{"id":"https://openalex.org/W2903666787","doi":"https://doi.org/10.1109/nems.2018.8557020","title":"In-Plane Air Damping of NEMS and MEMS Resonators","display_name":"In-Plane Air Damping of NEMS and MEMS Resonators","publication_year":2018,"publication_date":"2018-04-01","ids":{"openalex":"https://openalex.org/W2903666787","doi":"https://doi.org/10.1109/nems.2018.8557020","mag":"2903666787"},"language":"en","primary_location":{"id":"doi:10.1109/nems.2018.8557020","is_oa":false,"landing_page_url":"https://doi.org/10.1109/nems.2018.8557020","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2018 IEEE 13th Annual International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)","raw_type":"proceedings-article"},"type":"article","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5025089738","display_name":"Nouha Alcheikh","orcid":"https://orcid.org/0000-0003-4289-6354"},"institutions":[{"id":"https://openalex.org/I71920554","display_name":"King Abdullah University of Science and Technology","ror":"https://ror.org/01q3tbs38","country_code":"SA","type":"education","lineage":["https://openalex.org/I71920554"]}],"countries":["SA"],"is_corresponding":true,"raw_author_name":"Nouha Alcheikh","raw_affiliation_strings":["Nano/Micro Mechanics and Motion Laboratory, King Abdullah University of Science and Technology, Thuwal, Kingdom of Saudi Arabia"],"affiliations":[{"raw_affiliation_string":"Nano/Micro Mechanics and Motion Laboratory, King Abdullah University of Science and Technology, Thuwal, Kingdom of Saudi Arabia","institution_ids":["https://openalex.org/I71920554"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5051222000","display_name":"Lakshmoji Kosuru","orcid":"https://orcid.org/0000-0003-3813-9262"},"institutions":[{"id":"https://openalex.org/I71920554","display_name":"King Abdullah University of Science and Technology","ror":"https://ror.org/01q3tbs38","country_code":"SA","type":"education","lineage":["https://openalex.org/I71920554"]}],"countries":["SA"],"is_corresponding":false,"raw_author_name":"Lakshmoji Kosuru","raw_affiliation_strings":["Nano/Micro Mechanics and Motion Laboratory, King Abdullah University of Science and Technology, Thuwal, Kingdom of Saudi Arabia"],"affiliations":[{"raw_affiliation_string":"Nano/Micro Mechanics and Motion Laboratory, King Abdullah University of Science and Technology, Thuwal, Kingdom of Saudi Arabia","institution_ids":["https://openalex.org/I71920554"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5031018633","display_name":"Syed N. R. Kazmi","orcid":"https://orcid.org/0000-0001-8145-9435"},"institutions":[{"id":"https://openalex.org/I71920554","display_name":"King Abdullah University of Science and Technology","ror":"https://ror.org/01q3tbs38","country_code":"SA","type":"education","lineage":["https://openalex.org/I71920554"]}],"countries":["SA"],"is_corresponding":false,"raw_author_name":"Syed N. R. Kazmi","raw_affiliation_strings":["Nano/Micro Mechanics and Motion Laboratory, King Abdullah University of Science and Technology, Thuwal, Kingdom of Saudi Arabia"],"affiliations":[{"raw_affiliation_string":"Nano/Micro Mechanics and Motion Laboratory, King Abdullah University of Science and Technology, Thuwal, Kingdom of Saudi Arabia","institution_ids":["https://openalex.org/I71920554"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5035564926","display_name":"Mohammad I. Younis","orcid":"https://orcid.org/0000-0002-9491-1838"},"institutions":[{"id":"https://openalex.org/I71920554","display_name":"King Abdullah University of Science and Technology","ror":"https://ror.org/01q3tbs38","country_code":"SA","type":"education","lineage":["https://openalex.org/I71920554"]}],"countries":["SA"],"is_corresponding":false,"raw_author_name":"Mohammad I. Younis","raw_affiliation_strings":["Nano/Micro Mechanics and Motion Laboratory, King Abdullah University of Science and Technology, Thuwal, Kingdom of Saudi Arabia"],"affiliations":[{"raw_affiliation_string":"Nano/Micro Mechanics and Motion Laboratory, King Abdullah University of Science and Technology, Thuwal, Kingdom of Saudi Arabia","institution_ids":["https://openalex.org/I71920554"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":4,"corresponding_author_ids":["https://openalex.org/A5025089738"],"corresponding_institution_ids":["https://openalex.org/I71920554"],"apc_list":null,"apc_paid":null,"fwci":0.1599,"has_fulltext":false,"cited_by_count":1,"citation_normalized_percentile":{"value":0.55694992,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":89,"max":94},"biblio":{"volume":null,"issue":null,"first_page":"225","last_page":"228"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T11449","display_name":"Mechanical and Optical Resonators","score":1.0,"subfield":{"id":"https://openalex.org/subfields/3107","display_name":"Atomic and Molecular Physics, and Optics"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T11449","display_name":"Mechanical and Optical Resonators","score":1.0,"subfield":{"id":"https://openalex.org/subfields/3107","display_name":"Atomic and Molecular Physics, and Optics"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":0.9998999834060669,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11160","display_name":"Acoustic Wave Resonator Technologies","score":0.9990000128746033,"subfield":{"id":"https://openalex.org/subfields/2204","display_name":"Biomedical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/resonator","display_name":"Resonator","score":0.8749921321868896},{"id":"https://openalex.org/keywords/materials-science","display_name":"Materials science","score":0.7795543670654297},{"id":"https://openalex.org/keywords/capacitive-sensing","display_name":"Capacitive sensing","score":0.7789465188980103},{"id":"https://openalex.org/keywords/q-factor","display_name":"Q factor","score":0.6165945529937744},{"id":"https://openalex.org/keywords/microelectromechanical-systems","display_name":"Microelectromechanical systems","score":0.6136044859886169},{"id":"https://openalex.org/keywords/nanoelectromechanical-systems","display_name":"Nanoelectromechanical systems","score":0.5277835726737976},{"id":"https://openalex.org/keywords/beam","display_name":"Beam (structure)","score":0.5275083184242249},{"id":"https://openalex.org/keywords/air-gap","display_name":"Air gap (plumbing)","score":0.5235604643821716},{"id":"https://openalex.org/keywords/electrode","display_name":"Electrode","score":0.4894062578678131},{"id":"https://openalex.org/keywords/optics","display_name":"Optics","score":0.44385889172554016},{"id":"https://openalex.org/keywords/optoelectronics","display_name":"Optoelectronics","score":0.4382402002811432},{"id":"https://openalex.org/keywords/plane","display_name":"Plane (geometry)","score":0.41732969880104065},{"id":"https://openalex.org/keywords/acoustics","display_name":"Acoustics","score":0.34827184677124023},{"id":"https://openalex.org/keywords/composite-material","display_name":"Composite material","score":0.17534202337265015},{"id":"https://openalex.org/keywords/electrical-engineering","display_name":"Electrical engineering","score":0.17095184326171875},{"id":"https://openalex.org/keywords/physics","display_name":"Physics","score":0.1341109275817871},{"id":"https://openalex.org/keywords/engineering","display_name":"Engineering","score":0.11178126931190491},{"id":"https://openalex.org/keywords/nanotechnology","display_name":"Nanotechnology","score":0.10891792178153992},{"id":"https://openalex.org/keywords/geometry","display_name":"Geometry","score":0.062017470598220825}],"concepts":[{"id":"https://openalex.org/C97126364","wikidata":"https://www.wikidata.org/wiki/Q349669","display_name":"Resonator","level":2,"score":0.8749921321868896},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.7795543670654297},{"id":"https://openalex.org/C206755178","wikidata":"https://www.wikidata.org/wiki/Q1131271","display_name":"Capacitive sensing","level":2,"score":0.7789465188980103},{"id":"https://openalex.org/C187725362","wikidata":"https://www.wikidata.org/wiki/Q830521","display_name":"Q factor","level":3,"score":0.6165945529937744},{"id":"https://openalex.org/C37977207","wikidata":"https://www.wikidata.org/wiki/Q175561","display_name":"Microelectromechanical systems","level":2,"score":0.6136044859886169},{"id":"https://openalex.org/C173409883","wikidata":"https://www.wikidata.org/wiki/Q175593","display_name":"Nanoelectromechanical systems","level":4,"score":0.5277835726737976},{"id":"https://openalex.org/C168834538","wikidata":"https://www.wikidata.org/wiki/Q3705329","display_name":"Beam (structure)","level":2,"score":0.5275083184242249},{"id":"https://openalex.org/C50587689","wikidata":"https://www.wikidata.org/wiki/Q4698328","display_name":"Air gap (plumbing)","level":2,"score":0.5235604643821716},{"id":"https://openalex.org/C17525397","wikidata":"https://www.wikidata.org/wiki/Q176140","display_name":"Electrode","level":2,"score":0.4894062578678131},{"id":"https://openalex.org/C120665830","wikidata":"https://www.wikidata.org/wiki/Q14620","display_name":"Optics","level":1,"score":0.44385889172554016},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.4382402002811432},{"id":"https://openalex.org/C17825722","wikidata":"https://www.wikidata.org/wiki/Q17285","display_name":"Plane (geometry)","level":2,"score":0.41732969880104065},{"id":"https://openalex.org/C24890656","wikidata":"https://www.wikidata.org/wiki/Q82811","display_name":"Acoustics","level":1,"score":0.34827184677124023},{"id":"https://openalex.org/C159985019","wikidata":"https://www.wikidata.org/wiki/Q181790","display_name":"Composite material","level":1,"score":0.17534202337265015},{"id":"https://openalex.org/C119599485","wikidata":"https://www.wikidata.org/wiki/Q43035","display_name":"Electrical engineering","level":1,"score":0.17095184326171875},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.1341109275817871},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.11178126931190491},{"id":"https://openalex.org/C171250308","wikidata":"https://www.wikidata.org/wiki/Q11468","display_name":"Nanotechnology","level":1,"score":0.10891792178153992},{"id":"https://openalex.org/C2524010","wikidata":"https://www.wikidata.org/wiki/Q8087","display_name":"Geometry","level":1,"score":0.062017470598220825},{"id":"https://openalex.org/C155672457","wikidata":"https://www.wikidata.org/wiki/Q61231","display_name":"Nanoparticle","level":2,"score":0.0},{"id":"https://openalex.org/C62520636","wikidata":"https://www.wikidata.org/wiki/Q944","display_name":"Quantum mechanics","level":1,"score":0.0},{"id":"https://openalex.org/C15083742","wikidata":"https://www.wikidata.org/wiki/Q261659","display_name":"Nanomedicine","level":3,"score":0.0},{"id":"https://openalex.org/C33923547","wikidata":"https://www.wikidata.org/wiki/Q395","display_name":"Mathematics","level":0,"score":0.0}],"mesh":[],"locations_count":2,"locations":[{"id":"doi:10.1109/nems.2018.8557020","is_oa":false,"landing_page_url":"https://doi.org/10.1109/nems.2018.8557020","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2018 IEEE 13th Annual International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)","raw_type":"proceedings-article"},{"id":"pmh:oai:repository.kaust.edu.sa:10754/630708","is_oa":false,"landing_page_url":"http://hdl.handle.net/10754/630708","pdf_url":null,"source":{"id":"https://openalex.org/S4306401596","display_name":"King Abdullah University of Science and Technology Repository (King Abdullah University of Science and Technology)","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"host_organization":"https://openalex.org/I71920554","host_organization_name":"King Abdullah University of Science and Technology","host_organization_lineage":["https://openalex.org/I71920554"],"host_organization_lineage_names":[],"type":"repository"},"license":null,"license_id":null,"version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"","raw_type":"Conference Paper"}],"best_oa_location":null,"sustainable_development_goals":[{"id":"https://metadata.un.org/sdg/11","display_name":"Sustainable cities and communities","score":0.47999998927116394}],"awards":[],"funders":[{"id":"https://openalex.org/F4320322320","display_name":"King Abdullah University of Science and Technology","ror":"https://ror.org/01q3tbs38"}],"has_content":{"grobid_xml":false,"pdf":false},"content_urls":null,"referenced_works_count":14,"referenced_works":["https://openalex.org/W1991861038","https://openalex.org/W1999236037","https://openalex.org/W2028969753","https://openalex.org/W2029343694","https://openalex.org/W2079289673","https://openalex.org/W2090384543","https://openalex.org/W2147664848","https://openalex.org/W2162533706","https://openalex.org/W2167552929","https://openalex.org/W2278569975","https://openalex.org/W2520696995","https://openalex.org/W2588536785","https://openalex.org/W2769383380","https://openalex.org/W2792155696"],"related_works":["https://openalex.org/W4285099144","https://openalex.org/W2294335124","https://openalex.org/W4317346967","https://openalex.org/W1514561573","https://openalex.org/W1527636689","https://openalex.org/W1852323362","https://openalex.org/W1902246597","https://openalex.org/W2612655727","https://openalex.org/W2891496159","https://openalex.org/W2050528733"],"abstract_inverted_index":{"This":[0],"paper":[1],"presents":[2],"a":[3],"study":[4,114],"of":[5,14,58,65,105,115,118,125,138,149],"the":[6,11,36,44,55,59,66,70,98,103,116,119,136,139,150,155],"quality":[7,37,71,151],"factor":[8,152],"dependence":[9],"on":[10,69,102],"geometrical":[12],"parameters":[13],"in-plane":[15,123,143],"clamped-clamped":[16],"micro-":[17],"and":[18,31,97,127],"nano-beams":[19],"capacitive":[20,51,120],"structures":[21,45],"at":[22,83],"low-to-high":[23],"pressure":[24,85,93],"range.":[25,94],"We":[26],"found":[27,75,134],"that":[28,135],"smaller":[29],"length":[30],"larger":[32],"beam":[33,157],"thickness":[34],"maximize":[35],"factor.":[38,72],"To":[39],"minimize":[40],"squeeze":[41],"film":[42],"damping,":[43],"have":[46,108],"been":[47,109],"fabricated":[48],"with":[49],"large":[50],"air":[52,99],"gaps.":[53],"Despite":[54],"high":[56,92],"ratio":[57],"gap/thickness,":[60],"we":[61],"report":[62],"significant":[63,147],"effect":[64,80,117],"gap":[67,100,121],"width":[68],"It":[73,132],"is":[74,81,130,133],"that,":[76],"for":[77,87,122,142],"micro-beams,":[78],"this":[79],"limited":[82],"low":[84],"while":[86],"nano-beams,":[88],"it":[89],"continues":[90],"until":[91],"The":[95],"geometry":[96],"effects":[101],"damping":[104],"beams":[106],"resonators":[107,124,144],"examined":[110],"experimentally.":[111],"A":[112],"finite-element":[113],"one":[126],"two-side":[128],"electrodes":[129,141],"presented.":[131],"presence":[137],"double":[140],"can":[145],"cause":[146],"drop":[148],"compared":[153],"to":[154],"single-sided":[156],"resonator.":[158]},"counts_by_year":[{"year":2020,"cited_by_count":1}],"updated_date":"2026-01-13T01:12:25.745995","created_date":"2025-10-10T00:00:00"}