{"id":"https://openalex.org/W2752613755","doi":"https://doi.org/10.1109/nems.2017.8017143","title":"Reduction of the temperature sensitivity of anodic bonded resonant pressure micro sensors","display_name":"Reduction of the temperature sensitivity of anodic bonded resonant pressure micro sensors","publication_year":2017,"publication_date":"2017-04-01","ids":{"openalex":"https://openalex.org/W2752613755","doi":"https://doi.org/10.1109/nems.2017.8017143","mag":"2752613755"},"language":"en","primary_location":{"id":"doi:10.1109/nems.2017.8017143","is_oa":false,"landing_page_url":"https://doi.org/10.1109/nems.2017.8017143","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2017 IEEE 12th International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)","raw_type":"proceedings-article"},"type":"article","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5050851728","display_name":"Yulan Lu","orcid":"https://orcid.org/0000-0003-3826-5998"},"institutions":[{"id":"https://openalex.org/I4210165038","display_name":"University of Chinese Academy of Sciences","ror":"https://ror.org/05qbk4x57","country_code":"CN","type":"education","lineage":["https://openalex.org/I19820366","https://openalex.org/I4210165038"]}],"countries":["CN"],"is_corresponding":true,"raw_author_name":"Yulan Lu","raw_affiliation_strings":["University of Chinese Academy of Sciences, Beijing, China"],"affiliations":[{"raw_affiliation_string":"University of Chinese Academy of Sciences, Beijing, China","institution_ids":["https://openalex.org/I4210165038"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5101115987","display_name":"Bo Xie","orcid":null},"institutions":[{"id":"https://openalex.org/I4210107198","display_name":"State Key Laboratory of Transducer Technology","ror":"https://ror.org/01qg56n75","country_code":"CN","type":"government","lineage":["https://openalex.org/I19820366","https://openalex.org/I19820366","https://openalex.org/I4210107198","https://openalex.org/I4210110458","https://openalex.org/I4210147322"]},{"id":"https://openalex.org/I19820366","display_name":"Chinese Academy of Sciences","ror":"https://ror.org/034t30j35","country_code":"CN","type":"government","lineage":["https://openalex.org/I19820366"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Bo Xie","raw_affiliation_strings":["State Key Laboratory of Transducer Technology, Chinese Academy of Sciences, Beijing, China"],"affiliations":[{"raw_affiliation_string":"State Key Laboratory of Transducer Technology, Chinese Academy of Sciences, Beijing, China","institution_ids":["https://openalex.org/I4210107198","https://openalex.org/I19820366"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5048401692","display_name":"Lin Zhu","orcid":"https://orcid.org/0000-0001-7918-0785"},"institutions":[{"id":"https://openalex.org/I4210165038","display_name":"University of Chinese Academy of Sciences","ror":"https://ror.org/05qbk4x57","country_code":"CN","type":"education","lineage":["https://openalex.org/I19820366","https://openalex.org/I4210165038"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Lin Zhu","raw_affiliation_strings":["University of Chinese Academy of Sciences, Beijing, China"],"affiliations":[{"raw_affiliation_string":"University of Chinese Academy of Sciences, Beijing, China","institution_ids":["https://openalex.org/I4210165038"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5047352969","display_name":"Qiuxu Wei","orcid":"https://orcid.org/0000-0003-1201-6432"},"institutions":[{"id":"https://openalex.org/I4210165038","display_name":"University of Chinese Academy of Sciences","ror":"https://ror.org/05qbk4x57","country_code":"CN","type":"education","lineage":["https://openalex.org/I19820366","https://openalex.org/I4210165038"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Qiuxu Wei","raw_affiliation_strings":["University of Chinese Academy of Sciences, Beijing, China"],"affiliations":[{"raw_affiliation_string":"University of Chinese Academy of Sciences, Beijing, China","institution_ids":["https://openalex.org/I4210165038"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5048309067","display_name":"Chaochao He","orcid":null},"institutions":[{"id":"https://openalex.org/I4210165038","display_name":"University of Chinese Academy of Sciences","ror":"https://ror.org/05qbk4x57","country_code":"CN","type":"education","lineage":["https://openalex.org/I19820366","https://openalex.org/I4210165038"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Chaochao He","raw_affiliation_strings":["University of Chinese Academy of Sciences, Beijing, China"],"affiliations":[{"raw_affiliation_string":"University of Chinese Academy of Sciences, Beijing, China","institution_ids":["https://openalex.org/I4210165038"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5102772738","display_name":"Chao Xiang","orcid":"https://orcid.org/0000-0002-9903-5451"},"institutions":[{"id":"https://openalex.org/I4210165038","display_name":"University of Chinese Academy of Sciences","ror":"https://ror.org/05qbk4x57","country_code":"CN","type":"education","lineage":["https://openalex.org/I19820366","https://openalex.org/I4210165038"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Chao Xiang","raw_affiliation_strings":["University of Chinese Academy of Sciences, Beijing, China"],"affiliations":[{"raw_affiliation_string":"University of Chinese Academy of Sciences, Beijing, China","institution_ids":["https://openalex.org/I4210165038"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5109218676","display_name":"Junbo Wang","orcid":"https://orcid.org/0000-0002-6032-1274"},"institutions":[{"id":"https://openalex.org/I4210107198","display_name":"State Key Laboratory of Transducer Technology","ror":"https://ror.org/01qg56n75","country_code":"CN","type":"government","lineage":["https://openalex.org/I19820366","https://openalex.org/I19820366","https://openalex.org/I4210107198","https://openalex.org/I4210110458","https://openalex.org/I4210147322"]},{"id":"https://openalex.org/I19820366","display_name":"Chinese Academy of Sciences","ror":"https://ror.org/034t30j35","country_code":"CN","type":"government","lineage":["https://openalex.org/I19820366"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Junbo Wang","raw_affiliation_strings":["State Key Laboratory of Transducer Technology, Chinese Academy of Sciences, Beijing, China"],"affiliations":[{"raw_affiliation_string":"State Key Laboratory of Transducer Technology, Chinese Academy of Sciences, Beijing, China","institution_ids":["https://openalex.org/I4210107198","https://openalex.org/I19820366"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5049215297","display_name":"Deyong Chen","orcid":"https://orcid.org/0000-0001-5856-3592"},"institutions":[{"id":"https://openalex.org/I4210107198","display_name":"State Key Laboratory of Transducer Technology","ror":"https://ror.org/01qg56n75","country_code":"CN","type":"government","lineage":["https://openalex.org/I19820366","https://openalex.org/I19820366","https://openalex.org/I4210107198","https://openalex.org/I4210110458","https://openalex.org/I4210147322"]},{"id":"https://openalex.org/I19820366","display_name":"Chinese Academy of Sciences","ror":"https://ror.org/034t30j35","country_code":"CN","type":"government","lineage":["https://openalex.org/I19820366"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Deyong Chen","raw_affiliation_strings":["State Key Laboratory of Transducer Technology, Chinese Academy of Sciences, Beijing, China"],"affiliations":[{"raw_affiliation_string":"State Key Laboratory of Transducer Technology, Chinese Academy of Sciences, Beijing, China","institution_ids":["https://openalex.org/I4210107198","https://openalex.org/I19820366"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5100326500","display_name":"Jian Chen","orcid":"https://orcid.org/0000-0003-4612-3279"},"institutions":[{"id":"https://openalex.org/I4210107198","display_name":"State Key Laboratory of Transducer Technology","ror":"https://ror.org/01qg56n75","country_code":"CN","type":"government","lineage":["https://openalex.org/I19820366","https://openalex.org/I19820366","https://openalex.org/I4210107198","https://openalex.org/I4210110458","https://openalex.org/I4210147322"]},{"id":"https://openalex.org/I19820366","display_name":"Chinese Academy of Sciences","ror":"https://ror.org/034t30j35","country_code":"CN","type":"government","lineage":["https://openalex.org/I19820366"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Jian Chen","raw_affiliation_strings":["State Key Laboratory of Transducer Technology, Chinese Academy of Sciences, Beijing, China"],"affiliations":[{"raw_affiliation_string":"State Key Laboratory of Transducer Technology, Chinese Academy of Sciences, Beijing, China","institution_ids":["https://openalex.org/I4210107198","https://openalex.org/I19820366"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":9,"corresponding_author_ids":["https://openalex.org/A5050851728"],"corresponding_institution_ids":["https://openalex.org/I4210165038"],"apc_list":null,"apc_paid":null,"fwci":0.1433,"has_fulltext":false,"cited_by_count":1,"citation_normalized_percentile":{"value":0.50934513,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":90,"max":94},"biblio":{"volume":"19","issue":null,"first_page":"816","last_page":"819"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":1.0,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":1.0,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11449","display_name":"Mechanical and Optical Resonators","score":0.9993000030517578,"subfield":{"id":"https://openalex.org/subfields/3107","display_name":"Atomic and Molecular Physics, and Optics"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11160","display_name":"Acoustic Wave Resonator Technologies","score":0.9991999864578247,"subfield":{"id":"https://openalex.org/subfields/2204","display_name":"Biomedical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/quartz","display_name":"Quartz","score":0.8098336458206177},{"id":"https://openalex.org/keywords/materials-science","display_name":"Materials science","score":0.7813228368759155},{"id":"https://openalex.org/keywords/wafer","display_name":"Wafer","score":0.7746394872665405},{"id":"https://openalex.org/keywords/anodic-bonding","display_name":"Anodic bonding","score":0.7479187250137329},{"id":"https://openalex.org/keywords/silicon","display_name":"Silicon","score":0.6016970872879028},{"id":"https://openalex.org/keywords/pressure-sensor","display_name":"Pressure sensor","score":0.57645583152771},{"id":"https://openalex.org/keywords/optoelectronics","display_name":"Optoelectronics","score":0.5374053120613098},{"id":"https://openalex.org/keywords/thermal-expansion","display_name":"Thermal expansion","score":0.5369702577590942},{"id":"https://openalex.org/keywords/wafer-bonding","display_name":"Wafer bonding","score":0.5327885746955872},{"id":"https://openalex.org/keywords/sensitivity","display_name":"Sensitivity (control systems)","score":0.5173644423484802},{"id":"https://openalex.org/keywords/residual-stress","display_name":"Residual stress","score":0.48624387383461},{"id":"https://openalex.org/keywords/atmospheric-temperature-range","display_name":"Atmospheric temperature range","score":0.46511226892471313},{"id":"https://openalex.org/keywords/anode","display_name":"Anode","score":0.4433841109275818},{"id":"https://openalex.org/keywords/thermal","display_name":"Thermal","score":0.4344683289527893},{"id":"https://openalex.org/keywords/chip","display_name":"Chip","score":0.415446937084198},{"id":"https://openalex.org/keywords/analytical-chemistry","display_name":"Analytical Chemistry (journal)","score":0.3493523597717285},{"id":"https://openalex.org/keywords/composite-material","display_name":"Composite material","score":0.2821776270866394},{"id":"https://openalex.org/keywords/electronic-engineering","display_name":"Electronic engineering","score":0.23662370443344116},{"id":"https://openalex.org/keywords/electrical-engineering","display_name":"Electrical engineering","score":0.1819896697998047},{"id":"https://openalex.org/keywords/electrode","display_name":"Electrode","score":0.15450885891914368},{"id":"https://openalex.org/keywords/chemistry","display_name":"Chemistry","score":0.10071802139282227}],"concepts":[{"id":"https://openalex.org/C2779870107","wikidata":"https://www.wikidata.org/wiki/Q43010","display_name":"Quartz","level":2,"score":0.8098336458206177},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.7813228368759155},{"id":"https://openalex.org/C160671074","wikidata":"https://www.wikidata.org/wiki/Q267131","display_name":"Wafer","level":2,"score":0.7746394872665405},{"id":"https://openalex.org/C201414436","wikidata":"https://www.wikidata.org/wiki/Q567503","display_name":"Anodic bonding","level":3,"score":0.7479187250137329},{"id":"https://openalex.org/C544956773","wikidata":"https://www.wikidata.org/wiki/Q670","display_name":"Silicon","level":2,"score":0.6016970872879028},{"id":"https://openalex.org/C41325743","wikidata":"https://www.wikidata.org/wiki/Q1261040","display_name":"Pressure sensor","level":2,"score":0.57645583152771},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.5374053120613098},{"id":"https://openalex.org/C47463417","wikidata":"https://www.wikidata.org/wiki/Q6583695","display_name":"Thermal expansion","level":2,"score":0.5369702577590942},{"id":"https://openalex.org/C2779133538","wikidata":"https://www.wikidata.org/wiki/Q677010","display_name":"Wafer bonding","level":3,"score":0.5327885746955872},{"id":"https://openalex.org/C21200559","wikidata":"https://www.wikidata.org/wiki/Q7451068","display_name":"Sensitivity (control systems)","level":2,"score":0.5173644423484802},{"id":"https://openalex.org/C37292000","wikidata":"https://www.wikidata.org/wiki/Q1257918","display_name":"Residual stress","level":2,"score":0.48624387383461},{"id":"https://openalex.org/C39353612","wikidata":"https://www.wikidata.org/wiki/Q5283759","display_name":"Atmospheric temperature range","level":2,"score":0.46511226892471313},{"id":"https://openalex.org/C89395315","wikidata":"https://www.wikidata.org/wiki/Q181232","display_name":"Anode","level":3,"score":0.4433841109275818},{"id":"https://openalex.org/C204530211","wikidata":"https://www.wikidata.org/wiki/Q752823","display_name":"Thermal","level":2,"score":0.4344683289527893},{"id":"https://openalex.org/C165005293","wikidata":"https://www.wikidata.org/wiki/Q1074500","display_name":"Chip","level":2,"score":0.415446937084198},{"id":"https://openalex.org/C113196181","wikidata":"https://www.wikidata.org/wiki/Q485223","display_name":"Analytical Chemistry (journal)","level":2,"score":0.3493523597717285},{"id":"https://openalex.org/C159985019","wikidata":"https://www.wikidata.org/wiki/Q181790","display_name":"Composite material","level":1,"score":0.2821776270866394},{"id":"https://openalex.org/C24326235","wikidata":"https://www.wikidata.org/wiki/Q126095","display_name":"Electronic engineering","level":1,"score":0.23662370443344116},{"id":"https://openalex.org/C119599485","wikidata":"https://www.wikidata.org/wiki/Q43035","display_name":"Electrical engineering","level":1,"score":0.1819896697998047},{"id":"https://openalex.org/C17525397","wikidata":"https://www.wikidata.org/wiki/Q176140","display_name":"Electrode","level":2,"score":0.15450885891914368},{"id":"https://openalex.org/C185592680","wikidata":"https://www.wikidata.org/wiki/Q2329","display_name":"Chemistry","level":0,"score":0.10071802139282227},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.0},{"id":"https://openalex.org/C147789679","wikidata":"https://www.wikidata.org/wiki/Q11372","display_name":"Physical chemistry","level":1,"score":0.0},{"id":"https://openalex.org/C153294291","wikidata":"https://www.wikidata.org/wiki/Q25261","display_name":"Meteorology","level":1,"score":0.0},{"id":"https://openalex.org/C43617362","wikidata":"https://www.wikidata.org/wiki/Q170050","display_name":"Chromatography","level":1,"score":0.0},{"id":"https://openalex.org/C97355855","wikidata":"https://www.wikidata.org/wiki/Q11473","display_name":"Thermodynamics","level":1,"score":0.0},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1109/nems.2017.8017143","is_oa":false,"landing_page_url":"https://doi.org/10.1109/nems.2017.8017143","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2017 IEEE 12th International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)","raw_type":"proceedings-article"}],"best_oa_location":null,"sustainable_development_goals":[{"display_name":"Affordable and clean energy","id":"https://metadata.un.org/sdg/7","score":0.4399999976158142}],"awards":[],"funders":[],"has_content":{"grobid_xml":false,"pdf":false},"content_urls":null,"referenced_works_count":8,"referenced_works":["https://openalex.org/W2030890954","https://openalex.org/W2035394251","https://openalex.org/W2113792337","https://openalex.org/W2138146368","https://openalex.org/W2154759250","https://openalex.org/W2155721926","https://openalex.org/W6682835343","https://openalex.org/W6682873582"],"related_works":["https://openalex.org/W4302285966","https://openalex.org/W2785922250","https://openalex.org/W2532494584","https://openalex.org/W2070720201","https://openalex.org/W2066177426","https://openalex.org/W2024267198","https://openalex.org/W4249684911","https://openalex.org/W2064912790","https://openalex.org/W1995865471","https://openalex.org/W2625018053"],"abstract_inverted_index":{"This":[0],"paper":[1],"presents":[2],"an":[3,11,67],"approach":[4],"to":[5,23,81],"reduce":[6,39],"the":[7,24,27,40,45,71,86,93],"temperature":[8,87],"sensitivity":[9],"of":[10,26,73,89,96],"anodic":[12,50],"bonded":[13],"resonant":[14,75],"pressure":[15,95],"micro":[16],"sensor":[17,46],"by":[18,49],"attaching":[19],"a":[20,33],"quartz":[21,30],"wafer":[22,31],"backside":[25],"sensor.":[28],"The":[29,52],"with":[32],"negligible":[34],"expansion":[35],"coefficient":[36],"can":[37],"effectively":[38],"residual":[41],"thermal":[42],"stress":[43],"in":[44,70],"chip":[47],"caused":[48],"bonding.":[51],"silicon-quartz":[53],"bonding":[54],"based":[55],"on":[56],"hydroxide":[57],"catalysis":[58],"was":[59],"proposed,":[60],"fabricated":[61],"and":[62],"characterized.":[63],"Experimental":[64],"results":[65],"showed":[66],"effective":[68],"reduction":[69],"drifts":[72],"device":[74],"frequencies":[76],"from":[77],"~":[78,82],"1700":[79],"Hz":[80,84],"550":[83],"within":[85],"range":[88],"-40~80":[90],"\u00b0C":[91],"under":[92],"external":[94],"110":[97],"kPa.":[98]},"counts_by_year":[{"year":2018,"cited_by_count":1}],"updated_date":"2025-11-06T03:46:38.306776","created_date":"2025-10-10T00:00:00"}