{"id":"https://openalex.org/W2904206282","doi":"https://doi.org/10.1109/nems.2018.8557003","title":"A Study on High Resolution Batch-Mode Micro-Utralsonic-Machining with Constant Feed Force of Sapphire for MEMS Application","display_name":"A Study on High Resolution Batch-Mode Micro-Utralsonic-Machining with Constant Feed Force of Sapphire for MEMS Application","publication_year":2018,"publication_date":"2018-04-01","ids":{"openalex":"https://openalex.org/W2904206282","doi":"https://doi.org/10.1109/nems.2018.8557003","mag":"2904206282"},"language":"en","primary_location":{"id":"doi:10.1109/nems.2018.8557003","is_oa":false,"landing_page_url":"https://doi.org/10.1109/nems.2018.8557003","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2018 IEEE 13th Annual International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)","raw_type":"proceedings-article"},"type":"article","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5056905294","display_name":"Yanming Xia","orcid":null},"institutions":[{"id":"https://openalex.org/I191208505","display_name":"Xiamen University","ror":"https://ror.org/00mcjh785","country_code":"CN","type":"education","lineage":["https://openalex.org/I191208505"]}],"countries":["CN"],"is_corresponding":true,"raw_author_name":"Yanming Xia","raw_affiliation_strings":["Department of Mechanical & Electrical Engineering, Xiamen University, Xiamen, Fujian, China"],"affiliations":[{"raw_affiliation_string":"Department of Mechanical & Electrical Engineering, Xiamen University, Xiamen, Fujian, China","institution_ids":["https://openalex.org/I191208505"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5078263922","display_name":"Tao Wang","orcid":"https://orcid.org/0000-0002-4294-9690"},"institutions":[{"id":"https://openalex.org/I20231570","display_name":"Peking University","ror":"https://ror.org/02v51f717","country_code":"CN","type":"education","lineage":["https://openalex.org/I20231570"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Tao Wang","raw_affiliation_strings":["National Key Laboratory of Science and Technology on Micro/Nano Fabrication, Peking University, Beijing, China"],"affiliations":[{"raw_affiliation_string":"National Key Laboratory of Science and Technology on Micro/Nano Fabrication, Peking University, Beijing, China","institution_ids":["https://openalex.org/I20231570"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5002489705","display_name":"Lu Song","orcid":"https://orcid.org/0000-0002-7285-6794"},"institutions":[{"id":"https://openalex.org/I20231570","display_name":"Peking University","ror":"https://ror.org/02v51f717","country_code":"CN","type":"education","lineage":["https://openalex.org/I20231570"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Lu Song","raw_affiliation_strings":["National Key Laboratory of Science and Technology on Micro/Nano Fabrication, Peking University, Beijing, China"],"affiliations":[{"raw_affiliation_string":"National Key Laboratory of Science and Technology on Micro/Nano Fabrication, Peking University, Beijing, China","institution_ids":["https://openalex.org/I20231570"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5070398308","display_name":"Xuanyanz Li","orcid":null},"institutions":[{"id":"https://openalex.org/I191208505","display_name":"Xiamen University","ror":"https://ror.org/00mcjh785","country_code":"CN","type":"education","lineage":["https://openalex.org/I191208505"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Xuanyanz Li","raw_affiliation_strings":["Department of Mechanical & Electrical Engineering, Xiamen University, Xiamen, Fujian, China"],"affiliations":[{"raw_affiliation_string":"Department of Mechanical & Electrical Engineering, Xiamen University, Xiamen, Fujian, China","institution_ids":["https://openalex.org/I191208505"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5100766616","display_name":"Shenglin Ma","orcid":"https://orcid.org/0000-0002-3481-3929"},"institutions":[{"id":"https://openalex.org/I191208505","display_name":"Xiamen University","ror":"https://ror.org/00mcjh785","country_code":"CN","type":"education","lineage":["https://openalex.org/I191208505"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Shenglin Ma","raw_affiliation_strings":["Department of Mechanical & Electrical Engineering, Xiamen University, Xiamen, Fujian, China"],"affiliations":[{"raw_affiliation_string":"Department of Mechanical & Electrical Engineering, Xiamen University, Xiamen, Fujian, China","institution_ids":["https://openalex.org/I191208505"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5046894809","display_name":"Rongfeng Luo","orcid":"https://orcid.org/0000-0002-0455-0347"},"institutions":[{"id":"https://openalex.org/I191208505","display_name":"Xiamen University","ror":"https://ror.org/00mcjh785","country_code":"CN","type":"education","lineage":["https://openalex.org/I191208505"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Rongfeng Luo","raw_affiliation_strings":["Department of Mechanical & Electrical Engineering, Xiamen University, Xiamen, Fujian, China"],"affiliations":[{"raw_affiliation_string":"Department of Mechanical & Electrical Engineering, Xiamen University, Xiamen, Fujian, China","institution_ids":["https://openalex.org/I191208505"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5100394911","display_name":"Jing Chen","orcid":"https://orcid.org/0000-0002-6640-7140"},"institutions":[{"id":"https://openalex.org/I20231570","display_name":"Peking University","ror":"https://ror.org/02v51f717","country_code":"CN","type":"education","lineage":["https://openalex.org/I20231570"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Jing Chen","raw_affiliation_strings":["National Key Laboratory of Science and Technology on Micro/Nano Fabrication, Peking University, Beijing, China"],"affiliations":[{"raw_affiliation_string":"National Key Laboratory of Science and Technology on Micro/Nano Fabrication, Peking University, Beijing, China","institution_ids":["https://openalex.org/I20231570"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5100391999","display_name":"Wei Wang","orcid":"https://orcid.org/0000-0002-5257-7675"},"institutions":[{"id":"https://openalex.org/I20231570","display_name":"Peking University","ror":"https://ror.org/02v51f717","country_code":"CN","type":"education","lineage":["https://openalex.org/I20231570"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Wei Wang","raw_affiliation_strings":["National Key Laboratory of Science and Technology on Micro/Nano Fabrication, Peking University, Beijing, China"],"affiliations":[{"raw_affiliation_string":"National Key Laboratory of Science and Technology on Micro/Nano Fabrication, Peking University, Beijing, China","institution_ids":["https://openalex.org/I20231570"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5104079377","display_name":"Yufeng Jin","orcid":"https://orcid.org/0009-0006-9750-4599"},"institutions":[{"id":"https://openalex.org/I4210128628","display_name":"Peking University Shenzhen Hospital","ror":"https://ror.org/03kkjyb15","country_code":"CN","type":"healthcare","lineage":["https://openalex.org/I4210128628"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Yufeng Jin","raw_affiliation_strings":["Peking University Shenzhen Graduate School, Shenzhen, China"],"affiliations":[{"raw_affiliation_string":"Peking University Shenzhen Graduate School, Shenzhen, China","institution_ids":["https://openalex.org/I4210128628"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":9,"corresponding_author_ids":["https://openalex.org/A5056905294"],"corresponding_institution_ids":["https://openalex.org/I191208505"],"apc_list":null,"apc_paid":null,"fwci":0.2575,"has_fulltext":false,"cited_by_count":4,"citation_normalized_percentile":{"value":0.58890391,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":90,"max":96},"biblio":{"volume":null,"issue":null,"first_page":"304","last_page":"307"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":0.9980000257492065,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":0.9980000257492065,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11301","display_name":"Advanced Surface Polishing Techniques","score":0.9980000257492065,"subfield":{"id":"https://openalex.org/subfields/2204","display_name":"Biomedical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11451","display_name":"Advanced Machining and Optimization Techniques","score":0.9968000054359436,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/machining","display_name":"Machining","score":0.8266780376434326},{"id":"https://openalex.org/keywords/sapphire","display_name":"Sapphire","score":0.8231638669967651},{"id":"https://openalex.org/keywords/materials-science","display_name":"Materials science","score":0.800349235534668},{"id":"https://openalex.org/keywords/surface-roughness","display_name":"Surface roughness","score":0.677980363368988},{"id":"https://openalex.org/keywords/resonator","display_name":"Resonator","score":0.65484619140625},{"id":"https://openalex.org/keywords/microelectromechanical-systems","display_name":"Microelectromechanical systems","score":0.6511166095733643},{"id":"https://openalex.org/keywords/surface-micromachining","display_name":"Surface micromachining","score":0.49332013726234436},{"id":"https://openalex.org/keywords/optoelectronics","display_name":"Optoelectronics","score":0.4084615707397461},{"id":"https://openalex.org/keywords/composite-material","display_name":"Composite material","score":0.34720462560653687},{"id":"https://openalex.org/keywords/optics","display_name":"Optics","score":0.34568896889686584},{"id":"https://openalex.org/keywords/metallurgy","display_name":"Metallurgy","score":0.13649234175682068},{"id":"https://openalex.org/keywords/laser","display_name":"Laser","score":0.09872564673423767},{"id":"https://openalex.org/keywords/fabrication","display_name":"Fabrication","score":0.07328709959983826}],"concepts":[{"id":"https://openalex.org/C523214423","wikidata":"https://www.wikidata.org/wiki/Q192047","display_name":"Machining","level":2,"score":0.8266780376434326},{"id":"https://openalex.org/C2780064504","wikidata":"https://www.wikidata.org/wiki/Q127583","display_name":"Sapphire","level":3,"score":0.8231638669967651},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.800349235534668},{"id":"https://openalex.org/C107365816","wikidata":"https://www.wikidata.org/wiki/Q114817","display_name":"Surface roughness","level":2,"score":0.677980363368988},{"id":"https://openalex.org/C97126364","wikidata":"https://www.wikidata.org/wiki/Q349669","display_name":"Resonator","level":2,"score":0.65484619140625},{"id":"https://openalex.org/C37977207","wikidata":"https://www.wikidata.org/wiki/Q175561","display_name":"Microelectromechanical systems","level":2,"score":0.6511166095733643},{"id":"https://openalex.org/C145667562","wikidata":"https://www.wikidata.org/wiki/Q7646003","display_name":"Surface micromachining","level":4,"score":0.49332013726234436},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.4084615707397461},{"id":"https://openalex.org/C159985019","wikidata":"https://www.wikidata.org/wiki/Q181790","display_name":"Composite material","level":1,"score":0.34720462560653687},{"id":"https://openalex.org/C120665830","wikidata":"https://www.wikidata.org/wiki/Q14620","display_name":"Optics","level":1,"score":0.34568896889686584},{"id":"https://openalex.org/C191897082","wikidata":"https://www.wikidata.org/wiki/Q11467","display_name":"Metallurgy","level":1,"score":0.13649234175682068},{"id":"https://openalex.org/C520434653","wikidata":"https://www.wikidata.org/wiki/Q38867","display_name":"Laser","level":2,"score":0.09872564673423767},{"id":"https://openalex.org/C136525101","wikidata":"https://www.wikidata.org/wiki/Q5428139","display_name":"Fabrication","level":3,"score":0.07328709959983826},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.0},{"id":"https://openalex.org/C71924100","wikidata":"https://www.wikidata.org/wiki/Q11190","display_name":"Medicine","level":0,"score":0.0},{"id":"https://openalex.org/C142724271","wikidata":"https://www.wikidata.org/wiki/Q7208","display_name":"Pathology","level":1,"score":0.0},{"id":"https://openalex.org/C204787440","wikidata":"https://www.wikidata.org/wiki/Q188504","display_name":"Alternative medicine","level":2,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1109/nems.2018.8557003","is_oa":false,"landing_page_url":"https://doi.org/10.1109/nems.2018.8557003","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2018 IEEE 13th Annual International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)","raw_type":"proceedings-article"}],"best_oa_location":null,"sustainable_development_goals":[{"score":0.6700000166893005,"display_name":"Affordable and clean energy","id":"https://metadata.un.org/sdg/7"}],"awards":[],"funders":[],"has_content":{"pdf":false,"grobid_xml":false},"content_urls":null,"referenced_works_count":20,"referenced_works":["https://openalex.org/W1608153989","https://openalex.org/W1657863997","https://openalex.org/W1968496548","https://openalex.org/W1970956564","https://openalex.org/W1981028803","https://openalex.org/W1987017526","https://openalex.org/W2070483045","https://openalex.org/W2075383192","https://openalex.org/W2085630428","https://openalex.org/W2103182731","https://openalex.org/W2124593019","https://openalex.org/W2125563619","https://openalex.org/W2136109756","https://openalex.org/W2324722934","https://openalex.org/W2568581032","https://openalex.org/W2610956499","https://openalex.org/W2773825478","https://openalex.org/W6637110973","https://openalex.org/W6671958570","https://openalex.org/W6747135741"],"related_works":["https://openalex.org/W2272290532","https://openalex.org/W2007005446","https://openalex.org/W2587892165","https://openalex.org/W2962992888","https://openalex.org/W2537716684","https://openalex.org/W2114051864","https://openalex.org/W2152087047","https://openalex.org/W1563566515","https://openalex.org/W4296111267","https://openalex.org/W4206531533"],"abstract_inverted_index":{"Sapphire":[0],"has":[1,74,102,113],"widely":[2],"used":[3],"for":[4,35,69],"application":[5],"to":[6,9,85],"MEMS":[7,70],"due":[8],"its":[10,123],"excellent":[11],"optical":[12,30],"property,":[13,15,24],"mechanical":[14],"chemical":[16],"stability,":[17],"high":[18,36,45,58,77],"melting":[19],"point":[20],"and":[21,47,72,81,122],"electrical":[22],"insulation":[23],"such":[25],"as":[26],"X-ray":[27],"resonator":[28,43],"cavities,":[29],"wall":[31],"shear":[32],"stress":[33],"sensor":[34],"temperature":[37],"applications,":[38],"lateral":[39],"overtone":[40],"bulk":[41],"acoustic":[42],"with":[44,63,94],"f-Q":[46],"increasing":[48],"the":[49,95],"output":[50],"power":[51],"of":[52,67,76,100,111],"LED.":[53],"This":[54],"paper":[55],"presented":[56],"a":[57,117],"resolution":[59,80,97],"batch-mode":[60,106],"micro-utralsonic-machining":[61],"(\u03bcUSM)":[62],"constant":[64],"feed":[65],"force":[66],"sapphire":[68,101],"application,":[71],"it":[73],"advantages":[75],"machining":[78,87,109],"efficiency,":[79],"surface":[82,125],"quality":[83],"compared":[84],"other":[86],"method.":[88],"High":[89],"aspect":[90],"ratio":[91],"(>4)":[92],"structure":[93],"feature":[96],"below":[98,128],"1\u03bcm":[99],"been":[103,114],"machined":[104],"by":[105],"\u03bcUSM.":[107],"A":[108],"depth":[110],"40\u03bcm":[112],"achieved":[115],"at":[116],"removal":[118],"rate":[119],"up-to":[120],"4\u03bcm/min,":[121],"bottom":[124],"roughness":[126],"is":[127],"Ra":[129],"80nm.":[130]},"counts_by_year":[{"year":2022,"cited_by_count":2},{"year":2019,"cited_by_count":1},{"year":2018,"cited_by_count":1}],"updated_date":"2025-11-06T03:46:38.306776","created_date":"2025-10-10T00:00:00"}