{"id":"https://openalex.org/W2990409211","doi":"https://doi.org/10.1109/nems.2019.8915588","title":"Liquid Metal-Based Manipulator for Microscale Handling Inside SEM","display_name":"Liquid Metal-Based Manipulator for Microscale Handling Inside SEM","publication_year":2019,"publication_date":"2019-04-01","ids":{"openalex":"https://openalex.org/W2990409211","doi":"https://doi.org/10.1109/nems.2019.8915588","mag":"2990409211"},"language":"en","primary_location":{"id":"doi:10.1109/nems.2019.8915588","is_oa":false,"landing_page_url":"https://doi.org/10.1109/nems.2019.8915588","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2019 IEEE 14th International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)","raw_type":"proceedings-article"},"type":"article","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5079020441","display_name":"Fabian T. von Kleist-Retzow","orcid":"https://orcid.org/0000-0001-6481-3594"},"institutions":[{"id":"https://openalex.org/I129877168","display_name":"Carl von Ossietzky Universit\u00e4t Oldenburg","ror":"https://ror.org/033n9gh91","country_code":"DE","type":"education","lineage":["https://openalex.org/I129877168"]}],"countries":["DE"],"is_corresponding":true,"raw_author_name":"Fabian T. von Kleist-Retzow","raw_affiliation_strings":["Department of Computing Science, University of Oldenburg, D-26129 Oldenburg"],"affiliations":[{"raw_affiliation_string":"Department of Computing Science, University of Oldenburg, D-26129 Oldenburg","institution_ids":["https://openalex.org/I129877168"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5070677520","display_name":"Malte Bartenwerfer","orcid":"https://orcid.org/0000-0003-1910-8540"},"institutions":[{"id":"https://openalex.org/I129877168","display_name":"Carl von Ossietzky Universit\u00e4t Oldenburg","ror":"https://ror.org/033n9gh91","country_code":"DE","type":"education","lineage":["https://openalex.org/I129877168"]}],"countries":["DE"],"is_corresponding":false,"raw_author_name":"Malte Bartenwerfer","raw_affiliation_strings":["Department of Computing Science, University of Oldenburg, D-26129 Oldenburg"],"affiliations":[{"raw_affiliation_string":"Department of Computing Science, University of Oldenburg, D-26129 Oldenburg","institution_ids":["https://openalex.org/I129877168"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5013858630","display_name":"Sergej Fatikow","orcid":"https://orcid.org/0000-0002-3352-7250"},"institutions":[{"id":"https://openalex.org/I129877168","display_name":"Carl von Ossietzky Universit\u00e4t Oldenburg","ror":"https://ror.org/033n9gh91","country_code":"DE","type":"education","lineage":["https://openalex.org/I129877168"]}],"countries":["DE"],"is_corresponding":false,"raw_author_name":"Sergej Fatikow","raw_affiliation_strings":["Department of Computing Science, University of Oldenburg, D-26129 Oldenburg"],"affiliations":[{"raw_affiliation_string":"Department of Computing Science, University of Oldenburg, D-26129 Oldenburg","institution_ids":["https://openalex.org/I129877168"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":3,"corresponding_author_ids":["https://openalex.org/A5079020441"],"corresponding_institution_ids":["https://openalex.org/I129877168"],"apc_list":null,"apc_paid":null,"fwci":0.3612,"has_fulltext":false,"cited_by_count":2,"citation_normalized_percentile":{"value":0.58034729,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":89,"max":94},"biblio":{"volume":null,"issue":null,"first_page":"332","last_page":"335"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T11799","display_name":"Adhesion, Friction, and Surface Interactions","score":0.9975000023841858,"subfield":{"id":"https://openalex.org/subfields/2211","display_name":"Mechanics of Materials"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T11799","display_name":"Adhesion, Friction, and Surface Interactions","score":0.9975000023841858,"subfield":{"id":"https://openalex.org/subfields/2211","display_name":"Mechanics of Materials"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10338","display_name":"Advanced Sensor and Energy Harvesting Materials","score":0.996999979019165,"subfield":{"id":"https://openalex.org/subfields/2204","display_name":"Biomedical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T12784","display_name":"Modular Robots and Swarm Intelligence","score":0.9968000054359436,"subfield":{"id":"https://openalex.org/subfields/2210","display_name":"Mechanical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/microscale-chemistry","display_name":"Microscale chemistry","score":0.8414726853370667},{"id":"https://openalex.org/keywords/manipulator","display_name":"Manipulator (device)","score":0.6705897450447083},{"id":"https://openalex.org/keywords/smt-placement-equipment","display_name":"SMT placement equipment","score":0.62627774477005},{"id":"https://openalex.org/keywords/liquid-metal","display_name":"Liquid metal","score":0.5847131013870239},{"id":"https://openalex.org/keywords/adhesion","display_name":"Adhesion","score":0.5689870119094849},{"id":"https://openalex.org/keywords/process","display_name":"Process (computing)","score":0.5660700798034668},{"id":"https://openalex.org/keywords/liquid-state","display_name":"Liquid state","score":0.5323536396026611},{"id":"https://openalex.org/keywords/liquid-phase","display_name":"Liquid phase","score":0.5260885953903198},{"id":"https://openalex.org/keywords/computer-science","display_name":"Computer science","score":0.506086528301239},{"id":"https://openalex.org/keywords/robot","display_name":"Robot","score":0.47467851638793945},{"id":"https://openalex.org/keywords/adhesive","display_name":"Adhesive","score":0.4674685001373291},{"id":"https://openalex.org/keywords/materials-science","display_name":"Materials science","score":0.463681161403656},{"id":"https://openalex.org/keywords/phase","display_name":"Phase (matter)","score":0.46041661500930786},{"id":"https://openalex.org/keywords/state","display_name":"State (computer science)","score":0.43308141827583313},{"id":"https://openalex.org/keywords/mechanical-engineering","display_name":"Mechanical engineering","score":0.42241692543029785},{"id":"https://openalex.org/keywords/simulation","display_name":"Simulation","score":0.34994396567344666},{"id":"https://openalex.org/keywords/control-engineering","display_name":"Control engineering","score":0.3201550543308258},{"id":"https://openalex.org/keywords/nanotechnology","display_name":"Nanotechnology","score":0.292957067489624},{"id":"https://openalex.org/keywords/engineering","display_name":"Engineering","score":0.21507352590560913},{"id":"https://openalex.org/keywords/artificial-intelligence","display_name":"Artificial intelligence","score":0.14104542136192322},{"id":"https://openalex.org/keywords/composite-material","display_name":"Composite material","score":0.1408599615097046},{"id":"https://openalex.org/keywords/physics","display_name":"Physics","score":0.1112092137336731},{"id":"https://openalex.org/keywords/algorithm","display_name":"Algorithm","score":0.0915963351726532}],"concepts":[{"id":"https://openalex.org/C179428855","wikidata":"https://www.wikidata.org/wiki/Q1069216","display_name":"Microscale chemistry","level":2,"score":0.8414726853370667},{"id":"https://openalex.org/C2781347998","wikidata":"https://www.wikidata.org/wiki/Q1587588","display_name":"Manipulator (device)","level":3,"score":0.6705897450447083},{"id":"https://openalex.org/C17511633","wikidata":"https://www.wikidata.org/wiki/Q830694","display_name":"SMT placement equipment","level":3,"score":0.62627774477005},{"id":"https://openalex.org/C2778492893","wikidata":"https://www.wikidata.org/wiki/Q6557453","display_name":"Liquid metal","level":2,"score":0.5847131013870239},{"id":"https://openalex.org/C84416704","wikidata":"https://www.wikidata.org/wiki/Q188666","display_name":"Adhesion","level":2,"score":0.5689870119094849},{"id":"https://openalex.org/C98045186","wikidata":"https://www.wikidata.org/wiki/Q205663","display_name":"Process (computing)","level":2,"score":0.5660700798034668},{"id":"https://openalex.org/C2992523068","wikidata":"https://www.wikidata.org/wiki/Q11435","display_name":"Liquid state","level":2,"score":0.5323536396026611},{"id":"https://openalex.org/C3020315061","wikidata":"https://www.wikidata.org/wiki/Q11435","display_name":"Liquid phase","level":2,"score":0.5260885953903198},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.506086528301239},{"id":"https://openalex.org/C90509273","wikidata":"https://www.wikidata.org/wiki/Q11012","display_name":"Robot","level":2,"score":0.47467851638793945},{"id":"https://openalex.org/C68928338","wikidata":"https://www.wikidata.org/wiki/Q131790","display_name":"Adhesive","level":3,"score":0.4674685001373291},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.463681161403656},{"id":"https://openalex.org/C44280652","wikidata":"https://www.wikidata.org/wiki/Q104837","display_name":"Phase (matter)","level":2,"score":0.46041661500930786},{"id":"https://openalex.org/C48103436","wikidata":"https://www.wikidata.org/wiki/Q599031","display_name":"State (computer science)","level":2,"score":0.43308141827583313},{"id":"https://openalex.org/C78519656","wikidata":"https://www.wikidata.org/wiki/Q101333","display_name":"Mechanical engineering","level":1,"score":0.42241692543029785},{"id":"https://openalex.org/C44154836","wikidata":"https://www.wikidata.org/wiki/Q45045","display_name":"Simulation","level":1,"score":0.34994396567344666},{"id":"https://openalex.org/C133731056","wikidata":"https://www.wikidata.org/wiki/Q4917288","display_name":"Control engineering","level":1,"score":0.3201550543308258},{"id":"https://openalex.org/C171250308","wikidata":"https://www.wikidata.org/wiki/Q11468","display_name":"Nanotechnology","level":1,"score":0.292957067489624},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.21507352590560913},{"id":"https://openalex.org/C154945302","wikidata":"https://www.wikidata.org/wiki/Q11660","display_name":"Artificial intelligence","level":1,"score":0.14104542136192322},{"id":"https://openalex.org/C159985019","wikidata":"https://www.wikidata.org/wiki/Q181790","display_name":"Composite material","level":1,"score":0.1408599615097046},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.1112092137336731},{"id":"https://openalex.org/C11413529","wikidata":"https://www.wikidata.org/wiki/Q8366","display_name":"Algorithm","level":1,"score":0.0915963351726532},{"id":"https://openalex.org/C97355855","wikidata":"https://www.wikidata.org/wiki/Q11473","display_name":"Thermodynamics","level":1,"score":0.0},{"id":"https://openalex.org/C33923547","wikidata":"https://www.wikidata.org/wiki/Q395","display_name":"Mathematics","level":0,"score":0.0},{"id":"https://openalex.org/C111919701","wikidata":"https://www.wikidata.org/wiki/Q9135","display_name":"Operating system","level":1,"score":0.0},{"id":"https://openalex.org/C2779227376","wikidata":"https://www.wikidata.org/wiki/Q6505497","display_name":"Layer (electronics)","level":2,"score":0.0},{"id":"https://openalex.org/C145420912","wikidata":"https://www.wikidata.org/wiki/Q853077","display_name":"Mathematics education","level":1,"score":0.0},{"id":"https://openalex.org/C62520636","wikidata":"https://www.wikidata.org/wiki/Q944","display_name":"Quantum mechanics","level":1,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1109/nems.2019.8915588","is_oa":false,"landing_page_url":"https://doi.org/10.1109/nems.2019.8915588","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2019 IEEE 14th International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)","raw_type":"proceedings-article"}],"best_oa_location":null,"sustainable_development_goals":[],"awards":[],"funders":[],"has_content":{"pdf":false,"grobid_xml":false},"content_urls":null,"referenced_works_count":10,"referenced_works":["https://openalex.org/W1974048255","https://openalex.org/W1984062010","https://openalex.org/W2087264827","https://openalex.org/W2161649967","https://openalex.org/W2219286031","https://openalex.org/W2347016908","https://openalex.org/W2536940996","https://openalex.org/W2546956260","https://openalex.org/W2563424862","https://openalex.org/W2900126411"],"related_works":["https://openalex.org/W2194938926","https://openalex.org/W2051314351","https://openalex.org/W3027317618","https://openalex.org/W2014744504","https://openalex.org/W5581294","https://openalex.org/W2952108167","https://openalex.org/W1531483166","https://openalex.org/W2003608663","https://openalex.org/W2007087325","https://openalex.org/W3136620813"],"abstract_inverted_index":{"In":[0],"this":[1,44,106],"paper,":[2],"the":[3,17,67,114],"application":[4],"of":[5,61,101,105,113],"liquid":[6],"metals":[7],"is":[8,59,82,92,108],"demonstrated":[9,94],"in":[10,43,84,95],"adhesive":[11],"bond":[12],"handling":[13,62],"for":[14],"micro-manipulation.":[15],"Using":[16],"possibility":[18],"to":[19,36],"switch":[20],"gallium":[21],"between":[22],"a":[23,28,74,85],"liquid,":[24],"low-adhesion":[25],"state":[26,31],"and":[27,48,73,88,103],"solid,":[29],"high-adhesion":[30],"by":[32],"phase":[33,78],"changes":[34],"enables":[35],"tune":[37],"force":[38],"equilibria":[39],"at":[40],"manipulators.":[41],"Based":[42],"possibility,":[45],"reproducible":[46],"pick":[47,87],"place":[49,89],"operations":[50],"become":[51],"feasible.":[52],"We":[53],"present":[54],"an":[55,96],"experimental":[56],"setup":[57],"that":[58,91],"capable":[60],"arbitrarily":[63],"shaped":[64],"objects":[65],"inside":[66],"SEM":[68],"using":[69],"robotic":[70],"fine-positioning":[71],"stages":[72],"customized":[75],"manipulator.":[76],"A":[77,98],"changing":[79],"liquid-metal":[80],"manipulator":[81],"used":[83],"six-step":[86],"method,":[90],"successfully":[93],"experiment.":[97],"general":[99],"analysis":[100],"uncertainties":[102],"challenges":[104],"method":[107],"presented":[109,115],"which":[110],"identifies":[111],"bottlenecks":[112],"process.":[116]},"counts_by_year":[{"year":2022,"cited_by_count":1},{"year":2019,"cited_by_count":1}],"updated_date":"2025-11-06T03:46:38.306776","created_date":"2025-10-10T00:00:00"}