{"id":"https://openalex.org/W2904342843","doi":"https://doi.org/10.1109/nems.2018.8556921","title":"Study of Amplitude Saturation in T-Shape MEMS Resonators","display_name":"Study of Amplitude Saturation in T-Shape MEMS Resonators","publication_year":2018,"publication_date":"2018-04-01","ids":{"openalex":"https://openalex.org/W2904342843","doi":"https://doi.org/10.1109/nems.2018.8556921","mag":"2904342843"},"language":"en","primary_location":{"id":"doi:10.1109/nems.2018.8556921","is_oa":false,"landing_page_url":"https://doi.org/10.1109/nems.2018.8556921","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2018 IEEE 13th Annual International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)","raw_type":"proceedings-article"},"type":"article","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5069043240","display_name":"Hai Lan","orcid":"https://orcid.org/0000-0002-9128-404X"},"institutions":[{"id":"https://openalex.org/I87445476","display_name":"Xi'an Jiaotong University","ror":"https://ror.org/017zhmm22","country_code":"CN","type":"education","lineage":["https://openalex.org/I87445476"]}],"countries":["CN"],"is_corresponding":true,"raw_author_name":"Hai Lan","raw_affiliation_strings":["State Key Laboratory for Manufacturing Systems Engineering, Xi'an Jiaotong University, Xi'an, Shaanxi, China"],"affiliations":[{"raw_affiliation_string":"State Key Laboratory for Manufacturing Systems Engineering, Xi'an Jiaotong University, Xi'an, Shaanxi, China","institution_ids":["https://openalex.org/I87445476"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5079974777","display_name":"Xueyong Wei","orcid":"https://orcid.org/0000-0002-6443-4727"},"institutions":[{"id":"https://openalex.org/I87445476","display_name":"Xi'an Jiaotong University","ror":"https://ror.org/017zhmm22","country_code":"CN","type":"education","lineage":["https://openalex.org/I87445476"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Xueyong Wei","raw_affiliation_strings":["State Key Laboratory for Manufacturing Systems Engineering, Xi'an Jiaotong University, Xi'an, Shaanxi, China"],"affiliations":[{"raw_affiliation_string":"State Key Laboratory for Manufacturing Systems Engineering, Xi'an Jiaotong University, Xi'an, Shaanxi, China","institution_ids":["https://openalex.org/I87445476"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5100769637","display_name":"Yulong Zhao","orcid":null},"institutions":[{"id":"https://openalex.org/I87445476","display_name":"Xi'an Jiaotong University","ror":"https://ror.org/017zhmm22","country_code":"CN","type":"education","lineage":["https://openalex.org/I87445476"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Yulong Zhao","raw_affiliation_strings":["State Key Laboratory for Manufacturing Systems Engineering, Xi'an Jiaotong University, Xi'an, Shaanxi, China"],"affiliations":[{"raw_affiliation_string":"State Key Laboratory for Manufacturing Systems Engineering, Xi'an Jiaotong University, Xi'an, Shaanxi, China","institution_ids":["https://openalex.org/I87445476"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5062577404","display_name":"Zhuangde Jiang","orcid":"https://orcid.org/0000-0002-8452-6768"},"institutions":[{"id":"https://openalex.org/I87445476","display_name":"Xi'an Jiaotong University","ror":"https://ror.org/017zhmm22","country_code":"CN","type":"education","lineage":["https://openalex.org/I87445476"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Zhuangde Jiang","raw_affiliation_strings":["State Key Laboratory for Manufacturing Systems Engineering, Xi'an Jiaotong University, Xi'an, Shaanxi, China"],"affiliations":[{"raw_affiliation_string":"State Key Laboratory for Manufacturing Systems Engineering, Xi'an Jiaotong University, Xi'an, Shaanxi, China","institution_ids":["https://openalex.org/I87445476"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":4,"corresponding_author_ids":["https://openalex.org/A5069043240"],"corresponding_institution_ids":["https://openalex.org/I87445476"],"apc_list":null,"apc_paid":null,"fwci":0.0,"has_fulltext":false,"cited_by_count":3,"citation_normalized_percentile":{"value":0.13833815,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":90,"max":99},"biblio":{"volume":null,"issue":null,"first_page":"102","last_page":"105"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":1.0,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":1.0,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11449","display_name":"Mechanical and Optical Resonators","score":1.0,"subfield":{"id":"https://openalex.org/subfields/3107","display_name":"Atomic and Molecular Physics, and Optics"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11160","display_name":"Acoustic Wave Resonator Technologies","score":0.9998999834060669,"subfield":{"id":"https://openalex.org/subfields/2204","display_name":"Biomedical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/resonator","display_name":"Resonator","score":0.9251476526260376},{"id":"https://openalex.org/keywords/microelectromechanical-systems","display_name":"Microelectromechanical systems","score":0.8187191486358643},{"id":"https://openalex.org/keywords/amplitude","display_name":"Amplitude","score":0.7533119916915894},{"id":"https://openalex.org/keywords/saturation","display_name":"Saturation (graph theory)","score":0.7031568288803101},{"id":"https://openalex.org/keywords/nonlinear-system","display_name":"Nonlinear system","score":0.6260513663291931},{"id":"https://openalex.org/keywords/control-theory","display_name":"Control theory (sociology)","score":0.528876543045044},{"id":"https://openalex.org/keywords/work","display_name":"Work (physics)","score":0.4350167214870453},{"id":"https://openalex.org/keywords/physics","display_name":"Physics","score":0.3992513418197632},{"id":"https://openalex.org/keywords/acoustics","display_name":"Acoustics","score":0.35651513934135437},{"id":"https://openalex.org/keywords/materials-science","display_name":"Materials science","score":0.32192760705947876},{"id":"https://openalex.org/keywords/optics","display_name":"Optics","score":0.24906125664710999},{"id":"https://openalex.org/keywords/optoelectronics","display_name":"Optoelectronics","score":0.22722259163856506},{"id":"https://openalex.org/keywords/computer-science","display_name":"Computer science","score":0.20226848125457764},{"id":"https://openalex.org/keywords/mathematics","display_name":"Mathematics","score":0.11711323261260986},{"id":"https://openalex.org/keywords/quantum-mechanics","display_name":"Quantum mechanics","score":0.07542139291763306}],"concepts":[{"id":"https://openalex.org/C97126364","wikidata":"https://www.wikidata.org/wiki/Q349669","display_name":"Resonator","level":2,"score":0.9251476526260376},{"id":"https://openalex.org/C37977207","wikidata":"https://www.wikidata.org/wiki/Q175561","display_name":"Microelectromechanical systems","level":2,"score":0.8187191486358643},{"id":"https://openalex.org/C180205008","wikidata":"https://www.wikidata.org/wiki/Q159190","display_name":"Amplitude","level":2,"score":0.7533119916915894},{"id":"https://openalex.org/C9930424","wikidata":"https://www.wikidata.org/wiki/Q7426587","display_name":"Saturation (graph theory)","level":2,"score":0.7031568288803101},{"id":"https://openalex.org/C158622935","wikidata":"https://www.wikidata.org/wiki/Q660848","display_name":"Nonlinear system","level":2,"score":0.6260513663291931},{"id":"https://openalex.org/C47446073","wikidata":"https://www.wikidata.org/wiki/Q5165890","display_name":"Control theory (sociology)","level":3,"score":0.528876543045044},{"id":"https://openalex.org/C18762648","wikidata":"https://www.wikidata.org/wiki/Q42213","display_name":"Work (physics)","level":2,"score":0.4350167214870453},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.3992513418197632},{"id":"https://openalex.org/C24890656","wikidata":"https://www.wikidata.org/wiki/Q82811","display_name":"Acoustics","level":1,"score":0.35651513934135437},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.32192760705947876},{"id":"https://openalex.org/C120665830","wikidata":"https://www.wikidata.org/wiki/Q14620","display_name":"Optics","level":1,"score":0.24906125664710999},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.22722259163856506},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.20226848125457764},{"id":"https://openalex.org/C33923547","wikidata":"https://www.wikidata.org/wiki/Q395","display_name":"Mathematics","level":0,"score":0.11711323261260986},{"id":"https://openalex.org/C62520636","wikidata":"https://www.wikidata.org/wiki/Q944","display_name":"Quantum mechanics","level":1,"score":0.07542139291763306},{"id":"https://openalex.org/C154945302","wikidata":"https://www.wikidata.org/wiki/Q11660","display_name":"Artificial intelligence","level":1,"score":0.0},{"id":"https://openalex.org/C2775924081","wikidata":"https://www.wikidata.org/wiki/Q55608371","display_name":"Control (management)","level":2,"score":0.0},{"id":"https://openalex.org/C114614502","wikidata":"https://www.wikidata.org/wiki/Q76592","display_name":"Combinatorics","level":1,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1109/nems.2018.8556921","is_oa":false,"landing_page_url":"https://doi.org/10.1109/nems.2018.8556921","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2018 IEEE 13th Annual International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)","raw_type":"proceedings-article"}],"best_oa_location":null,"sustainable_development_goals":[],"awards":[],"funders":[{"id":"https://openalex.org/F4320321001","display_name":"National Natural Science Foundation of China","ror":"https://ror.org/01h0zpd94"},{"id":"https://openalex.org/F4320324173","display_name":"Natural Science Foundation of Shaanxi Province","ror":null}],"has_content":{"grobid_xml":false,"pdf":false},"content_urls":null,"referenced_works_count":11,"referenced_works":["https://openalex.org/W1967951414","https://openalex.org/W2013625638","https://openalex.org/W2040163704","https://openalex.org/W2055645296","https://openalex.org/W2068169048","https://openalex.org/W2070254887","https://openalex.org/W2072243793","https://openalex.org/W2089867942","https://openalex.org/W2131384305","https://openalex.org/W2140810418","https://openalex.org/W2148441362"],"related_works":["https://openalex.org/W2272290532","https://openalex.org/W2120483398","https://openalex.org/W1530711136","https://openalex.org/W1763916368","https://openalex.org/W2319192085","https://openalex.org/W2059751975","https://openalex.org/W2391127530","https://openalex.org/W2587892165","https://openalex.org/W2537716684","https://openalex.org/W2152087047"],"abstract_inverted_index":{"In":[0],"order":[1,84],"to":[2,72],"improve":[3,73],"the":[4,20,55,74],"performances":[5],"of":[6,11,22,28,57,79,85],"MEMS":[7,45,80],"oscillators,":[8],"nonlinear":[9,29],"behavior":[10],"micromechanical":[12],"resonators":[13],"are":[14],"usually":[15],"avoided":[16],"or":[17],"canceled":[18],"in":[19,42,47],"most":[21],"research":[23],"work.":[24,49],"A":[25],"new":[26],"kind":[27],"phenomenon":[30],"called":[31],"amplitude":[32,61],"saturation":[33],"but":[34],"different":[35],"from":[36],"those":[37],"presented":[38],"before":[39],"is":[40],"found":[41],"a":[43],"T-shape":[44],"resonator":[46],"this":[48],"Open-loop":[50],"testing":[51],"results":[52,65],"clearly":[53],"show":[54],"effect":[56],"driving":[58],"conditions":[59],"on":[60],"saturation,":[62],"and":[63],"closed-loop":[64],"suggest":[66],"that":[67],"it":[68],"can":[69],"be":[70],"used":[71],"short":[75],"term":[76],"frequency":[77],"stability":[78],"oscillators":[81],"by":[82],"an":[83],"magnitude.":[86]},"counts_by_year":[{"year":2026,"cited_by_count":1},{"year":2025,"cited_by_count":1},{"year":2024,"cited_by_count":1}],"updated_date":"2026-03-04T09:10:02.777135","created_date":"2025-10-10T00:00:00"}