2990428615","doi":"https://doi.org/10.1109/nems.2019.8915669","title":"The Test Structure to Measure Polysilicon Seebeck Coefficient for Thermoelectric-Photoelectric Integrated Generator","display_name":"The Test Structure to Measure Polysilicon Seebeck Coefficient for Thermoelectric-Photoelectric Integrated Generator","publication_year":2019,"publication_date":"2019-04-01","ids":{"openalex":"https://openalex.org/W2990428615","doi":"https://doi.org/10.1109/nems.2019.8915669","mag":"2990428615"},"language":"en","primary_location":{"id":"doi:10.1109/nems.2019.8915669","is_oa":false,"landing_page_url":"https://doi.org/10.1109/nems.2019.8915669","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2019 IEEE 14th International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)","raw_type":"proceedings-article"},"type":"article","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5100378876","display_name":"Sen Zhang","orcid":"https://orcid.org/0000-0001-8645-3032"},"institutions":[{"id":"https://openalex.org/I76569877","display_name":"Southeast University","ror":"https://ror.org/04ct4d772","country_code":"CN","type":"education","lineage":["https://openalex.org/I76569877"]}],"countries":["CN"],"is_corresponding":true,"raw_author_name":"Sen Zhang","raw_affiliation_strings":["Key Laboratory of MEMS of the Ministry of Education, Southeast University, Nanjing 210096, China"],"affiliations":[{"raw_affiliation_string":"Key Laboratory of MEMS of the Ministry of Education, Southeast University, Nanjing 210096, China","institution_ids":["https://openalex.org/I76569877"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5101924353","display_name":"Xiaoping Liao","orcid":"https://orcid.org/0000-0001-9479-6545"},"institutions":[{"id":"https://openalex.org/I76569877","display_name":"Southeast University","ror":"https://ror.org/04ct4d772","country_code":"CN","type":"education","lineage":["https://openalex.org/I76569877"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Xiaoping Liao","raw_affiliation_strings":["Key Laboratory of MEMS of the Ministry of Education, Southeast University, Nanjing 210096, China"],"affiliations":[{"raw_affiliation_string":"Key Laboratory of MEMS of the Ministry of Education, Southeast University, Nanjing 210096, China","institution_ids":["https://openalex.org/I76569877"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":2,"corresponding_author_ids":["https://openalex.org/A5100378876"],"corresponding_institution_ids":["https://openalex.org/I76569877"],"apc_list":null,"apc_paid":null,"fwci":0.0,"has_fulltext":false,"cited_by_count":0,"citation_normalized_percentile":{"value":0.10602613,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":null,"biblio":{"volume":null,"issue":null,"first_page":"149","last_page":"152"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10440","display_name":"Advanced Thermoelectric Materials and Devices","score":0.9997000098228455,"subfield":{"id":"https://openalex.org/subfields/2505","display_name":"Materials Chemistry"},"field":{"id":"https://openalex.org/fields/25","display_name":"Materials Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10440","display_name":"Advanced Thermoelectric Materials and Devices","score":0.9997000098228455,"subfield":{"id":"https://openalex.org/subfields/2505","display_name":"Materials Chemistry"},"field":{"id":"https://openalex.org/fields/25","display_name":"Materials Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10461","display_name":"Gas Sensing Nanomaterials and Sensors","score":0.9973000288009644,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T13928","display_name":"Advanced Sensor Technologies Research","score":0.9968000054359436,"subfield":{"id":"https://openalex.org/subfields/2204","display_name":"Biomedical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/seebeck-coefficient","display_name":"Seebeck coefficient","score":0.8677694797515869},{"id":"https://openalex.org/keywords/thermoelectric-effect","display_name":"Thermoelectric effect","score":0.775659441947937},{"id":"https://openalex.org/keywords/materials-science","display_name":"Materials science","score":0.7674270868301392},{"id":"https://openalex.org/keywords/thermocouple","display_name":"Thermocouple","score":0.6460023522377014},{"id":"https://openalex.org/keywords/thermoelectric-generator","display_name":"Thermoelectric generator","score":0.6206995248794556},{"id":"https://openalex.org/keywords/thermoelectric-materials","display_name":"Thermoelectric materials","score":0.6103065013885498},{"id":"https://openalex.org/keywords/resistor","display_name":"Resistor","score":0.5483553409576416},{"id":"https://openalex.org/keywords/polysilicon-depletion-effect","display_name":"Polysilicon depletion effect","score":0.5358328819274902},{"id":"https://openalex.org/keywords/optoelectronics","display_name":"Optoelectronics","score":0.5168419480323792},{"id":"https://openalex.org/keywords/semiconductor","display_name":"Semiconductor","score":0.41020750999450684},{"id":"https://openalex.org/keywords/electronic-engineering","display_name":"Electronic engineering","score":0.4062943458557129},{"id":"https://openalex.org/keywords/electrical-engineering","display_name":"Electrical engineering","score":0.3473658859729767},{"id":"https://openalex.org/keywords/composite-material","display_name":"Composite material","score":0.2684849202632904},{"id":"https://openalex.org/keywords/thermal-conductivity","display_name":"Thermal conductivity","score":0.22546342015266418},{"id":"https://openalex.org/keywords/transistor","display_name":"Transistor","score":0.15374499559402466},{"id":"https://openalex.org/keywords/engineering","display_name":"Engineering","score":0.0802331268787384},{"id":"https://openalex.org/keywords/voltage","display_name":"Voltage","score":0.06864327192306519}],"concepts":[{"id":"https://openalex.org/C112625512","wikidata":"https://www.wikidata.org/wiki/Q1091448","display_name":"Seebeck coefficient","level":3,"score":0.8677694797515869},{"id":"https://openalex.org/C63024428","wikidata":"https://www.wikidata.org/wiki/Q552456","display_name":"Thermoelectric effect","level":2,"score":0.775659441947937},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.7674270868301392},{"id":"https://openalex.org/C168068576","wikidata":"https://www.wikidata.org/wiki/Q190241","display_name":"Thermocouple","level":2,"score":0.6460023522377014},{"id":"https://openalex.org/C117127486","wikidata":"https://www.wikidata.org/wiki/Q11569191","display_name":"Thermoelectric generator","level":3,"score":0.6206995248794556},{"id":"https://openalex.org/C207365445","wikidata":"https://www.wikidata.org/wiki/Q15020929","display_name":"Thermoelectric materials","level":3,"score":0.6103065013885498},{"id":"https://openalex.org/C137488568","wikidata":"https://www.wikidata.org/wiki/Q5321","display_name":"Resistor","level":3,"score":0.5483553409576416},{"id":"https://openalex.org/C25356406","wikidata":"https://www.wikidata.org/wiki/Q7226935","display_name":"Polysilicon depletion effect","level":5,"score":0.5358328819274902},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.5168419480323792},{"id":"https://openalex.org/C108225325","wikidata":"https://www.wikidata.org/wiki/Q11456","display_name":"Semiconductor","level":2,"score":0.41020750999450684},{"id":"https://openalex.org/C24326235","wikidata":"https://www.wikidata.org/wiki/Q126095","display_name":"Electronic engineering","level":1,"score":0.4062943458557129},{"id":"https://openalex.org/C119599485","wikidata":"https://www.wikidata.org/wiki/Q43035","display_name":"Electrical engineering","level":1,"score":0.3473658859729767},{"id":"https://openalex.org/C159985019","wikidata":"https://www.wikidata.org/wiki/Q181790","display_name":"Composite material","level":1,"score":0.2684849202632904},{"id":"https://openalex.org/C97346530","wikidata":"https://www.wikidata.org/wiki/Q487005","display_name":"Thermal conductivity","level":2,"score":0.22546342015266418},{"id":"https://openalex.org/C172385210","wikidata":"https://www.wikidata.org/wiki/Q5339","display_name":"Transistor","level":3,"score":0.15374499559402466},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.0802331268787384},{"id":"https://openalex.org/C165801399","wikidata":"https://www.wikidata.org/wiki/Q25428","display_name":"Voltage","level":2,"score":0.06864327192306519},{"id":"https://openalex.org/C2361726","wikidata":"https://www.wikidata.org/wiki/Q5527031","display_name":"Gate oxide","level":4,"score":0.0},{"id":"https://openalex.org/C97355855","wikidata":"https://www.wikidata.org/wiki/Q11473","display_name":"Thermodynamics","level":1,"score":0.0},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1109/nems.2019.8915669","is_oa":false,"landing_page_url":"https://doi.org/10.1109/nems.2019.8915669","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2019 IEEE 14th International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)","raw_type":"proceedings-article"}],"best_oa_location":null,"sustainable_development_goals":[{"id":"https://metadata.un.org/sdg/7","display_name":"Affordable and clean energy","score":0.8399999737739563}],"awards":[],"funders":[],"has_content":{"pdf":false,"grobid_xml":false},"content_urls":null,"referenced_works_count":10,"referenced_works":["https://openalex.org/W1964638431","https://openalex.org/W1996202817","https://openalex.org/W2003113054","https://openalex.org/W2012544723","https://openalex.org/W2051785138","https://openalex.org/W2057473968","https://openalex.org/W2100037165","https://openalex.org/W2783113687","https://openalex.org/W2905447939","https://openalex.org/W2905747653"],"related_works":["https://openalex.org/W2313253132","https://openalex.org/W4205778619","https://openalex.org/W2027463546","https://openalex.org/W1532356289","https://openalex.org/W2573590587","https://openalex.org/W2128275150","https://openalex.org/W2080573930","https://openalex.org/W2038454371","https://openalex.org/W2490922261","https://openalex.org/W3000652821"],"abstract_inverted_index":{"We":[0],"propose":[1],"a":[2,9,13,29,33,46],"polysilicon":[3,19,107],"Seebeck":[4,20,88,103,114],"coefficient":[5,21,89,104,115],"test":[6,22,121],"structure":[7,23,35,122],"for":[8,12,55,66,126],"thermoelectric":[10],"micro-generator":[11],"wireless":[14],"sensor":[15],"nodes":[16],"(WSNs).":[17],"The":[18,39,120],"consists":[24],"of":[25,90,99,105,116,130],"an":[26],"etched":[27],"polysilicon,":[28],"polyimide":[30],"layer,":[31],"and":[32,71],"special":[34],"interconnected":[36],"by":[37],"metal.":[38],"temperature":[40,68],"measuring":[41,62,69],"resistor":[42],"is":[43,94,109,123],"designed":[44,65],"as":[45],"folded":[47],"structure,":[48],"which":[49],"can":[50,75],"increase":[51],"the":[52,58,72,81,87,91,100,102,106,113,117,128],"resistance":[53,82],"value":[54],"testing.":[56],"At":[57],"same":[59],"time,":[60],"four":[61],"electrodes":[63],"are":[64],"each":[67],"resistor,":[70],"four-probe":[73],"method":[74],"be":[76],"used":[77],"to":[78,112],"accurately":[79],"measure":[80],"with":[83],"less":[84],"error.":[85],"Since":[86],"semiconductor":[92],"material":[93,108],"much":[95],"larger":[96],"than":[97],"that":[98],"metal,":[101],"approximately":[110],"equal":[111],"polysilicon/metal":[118],"thermocouple.":[119],"extremely":[124],"important":[125],"guiding":[127],"design":[129],"integrated":[131],"generators.":[132]},"counts_by_year":[],"updated_date":"2025-11-06T03:46:38.306776","created_date":"2025-10-10T00:00:00"}