{"id":"https://openalex.org/W2990916463","doi":"https://doi.org/10.1109/nems.2019.8915599","title":"A High Accuracy Resonant Pressure Sensor with Lateral Driven and Piezoresistive Detection","display_name":"A High Accuracy Resonant Pressure Sensor with Lateral Driven and Piezoresistive Detection","publication_year":2019,"publication_date":"2019-04-01","ids":{"openalex":"https://openalex.org/W2990916463","doi":"https://doi.org/10.1109/nems.2019.8915599","mag":"2990916463"},"language":"en","primary_location":{"id":"doi:10.1109/nems.2019.8915599","is_oa":false,"landing_page_url":"https://doi.org/10.1109/nems.2019.8915599","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2019 IEEE 14th International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)","raw_type":"proceedings-article"},"type":"article","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5090242606","display_name":"Xiangguang Han","orcid":"https://orcid.org/0000-0003-1409-7600"},"institutions":[{"id":"https://openalex.org/I87445476","display_name":"Xi'an Jiaotong University","ror":"https://ror.org/017zhmm22","country_code":"CN","type":"education","lineage":["https://openalex.org/I87445476"]}],"countries":["CN"],"is_corresponding":true,"raw_author_name":"Xiangguang Han","raw_affiliation_strings":["State Key Laboratory for Manufacturing Systems Engineering, Xi\u2019an Jiaotong University, Xi\u2019an, China","State Key Laboratory for Manufacturing Systems Engineering, Xi'an Jiaotong University, Xi'an, China"],"affiliations":[{"raw_affiliation_string":"State Key Laboratory for Manufacturing Systems Engineering, Xi\u2019an Jiaotong University, Xi\u2019an, China","institution_ids":["https://openalex.org/I87445476"]},{"raw_affiliation_string":"State Key Laboratory for Manufacturing Systems Engineering, Xi'an Jiaotong University, Xi'an, China","institution_ids":["https://openalex.org/I87445476"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5072118178","display_name":"Libo Zhao","orcid":"https://orcid.org/0000-0001-6101-8173"},"institutions":[{"id":"https://openalex.org/I87445476","display_name":"Xi'an Jiaotong University","ror":"https://ror.org/017zhmm22","country_code":"CN","type":"education","lineage":["https://openalex.org/I87445476"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Libo Zhao","raw_affiliation_strings":["State Key Laboratory for Manufacturing Systems Engineering, Xi\u2019an Jiaotong University, Xi\u2019an, China","State Key Laboratory for Manufacturing Systems Engineering, Xi'an Jiaotong University, Xi'an, China"],"affiliations":[{"raw_affiliation_string":"State Key Laboratory for Manufacturing Systems Engineering, Xi\u2019an Jiaotong University, Xi\u2019an, China","institution_ids":["https://openalex.org/I87445476"]},{"raw_affiliation_string":"State Key Laboratory for Manufacturing Systems Engineering, Xi'an Jiaotong University, Xi'an, China","institution_ids":["https://openalex.org/I87445476"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5100668550","display_name":"Xuejiao Li","orcid":"https://orcid.org/0000-0002-2250-0300"},"institutions":[{"id":"https://openalex.org/I87445476","display_name":"Xi'an Jiaotong University","ror":"https://ror.org/017zhmm22","country_code":"CN","type":"education","lineage":["https://openalex.org/I87445476"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Xuejiao Li","raw_affiliation_strings":["State Key Laboratory for Manufacturing Systems Engineering, Xi\u2019an Jiaotong University, Xi\u2019an, China","State Key Laboratory for Manufacturing Systems Engineering, Xi'an Jiaotong University, Xi'an, China"],"affiliations":[{"raw_affiliation_string":"State Key Laboratory for Manufacturing Systems Engineering, Xi\u2019an Jiaotong University, Xi\u2019an, China","institution_ids":["https://openalex.org/I87445476"]},{"raw_affiliation_string":"State Key Laboratory for Manufacturing Systems Engineering, Xi'an Jiaotong University, Xi'an, China","institution_ids":["https://openalex.org/I87445476"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5046764549","display_name":"Ping Yang","orcid":"https://orcid.org/0000-0002-6437-2036"},"institutions":[{"id":"https://openalex.org/I87445476","display_name":"Xi'an Jiaotong University","ror":"https://ror.org/017zhmm22","country_code":"CN","type":"education","lineage":["https://openalex.org/I87445476"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Ping Yang","raw_affiliation_strings":["State Key Laboratory for Manufacturing Systems Engineering, Xi\u2019an Jiaotong University, Xi\u2019an, China","State Key Laboratory for Manufacturing Systems Engineering, Xi'an Jiaotong University, Xi'an, China"],"affiliations":[{"raw_affiliation_string":"State Key Laboratory for Manufacturing Systems Engineering, Xi\u2019an Jiaotong University, Xi\u2019an, China","institution_ids":["https://openalex.org/I87445476"]},{"raw_affiliation_string":"State Key Laboratory for Manufacturing Systems Engineering, Xi'an Jiaotong University, Xi'an, China","institution_ids":["https://openalex.org/I87445476"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5100359678","display_name":"Hongyan Wang","orcid":"https://orcid.org/0000-0003-2264-6817"},"institutions":[{"id":"https://openalex.org/I4210123506","display_name":"Jiangsu Institute of Metrology","ror":"https://ror.org/035hazd92","country_code":"CN","type":"other","lineage":["https://openalex.org/I4210123506"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Hongyan Wang","raw_affiliation_strings":["Shaanxi Institute of Metrology Science, Xi\u2019an, China","Shaanxi Institute of Metrology Science, Xi'an, China"],"affiliations":[{"raw_affiliation_string":"Shaanxi Institute of Metrology Science, Xi\u2019an, China","institution_ids":["https://openalex.org/I4210123506"]},{"raw_affiliation_string":"Shaanxi Institute of Metrology Science, Xi'an, China","institution_ids":["https://openalex.org/I4210123506"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5033373769","display_name":"Zhuangde Jiang","orcid":"https://orcid.org/0000-0001-5557-2653"},"institutions":[{"id":"https://openalex.org/I87445476","display_name":"Xi'an Jiaotong University","ror":"https://ror.org/017zhmm22","country_code":"CN","type":"education","lineage":["https://openalex.org/I87445476"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Zhuangde Jiang","raw_affiliation_strings":["State Key Laboratory for Manufacturing Systems Engineering, Xi\u2019an Jiaotong University, Xi\u2019an, China","State Key Laboratory for Manufacturing Systems Engineering, Xi'an Jiaotong University, Xi'an, China"],"affiliations":[{"raw_affiliation_string":"State Key Laboratory for Manufacturing Systems Engineering, Xi\u2019an Jiaotong University, Xi\u2019an, China","institution_ids":["https://openalex.org/I87445476"]},{"raw_affiliation_string":"State Key Laboratory for Manufacturing Systems Engineering, Xi'an Jiaotong University, Xi'an, China","institution_ids":["https://openalex.org/I87445476"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":6,"corresponding_author_ids":["https://openalex.org/A5090242606"],"corresponding_institution_ids":["https://openalex.org/I87445476"],"apc_list":null,"apc_paid":null,"fwci":0.0,"has_fulltext":false,"cited_by_count":1,"citation_normalized_percentile":{"value":0.12893952,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":90,"max":94},"biblio":{"volume":"14","issue":null,"first_page":"167","last_page":"171"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":1.0,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":1.0,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11449","display_name":"Mechanical and Optical Resonators","score":0.9998000264167786,"subfield":{"id":"https://openalex.org/subfields/3107","display_name":"Atomic and Molecular Physics, and Optics"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11160","display_name":"Acoustic Wave Resonator Technologies","score":0.9995999932289124,"subfield":{"id":"https://openalex.org/subfields/2204","display_name":"Biomedical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/piezoresistive-effect","display_name":"Piezoresistive effect","score":0.8040180206298828},{"id":"https://openalex.org/keywords/materials-science","display_name":"Materials science","score":0.7496466040611267},{"id":"https://openalex.org/keywords/cantilever","display_name":"Cantilever","score":0.7135328054428101},{"id":"https://openalex.org/keywords/pressure-sensor","display_name":"Pressure sensor","score":0.6117872595787048},{"id":"https://openalex.org/keywords/acoustics","display_name":"Acoustics","score":0.5812148451805115},{"id":"https://openalex.org/keywords/offset","display_name":"Offset (computer science)","score":0.5313727855682373},{"id":"https://openalex.org/keywords/sensitivity","display_name":"Sensitivity (control systems)","score":0.48304611444473267},{"id":"https://openalex.org/keywords/linearity","display_name":"Linearity","score":0.48304516077041626},{"id":"https://openalex.org/keywords/beam","display_name":"Beam (structure)","score":0.4763610363006592},{"id":"https://openalex.org/keywords/vibration","display_name":"Vibration","score":0.44875770807266235},{"id":"https://openalex.org/keywords/coupling","display_name":"Coupling (piping)","score":0.4405759572982788},{"id":"https://openalex.org/keywords/stress","display_name":"Stress (linguistics)","score":0.43953731656074524},{"id":"https://openalex.org/keywords/diaphragm","display_name":"Diaphragm (acoustics)","score":0.42330530285835266},{"id":"https://openalex.org/keywords/optoelectronics","display_name":"Optoelectronics","score":0.2643094062805176},{"id":"https://openalex.org/keywords/optics","display_name":"Optics","score":0.25339269638061523},{"id":"https://openalex.org/keywords/physics","display_name":"Physics","score":0.20324662327766418},{"id":"https://openalex.org/keywords/electronic-engineering","display_name":"Electronic engineering","score":0.2030341923236847},{"id":"https://openalex.org/keywords/composite-material","display_name":"Composite material","score":0.14779752492904663},{"id":"https://openalex.org/keywords/engineering","display_name":"Engineering","score":0.14726704359054565},{"id":"https://openalex.org/keywords/computer-science","display_name":"Computer science","score":0.14645451307296753},{"id":"https://openalex.org/keywords/mechanical-engineering","display_name":"Mechanical engineering","score":0.07517227530479431}],"concepts":[{"id":"https://openalex.org/C198490522","wikidata":"https://www.wikidata.org/wiki/Q1932915","display_name":"Piezoresistive effect","level":2,"score":0.8040180206298828},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.7496466040611267},{"id":"https://openalex.org/C141354745","wikidata":"https://www.wikidata.org/wiki/Q17227","display_name":"Cantilever","level":2,"score":0.7135328054428101},{"id":"https://openalex.org/C41325743","wikidata":"https://www.wikidata.org/wiki/Q1261040","display_name":"Pressure sensor","level":2,"score":0.6117872595787048},{"id":"https://openalex.org/C24890656","wikidata":"https://www.wikidata.org/wiki/Q82811","display_name":"Acoustics","level":1,"score":0.5812148451805115},{"id":"https://openalex.org/C175291020","wikidata":"https://www.wikidata.org/wiki/Q1156822","display_name":"Offset (computer science)","level":2,"score":0.5313727855682373},{"id":"https://openalex.org/C21200559","wikidata":"https://www.wikidata.org/wiki/Q7451068","display_name":"Sensitivity (control systems)","level":2,"score":0.48304611444473267},{"id":"https://openalex.org/C77170095","wikidata":"https://www.wikidata.org/wiki/Q1753188","display_name":"Linearity","level":2,"score":0.48304516077041626},{"id":"https://openalex.org/C168834538","wikidata":"https://www.wikidata.org/wiki/Q3705329","display_name":"Beam (structure)","level":2,"score":0.4763610363006592},{"id":"https://openalex.org/C198394728","wikidata":"https://www.wikidata.org/wiki/Q3695508","display_name":"Vibration","level":2,"score":0.44875770807266235},{"id":"https://openalex.org/C131584629","wikidata":"https://www.wikidata.org/wiki/Q4308705","display_name":"Coupling (piping)","level":2,"score":0.4405759572982788},{"id":"https://openalex.org/C21036866","wikidata":"https://www.wikidata.org/wiki/Q181767","display_name":"Stress (linguistics)","level":2,"score":0.43953731656074524},{"id":"https://openalex.org/C164292776","wikidata":"https://www.wikidata.org/wiki/Q5271779","display_name":"Diaphragm (acoustics)","level":3,"score":0.42330530285835266},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.2643094062805176},{"id":"https://openalex.org/C120665830","wikidata":"https://www.wikidata.org/wiki/Q14620","display_name":"Optics","level":1,"score":0.25339269638061523},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.20324662327766418},{"id":"https://openalex.org/C24326235","wikidata":"https://www.wikidata.org/wiki/Q126095","display_name":"Electronic engineering","level":1,"score":0.2030341923236847},{"id":"https://openalex.org/C159985019","wikidata":"https://www.wikidata.org/wiki/Q181790","display_name":"Composite material","level":1,"score":0.14779752492904663},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.14726704359054565},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.14645451307296753},{"id":"https://openalex.org/C78519656","wikidata":"https://www.wikidata.org/wiki/Q101333","display_name":"Mechanical engineering","level":1,"score":0.07517227530479431},{"id":"https://openalex.org/C41895202","wikidata":"https://www.wikidata.org/wiki/Q8162","display_name":"Linguistics","level":1,"score":0.0},{"id":"https://openalex.org/C138885662","wikidata":"https://www.wikidata.org/wiki/Q5891","display_name":"Philosophy","level":0,"score":0.0},{"id":"https://openalex.org/C199360897","wikidata":"https://www.wikidata.org/wiki/Q9143","display_name":"Programming language","level":1,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1109/nems.2019.8915599","is_oa":false,"landing_page_url":"https://doi.org/10.1109/nems.2019.8915599","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2019 IEEE 14th International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)","raw_type":"proceedings-article"}],"best_oa_location":null,"sustainable_development_goals":[{"display_name":"Affordable and clean energy","score":0.7699999809265137,"id":"https://metadata.un.org/sdg/7"}],"awards":[],"funders":[],"has_content":{"pdf":false,"grobid_xml":false},"content_urls":null,"referenced_works_count":8,"referenced_works":["https://openalex.org/W1954875177","https://openalex.org/W2030890954","https://openalex.org/W2048945014","https://openalex.org/W2056474353","https://openalex.org/W2089073173","https://openalex.org/W2098508403","https://openalex.org/W2268397903","https://openalex.org/W2559857784"],"related_works":["https://openalex.org/W2150004397","https://openalex.org/W1973407535","https://openalex.org/W2105225674","https://openalex.org/W2540685717","https://openalex.org/W2025294681","https://openalex.org/W2122612554","https://openalex.org/W2474799934","https://openalex.org/W2045503801","https://openalex.org/W3040115070","https://openalex.org/W2121972528"],"abstract_inverted_index":{"A":[0],"novel":[1,59],"structure":[2,60],"of":[3,109],"resonant":[4],"pressure":[5,29,37,107],"sensor":[6,96],"with":[7,12,62,83,105],"integrated":[8],"comb":[9],"is":[10,47,53,68,101,116],"presented":[11],"the":[13,39,80,106],"electrostatic":[14],"drive":[15],"and":[16,44,65,112],"piezoresistive":[17,63],"detection.":[18],"This":[19],"design":[20],"realizes":[21],"double":[22],"symmetric":[23],"`H'":[24],"beams":[25],"assembled":[26],"in":[27],"one":[28],"diaphragm":[30],"to":[31,92,118],"realize":[32],"symmetric-lateral":[33],"vibration.":[34],"When":[35],"a":[36],"applied,":[38],"Z-direction":[40],"offset":[41],"between":[42],"fixed":[43],"movable":[45],"combs":[46],"less":[48,102],"than":[49,103],"0.2":[50],"\u03bcm,":[51],"which":[52,70],"beneficial":[54],"for":[55],"close-loop":[56],"control.":[57],"The":[58,94],"combined":[61],"detection":[64,81],"coupling":[66],"beam":[67,82],"presented,":[69],"can":[71],"obtain":[72],"pure":[73],"tensile":[74],"stress":[75,78],"or":[76],"compressive":[77],"on":[79],"low":[84],"noise,":[85],"adjacent":[86],"modal":[87],"output":[88],"will":[89],"be":[90],"easy":[91],"filter.":[93],"simulated":[95],"non-linearity":[97],"after":[98],"polynomial":[99],"fitting":[100],"0.01%FS":[104],"range":[108],"0-300":[110],"kPa,":[111],"its":[113],"measuring":[114],"sensitivity":[115],"up":[117],"-25":[119],"Hz/kPa.":[120]},"counts_by_year":[{"year":2024,"cited_by_count":1}],"updated_date":"2025-11-06T03:46:38.306776","created_date":"2025-10-10T00:00:00"}