{"id":"https://openalex.org/W2990456534","doi":"https://doi.org/10.1109/nems.2019.8915627","title":"Anisotropic Pyrochemical Etching of PTFE by Synchrotron Radiation","display_name":"Anisotropic Pyrochemical Etching of PTFE by Synchrotron Radiation","publication_year":2019,"publication_date":"2019-04-01","ids":{"openalex":"https://openalex.org/W2990456534","doi":"https://doi.org/10.1109/nems.2019.8915627","mag":"2990456534"},"language":"en","primary_location":{"id":"doi:10.1109/nems.2019.8915627","is_oa":false,"landing_page_url":"https://doi.org/10.1109/nems.2019.8915627","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2019 IEEE 14th International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)","raw_type":"proceedings-article"},"type":"article","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5103788596","display_name":"Masaya Takeuchi","orcid":null},"institutions":[{"id":"https://openalex.org/I180941496","display_name":"University of Hyogo","ror":"https://ror.org/0151bmh98","country_code":"JP","type":"education","lineage":["https://openalex.org/I180941496"]}],"countries":["JP"],"is_corresponding":true,"raw_author_name":"Masaya Takeuchi","raw_affiliation_strings":["Laboratory of Advanced Science and Technology for Industry, University of Hyogo, Hyogo, Japan"],"affiliations":[{"raw_affiliation_string":"Laboratory of Advanced Science and Technology for Industry, University of Hyogo, Hyogo, Japan","institution_ids":["https://openalex.org/I180941496"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5033834082","display_name":"Akinobu Yamaguchi","orcid":"https://orcid.org/0000-0002-1673-1292"},"institutions":[{"id":"https://openalex.org/I180941496","display_name":"University of Hyogo","ror":"https://ror.org/0151bmh98","country_code":"JP","type":"education","lineage":["https://openalex.org/I180941496"]}],"countries":["JP"],"is_corresponding":false,"raw_author_name":"Akinobu Yamaguchi","raw_affiliation_strings":["Laboratory of Advanced Science and Technology for Industry, University of Hyogo, Hyogo, Japan"],"affiliations":[{"raw_affiliation_string":"Laboratory of Advanced Science and Technology for Industry, University of Hyogo, Hyogo, Japan","institution_ids":["https://openalex.org/I180941496"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5103444940","display_name":"Yuichi Utsumi","orcid":null},"institutions":[{"id":"https://openalex.org/I180941496","display_name":"University of Hyogo","ror":"https://ror.org/0151bmh98","country_code":"JP","type":"education","lineage":["https://openalex.org/I180941496"]}],"countries":["JP"],"is_corresponding":false,"raw_author_name":"Yuichi Utsumi","raw_affiliation_strings":["Laboratory of Advanced Science and Technology for Industry, University of Hyogo, Hyogo, Japan"],"affiliations":[{"raw_affiliation_string":"Laboratory of Advanced Science and Technology for Industry, University of Hyogo, Hyogo, Japan","institution_ids":["https://openalex.org/I180941496"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":3,"corresponding_author_ids":["https://openalex.org/A5103788596"],"corresponding_institution_ids":["https://openalex.org/I180941496"],"apc_list":null,"apc_paid":null,"fwci":0.0,"has_fulltext":false,"cited_by_count":0,"citation_normalized_percentile":{"value":0.13551697,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":null,"biblio":{"volume":null,"issue":null,"first_page":"418","last_page":"422"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T11393","display_name":"Biosensors and Analytical Detection","score":0.9998000264167786,"subfield":{"id":"https://openalex.org/subfields/2204","display_name":"Biomedical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T11393","display_name":"Biosensors and Analytical Detection","score":0.9998000264167786,"subfield":{"id":"https://openalex.org/subfields/2204","display_name":"Biomedical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10412","display_name":"Microfluidic and Capillary Electrophoresis Applications","score":0.9995999932289124,"subfield":{"id":"https://openalex.org/subfields/2204","display_name":"Biomedical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11472","display_name":"Analytical Chemistry and Sensors","score":0.9987000226974487,"subfield":{"id":"https://openalex.org/subfields/1502","display_name":"Bioengineering"},"field":{"id":"https://openalex.org/fields/15","display_name":"Chemical Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/materials-science","display_name":"Materials science","score":0.8214113712310791},{"id":"https://openalex.org/keywords/etching","display_name":"Etching (microfabrication)","score":0.7210727334022522},{"id":"https://openalex.org/keywords/substrate","display_name":"Substrate (aquarium)","score":0.6418416500091553},{"id":"https://openalex.org/keywords/polytetrafluoroethylene","display_name":"Polytetrafluoroethylene","score":0.6416822671890259},{"id":"https://openalex.org/keywords/composite-material","display_name":"Composite material","score":0.6053135991096497},{"id":"https://openalex.org/keywords/fabrication","display_name":"Fabrication","score":0.5800549387931824},{"id":"https://openalex.org/keywords/isotropic-etching","display_name":"Isotropic etching","score":0.5693656206130981},{"id":"https://openalex.org/keywords/synchrotron-radiation","display_name":"Synchrotron radiation","score":0.5015108585357666},{"id":"https://openalex.org/keywords/microstructure","display_name":"Microstructure","score":0.4843546152114868},{"id":"https://openalex.org/keywords/thermal-expansion","display_name":"Thermal expansion","score":0.47184160351753235},{"id":"https://openalex.org/keywords/irradiation","display_name":"Irradiation","score":0.4257509708404541},{"id":"https://openalex.org/keywords/optoelectronics","display_name":"Optoelectronics","score":0.42242830991744995},{"id":"https://openalex.org/keywords/optics","display_name":"Optics","score":0.320232093334198},{"id":"https://openalex.org/keywords/layer","display_name":"Layer (electronics)","score":0.06542325019836426}],"concepts":[{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.8214113712310791},{"id":"https://openalex.org/C100460472","wikidata":"https://www.wikidata.org/wiki/Q2368605","display_name":"Etching (microfabrication)","level":3,"score":0.7210727334022522},{"id":"https://openalex.org/C2777289219","wikidata":"https://www.wikidata.org/wiki/Q7632154","display_name":"Substrate (aquarium)","level":2,"score":0.6418416500091553},{"id":"https://openalex.org/C2780557906","wikidata":"https://www.wikidata.org/wiki/Q143252","display_name":"Polytetrafluoroethylene","level":2,"score":0.6416822671890259},{"id":"https://openalex.org/C159985019","wikidata":"https://www.wikidata.org/wiki/Q181790","display_name":"Composite material","level":1,"score":0.6053135991096497},{"id":"https://openalex.org/C136525101","wikidata":"https://www.wikidata.org/wiki/Q5428139","display_name":"Fabrication","level":3,"score":0.5800549387931824},{"id":"https://openalex.org/C33220542","wikidata":"https://www.wikidata.org/wiki/Q6086567","display_name":"Isotropic etching","level":4,"score":0.5693656206130981},{"id":"https://openalex.org/C16332341","wikidata":"https://www.wikidata.org/wiki/Q212871","display_name":"Synchrotron radiation","level":2,"score":0.5015108585357666},{"id":"https://openalex.org/C87976508","wikidata":"https://www.wikidata.org/wiki/Q1498213","display_name":"Microstructure","level":2,"score":0.4843546152114868},{"id":"https://openalex.org/C47463417","wikidata":"https://www.wikidata.org/wiki/Q6583695","display_name":"Thermal expansion","level":2,"score":0.47184160351753235},{"id":"https://openalex.org/C111337013","wikidata":"https://www.wikidata.org/wiki/Q2737837","display_name":"Irradiation","level":2,"score":0.4257509708404541},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.42242830991744995},{"id":"https://openalex.org/C120665830","wikidata":"https://www.wikidata.org/wiki/Q14620","display_name":"Optics","level":1,"score":0.320232093334198},{"id":"https://openalex.org/C2779227376","wikidata":"https://www.wikidata.org/wiki/Q6505497","display_name":"Layer (electronics)","level":2,"score":0.06542325019836426},{"id":"https://openalex.org/C127313418","wikidata":"https://www.wikidata.org/wiki/Q1069","display_name":"Geology","level":0,"score":0.0},{"id":"https://openalex.org/C185544564","wikidata":"https://www.wikidata.org/wiki/Q81197","display_name":"Nuclear physics","level":1,"score":0.0},{"id":"https://openalex.org/C204787440","wikidata":"https://www.wikidata.org/wiki/Q188504","display_name":"Alternative medicine","level":2,"score":0.0},{"id":"https://openalex.org/C111368507","wikidata":"https://www.wikidata.org/wiki/Q43518","display_name":"Oceanography","level":1,"score":0.0},{"id":"https://openalex.org/C71924100","wikidata":"https://www.wikidata.org/wiki/Q11190","display_name":"Medicine","level":0,"score":0.0},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.0},{"id":"https://openalex.org/C142724271","wikidata":"https://www.wikidata.org/wiki/Q7208","display_name":"Pathology","level":1,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1109/nems.2019.8915627","is_oa":false,"landing_page_url":"https://doi.org/10.1109/nems.2019.8915627","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2019 IEEE 14th International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)","raw_type":"proceedings-article"}],"best_oa_location":null,"sustainable_development_goals":[],"awards":[],"funders":[],"has_content":{"pdf":false,"grobid_xml":false},"content_urls":null,"referenced_works_count":5,"referenced_works":["https://openalex.org/W1972032139","https://openalex.org/W2074016966","https://openalex.org/W2075728242","https://openalex.org/W2089588531","https://openalex.org/W2259013943"],"related_works":["https://openalex.org/W2128494206","https://openalex.org/W2148274155","https://openalex.org/W2074502480","https://openalex.org/W2788903434","https://openalex.org/W2606133557","https://openalex.org/W2091008601","https://openalex.org/W3184811876","https://openalex.org/W581292172","https://openalex.org/W2990644426","https://openalex.org/W2150931894"],"abstract_inverted_index":{"Polytetrafluoroethylene":[0],"(PTFE)":[1],"has":[2,46],"attention":[3],"in":[4],"the":[5,36,43,51,81],"field":[6],"of":[7,32,39,50,58,87],"Lab-on-a-chip":[8],"(LOC)":[9],"and":[10,19],"micro":[11],"total":[12],"analysis":[13],"system":[14],"(\u03bcTAS),":[15],"having":[16],"high":[17],"heat":[18],"chemical":[20],"resistance":[21],"compared":[22],"with":[23,30],"other":[24],"plastic":[25],"materials.":[26],"SR-ablation":[27],"process":[28,45],"accompanying":[29],"heating":[31,74],"PTFE":[33,59,75,88],"substrate":[34,76,89],"enable":[35],"direct":[37],"fabrication":[38],"high-aspect-ratio":[40],"microstructure.":[41],"However,":[42],"etching":[44,69],"characteristics":[47,86],"that":[48],"misalignment":[49],"pattern":[52],"arises":[53],"due":[54],"to":[55],"thermal":[56],"expansion":[57],"substrate.":[60],"In":[61],"this":[62],"study,":[63],"we":[64],"present":[65],"here":[66],"anisotropic":[67],"pyrochemical":[68],"which":[70],"is":[71],"performed":[72],"by":[73],"after":[77],"X-ray":[78],"irradiation":[79],"at":[80],"room":[82],"temperature.":[83],"The":[84],"processing":[85],"was":[90],"investigated.":[91]},"counts_by_year":[],"updated_date":"2025-11-06T03:46:38.306776","created_date":"2025-10-10T00:00:00"}