{"id":"https://openalex.org/W2990926792","doi":"https://doi.org/10.1109/nems.2019.8915611","title":"MEMS Piezoelectric Vibration Energy Harvester with In-Plane PZT Bimorph","display_name":"MEMS Piezoelectric Vibration Energy Harvester with In-Plane PZT Bimorph","publication_year":2019,"publication_date":"2019-04-01","ids":{"openalex":"https://openalex.org/W2990926792","doi":"https://doi.org/10.1109/nems.2019.8915611","mag":"2990926792"},"language":"en","primary_location":{"id":"doi:10.1109/nems.2019.8915611","is_oa":false,"landing_page_url":"https://doi.org/10.1109/nems.2019.8915611","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2019 IEEE 14th International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)","raw_type":"proceedings-article"},"type":"article","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5060819626","display_name":"Lu Wang","orcid":"https://orcid.org/0000-0003-4171-5873"},"institutions":[{"id":"https://openalex.org/I87445476","display_name":"Xi'an Jiaotong University","ror":"https://ror.org/017zhmm22","country_code":"CN","type":"education","lineage":["https://openalex.org/I87445476"]}],"countries":["CN"],"is_corresponding":true,"raw_author_name":"Lu Wang","raw_affiliation_strings":["State Key Laboratory for Manufacturing Systems Engineering, Xi\u2019an Jiaotong University, Xi\u2019an, China","State Key Laboratory for Manufacturing Systems Engineering, Xi'an Jiaotong University, Xi'an, China"],"affiliations":[{"raw_affiliation_string":"State Key Laboratory for Manufacturing Systems Engineering, Xi\u2019an Jiaotong University, Xi\u2019an, China","institution_ids":["https://openalex.org/I87445476"]},{"raw_affiliation_string":"State Key Laboratory for Manufacturing Systems Engineering, Xi'an Jiaotong University, Xi'an, China","institution_ids":["https://openalex.org/I87445476"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5072118178","display_name":"Libo Zhao","orcid":"https://orcid.org/0000-0001-6101-8173"},"institutions":[{"id":"https://openalex.org/I87445476","display_name":"Xi'an Jiaotong University","ror":"https://ror.org/017zhmm22","country_code":"CN","type":"education","lineage":["https://openalex.org/I87445476"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Libo Zhao","raw_affiliation_strings":["State Key Laboratory for Manufacturing Systems Engineering, Xi\u2019an Jiaotong University, Xi\u2019an, China","State Key Laboratory for Manufacturing Systems Engineering, Xi'an Jiaotong University, Xi'an, China"],"affiliations":[{"raw_affiliation_string":"State Key Laboratory for Manufacturing Systems Engineering, Xi\u2019an Jiaotong University, Xi\u2019an, China","institution_ids":["https://openalex.org/I87445476"]},{"raw_affiliation_string":"State Key Laboratory for Manufacturing Systems Engineering, Xi'an Jiaotong University, Xi'an, China","institution_ids":["https://openalex.org/I87445476"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5033373769","display_name":"Zhuangde Jiang","orcid":"https://orcid.org/0000-0001-5557-2653"},"institutions":[{"id":"https://openalex.org/I87445476","display_name":"Xi'an Jiaotong University","ror":"https://ror.org/017zhmm22","country_code":"CN","type":"education","lineage":["https://openalex.org/I87445476"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Zhuangde Jiang","raw_affiliation_strings":["State Key Laboratory for Manufacturing Systems Engineering, Xi\u2019an Jiaotong University, Xi\u2019an, China","State Key Laboratory for Manufacturing Systems Engineering, Xi'an Jiaotong University, Xi'an, China"],"affiliations":[{"raw_affiliation_string":"State Key Laboratory for Manufacturing Systems Engineering, Xi\u2019an Jiaotong University, Xi\u2019an, China","institution_ids":["https://openalex.org/I87445476"]},{"raw_affiliation_string":"State Key Laboratory for Manufacturing Systems Engineering, Xi'an Jiaotong University, Xi'an, China","institution_ids":["https://openalex.org/I87445476"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5022516253","display_name":"Xiang Li","orcid":"https://orcid.org/0000-0002-3919-2658"},"institutions":[{"id":"https://openalex.org/I87445476","display_name":"Xi'an Jiaotong University","ror":"https://ror.org/017zhmm22","country_code":"CN","type":"education","lineage":["https://openalex.org/I87445476"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Xiang Li","raw_affiliation_strings":["School of Mechanical Engineering, Xi\u2019an Jiaotong University, Xi\u2019an, China","School of Mechanical Engineering, Xi'an Jiaotong University, Xi'an, China"],"affiliations":[{"raw_affiliation_string":"School of Mechanical Engineering, Xi\u2019an Jiaotong University, Xi\u2019an, China","institution_ids":["https://openalex.org/I87445476"]},{"raw_affiliation_string":"School of Mechanical Engineering, Xi'an Jiaotong University, Xi'an, China","institution_ids":["https://openalex.org/I87445476"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5070999349","display_name":"Zihang Chen","orcid":"https://orcid.org/0000-0002-8903-0171"},"institutions":[{"id":"https://openalex.org/I87445476","display_name":"Xi'an Jiaotong University","ror":"https://ror.org/017zhmm22","country_code":"CN","type":"education","lineage":["https://openalex.org/I87445476"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Zihang Chen","raw_affiliation_strings":["School of Mechanical Engineering, Xi\u2019an Jiaotong University, Xi\u2019an, China","School of Mechanical Engineering, Xi'an Jiaotong University, Xi'an, China"],"affiliations":[{"raw_affiliation_string":"School of Mechanical Engineering, Xi\u2019an Jiaotong University, Xi\u2019an, China","institution_ids":["https://openalex.org/I87445476"]},{"raw_affiliation_string":"School of Mechanical Engineering, Xi'an Jiaotong University, Xi'an, China","institution_ids":["https://openalex.org/I87445476"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5033535293","display_name":"Ryutaro Maeda","orcid":"https://orcid.org/0000-0003-1693-0790"},"institutions":[{"id":"https://openalex.org/I87445476","display_name":"Xi'an Jiaotong University","ror":"https://ror.org/017zhmm22","country_code":"CN","type":"education","lineage":["https://openalex.org/I87445476"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Maeda Ryutaro","raw_affiliation_strings":["International Joint Laboratory for Micro/Nano Manufacturing and Measurement Technologies and School of Mechanical Engineering, Xi\u2019an Jiaotong University, Xi\u2019an, China","International Joint Laboratory for Micro/Nano Manufacturing and Measurement Technologies and School of Mechanical Engineering, Xi'an Jiaotong University, Xi'an, China"],"affiliations":[{"raw_affiliation_string":"International Joint Laboratory for Micro/Nano Manufacturing and Measurement Technologies and School of Mechanical Engineering, Xi\u2019an Jiaotong University, Xi\u2019an, China","institution_ids":["https://openalex.org/I87445476"]},{"raw_affiliation_string":"International Joint Laboratory for Micro/Nano Manufacturing and Measurement Technologies and School of Mechanical Engineering, Xi'an Jiaotong University, Xi'an, China","institution_ids":["https://openalex.org/I87445476"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":6,"corresponding_author_ids":["https://openalex.org/A5060819626"],"corresponding_institution_ids":["https://openalex.org/I87445476"],"apc_list":null,"apc_paid":null,"fwci":0.0,"has_fulltext":false,"cited_by_count":0,"citation_normalized_percentile":{"value":0.15832434,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":null,"biblio":{"volume":null,"issue":null,"first_page":"355","last_page":"359"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T11230","display_name":"Innovative Energy Harvesting Technologies","score":1.0,"subfield":{"id":"https://openalex.org/subfields/2210","display_name":"Mechanical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T11230","display_name":"Innovative Energy Harvesting Technologies","score":1.0,"subfield":{"id":"https://openalex.org/subfields/2210","display_name":"Mechanical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11392","display_name":"Energy Harvesting in Wireless Networks","score":0.9977999925613403,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11249","display_name":"Wireless Power Transfer Systems","score":0.9904999732971191,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/bimorph","display_name":"Bimorph","score":0.9034825563430786},{"id":"https://openalex.org/keywords/vibration","display_name":"Vibration","score":0.7623555064201355},{"id":"https://openalex.org/keywords/proof-mass","display_name":"Proof mass","score":0.7318706512451172},{"id":"https://openalex.org/keywords/materials-science","display_name":"Materials science","score":0.7100144624710083},{"id":"https://openalex.org/keywords/microelectromechanical-systems","display_name":"Microelectromechanical systems","score":0.6657609939575195},{"id":"https://openalex.org/keywords/acoustics","display_name":"Acoustics","score":0.5460051894187927},{"id":"https://openalex.org/keywords/piezoelectricity","display_name":"Piezoelectricity","score":0.5321231484413147},{"id":"https://openalex.org/keywords/cantilever","display_name":"Cantilever","score":0.5195969939231873},{"id":"https://openalex.org/keywords/finite-element-method","display_name":"Finite element method","score":0.4893442988395691},{"id":"https://openalex.org/keywords/voltage","display_name":"Voltage","score":0.48610353469848633},{"id":"https://openalex.org/keywords/energy-harvesting","display_name":"Energy harvesting","score":0.4107191264629364},{"id":"https://openalex.org/keywords/structural-engineering","display_name":"Structural engineering","score":0.3653140664100647},{"id":"https://openalex.org/keywords/power","display_name":"Power (physics)","score":0.31985166668891907},{"id":"https://openalex.org/keywords/electrical-engineering","display_name":"Electrical engineering","score":0.2204812467098236},{"id":"https://openalex.org/keywords/optoelectronics","display_name":"Optoelectronics","score":0.20058977603912354},{"id":"https://openalex.org/keywords/engineering","display_name":"Engineering","score":0.19429630041122437},{"id":"https://openalex.org/keywords/composite-material","display_name":"Composite material","score":0.1766851842403412},{"id":"https://openalex.org/keywords/physics","display_name":"Physics","score":0.13810515403747559}],"concepts":[{"id":"https://openalex.org/C2778393539","wikidata":"https://www.wikidata.org/wiki/Q4913759","display_name":"Bimorph","level":3,"score":0.9034825563430786},{"id":"https://openalex.org/C198394728","wikidata":"https://www.wikidata.org/wiki/Q3695508","display_name":"Vibration","level":2,"score":0.7623555064201355},{"id":"https://openalex.org/C2780330379","wikidata":"https://www.wikidata.org/wiki/Q16990023","display_name":"Proof mass","level":3,"score":0.7318706512451172},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.7100144624710083},{"id":"https://openalex.org/C37977207","wikidata":"https://www.wikidata.org/wiki/Q175561","display_name":"Microelectromechanical systems","level":2,"score":0.6657609939575195},{"id":"https://openalex.org/C24890656","wikidata":"https://www.wikidata.org/wiki/Q82811","display_name":"Acoustics","level":1,"score":0.5460051894187927},{"id":"https://openalex.org/C100082104","wikidata":"https://www.wikidata.org/wiki/Q183759","display_name":"Piezoelectricity","level":2,"score":0.5321231484413147},{"id":"https://openalex.org/C141354745","wikidata":"https://www.wikidata.org/wiki/Q17227","display_name":"Cantilever","level":2,"score":0.5195969939231873},{"id":"https://openalex.org/C135628077","wikidata":"https://www.wikidata.org/wiki/Q220184","display_name":"Finite element method","level":2,"score":0.4893442988395691},{"id":"https://openalex.org/C165801399","wikidata":"https://www.wikidata.org/wiki/Q25428","display_name":"Voltage","level":2,"score":0.48610353469848633},{"id":"https://openalex.org/C101518730","wikidata":"https://www.wikidata.org/wiki/Q930236","display_name":"Energy harvesting","level":3,"score":0.4107191264629364},{"id":"https://openalex.org/C66938386","wikidata":"https://www.wikidata.org/wiki/Q633538","display_name":"Structural engineering","level":1,"score":0.3653140664100647},{"id":"https://openalex.org/C163258240","wikidata":"https://www.wikidata.org/wiki/Q25342","display_name":"Power (physics)","level":2,"score":0.31985166668891907},{"id":"https://openalex.org/C119599485","wikidata":"https://www.wikidata.org/wiki/Q43035","display_name":"Electrical engineering","level":1,"score":0.2204812467098236},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.20058977603912354},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.19429630041122437},{"id":"https://openalex.org/C159985019","wikidata":"https://www.wikidata.org/wiki/Q181790","display_name":"Composite material","level":1,"score":0.1766851842403412},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.13810515403747559},{"id":"https://openalex.org/C62520636","wikidata":"https://www.wikidata.org/wiki/Q944","display_name":"Quantum mechanics","level":1,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1109/nems.2019.8915611","is_oa":false,"landing_page_url":"https://doi.org/10.1109/nems.2019.8915611","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2019 IEEE 14th International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)","raw_type":"proceedings-article"}],"best_oa_location":null,"sustainable_development_goals":[{"id":"https://metadata.un.org/sdg/7","score":0.8899999856948853,"display_name":"Affordable and clean energy"}],"awards":[],"funders":[],"has_content":{"pdf":false,"grobid_xml":false},"content_urls":null,"referenced_works_count":9,"referenced_works":["https://openalex.org/W1981828672","https://openalex.org/W1997729018","https://openalex.org/W2019809904","https://openalex.org/W2052282168","https://openalex.org/W2058293504","https://openalex.org/W2069614350","https://openalex.org/W2142172865","https://openalex.org/W2900053424","https://openalex.org/W6655302897"],"related_works":["https://openalex.org/W2077127004","https://openalex.org/W2111714088","https://openalex.org/W2003650113","https://openalex.org/W2048171849","https://openalex.org/W2560819980","https://openalex.org/W2023345212","https://openalex.org/W4232743211","https://openalex.org/W2978594305","https://openalex.org/W2169342510","https://openalex.org/W2945916543"],"abstract_inverted_index":{"In":[0],"order":[1],"to":[2,62,106,116],"overcome":[3],"the":[4,52,59,63,67,104,108],"drawbacks":[5],"of":[6,25,28,58,76,82,88],"conventional-plane":[7,64],"vibration":[8,15,40,65,70,112],"MEMS-PVEH.":[9],"We":[10],"have":[11],"presented":[12],"an":[13],"in-plane":[14,69,111],"MEMS-PVEH":[16],"with":[17],"bimorph":[18],"PZT":[19,94],"by":[20,32,119],"bonding":[21],"bulk":[22],"PZT.":[23],"Performance":[24],"two":[26],"kinds":[27],"PVEHs":[29],"were":[30],"studied":[31],"finite":[33],"element":[34],"method":[35],"using":[36],"COMSOL":[37],"software.":[38],"Including":[39],"modes,":[41],"resonant":[42,74],"frequencies,":[43],"open":[44],"circuit":[45],"voltage,":[46],"peak":[47,80],"power,":[48],"optimal":[49],"resistance,":[50],"and":[51,102],"static":[53],"stress":[54],"at":[55],"gravity":[56],"load":[57],"structure.":[60],"Compare":[61],"PVEH,":[66],"proposed":[68],"PVEH":[71,113],"has":[72,86,103],"lower":[73],"frequency":[75],"122":[77],"Hz,":[78],"higher":[79],"power":[81],"50":[83],"\u03bcW.":[84],"It":[85],"advantages":[87],"heavier":[89],"proof":[90],"mass,":[91],"good":[92],"performance":[93],"bimorph,":[95],"thinner":[96],"cantilever":[97],"thickness,":[98],"convenient":[99,115],"electrodes":[100],"lead,":[101],"frame":[105],"protect":[107],"oscillator.":[109],"Besides,":[110],"is":[114],"be":[117],"fabricated":[118],"planar":[120],"graphical":[121],"MEMS":[122],"process.":[123]},"counts_by_year":[],"updated_date":"2025-11-06T03:46:38.306776","created_date":"2025-10-10T00:00:00"}