{"id":"https://openalex.org/W2903726504","doi":"https://doi.org/10.1109/nems.2018.8556949","title":"A Novel Air-Coupled Piezoelectric Micromachined Ultrasonic Transducers Based on Parametric Excitation Method","display_name":"A Novel Air-Coupled Piezoelectric Micromachined Ultrasonic Transducers Based on Parametric Excitation Method","publication_year":2018,"publication_date":"2018-04-01","ids":{"openalex":"https://openalex.org/W2903726504","doi":"https://doi.org/10.1109/nems.2018.8556949","mag":"2903726504"},"language":"en","primary_location":{"id":"doi:10.1109/nems.2018.8556949","is_oa":false,"landing_page_url":"https://doi.org/10.1109/nems.2018.8556949","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2018 IEEE 13th Annual International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)","raw_type":"proceedings-article"},"type":"article","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5076601427","display_name":"Tingzhong Xu","orcid":"https://orcid.org/0000-0001-8193-0223"},"institutions":[{"id":"https://openalex.org/I87445476","display_name":"Xi'an Jiaotong University","ror":"https://ror.org/017zhmm22","country_code":"CN","type":"education","lineage":["https://openalex.org/I87445476"]}],"countries":["CN"],"is_corresponding":true,"raw_author_name":"Tingzhong Xu","raw_affiliation_strings":["State Key Laboratory for Manufacturing Systems Engineering, Xi'an Jiaotong University, Shannxi, China"],"affiliations":[{"raw_affiliation_string":"State Key Laboratory for Manufacturing Systems Engineering, Xi'an Jiaotong University, Shannxi, China","institution_ids":["https://openalex.org/I87445476"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5072118178","display_name":"Libo Zhao","orcid":"https://orcid.org/0000-0001-6101-8173"},"institutions":[{"id":"https://openalex.org/I87445476","display_name":"Xi'an Jiaotong University","ror":"https://ror.org/017zhmm22","country_code":"CN","type":"education","lineage":["https://openalex.org/I87445476"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Libo Zhao","raw_affiliation_strings":["State Key Laboratory for Manufacturing Systems Engineering, Xi'an Jiaotong University, Shannxi, China"],"affiliations":[{"raw_affiliation_string":"State Key Laboratory for Manufacturing Systems Engineering, Xi'an Jiaotong University, Shannxi, China","institution_ids":["https://openalex.org/I87445476"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5019670877","display_name":"Dejiang Lu","orcid":"https://orcid.org/0000-0001-5371-5817"},"institutions":[{"id":"https://openalex.org/I87445476","display_name":"Xi'an Jiaotong University","ror":"https://ror.org/017zhmm22","country_code":"CN","type":"education","lineage":["https://openalex.org/I87445476"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Dejiang Lu","raw_affiliation_strings":["State Key Laboratory for Manufacturing Systems Engineering, Xi'an Jiaotong University, Shannxi, China"],"affiliations":[{"raw_affiliation_string":"State Key Laboratory for Manufacturing Systems Engineering, Xi'an Jiaotong University, Shannxi, China","institution_ids":["https://openalex.org/I87445476"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5033373769","display_name":"Zhuangde Jiang","orcid":"https://orcid.org/0000-0001-5557-2653"},"institutions":[{"id":"https://openalex.org/I87445476","display_name":"Xi'an Jiaotong University","ror":"https://ror.org/017zhmm22","country_code":"CN","type":"education","lineage":["https://openalex.org/I87445476"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Zhuangde Jiang","raw_affiliation_strings":["State Key Laboratory for Manufacturing Systems Engineering, Xi'an Jiaotong University, Shannxi, China"],"affiliations":[{"raw_affiliation_string":"State Key Laboratory for Manufacturing Systems Engineering, Xi'an Jiaotong University, Shannxi, China","institution_ids":["https://openalex.org/I87445476"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5018141072","display_name":"Zhiwei Cui","orcid":"https://orcid.org/0000-0002-6846-9708"},"institutions":[{"id":"https://openalex.org/I110440473","display_name":"Xi'an University of Science and Technology","ror":"https://ror.org/046fkpt18","country_code":"CN","type":"education","lineage":["https://openalex.org/I110440473"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Zhiwei Cui","raw_affiliation_strings":["Department of Biomedical Engineering, School of Life Science and Technology, Xi'an"],"affiliations":[{"raw_affiliation_string":"Department of Biomedical Engineering, School of Life Science and Technology, Xi'an","institution_ids":["https://openalex.org/I110440473"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5074816806","display_name":"Jiawang Zhang","orcid":"https://orcid.org/0000-0001-8147-1258"},"institutions":[{"id":"https://openalex.org/I87445476","display_name":"Xi'an Jiaotong University","ror":"https://ror.org/017zhmm22","country_code":"CN","type":"education","lineage":["https://openalex.org/I87445476"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Jiawang Zhang","raw_affiliation_strings":["State Key Laboratory for Manufacturing Systems Engineering, Xi'an Jiaotong University, Shannxi, China"],"affiliations":[{"raw_affiliation_string":"State Key Laboratory for Manufacturing Systems Engineering, Xi'an Jiaotong University, Shannxi, China","institution_ids":["https://openalex.org/I87445476"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":6,"corresponding_author_ids":["https://openalex.org/A5076601427"],"corresponding_institution_ids":["https://openalex.org/I87445476"],"apc_list":null,"apc_paid":null,"fwci":0.0,"has_fulltext":false,"cited_by_count":0,"citation_normalized_percentile":{"value":0.16913292,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":null,"biblio":{"volume":"396","issue":null,"first_page":"240","last_page":"244"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10662","display_name":"Ultrasonics and Acoustic Wave Propagation","score":0.9990000128746033,"subfield":{"id":"https://openalex.org/subfields/2211","display_name":"Mechanics of Materials"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10662","display_name":"Ultrasonics and Acoustic Wave Propagation","score":0.9990000128746033,"subfield":{"id":"https://openalex.org/subfields/2211","display_name":"Mechanics of Materials"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11160","display_name":"Acoustic Wave Resonator Technologies","score":0.9980000257492065,"subfield":{"id":"https://openalex.org/subfields/2204","display_name":"Biomedical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10338","display_name":"Advanced Sensor and Energy Harvesting Materials","score":0.9976999759674072,"subfield":{"id":"https://openalex.org/subfields/2204","display_name":"Biomedical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/bimorph","display_name":"Bimorph","score":0.7316706776618958},{"id":"https://openalex.org/keywords/excitation","display_name":"Excitation","score":0.6981326937675476},{"id":"https://openalex.org/keywords/materials-science","display_name":"Materials science","score":0.6884753704071045},{"id":"https://openalex.org/keywords/parametric-statistics","display_name":"Parametric statistics","score":0.6870083808898926},{"id":"https://openalex.org/keywords/acoustics","display_name":"Acoustics","score":0.6204863786697388},{"id":"https://openalex.org/keywords/ultrasonic-sensor","display_name":"Ultrasonic sensor","score":0.5328153967857361},{"id":"https://openalex.org/keywords/piezoelectricity","display_name":"Piezoelectricity","score":0.4526578485965729},{"id":"https://openalex.org/keywords/voltage","display_name":"Voltage","score":0.4520334303379059},{"id":"https://openalex.org/keywords/finite-element-method","display_name":"Finite element method","score":0.4218297600746155},{"id":"https://openalex.org/keywords/physics","display_name":"Physics","score":0.14997181296348572},{"id":"https://openalex.org/keywords/structural-engineering","display_name":"Structural engineering","score":0.12788620591163635},{"id":"https://openalex.org/keywords/electrical-engineering","display_name":"Electrical engineering","score":0.10947367548942566},{"id":"https://openalex.org/keywords/engineering","display_name":"Engineering","score":0.08426564931869507},{"id":"https://openalex.org/keywords/mathematics","display_name":"Mathematics","score":0.06584140658378601}],"concepts":[{"id":"https://openalex.org/C2778393539","wikidata":"https://www.wikidata.org/wiki/Q4913759","display_name":"Bimorph","level":3,"score":0.7316706776618958},{"id":"https://openalex.org/C83581075","wikidata":"https://www.wikidata.org/wiki/Q1361503","display_name":"Excitation","level":2,"score":0.6981326937675476},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.6884753704071045},{"id":"https://openalex.org/C117251300","wikidata":"https://www.wikidata.org/wiki/Q1849855","display_name":"Parametric statistics","level":2,"score":0.6870083808898926},{"id":"https://openalex.org/C24890656","wikidata":"https://www.wikidata.org/wiki/Q82811","display_name":"Acoustics","level":1,"score":0.6204863786697388},{"id":"https://openalex.org/C81288441","wikidata":"https://www.wikidata.org/wiki/Q20736125","display_name":"Ultrasonic sensor","level":2,"score":0.5328153967857361},{"id":"https://openalex.org/C100082104","wikidata":"https://www.wikidata.org/wiki/Q183759","display_name":"Piezoelectricity","level":2,"score":0.4526578485965729},{"id":"https://openalex.org/C165801399","wikidata":"https://www.wikidata.org/wiki/Q25428","display_name":"Voltage","level":2,"score":0.4520334303379059},{"id":"https://openalex.org/C135628077","wikidata":"https://www.wikidata.org/wiki/Q220184","display_name":"Finite element method","level":2,"score":0.4218297600746155},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.14997181296348572},{"id":"https://openalex.org/C66938386","wikidata":"https://www.wikidata.org/wiki/Q633538","display_name":"Structural engineering","level":1,"score":0.12788620591163635},{"id":"https://openalex.org/C119599485","wikidata":"https://www.wikidata.org/wiki/Q43035","display_name":"Electrical engineering","level":1,"score":0.10947367548942566},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.08426564931869507},{"id":"https://openalex.org/C33923547","wikidata":"https://www.wikidata.org/wiki/Q395","display_name":"Mathematics","level":0,"score":0.06584140658378601},{"id":"https://openalex.org/C105795698","wikidata":"https://www.wikidata.org/wiki/Q12483","display_name":"Statistics","level":1,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1109/nems.2018.8556949","is_oa":false,"landing_page_url":"https://doi.org/10.1109/nems.2018.8556949","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2018 IEEE 13th Annual International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)","raw_type":"proceedings-article"}],"best_oa_location":null,"sustainable_development_goals":[{"id":"https://metadata.un.org/sdg/7","display_name":"Affordable and clean energy","score":0.5400000214576721}],"awards":[],"funders":[],"has_content":{"pdf":false,"grobid_xml":false},"content_urls":null,"referenced_works_count":8,"referenced_works":["https://openalex.org/W1482570919","https://openalex.org/W1985383371","https://openalex.org/W2009656619","https://openalex.org/W2036774645","https://openalex.org/W2089008891","https://openalex.org/W2092950681","https://openalex.org/W2094382114","https://openalex.org/W2315162695"],"related_works":["https://openalex.org/W4281290738","https://openalex.org/W831624437","https://openalex.org/W2037248982","https://openalex.org/W2071955149","https://openalex.org/W2105101786","https://openalex.org/W2052310304","https://openalex.org/W2373779337","https://openalex.org/W2377795535","https://openalex.org/W2522212431","https://openalex.org/W2050925970"],"abstract_inverted_index":{"This":[0],"paper":[1],"presents":[2],"a":[3,102],"novel":[4],"PMUTs":[5,81],"excitation":[6,24,32,85,115],"method":[7],"based":[8],"on":[9,28],"parametric":[10,84,114],"excitation.":[11],"An":[12],"extra":[13],"AC":[14],"perturbation":[15,59],"voltage":[16,62],"at":[17],"twice":[18],"the":[19,22,29,54,58,64,68,72,76,80,100,109,113],"frequency":[20,25],"of":[21,49,67,79,112],"main":[23],"was":[26,40,51,105],"superimposed":[27],"conventional":[30,73],"sinusoidal":[31],"voltage.":[33],"Finite":[34],"element":[35],"analysis":[36],"and":[37,63],"numerical":[38],"simulation":[39],"conducted":[41,106],"for":[42],"an":[43],"air-coupled":[44],"bimorph":[45,74],"PMUTs.":[46],"The":[47],"level":[48],"amplification":[50,110],"related":[52],"to":[53,107],"phase":[55],"difference":[56],"between":[57],"&":[60],"driving":[61],"quality":[65],"factor":[66],"structure.":[69],"Compared":[70],"with":[71],"PMUTs,":[75],"transmission":[77],"sensitivity":[78],"excited":[82],"by":[83,90],"method,":[86],"can":[87],"be":[88],"improved":[89],"more":[91],"than":[92],"200%":[93],"around":[94],"1":[95],"MHz":[96],"working":[97],"frequency.":[98],"In":[99],"end":[101],"verification":[103],"experiment":[104],"verify":[108],"ability":[111],"method.":[116]},"counts_by_year":[],"updated_date":"2025-11-06T03:46:38.306776","created_date":"2025-10-10T00:00:00"}